DE69529880D1 - Mikromechanische Vorrichtung - Google Patents

Mikromechanische Vorrichtung

Info

Publication number
DE69529880D1
DE69529880D1 DE69529880T DE69529880T DE69529880D1 DE 69529880 D1 DE69529880 D1 DE 69529880D1 DE 69529880 T DE69529880 T DE 69529880T DE 69529880 T DE69529880 T DE 69529880T DE 69529880 D1 DE69529880 D1 DE 69529880D1
Authority
DE
Germany
Prior art keywords
micromechanical device
micromechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69529880T
Other languages
English (en)
Other versions
DE69529880T2 (de
Inventor
John H Tregilgas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of DE69529880D1 publication Critical patent/DE69529880D1/de
Application granted granted Critical
Publication of DE69529880T2 publication Critical patent/DE69529880T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
DE69529880T 1994-11-14 1995-11-14 Mikromechanische Vorrichtung Expired - Lifetime DE69529880T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/339,363 US5552924A (en) 1994-11-14 1994-11-14 Micromechanical device having an improved beam

Publications (2)

Publication Number Publication Date
DE69529880D1 true DE69529880D1 (de) 2003-04-17
DE69529880T2 DE69529880T2 (de) 2003-11-20

Family

ID=23328668

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69529880T Expired - Lifetime DE69529880T2 (de) 1994-11-14 1995-11-14 Mikromechanische Vorrichtung

Country Status (6)

Country Link
US (1) US5552924A (de)
EP (1) EP0712022B1 (de)
JP (1) JPH08227041A (de)
KR (1) KR100412003B1 (de)
DE (1) DE69529880T2 (de)
TW (1) TW313661B (de)

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US6954301B2 (en) * 2002-04-30 2005-10-11 The Regents Of The University Of Michigan Low-voltage electromechanical device including a tiltable microplatform, method of tilting same, array of such devices and method of setting dimple-to-substrate spacing
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Also Published As

Publication number Publication date
TW313661B (de) 1997-08-21
JPH08227041A (ja) 1996-09-03
KR960018622A (ko) 1996-06-17
EP0712022A2 (de) 1996-05-15
US5552924A (en) 1996-09-03
KR100412003B1 (ko) 2004-03-20
EP0712022B1 (de) 2003-03-12
EP0712022A3 (de) 1996-10-16
DE69529880T2 (de) 2003-11-20

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