DE69635602D1 - Stützbehälter für dünne Scheiben - Google Patents
Stützbehälter für dünne ScheibenInfo
- Publication number
- DE69635602D1 DE69635602D1 DE69635602T DE69635602T DE69635602D1 DE 69635602 D1 DE69635602 D1 DE 69635602D1 DE 69635602 T DE69635602 T DE 69635602T DE 69635602 T DE69635602 T DE 69635602T DE 69635602 D1 DE69635602 D1 DE 69635602D1
- Authority
- DE
- Germany
- Prior art keywords
- thin slices
- support container
- container
- support
- slices
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67383—Closed carriers characterised by substrate supports
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67386—Closed carriers characterised by the construction of the closed carrier
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/17—Component parts, details or accessories; Auxiliary operations
- B29C45/1703—Introducing an auxiliary fluid into the mould
- B29C45/1704—Introducing an auxiliary fluid into the mould the fluid being introduced into the interior of the injected material which is still in a molten state, e.g. for producing hollow articles
Applications Claiming Priority (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15913695A JPH098117A (ja) | 1995-06-26 | 1995-06-26 | 薄板用支持容器 |
JP15913695 | 1995-06-26 | ||
JP691595U | 1995-07-07 | ||
JP1995006915U JP3020287U (ja) | 1995-07-07 | 1995-07-07 | 薄板用支持容器 |
JP21055295A JPH0964161A (ja) | 1995-08-18 | 1995-08-18 | 薄板用支持容器 |
JP21055395A JPH0964162A (ja) | 1995-08-18 | 1995-08-18 | 薄板用支持容器 |
JP21055295 | 1995-08-18 | ||
JP21055395 | 1995-08-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69635602D1 true DE69635602D1 (de) | 2006-01-26 |
DE69635602T2 DE69635602T2 (de) | 2006-07-13 |
Family
ID=33303980
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69635602T Expired - Lifetime DE69635602T2 (de) | 1995-06-26 | 1996-02-19 | Stützbehälter für dünne Scheiben |
Country Status (4)
Country | Link |
---|---|
US (1) | US5782361A (de) |
EP (4) | EP1480256B1 (de) |
DE (1) | DE69635602T2 (de) |
TW (1) | TW296361B (de) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3423512B2 (ja) * | 1995-11-27 | 2003-07-07 | 信越ポリマー株式会社 | 精密基板用カセットの製造方法および精密基板用カセット |
US5874767A (en) * | 1996-05-14 | 1999-02-23 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor device including a lateral power device |
US6776289B1 (en) | 1996-07-12 | 2004-08-17 | Entegris, Inc. | Wafer container with minimal contact |
US6214127B1 (en) * | 1998-02-04 | 2001-04-10 | Micron Technology, Inc. | Methods of processing electronic device workpieces and methods of positioning electronic device workpieces within a workpiece carrier |
US6171400B1 (en) * | 1998-10-02 | 2001-01-09 | Union Oil Company Of California | Vertical semiconductor wafer carrier |
FR2785270B1 (fr) * | 1998-10-30 | 2001-01-19 | St Microelectronics Sa | Cassette de transport de plaquettes de semiconducteur |
US6455395B1 (en) * | 2000-06-30 | 2002-09-24 | Integrated Materials, Inc. | Method of fabricating silicon structures including fixtures for supporting wafers |
US6386655B1 (en) * | 2000-10-04 | 2002-05-14 | Rgt Design, Incorporated | Disc storage device with self-aligning slots |
JP2003201148A (ja) * | 2001-10-31 | 2003-07-15 | Nippon Sheet Glass Co Ltd | 情報記録媒体用ガラス基板の化学強化用ホルダー |
US7522762B2 (en) * | 2003-04-16 | 2009-04-21 | Inverness Medical-Biostar, Inc. | Detection, resolution, and identification of arrayed elements |
