DE69528143T2 - Mehrschicht-Antireflektionsüberzug mit gradierter Basisschicht - Google Patents

Mehrschicht-Antireflektionsüberzug mit gradierter Basisschicht

Info

Publication number
DE69528143T2
DE69528143T2 DE69528143T DE69528143T DE69528143T2 DE 69528143 T2 DE69528143 T2 DE 69528143T2 DE 69528143 T DE69528143 T DE 69528143T DE 69528143 T DE69528143 T DE 69528143T DE 69528143 T2 DE69528143 T2 DE 69528143T2
Authority
DE
Germany
Prior art keywords
layer
refractive index
graded
graded layer
interface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69528143T
Other languages
English (en)
Other versions
DE69528143D1 (de
Inventor
George A Neuman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PPG Industries Ohio Inc
Original Assignee
PPG Industries Ohio Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PPG Industries Ohio Inc filed Critical PPG Industries Ohio Inc
Application granted granted Critical
Publication of DE69528143D1 publication Critical patent/DE69528143D1/de
Publication of DE69528143T2 publication Critical patent/DE69528143T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3417Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • G02B1/113Anti-reflection coatings using inorganic layer materials only
    • G02B1/115Multilayers
    • G02B1/116Multilayers including electrically conducting layers
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/70Properties of coatings
    • C03C2217/73Anti-reflective coatings with specific characteristics
    • C03C2217/732Anti-reflective coatings with specific characteristics made of a single layer
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/70Properties of coatings
    • C03C2217/73Anti-reflective coatings with specific characteristics
    • C03C2217/734Anti-reflective coatings with specific characteristics comprising an alternation of high and low refractive indexes
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/90Other aspects of coatings
    • C03C2217/91Coatings containing at least one layer having a composition gradient through its thickness
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495Thickness [relative or absolute]
    • Y10T428/24967Absolute thicknesses specified
    • Y10T428/24975No layer or component greater than 5 mils thick
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/26Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264Up to 3 mils
    • Y10T428/2651 mil or less
DE69528143T 1994-12-27 1995-12-09 Mehrschicht-Antireflektionsüberzug mit gradierter Basisschicht Expired - Fee Related DE69528143T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/364,148 US5811191A (en) 1994-12-27 1994-12-27 Multilayer antireflective coating with a graded base layer

Publications (2)

Publication Number Publication Date
DE69528143D1 DE69528143D1 (de) 2002-10-17
DE69528143T2 true DE69528143T2 (de) 2003-04-17

Family

ID=23433237

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69528143T Expired - Fee Related DE69528143T2 (de) 1994-12-27 1995-12-09 Mehrschicht-Antireflektionsüberzug mit gradierter Basisschicht

Country Status (11)

Country Link
US (2) US5811191A (de)
EP (1) EP0721112B1 (de)
JP (1) JPH08231248A (de)
KR (1) KR100186922B1 (de)
CN (1) CN1134555A (de)
AT (1) ATE224064T1 (de)
AU (1) AU669319B1 (de)
CA (1) CA2161282C (de)
DE (1) DE69528143T2 (de)
DK (1) DK0721112T3 (de)
ES (1) ES2182862T3 (de)

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US6436541B1 (en) * 1998-04-07 2002-08-20 Ppg Industries Ohio, Inc. Conductive antireflective coatings and methods of producing same
US6797388B1 (en) 1999-03-18 2004-09-28 Ppg Industries Ohio, Inc. Methods of making low haze coatings and the coatings and coated articles made thereby
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JP2001060708A (ja) * 1999-06-18 2001-03-06 Nippon Sheet Glass Co Ltd 透明積層体およびこれを用いたガラス物品
JP2001060702A (ja) 1999-06-18 2001-03-06 Nippon Sheet Glass Co Ltd 光電変換装置用基板およびこれを用いた光電変換装置
US6379014B1 (en) 2000-04-27 2002-04-30 N & K Technology, Inc. Graded anti-reflective coatings for photolithography
US6576349B2 (en) * 2000-07-10 2003-06-10 Guardian Industries Corp. Heat treatable low-E coated articles and methods of making same
JP2002030440A (ja) 2000-07-18 2002-01-31 National Institute Of Advanced Industrial & Technology 傾斜材料およびその合成、加工方法
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Also Published As

Publication number Publication date
DK0721112T3 (da) 2003-01-20
US5811191A (en) 1998-09-22
ES2182862T3 (es) 2003-03-16
CN1134555A (zh) 1996-10-30
KR960022314A (ko) 1996-07-18
CA2161282C (en) 2001-07-24
JPH08231248A (ja) 1996-09-10
EP0721112B1 (de) 2002-09-11
EP0721112A3 (de) 1998-07-15
US5948131A (en) 1999-09-07
CA2161282A1 (en) 1996-06-28
AU669319B1 (en) 1996-05-30
ATE224064T1 (de) 2002-09-15
KR100186922B1 (ko) 1999-04-15
DE69528143D1 (de) 2002-10-17
EP0721112A2 (de) 1996-07-10

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