DE69513877T2 - Verfahren und Gerät zur Steuerung und Planung von Bearbeitungsmaschinen - Google Patents
Verfahren und Gerät zur Steuerung und Planung von BearbeitungsmaschinenInfo
- Publication number
- DE69513877T2 DE69513877T2 DE69513877T DE69513877T DE69513877T2 DE 69513877 T2 DE69513877 T2 DE 69513877T2 DE 69513877 T DE69513877 T DE 69513877T DE 69513877 T DE69513877 T DE 69513877T DE 69513877 T2 DE69513877 T2 DE 69513877T2
- Authority
- DE
- Germany
- Prior art keywords
- controlling
- processing machines
- planning processing
- planning
- machines
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
- G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32253—As a function of, change of machine operation
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32264—Setup time
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32265—Waiting, queue time, buffer
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32304—Minimize flow time, tact, shortest processing, machining time
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32305—Fastest interrupt time, change jobs dynamically to fastest machine
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32325—Object oriented scheduling, use machine, part, tool object and coordinator
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/234,072 US5444632A (en) | 1994-04-28 | 1994-04-28 | Apparatus and method for controlling and scheduling processing machines |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69513877D1 DE69513877D1 (de) | 2000-01-20 |
DE69513877T2 true DE69513877T2 (de) | 2000-05-18 |
Family
ID=22879780
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69513877T Expired - Fee Related DE69513877T2 (de) | 1994-04-28 | 1995-04-28 | Verfahren und Gerät zur Steuerung und Planung von Bearbeitungsmaschinen |
Country Status (4)
Country | Link |
---|---|
US (1) | US5444632A (de) |
EP (1) | EP0679972B1 (de) |
JP (1) | JP3717967B2 (de) |
DE (1) | DE69513877T2 (de) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102006009248A1 (de) * | 2006-02-28 | 2007-09-06 | Advanced Micro Devices, Inc., Sunnyvale | Verfahren und System zur Modellierung eines Produktstromes in einer Fertigungsumgebung durch Prozess- und Anlagenkategorisierung |
DE102005050608B4 (de) * | 2004-10-22 | 2016-06-16 | Fisher-Rosemount Systems, Inc. | Verfahren und System für die Batch-Verarbeitungseinschätzung in einem Prozesssteuerungssystem |
DE102021204043B3 (de) | 2021-04-22 | 2022-02-03 | Robert Bosch Gesellschaft mit beschränkter Haftung | Scheduler und, insbesondere computerimplementiertes, Verfahren zur Maschinenzeitplanung zum Durchführen einer Gruppe von Jobs einer Aufgabe mit einem Maschinensatz |
Families Citing this family (92)
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US6141647A (en) * | 1995-10-20 | 2000-10-31 | The Dow Chemical Company | System and method for integrating a business environment, a process control environment, and a laboratory environment |
US6345259B1 (en) | 1993-09-28 | 2002-02-05 | The Dow Chemical Company | System and method for integrating business and manufacturing environments |
US5596502A (en) * | 1994-11-14 | 1997-01-21 | Sunoptech, Ltd. | Computer system including means for decision support scheduling |
US5612886A (en) * | 1995-05-12 | 1997-03-18 | Taiwan Semiconductor Manufacturing Company Ltd. | Method and system for dynamic dispatching in semiconductor manufacturing plants |