US7017758B2 (en) * | 2003-07-09 | 2006-03-28 | Chartered Semiconductor Manufacturing Ltd. | Wafer protective cassette |
TWI337160B (en) | 2003-10-09 | 2011-02-11 | Entegris Inc | Shipper with tooth design for improved loading |
GB0416744D0 (en) * | 2004-07-27 | 2004-09-01 | Clearwater Innovations Ltd | Disc cartridge |
WO2006011609A1 (en) * | 2004-07-30 | 2006-02-02 | Showa Denko K.K. | Magnetic disk case |
US20060027171A1 (en) * | 2004-08-06 | 2006-02-09 | Taiwan Semiconductor Manufacturing Co., Ltd. | Wafer boat for reducing wafer warpage |
CN102130033B (zh) * | 2005-07-08 | 2014-05-14 | 交叉自动控制公司 | 工件支撑结构及其使用设备 |
TWI316040B (en) * | 2006-11-10 | 2009-10-21 | Innolux Display Corp | Packing box for glass substrate and a package structure of a glass substrate using the same |
JP4745209B2 (ja) * | 2006-12-13 | 2011-08-10 | 信越ポリマー株式会社 | 基板用キャリア |
TW200845265A (en) * | 2007-05-10 | 2008-11-16 | Nanya Technology Corp | Wafer supporter |
JP2009010119A (ja) * | 2007-06-27 | 2009-01-15 | Elpida Memory Inc | 基板収容容器 |
KR101525753B1 (ko) * | 2008-01-13 | 2015-06-09 | 엔테그리스, 아이엔씨. | 큰 지름의 웨이퍼를 취급하는 장치 및 방법 |
CN105225686A (zh) * | 2009-11-18 | 2016-01-06 | 恩特格林斯公司 | 通用磁盘装运器 |
JP6018075B2 (ja) | 2011-11-08 | 2016-11-02 | ミライアル株式会社 | ウェーハ収納容器 |
CN203921653U (zh) * | 2014-06-23 | 2014-11-05 | 成都京东方光电科技有限公司 | 显示面板包装箱 |
CN205770933U (zh) * | 2015-07-27 | 2016-12-07 | 盟立自动化股份有限公司 | 用以承载平板构件的卡匣结构 |
KR20210044849A (ko) * | 2018-09-20 | 2021-04-23 | 가부시키가이샤 코쿠사이 엘렉트릭 | 기판 처리 장치, 반도체 장치의 제조 방법 및 프로그램 |
WO2020089986A1 (ja) * | 2018-10-29 | 2020-05-07 | ミライアル株式会社 | 基板収納容器の成形方法、金型、及び、基板収納容器 |
CN112786500A (zh) * | 2019-11-11 | 2021-05-11 | 夏泰鑫半导体(青岛)有限公司 | 晶圆架及具有晶圆架的垂直晶舟 |
CN111081614B (zh) * | 2019-12-27 | 2022-09-30 | 上海至纯洁净系统科技股份有限公司 | 一种晶圆片承载装置 |
Family Cites Families (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1900053A (en) * | 1928-11-22 | 1933-03-07 | United Shoe Machinery Corp | Rack |
US3751629A (en) * | 1957-07-24 | 1973-08-07 | P Eisler | Surface heating device |
US2944696A (en) * | 1958-11-24 | 1960-07-12 | Effgen Anton | Grid tray |
US3573430A (en) * | 1966-12-30 | 1971-04-06 | Paul Eisler | Surface heating device |
US3723823A (en) * | 1971-11-30 | 1973-03-27 | Gen Electric | Printed circuit board guide |
US3733523A (en) * | 1972-02-11 | 1973-05-15 | Ampex | Electronic circuit card cage |
US4043451A (en) * | 1976-03-18 | 1977-08-23 | Fluoroware, Inc. | Shipping container for silicone semiconductor wafers |
US4135625A (en) * | 1976-07-12 | 1979-01-23 | Merrill Kenneth V | Multi-compartment container for fragile disks |
DE2702464C2 (de) * | 1977-01-21 | 1981-10-15 | Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen | Verpackung von Halbleiterscheiben |
CA1049662A (en) * | 1977-01-25 | 1979-02-27 | Michael J. E. Gillissie | Apparatus and method for transferring semiconductor wafers |
US4153164A (en) * | 1978-06-13 | 1979-05-08 | Kasper Instruments, Inc. | Carrier for semiconductive wafers |
JPS57141928A (en) * | 1981-01-15 | 1982-09-02 | Fluoroware Inc | Wafer treating container |
JPS5896749A (ja) * | 1981-12-03 | 1983-06-08 | Nec Kyushu Ltd | 半導体基板の製造装置 |
US4518085A (en) * | 1982-04-29 | 1985-05-21 | At&T Technologies, Inc. | Multi-purpose transport tray |
JPS58215052A (ja) * | 1982-06-08 | 1983-12-14 | Nec Corp | ウエハ−収納治具 |
US4600231A (en) * | 1984-07-19 | 1986-07-15 | Intermetro Industries Corp. | Carrier for self-supporting sheet-like articles such as printed circuit boards |
JPS6149450A (ja) * | 1984-08-17 | 1986-03-11 | Hitachi Cable Ltd | 半導体用リ−ドフレ−ム |
US4724963A (en) * | 1985-02-20 | 1988-02-16 | Empak, Inc. | Wafer processing cassette |
DE3539887A1 (de) * | 1985-11-11 | 1987-05-21 | Didier Werke Ag | Halterahmen fuer katalysatorplatten |
JPS6380848A (ja) * | 1986-09-25 | 1988-04-11 | Nippon Shokubai Kagaku Kogyo Co Ltd | 高圧メタン系燃料の燃焼用触媒システムおよびそれを用いた燃焼方法 |
JPH0788025B2 (ja) * | 1987-04-28 | 1995-09-27 | 三菱瓦斯化学株式会社 | 偏肉補強部構造を有する合成樹脂成形品の製造法 |
JPH0715936B2 (ja) * | 1987-05-27 | 1995-02-22 | 株式会社日立製作所 | ウェハ用キャリヤ |
JPS646048A (en) * | 1987-06-29 | 1989-01-10 | Kanegafuchi Chemical Ind | Thermoplastic polymer composition having excellent dulling property |
JP2871701B2 (ja) * | 1988-12-14 | 1999-03-17 | 日本電気株式会社 | 半導体ウェーハ用キャリア |
JPH02174244A (ja) * | 1988-12-27 | 1990-07-05 | Tomuko:Kk | ウェハキャリア用治具枠およびウェハ移換装置 |
JPH02209746A (ja) * | 1989-02-09 | 1990-08-21 | Seiko Epson Corp | 基板収納箱 |
JP3057684B2 (ja) * | 1989-05-09 | 2000-07-04 | 淀川化成株式会社 | ガラス基板用カセット |
US5149244A (en) * | 1989-08-18 | 1992-09-22 | Applied Materials, Inc. | Apparatus for aligning wafers within a semiconductor wafer cassette |
US4970772A (en) * | 1989-12-05 | 1990-11-20 | Sulzer Brothers Limited | Wafer alignment fixture |
JPH04179146A (ja) * | 1990-11-09 | 1992-06-25 | Toshiba Ceramics Co Ltd | 半導体ウェハ収納ケース |
US5111936A (en) * | 1990-11-30 | 1992-05-12 | Fluoroware | Wafer carrier |
EP0520105B1 (de) * | 1991-06-28 | 1995-08-30 | Shin-Etsu Handotai Company Limited | Trägerkassette für Halbleiterscheiben |
US5154301A (en) * | 1991-09-12 | 1992-10-13 | Fluoroware, Inc. | Wafer carrier |
US5255797A (en) * | 1992-02-26 | 1993-10-26 | Fluoroware, Inc. | Wafer carrier with wafer retaining cushions |
US5273159A (en) * | 1992-05-26 | 1993-12-28 | Empak, Inc. | Wafer suspension box |
US5351836A (en) * | 1992-07-08 | 1994-10-04 | Daifuku Co., Ltd. | Container for plate-like objects |
US5348151A (en) * | 1993-12-20 | 1994-09-20 | Empak, Inc. | Low profile disk carrier |
JP2791971B2 (ja) * | 1994-06-17 | 1998-08-27 | 信越ポリマー株式会社 | ウェーハ収納容器におけるウェーハバスケット |
JP3423512B2 (ja) * | 1995-11-27 | 2003-07-07 | 信越ポリマー株式会社 | 精密基板用カセットの製造方法および精密基板用カセット |
-
1995
- 1995-10-21 TW TW084111144A patent/TW296361B/zh not_active IP Right Cessation
-
1996
- 1996-02-12 US US08/599,928 patent/US5782361A/en not_active Expired - Lifetime
- 1996-02-19 EP EP04019624A patent/EP1480256B1/de not_active Expired - Lifetime
- 1996-02-19 EP EP96102467A patent/EP0751551B1/de not_active Expired - Lifetime
- 1996-02-19 EP EP04019623A patent/EP1480255A3/de not_active Withdrawn
- 1996-02-19 EP EP04019625A patent/EP1494266B1/de not_active Expired - Lifetime
- 1996-02-19 DE DE69635602T patent/DE69635602T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1494266A1 (de) | 2005-01-05 |
EP0751551B1 (de) | 2005-12-21 |
US5782361A (en) | 1998-07-21 |
EP1480256A2 (de) | 2004-11-24 |
TW296361B (de) | 1997-01-21 |
EP1480256A3 (de) | 2004-12-15 |
EP1480256B1 (de) | 2006-09-27 |
EP1494266B1 (de) | 2009-09-23 |
EP0751551A2 (de) | 1997-01-02 |
EP1480255A3 (de) | 2004-12-08 |
EP0751551A3 (de) | 2000-10-11 |
DE69635602T2 (de) | 2006-07-13 |
EP1480255A2 (de) | 2004-11-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |