DE69601167T2 - Schnittstelle für automatisches testgerät - Google Patents
Schnittstelle für automatisches testgerätInfo
- Publication number
- DE69601167T2 DE69601167T2 DE69601167T DE69601167T DE69601167T2 DE 69601167 T2 DE69601167 T2 DE 69601167T2 DE 69601167 T DE69601167 T DE 69601167T DE 69601167 T DE69601167 T DE 69601167T DE 69601167 T2 DE69601167 T2 DE 69601167T2
- Authority
- DE
- Germany
- Prior art keywords
- test head
- handling device
- kinematic
- interface
- test device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06705—Apparatus for holding or moving single probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/414,456 US5982182A (en) | 1994-09-01 | 1995-03-31 | Interface apparatus for automatic test equipment with positioning modules incorporating kinematic surfaces |
PCT/US1996/002895 WO1996030772A1 (en) | 1995-03-31 | 1996-02-27 | Interface apparatus for automatic test equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69601167D1 DE69601167D1 (de) | 1999-01-28 |
DE69601167T2 true DE69601167T2 (de) | 1999-07-08 |
Family
ID=23641523
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69601167T Expired - Lifetime DE69601167T2 (de) | 1995-03-31 | 1996-02-27 | Schnittstelle für automatisches testgerät |
Country Status (7)
Country | Link |
---|---|
US (1) | US5982182A (de) |
EP (1) | EP0817973B1 (de) |
JP (1) | JPH11503564A (de) |
KR (1) | KR100363762B1 (de) |
AT (1) | ATE174691T1 (de) |
DE (1) | DE69601167T2 (de) |
WO (1) | WO1996030772A1 (de) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100428827B1 (ko) | 1995-10-13 | 2005-04-20 | 엠팍 인코포레이티드 | 측면에도어를구비한300㎜미세환경포드 |
US6166552A (en) * | 1996-06-10 | 2000-12-26 | Motorola Inc. | Method and apparatus for testing a semiconductor wafer |
US5949002A (en) * | 1997-11-12 | 1999-09-07 | Teradyne, Inc. | Manipulator for automatic test equipment with active compliance |
US6259262B1 (en) * | 1999-03-10 | 2001-07-10 | Delware Capital Formation, Inc. | Camera system for automated verification and repair station |
DE10039336C2 (de) * | 2000-08-04 | 2003-12-11 | Infineon Technologies Ag | Verfahren zum Testen von Halbleiterschaltungen und Testvorrichtung zur Durchführung des Verfahrens |
US6813817B2 (en) | 2000-09-15 | 2004-11-09 | James Orsillo | Method of using a replacement headplate to adapt a probe station |
US6741072B2 (en) * | 2000-09-15 | 2004-05-25 | James E. Orsillo | Docking system for connecting a tester to a probe station using an A-type docking configuration |
US7053646B2 (en) | 2000-09-15 | 2006-05-30 | Orsillo James F | Apparatus and method for use in testing a semiconductor wafer |
US6408500B1 (en) | 2000-09-15 | 2002-06-25 | James Orsillo | Method of retrofitting a probe station |
US6551122B2 (en) | 2000-10-04 | 2003-04-22 | Teradyne, Inc. | Low profile pneumatically actuated docking module with power fault release |
US6617867B2 (en) * | 2000-11-29 | 2003-09-09 | Teradyne, Inc. | Mechanism for clamping device interface board to peripheral |
US6441607B1 (en) * | 2000-12-01 | 2002-08-27 | N&K Technology, Inc. | Apparatus for docking a floating test stage in a terrestrial base |
KR20040028925A (ko) * | 2001-07-16 | 2004-04-03 | 인테스트 아이피 코포레이션 | 테스트 헤드 도킹 시스템 및 그 방법 |
EP1458634A1 (de) * | 2001-11-27 | 2004-09-22 | Entegris, Inc. | Wafer-träger mit frontöffnung und erdleitung |
US20030162461A1 (en) * | 2002-02-22 | 2003-08-28 | Balthes Garry E. | Process, composition and coating of laminate material |
US6940298B2 (en) * | 2002-09-30 | 2005-09-06 | Teradyne, Inc. | High fidelity electrical probe |
US6836110B1 (en) * | 2003-04-29 | 2004-12-28 | National Semiconductor Corporation | Universal tester to handler docking plate |
KR100600482B1 (ko) * | 2004-06-22 | 2006-07-13 | 삼성전자주식회사 | 반도체 패키지 측정용 프로브 |
DE102004031426A1 (de) * | 2004-06-29 | 2006-01-26 | Esmo Ag | Dockingantrieb, Verriegelungselement, Dockingsystem |
US7671614B2 (en) * | 2005-12-02 | 2010-03-02 | Formfactor, Inc. | Apparatus and method for adjusting an orientation of probes |
