DE69609414T2 - Elastomeres mikroelektromekanisches system - Google Patents

Elastomeres mikroelektromekanisches system

Info

Publication number
DE69609414T2
DE69609414T2 DE69609414T DE69609414T DE69609414T2 DE 69609414 T2 DE69609414 T2 DE 69609414T2 DE 69609414 T DE69609414 T DE 69609414T DE 69609414 T DE69609414 T DE 69609414T DE 69609414 T2 DE69609414 T2 DE 69609414T2
Authority
DE
Germany
Prior art keywords
microelectromecanic
elastomeric
microelectromecanic system
elastomeric microelectromecanic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69609414T
Other languages
English (en)
Other versions
DE69609414D1 (de
Inventor
A Whitehead
J Bolleman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of British Columbia
Original Assignee
University of British Columbia
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of British Columbia filed Critical University of British Columbia
Application granted granted Critical
Publication of DE69609414D1 publication Critical patent/DE69609414D1/de
Publication of DE69609414T2 publication Critical patent/DE69609414T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
DE69609414T 1995-05-01 1996-04-26 Elastomeres mikroelektromekanisches system Expired - Fee Related DE69609414T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/431,735 US5642015A (en) 1993-07-14 1995-05-01 Elastomeric micro electro mechanical systems
PCT/CA1996/000268 WO1996034701A1 (en) 1995-05-01 1996-04-26 Elastomeric micro electromechanical systems

Publications (2)

Publication Number Publication Date
DE69609414D1 DE69609414D1 (de) 2000-08-24
DE69609414T2 true DE69609414T2 (de) 2001-03-08

Family

ID=23713203

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69609414T Expired - Fee Related DE69609414T2 (de) 1995-05-01 1996-04-26 Elastomeres mikroelektromekanisches system

Country Status (9)

Country Link
US (1) US5642015A (de)
EP (1) EP0824381B1 (de)
JP (1) JP3016870B2 (de)
KR (1) KR100286486B1 (de)
CN (1) CN1047107C (de)
AU (1) AU5394596A (de)
CA (1) CA2218876C (de)
DE (1) DE69609414T2 (de)
WO (1) WO1996034701A1 (de)

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MX9708359A (es) 1998-06-30
KR19990008212A (ko) 1999-01-25
AU5394596A (en) 1996-11-21
JP3016870B2 (ja) 2000-03-06
CN1047107C (zh) 1999-12-08
JPH10511528A (ja) 1998-11-04
WO1996034701A1 (en) 1996-11-07
DE69609414D1 (de) 2000-08-24
EP0824381B1 (de) 2000-07-19
CA2218876A1 (en) 1996-11-07
EP0824381A1 (de) 1998-02-25
US5642015A (en) 1997-06-24
CA2218876C (en) 1999-12-07
KR100286486B1 (ko) 2001-04-16
CN1186458A (zh) 1998-07-01

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