DE69634778D1 - Vorrichtung zum parallelen prüfen von halbleiterschaltkreisen - Google Patents
Vorrichtung zum parallelen prüfen von halbleiterschaltkreisenInfo
- Publication number
- DE69634778D1 DE69634778D1 DE69634778T DE69634778T DE69634778D1 DE 69634778 D1 DE69634778 D1 DE 69634778D1 DE 69634778 T DE69634778 T DE 69634778T DE 69634778 T DE69634778 T DE 69634778T DE 69634778 D1 DE69634778 D1 DE 69634778D1
- Authority
- DE
- Germany
- Prior art keywords
- test
- semiconductor devices
- mtx
- device under
- pattern generator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F11/00—Error detection; Error correction; Monitoring
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/04—Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
- G11C29/08—Functional testing, e.g. testing during refresh, power-on self testing [POST] or distributed testing
- G11C29/10—Test algorithms, e.g. memory scan [MScan] algorithms; Test patterns, e.g. checkerboard patterns
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/319—Tester hardware, i.e. output processing circuits
- G01R31/31903—Tester hardware, i.e. output processing circuits tester configuration
- G01R31/31908—Tester set-up, e.g. configuring the tester to the device under test [DUT], down loading test patterns
- G01R31/3191—Calibration
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US407103 | 1995-03-17 | ||
US08/407,103 US5682472A (en) | 1995-03-17 | 1995-03-17 | Method and system for testing memory programming devices |
PCT/US1996/003124 WO1996029649A1 (en) | 1995-03-17 | 1996-03-08 | Method and system for testing memory programming devices |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69634778D1 true DE69634778D1 (de) | 2005-06-30 |
DE69634778T2 DE69634778T2 (de) | 2006-02-02 |
Family
ID=23610604
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69634778T Expired - Fee Related DE69634778T2 (de) | 1995-03-17 | 1996-03-08 | Vorrichtung zum parallelen prüfen von halbleiterschaltkreisen |
Country Status (8)
Country | Link |
---|---|
US (1) | US5682472A (de) |
EP (1) | EP0819275B1 (de) |
JP (1) | JP3881017B2 (de) |
KR (1) | KR100395032B1 (de) |
AT (1) | ATE296463T1 (de) |
AU (1) | AU5185996A (de) |
DE (1) | DE69634778T2 (de) |
WO (1) | WO1996029649A1 (de) |
Families Citing this family (52)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5828824A (en) * | 1996-12-16 | 1998-10-27 | Texas Instruments Incorporated | Method for debugging an integrated circuit using extended operating modes |
US6076179A (en) * | 1997-01-29 | 2000-06-13 | Altera Corporation | Method and apparatus of increasing the vector rate of a digital test system |
US5954832A (en) * | 1997-03-14 | 1999-09-21 | International Business Machines Corporation | Method and system for performing non-standard insitu burn-in testings |
US5794175A (en) * | 1997-09-09 | 1998-08-11 | Teradyne, Inc. | Low cost, highly parallel memory tester |
US5949002A (en) * | 1997-11-12 | 1999-09-07 | Teradyne, Inc. | Manipulator for automatic test equipment with active compliance |
JPH11154103A (ja) * | 1997-11-20 | 1999-06-08 | Mitsubishi Electric Corp | 半導体集積回路装置 |
US6133725A (en) * | 1998-03-26 | 2000-10-17 | Teradyne, Inc. | Compensating for the effects of round-trip delay in automatic test equipment |
KR100295250B1 (ko) * | 1998-06-24 | 2001-07-12 | 오우라 히로시 | 반도체 메모리 시험장치 및 시험방법 |
US6158030A (en) * | 1998-08-21 | 2000-12-05 | Micron Technology, Inc. | System and method for aligning output signals in massively parallel testers and other electronic devices |
US6452411B1 (en) | 1999-03-01 | 2002-09-17 | Formfactor, Inc. | Efficient parallel testing of integrated circuit devices using a known good device to generate expected responses |
US6480978B1 (en) * | 1999-03-01 | 2002-11-12 | Formfactor, Inc. | Parallel testing of integrated circuit devices using cross-DUT and within-DUT comparisons |
US6499121B1 (en) * | 1999-03-01 | 2002-12-24 | Formfactor, Inc. | Distributed interface for parallel testing of multiple devices using a single tester channel |
US6340895B1 (en) * | 1999-07-14 | 2002-01-22 | Aehr Test Systems, Inc. | Wafer-level burn-in and test cartridge |
US6580283B1 (en) | 1999-07-14 | 2003-06-17 | Aehr Test Systems | Wafer level burn-in and test methods |
US6562636B1 (en) | 1999-07-14 | 2003-05-13 | Aehr Test Systems | Wafer level burn-in and electrical test system and method |
US6413113B2 (en) | 1999-07-14 | 2002-07-02 | Aehr Test Systems | Kinematic coupling |
DE19939595C1 (de) * | 1999-08-20 | 2001-02-08 | Siemens Ag | Anordnung zum Testen einer Vielzahl von Halbleiterschaltungen |
US6292415B1 (en) * | 1999-09-28 | 2001-09-18 | Aehr Test Systems, Inc. | Enhancements in testing devices on burn-in boards |
US6651204B1 (en) * | 2000-06-01 | 2003-11-18 | Advantest Corp. | Modular architecture for memory testing on event based test system |
US20020006624A1 (en) * | 2000-06-30 | 2002-01-17 | Town Terence C. | Method and assay for diagnosing substance dependency |
US6603323B1 (en) * | 2000-07-10 | 2003-08-05 | Formfactor, Inc. | Closed-grid bus architecture for wafer interconnect structure |
US6563298B1 (en) | 2000-08-15 | 2003-05-13 | Ltx Corporation | Separating device response signals from composite signals |
US6892328B2 (en) * | 2000-09-29 | 2005-05-10 | Tanisys Technology, Inc. | Method and system for distributed testing of electronic devices |
EP1195613A1 (de) * | 2000-10-06 | 2002-04-10 | Hewlett-Packard Company, A Delaware Corporation | Testen der Funktionalität von programmierten Vorrichtungen |
US7057518B2 (en) * | 2001-06-22 | 2006-06-06 | Schmidt Dominik J | Systems and methods for testing wireless devices |
US20030099139A1 (en) * | 2001-08-24 | 2003-05-29 | Abrosimov Igor Anatolievich | Memory test apparatus and method of testing |
US6842022B2 (en) * | 2002-09-20 | 2005-01-11 | Agilent Technologies, Inc. | System and method for heterogeneous multi-site testing |
US7065723B2 (en) * | 2002-09-25 | 2006-06-20 | Sun Microsystems, Inc. | Defect tracking by utilizing real-time counters in network computing environments |
US20040163076A1 (en) * | 2003-02-11 | 2004-08-19 | Zayas Fernando A. | Self-identifying self-test output system |
KR100543449B1 (ko) * | 2003-04-11 | 2006-01-23 | 삼성전자주식회사 | 상대 어드레스 방식으로 모든 메모리 셀들의 액세스가가능하게 하는 반도체 메모리 장치 |
KR100505686B1 (ko) * | 2003-05-26 | 2005-08-03 | 삼성전자주식회사 | 다수의 피시험 소자들을 병렬로 검사하는 테스트 시스템및 테스트 방법 |
US6961674B2 (en) * | 2003-08-11 | 2005-11-01 | Hewlett-Packard Development Company, L.P. | System and method for analysis of cache array test data |
US7376917B1 (en) * | 2003-08-25 | 2008-05-20 | Xilinx, Inc. | Client-server semiconductor verification system |
US20050240834A1 (en) * | 2004-03-30 | 2005-10-27 | Aviation Communication & Surveillance Systems Llc | Systems and methods for controlling extended functions |
DE102007016622A1 (de) * | 2007-04-05 | 2008-10-09 | Qimonda Ag | Halbleiter-Bauelement-Test-Verfahren und -Test-System mit reduzierter Anzahl an Test-Kanälen |
KR100927119B1 (ko) * | 2007-05-10 | 2009-11-18 | 삼성전자주식회사 | 불 휘발성 반도체 메모리 장치 및 그것의 프로그램 방법 |
US9092570B2 (en) * | 2007-07-28 | 2015-07-28 | Sam Michael | Memory management for remote software debuggers and methods |
DE102009010886B4 (de) * | 2009-02-27 | 2013-06-20 | Advanced Micro Devices, Inc. | Erkennung der Verzögerungszeit in einem eingebauten Speicherselbsttest unter Anwendung eines Ping-Signals |
TWI451428B (zh) | 2010-06-03 | 2014-09-01 | Sunplus Technology Co Ltd | 於完整記憶體系統中具有先進特徵的記憶體測試系統 |
EP2587489A1 (de) * | 2011-10-27 | 2013-05-01 | Maishi Electronic (Shanghai) Ltd. | Systeme und Verfahren zum Testen von Speichern |
CN103093829A (zh) * | 2011-10-27 | 2013-05-08 | 迈实电子(上海)有限公司 | 存储器测试系统及存储器测试方法 |
CN103107693A (zh) * | 2011-11-14 | 2013-05-15 | 鸿富锦精密工业(深圳)有限公司 | 测试电源装置 |
US9069719B2 (en) * | 2012-02-11 | 2015-06-30 | Samsung Electronics Co., Ltd. | Method and system for providing a smart memory architecture |
CN103809102B (zh) * | 2012-11-06 | 2017-08-22 | 比亚迪股份有限公司 | 一种在编程时对芯片进行测试的方法及测试系统 |
CN103870366A (zh) * | 2012-12-13 | 2014-06-18 | 鸿富锦精密工业(深圳)有限公司 | 时间记录装置及方法 |
KR101522292B1 (ko) * | 2013-07-31 | 2015-05-21 | 주식회사 유니테스트 | 메모리 테스트 동시 판정 시스템 |
