DE69534706D1 - Abtastgerät mit variabler fleckgrösse - Google Patents

Abtastgerät mit variabler fleckgrösse

Info

Publication number
DE69534706D1
DE69534706D1 DE69534706T DE69534706T DE69534706D1 DE 69534706 D1 DE69534706 D1 DE 69534706D1 DE 69534706 T DE69534706 T DE 69534706T DE 69534706 T DE69534706 T DE 69534706T DE 69534706 D1 DE69534706 D1 DE 69534706D1
Authority
DE
Germany
Prior art keywords
sensor
flake size
variable flake
variable
size
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69534706T
Other languages
English (en)
Other versions
DE69534706T2 (de
Inventor
Mehrdad Nikoonahad
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KLA Corp
Original Assignee
Tencor Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tencor Instruments Inc filed Critical Tencor Instruments Inc
Publication of DE69534706D1 publication Critical patent/DE69534706D1/de
Application granted granted Critical
Publication of DE69534706T2 publication Critical patent/DE69534706T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70605—Workpiece metrology
    • G03F7/70616—Monitoring the printed patterns
    • G03F7/70641—Focus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95623—Inspecting patterns on the surface of objects using a spatial filtering method
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
    • G02F1/113—Circuit or control arrangements
DE69534706T 1994-12-21 1995-04-13 Abtastgerät mit variabler fleckgrösse Expired - Lifetime DE69534706T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/361,135 US5633747A (en) 1994-12-21 1994-12-21 Variable spot-size scanning apparatus
US361135 1994-12-21
PCT/US1995/004614 WO1996019722A1 (en) 1994-12-21 1995-04-13 Variable spot-size scanning apparatus

Publications (2)

Publication Number Publication Date
DE69534706D1 true DE69534706D1 (de) 2006-01-26
DE69534706T2 DE69534706T2 (de) 2006-10-05

Family

ID=23420790

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69534706T Expired - Lifetime DE69534706T2 (de) 1994-12-21 1995-04-13 Abtastgerät mit variabler fleckgrösse

Country Status (6)

Country Link
US (1) US5633747A (de)
EP (1) EP0870188B8 (de)
JP (1) JP3408816B2 (de)
KR (1) KR100380711B1 (de)
DE (1) DE69534706T2 (de)
WO (1) WO1996019722A1 (de)

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Also Published As

Publication number Publication date
EP0870188B8 (de) 2006-03-08
JP3408816B2 (ja) 2003-05-19
KR100380711B1 (ko) 2003-07-16
EP0870188B1 (de) 2005-12-21
EP0870188A4 (de) 1998-10-14
EP0870188A1 (de) 1998-10-14
WO1996019722A1 (en) 1996-06-27
DE69534706T2 (de) 2006-10-05
JP2001525919A (ja) 2001-12-11
US5633747A (en) 1997-05-27

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Legal Events

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8327 Change in the person/name/address of the patent owner

Owner name: KLA-TENCOR CORP., SAN JOSE, CALIF., US

8364 No opposition during term of opposition