DE69712044T2 - Integriertes mikrogefertigtes oberflächenmagnetometer - Google Patents

Integriertes mikrogefertigtes oberflächenmagnetometer

Info

Publication number
DE69712044T2
DE69712044T2 DE69712044T DE69712044T DE69712044T2 DE 69712044 T2 DE69712044 T2 DE 69712044T2 DE 69712044 T DE69712044 T DE 69712044T DE 69712044 T DE69712044 T DE 69712044T DE 69712044 T2 DE69712044 T2 DE 69712044T2
Authority
DE
Germany
Prior art keywords
microproduced
magnetometer
integrated
surface magnetometer
microproduced surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69712044T
Other languages
English (en)
Other versions
DE69712044D1 (de
Inventor
S Payne
Yang Zhao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Analog Devices Inc
Original Assignee
Analog Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Analog Devices Inc filed Critical Analog Devices Inc
Publication of DE69712044D1 publication Critical patent/DE69712044D1/de
Application granted granted Critical
Publication of DE69712044T2 publication Critical patent/DE69712044T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/038—Measuring direction or magnitude of magnetic fields or magnetic flux using permanent magnets, e.g. balances, torsion devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49009—Dynamoelectric machine
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49009—Dynamoelectric machine
    • Y10T29/49012—Rotor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49075—Electromagnet, transformer or inductor including permanent magnet or core
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49075—Electromagnet, transformer or inductor including permanent magnet or core
    • Y10T29/49076—From comminuted material
DE69712044T 1996-02-22 1997-02-21 Integriertes mikrogefertigtes oberflächenmagnetometer Expired - Lifetime DE69712044T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/605,743 US5818227A (en) 1996-02-22 1996-02-22 Rotatable micromachined device for sensing magnetic fields
PCT/US1997/002607 WO1997031274A1 (en) 1996-02-22 1997-02-21 Integrated surface micromachined magnetometer

Publications (2)

Publication Number Publication Date
DE69712044D1 DE69712044D1 (de) 2002-05-23
DE69712044T2 true DE69712044T2 (de) 2002-11-14

Family

ID=24425030

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69712044T Expired - Lifetime DE69712044T2 (de) 1996-02-22 1997-02-21 Integriertes mikrogefertigtes oberflächenmagnetometer

Country Status (5)

Country Link
US (2) US5818227A (de)
EP (3) EP1376145A3 (de)
JP (1) JP4052671B2 (de)
DE (1) DE69712044T2 (de)
WO (1) WO1997031274A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112005003758B4 (de) * 2005-11-25 2011-12-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Auslenkbares mikromechanisches Element

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US6124712A (en) * 1997-05-16 2000-09-26 The Regents Of The University Of California Apparatus and method for imaging metallic objects using an array of giant magnetoresistive sensors
DE19740049A1 (de) * 1997-09-12 1999-03-25 Bosch Gmbh Robert Sensorelement
US6275034B1 (en) 1998-03-11 2001-08-14 Analog Devices Inc. Micromachined semiconductor magnetic sensor
DE19827056A1 (de) * 1998-06-18 1999-12-23 Bosch Gmbh Robert Mikromechanischer Magnetfeldsensor
DE19858826A1 (de) * 1998-12-19 2000-06-29 Micronas Intermetall Gmbh Kapazitiver Magnetfeldsensor
ATE254715T1 (de) * 1999-01-13 2003-12-15 Vermeer Mfg Co Automatisiertes bohrplanungsverfahren und vorrichtung zum horizontalen richtungsbohren
DE19938206A1 (de) * 1999-08-12 2001-02-15 Bosch Gmbh Robert Mikromechanischer Drehbeschleunigungssensor
US6315062B1 (en) 1999-09-24 2001-11-13 Vermeer Manufacturing Company Horizontal directional drilling machine employing inertial navigation control system and method
WO2001067122A2 (en) 2000-03-09 2001-09-13 The Johns Hopkins University Force detected magnetic field gradiometer
US6765160B1 (en) * 2002-08-21 2004-07-20 The United States Of America As Represented By The Secetary Of The Army Omnidirectional microscale impact switch
EP1443018A1 (de) * 2003-01-15 2004-08-04 STMicroelectronics S.r.l. Rotierbar mikroelektromechanische (MEMS) Struktur mit parallelen Elektroden
US7514283B2 (en) 2003-03-20 2009-04-07 Robert Bosch Gmbh Method of fabricating electromechanical device having a controlled atmosphere
US8912174B2 (en) * 2003-04-16 2014-12-16 Mylan Pharmaceuticals Inc. Formulations and methods for treating rhinosinusitis
US7075160B2 (en) 2003-06-04 2006-07-11 Robert Bosch Gmbh Microelectromechanical systems and devices having thin film encapsulated mechanical structures
US6936491B2 (en) 2003-06-04 2005-08-30 Robert Bosch Gmbh Method of fabricating microelectromechanical systems and devices having trench isolated contacts
US6952041B2 (en) 2003-07-25 2005-10-04 Robert Bosch Gmbh Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same
US7068125B2 (en) 2004-03-04 2006-06-27 Robert Bosch Gmbh Temperature controlled MEMS resonator and method for controlling resonator frequency
US7102467B2 (en) 2004-04-28 2006-09-05 Robert Bosch Gmbh Method for adjusting the frequency of a MEMS resonator
US7066004B1 (en) 2004-09-02 2006-06-27 Sandia Corporation Inertial measurement unit using rotatable MEMS sensors
US20060108995A1 (en) * 2004-11-09 2006-05-25 Lg Electronics Inc. Low power and proximity AC current sensor
US7898244B2 (en) 2005-03-07 2011-03-01 Digisensors, Inc. Electromagnetic sensor systems
US7253616B2 (en) * 2005-10-13 2007-08-07 Lucent Technologies Inc. Microelectromechanical magnetometer
US20070170528A1 (en) 2006-01-20 2007-07-26 Aaron Partridge Wafer encapsulated microelectromechanical structure and method of manufacturing same
US8159218B2 (en) * 2008-08-04 2012-04-17 Alcatel Lucent Microelectromechanical magnetometer with integrated electronics
FR2941534B1 (fr) * 2009-01-26 2011-12-23 Commissariat Energie Atomique Capteur de champ magnetique a jauge de contrainte suspendue
ITTO20090973A1 (it) * 2009-12-10 2011-06-11 St Microelectronics Srl Magnetometro triassiale integrato di materiale semiconduttore realizzato in tecnologia mems
FR2954512B1 (fr) * 2009-12-21 2012-05-25 Commissariat Energie Atomique Realisation d'un dispositif a structures magnetiques formees sur un meme substrat et ayant des orientations d'aimantation respectives differentes
EP2865990A4 (de) * 2012-06-22 2016-03-16 Nat Inst Of Advanced Ind Scien Vorrichtung zur messung einer drehwinkelbeschleunigung
FR2995086B1 (fr) * 2012-08-29 2014-09-12 Commissariat Energie Atomique Dispositif de mesure d'un champ magnetique a force de laplace
US9839783B2 (en) * 2014-07-25 2017-12-12 Medtronic, Inc. Magnetic field detectors, implantable medical devices, and related methods that utilize a suspended proof mass and magnetically sensitive material
JP2016085186A (ja) * 2014-10-29 2016-05-19 佐保 ミドリ 磁性加速度センサーおよび磁気特性測定装置
WO2016093507A1 (ko) 2014-12-12 2016-06-16 한국표준과학연구원 자기장 센서 및 자기장 측정 장치
CN109813483A (zh) * 2019-03-28 2019-05-28 交通运输部公路科学研究所 一种开环可调式索力测量装置及其测量方法
CN111537924B (zh) 2020-05-13 2022-02-08 江苏多维科技有限公司 一种旋转碟式磁场强探头