CN104679085B (zh) * | 2013-11-30 | 2017-02-15 | 上海德朗能新能源有限公司 | 电源调节装置 |
US9484116B1 (en) * | 2015-08-17 | 2016-11-01 | Advantest Corporation | Test system |
US20170370988A1 (en) * | 2016-06-28 | 2017-12-28 | International Business Machines Corporation | Burn-in testing of individually personalized semiconductor device configuration |
EP3482218B1 (de) * | 2016-07-08 | 2024-02-07 | Eaton Intelligent Power Limited | Elektrisches system für netzwerkinspektionsvorrichtungen |
US10557886B2 (en) * | 2017-04-28 | 2020-02-11 | Advantest Corporation | Test system supporting multiple users using different applications |
KR20200016680A (ko) * | 2018-08-07 | 2020-02-17 | 삼성전자주식회사 | 피크 노이즈를 감소한 테스트 장치, 테스트 방법 및 테스트가 수행되는 반도체 장치 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4379259A (en) * | 1980-03-12 | 1983-04-05 | National Semiconductor Corporation | Process of performing burn-in and parallel functional testing of integrated circuit memories in an environmental chamber |
US4866714A (en) * | 1987-10-15 | 1989-09-12 | Westinghouse Electric Corp. | Personal computer-based dynamic burn-in system |
JP2831767B2 (ja) * | 1990-01-10 | 1998-12-02 | 株式会社アドバンテスト | 半導体メモリ試験装置 |
JP2831780B2 (ja) * | 1990-02-02 | 1998-12-02 | 株式会社アドバンテスト | Ic試験装置 |
US5377148A (en) * | 1990-11-29 | 1994-12-27 | Case Western Reserve University | Apparatus and method to test random access memories for a plurality of possible types of faults |
JP2766082B2 (ja) * | 1991-02-15 | 1998-06-18 | シャープ株式会社 | 半導体記憶装置 |
US5339320A (en) * | 1991-11-12 | 1994-08-16 | Intel Corporation | Architecture of circuitry for generating test mode signals |
US5263003A (en) * | 1991-11-12 | 1993-11-16 | Allen-Bradley Company, Inc. | Flash memory circuit and method of operation |
JP3348248B2 (ja) * | 1992-04-22 | 2002-11-20 | 富士通株式会社 | 半導体記憶装置及びその情報の消去・書き込み方法 |
US5390129A (en) * | 1992-07-06 | 1995-02-14 | Motay Electronics, Inc. | Universal burn-in driver system and method therefor |
EP0594920B1 (de) * | 1992-10-29 | 1999-07-28 | STMicroelectronics S.r.l. | Verfahren zur Bewertung des Gatteroxids nicht-flüchtiger EPROM, EEPROM und flash-EEPROM-Speicher |
JP3240709B2 (ja) * | 1992-10-30 | 2001-12-25 | 株式会社アドバンテスト | メモリ試験装置 |
US5416782A (en) * | 1992-10-30 | 1995-05-16 | Intel Corporation | Method and apparatus for improving data failure rate testing for memory arrays |
US5448577A (en) * | 1992-10-30 | 1995-09-05 | Intel Corporation | Method for reliably storing non-data fields in a flash EEPROM memory array |
US5410544A (en) * | 1993-06-30 | 1995-04-25 | Intel Corporation | External tester control for flash memory |
JPH07130200A (ja) * | 1993-09-13 | 1995-05-19 | Advantest Corp | 半導体メモリ試験装置 |
US5523972A (en) * | 1994-06-02 | 1996-06-04 | Intel Corporation | Method and apparatus for verifying the programming of multi-level flash EEPROM memory |
US5490109A (en) * | 1994-06-28 | 1996-02-06 | Intel Corporation | Method and apparatus for preventing over-erasure of flash EEPROM memory devices |
-
1995
- 1995-03-17 US US08/407,103 patent/US5682472A/en not_active Expired - Lifetime
-
1996
- 1996-03-08 JP JP52844596A patent/JP3881017B2/ja not_active Expired - Lifetime
- 1996-03-08 AU AU51859/96A patent/AU5185996A/en not_active Abandoned
- 1996-03-08 KR KR1019970706486A patent/KR100395032B1/ko not_active IP Right Cessation
- 1996-03-08 WO PCT/US1996/003124 patent/WO1996029649A1/en active IP Right Grant
- 1996-03-08 AT AT96908701T patent/ATE296463T1/de not_active IP Right Cessation
- 1996-03-08 EP EP96908701A patent/EP0819275B1/de not_active Expired - Lifetime
- 1996-03-08 DE DE69634778T patent/DE69634778T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US5682472A (en) | 1997-10-28 |
JP3881017B2 (ja) | 2007-02-14 |
DE69634778T2 (de) | 2006-02-02 |
EP0819275A1 (de) | 1998-01-21 |
WO1996029649A1 (en) | 1996-09-26 |
AU5185996A (en) | 1996-10-08 |
EP0819275A4 (de) | 1998-10-14 |
ATE296463T1 (de) | 2005-06-15 |
KR19980703077A (ko) | 1998-09-05 |
EP0819275B1 (de) | 2005-05-25 |
JPH11502353A (ja) | 1999-02-23 |
KR100395032B1 (ko) | 2003-10-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |