DE69607960T2 - Flaches beugungsgitterlichtventil - Google Patents

Flaches beugungsgitterlichtventil

Info

Publication number
DE69607960T2
DE69607960T2 DE69607960T DE69607960T DE69607960T2 DE 69607960 T2 DE69607960 T2 DE 69607960T2 DE 69607960 T DE69607960 T DE 69607960T DE 69607960 T DE69607960 T DE 69607960T DE 69607960 T2 DE69607960 T2 DE 69607960T2
Authority
DE
Germany
Prior art keywords
diffraction grating
elongated elements
plane
light valve
grating light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69607960T
Other languages
English (en)
Other versions
DE69607960D1 (de
Inventor
M Bloom
B Corbin
C Banyai
P Staker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Silicon Light Machines Inc
Original Assignee
Silicon Light Machines Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Silicon Light Machines Inc filed Critical Silicon Light Machines Inc
Publication of DE69607960D1 publication Critical patent/DE69607960D1/de
Application granted granted Critical
Publication of DE69607960T2 publication Critical patent/DE69607960T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1828—Diffraction gratings having means for producing variable diffraction
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/904—Micromirror
DE69607960T 1995-06-07 1996-06-05 Flaches beugungsgitterlichtventil Expired - Lifetime DE69607960T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/482,188 US5841579A (en) 1995-06-07 1995-06-07 Flat diffraction grating light valve
PCT/US1996/008804 WO1996041217A1 (en) 1995-06-07 1996-06-05 Flat diffraction grating light valve

Publications (2)

Publication Number Publication Date
DE69607960D1 DE69607960D1 (de) 2000-05-31
DE69607960T2 true DE69607960T2 (de) 2000-08-17

Family

ID=23915073

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69607960T Expired - Lifetime DE69607960T2 (de) 1995-06-07 1996-06-05 Flaches beugungsgitterlichtventil

Country Status (14)

Country Link
US (1) US5841579A (de)
EP (1) EP0830624B1 (de)
JP (1) JP3164824B2 (de)
KR (1) KR100320997B1 (de)
CN (1) CN1158546C (de)
AT (1) ATE192241T1 (de)
AU (1) AU5981196A (de)
DE (1) DE69607960T2 (de)
DK (1) DK0830624T3 (de)
ES (1) ES2147380T3 (de)
GR (1) GR3033806T3 (de)
NO (1) NO975696L (de)
PT (1) PT830624E (de)
WO (1) WO1996041217A1 (de)

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JP2018122391A (ja) 2017-01-31 2018-08-09 株式会社リコー Ｍｅｍｓ素子
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JP7035671B2 (ja) * 2017-03-23 2022-03-15 大日本印刷株式会社 回折光学素子

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AU5981196A (en) 1996-12-30
PT830624E (pt) 2000-08-31
GR3033806T3 (en) 2000-10-31
EP0830624A1 (de) 1998-03-25
CN1158546C (zh) 2004-07-21
ATE192241T1 (de) 2000-05-15
JP3164824B2 (ja) 2001-05-14
NO975696D0 (no) 1997-12-05
US5841579A (en) 1998-11-24
ES2147380T3 (es) 2000-09-01
DK0830624T3 (da) 2000-09-25
CN1187247A (zh) 1998-07-08
DE69607960D1 (de) 2000-05-31
NO975696L (no) 1997-12-05
KR100320997B1 (ko) 2002-03-08
JPH10510374A (ja) 1998-10-06
EP0830624B1 (de) 2000-04-26
KR19990022270A (ko) 1999-03-25
WO1996041217A1 (en) 1996-12-19

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