US5716856A (en) * | 1995-08-22 | 1998-02-10 | Advanced Micro Devices, Inc. | Arrangement and method for detecting sequential processing effects in manufacturing using predetermined sequences within runs |
KR100384213B1 (ko) * | 1995-10-06 | 2003-08-19 | 어드밴스트 마이크로 디바이시즈 인코퍼레이티드 | 순차리스트내의선택된타입의제1또는제2대상을인식하는처리시스템,선택회로및방법 |
GB2309800B (en) * | 1996-02-03 | 1999-07-28 | Kodak Ltd | A method of controlling the effect of raw materials on manufacturability |
US5975740A (en) | 1996-05-28 | 1999-11-02 | Applied Materials, Inc. | Apparatus, method and medium for enhancing the throughput of a wafer processing facility using a multi-slot cool down chamber and a priority transfer scheme |
US5801945A (en) * | 1996-06-28 | 1998-09-01 | Lam Research Corporation | Scheduling method for robotic manufacturing processes |
US6104874A (en) * | 1996-10-15 | 2000-08-15 | International Business Machines Corporation | Object oriented framework mechanism for order processing including pre-defined extensible classes for defining an order processing environment |
US5818716A (en) * | 1996-10-18 | 1998-10-06 | Taiwan Semiconductor Manufacturing Company Ltd. | Dynamic lot dispatching required turn rate factory control system and method of operation thereof |
US5914879A (en) * | 1997-03-04 | 1999-06-22 | Advanced Micro Devices | System and method for calculating cluster tool performance metrics using a weighted configuration matrix |
JP3419241B2 (ja) * | 1997-03-17 | 2003-06-23 | 信越半導体株式会社 | 半導体シリコン単結晶ウエーハの工程管理方法および工程管理システム |
US5841677A (en) * | 1997-05-21 | 1998-11-24 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method and apparatus for dispatching lots in a factory |
JPH10326729A (ja) * | 1997-05-26 | 1998-12-08 | Toshiba Corp | 製造システム |
US6201999B1 (en) | 1997-06-09 | 2001-03-13 | Applied Materials, Inc. | Method and apparatus for automatically generating schedules for wafer processing within a multichamber semiconductor wafer processing tool |
DE19747574A1 (de) * | 1997-10-28 | 1999-05-06 | Siemens Ag | Verfahren zur Ermittlung realisierbarer Konfigurationen von Bearbeitungsanlagen |
US6470227B1 (en) * | 1997-12-02 | 2002-10-22 | Murali D. Rangachari | Method and apparatus for automating a microelectric manufacturing process |
US6256550B1 (en) | 1998-08-07 | 2001-07-03 | Taiwan Semiconductor Manufacturing Company | Overall equipment effectiveness on-line categories system and method |
US6768930B2 (en) | 1998-12-31 | 2004-07-27 | Asml Holding N.V. | Method and apparatus for resolving conflicts in a substrate processing system |
US6678572B1 (en) * | 1998-12-31 | 2004-01-13 | Asml Holdings, N.V. | Recipe cascading in a wafer processing system |
US6418356B1 (en) | 1998-12-31 | 2002-07-09 | Silicon Valley Group, Inc. | Method and apparatus for resolving conflicts in a substrate processing system |
ATE302438T1 (de) * | 1998-12-31 | 2005-09-15 | Silicon Valley Group | Verfahren zum synchronisieren eines substratbehandlungssystems |
US6865437B1 (en) * | 1998-12-31 | 2005-03-08 | Asml Holdings N.V. | Robot pre-positioning in a wafer processing system |
US6408220B1 (en) | 1999-06-01 | 2002-06-18 | Applied Materials, Inc. | Semiconductor processing techniques |
US6456894B1 (en) * | 1999-06-01 | 2002-09-24 | Applied Materials, Inc. | Semiconductor processing techniques |
US6459946B1 (en) | 1999-11-12 | 2002-10-01 | Agere Systems Guardian Corp. | Method and system for determining operator staffing |
JP4524720B2 (ja) * | 1999-12-28 | 2010-08-18 | ルネサスエレクトロニクス株式会社 | プロセス制御装置 |
US6714830B2 (en) * | 2000-02-28 | 2004-03-30 | Canon Kabushiki Kaisha | Push-type scheduling for semiconductor fabrication |
US6546302B1 (en) * | 2000-04-05 | 2003-04-08 | Ford Motor Company | Method for scheduling and sequencing vehicles for manufacture |
US6952656B1 (en) | 2000-04-28 | 2005-10-04 | Applied Materials, Inc. | Wafer fabrication data acquisition and management systems |
JP2001345241A (ja) * | 2000-05-31 | 2001-12-14 | Tokyo Electron Ltd | 基板処理システム及び基板処理方法 |
JP2002023823A (ja) * | 2000-07-12 | 2002-01-25 | Mitsubishi Electric Corp | 生産管理システム |
JP2002073143A (ja) * | 2000-08-25 | 2002-03-12 | Matsushita Electric Ind Co Ltd | 製造装置監視方法 |
JP3613516B2 (ja) * | 2000-08-28 | 2005-01-26 | 本田技研工業株式会社 | 製品の樹脂部品のリサイクル回数を管理する解体管理システム及び解体管理方法 |
US7325190B1 (en) | 2000-10-02 | 2008-01-29 | Boehmer Tiffany D | Interface system and method of building rules and constraints for a resource scheduling system |
EP1410292A1 (de) * | 2001-01-04 | 2004-04-21 | Roger Murphy | System zum abliefern von waren |
US20020147960A1 (en) * | 2001-01-26 | 2002-10-10 | Applied Materials, Inc. | Method and apparatus for determining scheduling for wafer processing in cluster tools with integrated metrology and defect control |
TW526530B (en) * | 2001-01-26 | 2003-04-01 | Applied Materials Inc | Method and apparatus for automatically generating schedules for wafer processing within a multichamber semiconductor wafer processing tool |
US7082345B2 (en) | 2001-06-19 | 2006-07-25 | Applied Materials, Inc. | Method, system and medium for process control for the matching of tools, chambers and/or other semiconductor-related entities |
US7047099B2 (en) * | 2001-06-19 | 2006-05-16 | Applied Materials Inc. | Integrating tool, module, and fab level control |
ITMI20011340A1 (it) * | 2001-06-26 | 2002-12-26 | Ausimont Spa | Pfpe aventi almeno un terminale alchiletereo e relativo processo dipreparazione |
EP1406751A2 (de) * | 2001-07-13 | 2004-04-14 | FSI International | Robotersteuerungssystem |
US6978187B1 (en) * | 2001-12-12 | 2005-12-20 | Advanced Micro Devices, Inc. | Method and apparatus for scheduling production lots based on lot and tool health metrics |
US6907305B2 (en) * | 2002-04-30 | 2005-06-14 | Advanced Micro Devices, Inc. | Agent reactive scheduling in an automated manufacturing environment |
US20030225474A1 (en) * | 2002-05-31 | 2003-12-04 | Gustavo Mata | Specialization of active software agents in an automated manufacturing environment |
US7512454B1 (en) | 2002-05-31 | 2009-03-31 | Advanced Micro Devices, Inc. | Display unit with processor and communication controller |
US6983189B2 (en) * | 2002-06-14 | 2006-01-03 | The Boeing Company | Systems and methods for manufacturing a product in a pull and push manufacturing system and associated methods and computer program products for modeling the same |
DE10235816A1 (de) | 2002-08-05 | 2004-02-26 | Infineon Technologies Ag | Verfahren zum Vorgeben einer Bearbeitungsreihenfolge und zugehörige Einheiten |
US7426419B2 (en) * | 2002-08-13 | 2008-09-16 | Texas Instruments Incorporated | Scheduling system and method |
US6968245B2 (en) * | 2002-08-13 | 2005-11-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | Flexible recipe modeling and recipe cluster management system |
US6904329B1 (en) | 2002-08-30 | 2005-06-07 | Advanced Micro Devices, Inc. | Method and apparatus for generating a multi-dimensional cost function |
US7813993B1 (en) | 2002-08-30 | 2010-10-12 | Advanced Micro Devices, Inc. | Method and apparatus for scheduling a resource |
US6801819B1 (en) | 2002-08-30 | 2004-10-05 | Advanced Micro Devices, Inc. | Method and apparatus for evaluating bids for scheduling a resource |
US6782302B1 (en) | 2002-08-30 | 2004-08-24 | Advanced Micro Devices, Inc. | Method and apparatus for scheduling workpieces with compatible processing requirements |
US7127310B1 (en) | 2002-08-30 | 2006-10-24 | Advanced Micro Devices, Inc. | Method and apparatus for determining cost functions using parameterized components |
US7069097B1 (en) | 2002-08-30 | 2006-06-27 | Advanced Micro Devices, Inc. | Method and apparatus for reducing scheduling conflicts for a resource |
US8315898B2 (en) * | 2002-10-30 | 2012-11-20 | Palo Alto Research Center, Incorporated | Planning and scheduling reconfigurable systems around off-line resources |
US7027885B1 (en) | 2002-12-30 | 2006-04-11 | Advanced Micro Devices, Inc. | Determining batch start versus delay |
US6687563B1 (en) | 2003-01-31 | 2004-02-03 | Taiwan Semiconductor Manufacturing Company | Integration method of dispatch and schedule tools for 300 mm full automation Fab |
US7162320B2 (en) * | 2003-03-31 | 2007-01-09 | Honda Motor Co., Ltd. | Assembly line quality control |
DE10316102A1 (de) * | 2003-04-09 | 2004-10-21 | Daimlerchrysler Ag | Verfahren zur Steuerung und Planung der Fertigungsreihenfolge |
EP1683082A1 (de) * | 2003-09-30 | 2006-07-26 | Telecom Italia S.p.A. | Verfahren und system zur abstimmung eines taskreihenfolgeplanungsprozesses. |
US7257454B2 (en) * | 2003-11-21 | 2007-08-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Dynamically adjusting the distribution for dispatching lot between current and downstream tool by using expertise weighting mechanism |
US7904192B2 (en) * | 2004-01-14 | 2011-03-08 | Agency For Science, Technology And Research | Finite capacity scheduling using job prioritization and machine selection |
JP4367167B2 (ja) * | 2004-02-18 | 2009-11-18 | 日本電気株式会社 | リアルタイムシステム、QoS適応制御装置及びそれらに用いるQoS適応制御方法並びにそのプログラム |
JP2005294473A (ja) * | 2004-03-31 | 2005-10-20 | Canon Inc | 露光装置、デバイス製造方法及びデバイス |
US7184852B2 (en) * | 2004-04-07 | 2007-02-27 | Taiwan Semiconductor Manufacturing Company, Ltd. | System and method for integrating a dispatching system with multiple process lines in a semiconductor manufacturing environment |
US7337032B1 (en) | 2004-10-04 | 2008-02-26 | Advanced Micro Devices, Inc. | Scheduling ahead for various processes |
US7463939B1 (en) | 2004-11-18 | 2008-12-09 | Advanced Micro Devices, Inc. | Scheduling tools with queue time constraints |
US20080275582A1 (en) * | 2004-11-19 | 2008-11-06 | Nettles Steven C | Scheduling AMHS pickup and delivery ahead of schedule |
TW200622777A (en) * | 2004-12-31 | 2006-07-01 | Inventec Corp | Manufacturing-order giving system and method thereof |
EP1691328A1 (de) * | 2005-02-11 | 2006-08-16 | Sap Ag | Erkennen von kritischen Aktivitäten in einem Produktionsprozess |
US7142937B1 (en) * | 2005-05-12 | 2006-11-28 | Systems On Silicon Manufacturing Company Pte. Ltd. | Capacity management in a wafer fabrication plant |
US20070005170A1 (en) * | 2005-06-29 | 2007-01-04 | Thorsten Schedel | Method for the preferred processing of workpieces of highest priority |
US7487003B1 (en) | 2006-03-09 | 2009-02-03 | Rockwell Automation Technologies, Inc. | Automatic tracking of a lot of items through virtual sublots |
US7369914B2 (en) * | 2006-07-14 | 2008-05-06 | Hitachi Global Storage Technologies Netherlands B.V. | Method for projecting build progression for a product in a manufacturing environment |