JP2007256117A (ja) * | 2006-03-23 | 2007-10-04 | Fujitsu Ltd | プリント回路基板試験装置、プリント回路基板試験方法、プリント回路基板試験プログラム、プリント回路基板製造方法 |
US7847570B2 (en) | 2007-10-19 | 2010-12-07 | Teradyne, Inc. | Laser targeting mechanism |
US7733081B2 (en) * | 2007-10-19 | 2010-06-08 | Teradyne, Inc. | Automated test equipment interface |
US8872532B2 (en) * | 2009-12-31 | 2014-10-28 | Formfactor, Inc. | Wafer test cassette system |
WO2013009817A1 (en) | 2011-07-12 | 2013-01-17 | Intest Corporation | Method and apparatus for docking a test head with a peripheral |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4303368A (en) * | 1978-09-18 | 1981-12-01 | Westinghouse Electric Corp. | Remote docking apparatus |
US4705447A (en) * | 1983-08-11 | 1987-11-10 | Intest Corporation | Electronic test head positioner for test systems |
US5149029A (en) * | 1982-08-25 | 1992-09-22 | Intest Corporation | Electronic test head positioner for test systems |
US4588346A (en) * | 1982-08-25 | 1986-05-13 | Intest Corporation | Positioner for maintaining an object in a substantially weightless condition |
US4527942A (en) * | 1982-08-25 | 1985-07-09 | Intest Corporation | Electronic test head positioner for test systems |
US4610020A (en) * | 1984-01-06 | 1986-09-02 | The Perkin-Elmer Corporation | X-ray mask ring and apparatus for making same |
DE3524348A1 (de) * | 1985-07-08 | 1987-01-29 | Heigl Helmuth | Vorrichtung zum positionieren von testkoepfen |
US4694230A (en) * | 1986-03-11 | 1987-09-15 | Usa As Represented By The Secretary Of Commerce | Micromanipulator system |
DE3615941A1 (de) * | 1986-05-12 | 1987-11-19 | Willberg Hans Heinrich | Geraet zum pruefen von elektronischen bauelementen, insbesondere ic's |
US4751457A (en) * | 1986-09-08 | 1988-06-14 | Tektronix, Inc. | Integrated circuit probe parallelism establishing method and apparatus |
US4765754A (en) * | 1987-05-12 | 1988-08-23 | The United States Of America As Represented By The Secretary Of Commerce | Inclined contact recirculating roller bearing |
US4943020A (en) * | 1987-09-17 | 1990-07-24 | Schlumberger Technologies, Inc. | Manipulator apparatus |
US4893074A (en) * | 1988-05-13 | 1990-01-09 | Intest Corporation | Electronic device testing system |
US4893914A (en) * | 1988-10-12 | 1990-01-16 | The Micromanipulator Company, Inc. | Test station |
US5091693A (en) * | 1990-07-13 | 1992-02-25 | Schlumberger Technologies, Inc. | Dual-sided test head having floating contact surfaces |
US5241870A (en) * | 1991-07-22 | 1993-09-07 | Intest Corporation | Test head manipulator |
US5479108A (en) * | 1992-11-25 | 1995-12-26 | David Cheng | Method and apparatus for handling wafers |
TW273635B (de) * | 1994-09-01 | 1996-04-01 | Aesop |
-
1995
- 1995-03-31 US US08/414,456 patent/US5982182A/en not_active Expired - Lifetime
-
1996
- 1996-02-27 JP JP8529408A patent/JPH11503564A/ja active Pending
- 1996-02-27 AT AT96920097T patent/ATE174691T1/de active
- 1996-02-27 DE DE69601167T patent/DE69601167T2/de not_active Expired - Lifetime
- 1996-02-27 EP EP96920097A patent/EP0817973B1/de not_active Expired - Lifetime
- 1996-02-27 WO PCT/US1996/002895 patent/WO1996030772A1/en active IP Right Grant
- 1996-02-27 KR KR1019970706869A patent/KR100363762B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
US5982182A (en) | 1999-11-09 |
WO1996030772A1 (en) | 1996-10-03 |
EP0817973B1 (de) | 1998-12-16 |
ATE174691T1 (de) | 1999-01-15 |
JPH11503564A (ja) | 1999-03-26 |
DE69601167D1 (de) | 1999-01-28 |
KR100363762B1 (ko) | 2003-01-24 |
EP0817973A1 (de) | 1998-01-14 |
KR19980703465A (ko) | 1998-11-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: TERADYNE INC., BOSTON, MASS., US |
|
8328 | Change in the person/name/address of the agent |
Representative=s name: MOSELPATENT TRIERPATENT, 54290 TRIER |
|
8328 | Change in the person/name/address of the agent |
Representative=s name: PATENTANWAELTE SERWE & DR. WAGNER, 54290 TRIER |