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JPS5613244B2 (de) * 1974-07-31 1981-03-27
US4506221A (en) * 1982-06-28 1985-03-19 Sanders Associates, Inc. Magnetic heading transducer having dual-axis magnetometer with electromagnet mounted to permit pivotal vibration thereof
US5182515A (en) * 1987-04-24 1993-01-26 Wacoh Corporation Detector for magnetism using a resistance element
US5036286A (en) * 1988-06-03 1991-07-30 The Research Corporation Of The University Of Hawaii Magnetic and electric force sensing method and apparatus
US5233213A (en) * 1990-07-14 1993-08-03 Robert Bosch Gmbh Silicon-mass angular acceleration sensor
US5314572A (en) * 1990-08-17 1994-05-24 Analog Devices, Inc. Method for fabricating microstructures
DE69113632T2 (de) * 1990-08-17 1996-03-21 Analog Devices Inc Monolithischer beschleunigungsmesser.
US5326726A (en) * 1990-08-17 1994-07-05 Analog Devices, Inc. Method for fabricating monolithic chip containing integrated circuitry and suspended microstructure
CH679341A5 (en) * 1990-12-10 1992-01-31 Landis & Gyr Betriebs Ag Magnetic field measuring device - uses torsion force induced in pivoted plate with magnetised layer
US5206983A (en) * 1991-06-24 1993-05-04 Wisconsin Alumni Research Foundation Method of manufacturing micromechanical devices
JP3027457B2 (ja) * 1991-10-25 2000-04-04 和廣 岡田 多次元方向に関する力・加速度・磁気の検出装置
US5412265A (en) * 1993-04-05 1995-05-02 Ford Motor Company Planar micro-motor and method of fabrication
US5672967A (en) * 1995-09-19 1997-09-30 Southwest Research Institute Compact tri-axial fluxgate magnetometer and housing with unitary orthogonal sensor substrate
US5731703A (en) * 1995-10-31 1998-03-24 The Charles Stark Draper Laboratory, Inc. Micromechanical d'arsonval magnetometer
US5684276A (en) * 1995-12-12 1997-11-04 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Micromechanical oscillating mass balance

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112005003758B4 (de) * 2005-11-25 2011-12-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Auslenkbares mikromechanisches Element

Also Published As

Publication number Publication date
US6233811B1 (en) 2001-05-22
EP0882242A1 (de) 1998-12-09
WO1997031274A1 (en) 1997-08-28
DE69712044D1 (de) 2002-05-23
US5818227A (en) 1998-10-06
EP0882242B1 (de) 2002-04-17
EP1376145A3 (de) 2004-09-22
JP2000506260A (ja) 2000-05-23
EP1096265A1 (de) 2001-05-02
EP1376145A2 (de) 2004-01-02
JP4052671B2 (ja) 2008-02-27

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Legal Events

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