US9008836B2 (en) * | 2007-01-09 | 2015-04-14 | Abb Inc. | Method and system for robotic assembly parameter optimization |
JP4193996B2 (ja) * | 2007-01-25 | 2008-12-10 | エルピーダメモリ株式会社 | 生産管理方法及び生産管理システム |
EP2009532A1 (de) * | 2007-06-29 | 2008-12-31 | Siemens Aktiengesellschaft | Verfahren zur Echtzeit-Fertigungsplanung von Prozessen an verteilten Herstellungsorten |
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EP2161637B1 (de) * | 2008-09-04 | 2015-05-20 | Siemens Aktiengesellschaft | Verfahren zur Aktualisierung der Fertigungsplanungsdaten für einen Fertigungsprozess |
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US8155770B2 (en) * | 2009-03-31 | 2012-04-10 | Globalfoundries Inc. | Method and apparatus for dispatching workpieces to tools based on processing and performance history |
US8452437B2 (en) * | 2009-11-10 | 2013-05-28 | International Business Machines Corporation | Product release control into time-sensitive processing environments |
JP5099188B2 (ja) * | 2010-08-18 | 2012-12-12 | コニカミノルタビジネステクノロジーズ株式会社 | 処理順決定装置、処理順決定方法および処理順決定プログラム |
KR101930981B1 (ko) * | 2011-11-25 | 2018-12-19 | 도쿄엘렉트론가부시키가이샤 | 처리 장치군 컨트롤러, 생산 처리 시스템, 처리 장치군 제어 방법, 생산 효율화 시스템, 생산 효율화 장치 및 생산 효율화 방법 |
US9618929B2 (en) * | 2014-11-26 | 2017-04-11 | Wafertech, Llc | Method and priority system for inventory management in semiconductor manufacturing |
US9400687B2 (en) * | 2014-12-11 | 2016-07-26 | International Business Machines Corporation | Method and system for dynamic pool reallocation |
KR102363113B1 (ko) * | 2018-03-01 | 2022-02-15 | 가부시키가이샤 에바라 세이사꾸쇼 | 스케줄러, 기판 처리 장치, 및 기판 반송 방법 |
CN111354654B (zh) * | 2018-12-20 | 2022-10-21 | 北京北方华创微电子装备有限公司 | 死锁判断方法及半导体设备 |
CN111382959B (zh) * | 2020-05-29 | 2020-09-01 | 双胞胎(集团)股份有限公司 | 基于数据队列的进度控制方法及猪饲料生产方法 |
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-
1994
- 1994-04-28 US US08/234,072 patent/US5444632A/en not_active Expired - Lifetime
-
1995
- 1995-04-27 JP JP10429395A patent/JP3717967B2/ja not_active Expired - Fee Related
- 1995-04-28 DE DE69513877T patent/DE69513877T2/de not_active Expired - Fee Related
- 1995-04-28 EP EP95302897A patent/EP0679972B1/de not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005050608B4 (de) * | 2004-10-22 | 2016-06-16 | Fisher-Rosemount Systems, Inc. | Verfahren und System für die Batch-Verarbeitungseinschätzung in einem Prozesssteuerungssystem |
DE102006009248A1 (de) * | 2006-02-28 | 2007-09-06 | Advanced Micro Devices, Inc., Sunnyvale | Verfahren und System zur Modellierung eines Produktstromes in einer Fertigungsumgebung durch Prozess- und Anlagenkategorisierung |
DE102006009248B4 (de) * | 2006-02-28 | 2017-10-12 | Globalfoundries Inc. | Verfahren und System zur Modellierung eines Produktstromes in einer Fertigungsumgebung durch Prozess- und Anlagenkategorisierung |
DE102021204043B3 (de) | 2021-04-22 | 2022-02-03 | Robert Bosch Gesellschaft mit beschränkter Haftung | Scheduler und, insbesondere computerimplementiertes, Verfahren zur Maschinenzeitplanung zum Durchführen einer Gruppe von Jobs einer Aufgabe mit einem Maschinensatz |
Also Published As
Publication number | Publication date |
---|---|
JPH0883115A (ja) | 1996-03-26 |
EP0679972B1 (de) | 1999-12-15 |
US5444632A (en) | 1995-08-22 |
EP0679972A1 (de) | 1995-11-02 |
DE69513877D1 (de) | 2000-01-20 |
JP3717967B2 (ja) | 2005-11-16 |
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