DE69431488D1 - Verfahren für die schnelle Datenerfassung bei der Köhärenz-Scanning-Interferometrie - Google Patents

Verfahren für die schnelle Datenerfassung bei der Köhärenz-Scanning-Interferometrie

Info

Publication number
DE69431488D1
DE69431488D1 DE69431488T DE69431488T DE69431488D1 DE 69431488 D1 DE69431488 D1 DE 69431488D1 DE 69431488 T DE69431488 T DE 69431488T DE 69431488 T DE69431488 T DE 69431488T DE 69431488 D1 DE69431488 D1 DE 69431488D1
Authority
DE
Germany
Prior art keywords
procedure
data acquisition
fast data
scanning interferometry
coherence scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69431488T
Other languages
English (en)
Other versions
DE69431488T2 (de
Inventor
L Deck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zygo Corp
Original Assignee
Zygo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zygo Corp filed Critical Zygo Corp
Publication of DE69431488D1 publication Critical patent/DE69431488D1/de
Application granted granted Critical
Publication of DE69431488T2 publication Critical patent/DE69431488T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G01B9/02009—Two or more frequencies or sources used for interferometric measurement by using two or more low coherence lengths using different or varying spectral width
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G01B9/02072—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer by calibration or testing of interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/04—Measuring microscopes
DE69431488T 1993-02-01 1994-01-13 Verfahren für die schnelle Datenerfassung bei der Köhärenz-Scanning-Interferometrie Expired - Lifetime DE69431488T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/011,963 US5402234A (en) 1992-08-31 1993-02-01 Method and apparatus for the rapid acquisition of data in coherence scanning interferometry
PCT/US1994/000659 WO1994018523A1 (en) 1993-02-01 1994-01-13 Method and apparatus for the rapid acquisition of data in coherence scanning interferometry

Publications (2)

Publication Number Publication Date
DE69431488D1 true DE69431488D1 (de) 2002-11-07
DE69431488T2 DE69431488T2 (de) 2003-06-26

Family

ID=21752721

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69431488T Expired - Lifetime DE69431488T2 (de) 1993-02-01 1994-01-13 Verfahren für die schnelle Datenerfassung bei der Köhärenz-Scanning-Interferometrie

Country Status (5)

Country Link
US (1) US5402234A (de)
EP (1) EP0746745B1 (de)
JP (1) JP2682742B2 (de)
DE (1) DE69431488T2 (de)
WO (1) WO1994018523A1 (de)

Families Citing this family (67)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5640465A (en) * 1992-02-14 1997-06-17 Smitt; Asbjorn Method and apparatus for on-line tiled thresholding in scanners based on prescan
US5502578A (en) * 1994-03-16 1996-03-26 Contex A/S Optical scanner having a variable resolution
DE4429416A1 (de) * 1994-08-19 1996-02-22 Velzel Christiaan H F Verfahren und Interferenzmikroskop zum Mikroskopieren eines Objektes zur Erzielung einer Auflösung jenseits der Beugungsgrenze (Superauflösung)
US5642207A (en) * 1994-09-16 1997-06-24 Contex A/S Color scanner with variable line resolution
US5598265A (en) * 1995-04-06 1997-01-28 Zygo Corporation Method for profiling an object surface using a large equivalent wavelength and system therefor
EP0768511A1 (de) * 1995-10-16 1997-04-16 European Community Optisches Verfahren für dreidimensionale Profilometrie basiert auf der Verarbeitung von Speckle-Bildern in Teilkohärenter Beleuchtung, und Interferometer zur Durchführung dieses Verfahrens
DE19622429A1 (de) * 1996-06-04 1997-12-11 Wagner Int Verfahren und Vorrichtung zum Bestimmen der Beschaffenheit einer Werkstückoberfläche
US5739906A (en) * 1996-06-07 1998-04-14 The United States Of America As Represented By The Secretary Of Commerce Interferometric thickness variation test method for windows and silicon wafers using a diverging wavefront
US6104703A (en) * 1996-12-20 2000-08-15 Cornell Research Foundation, Inc. Communication systems and methods employing receivers with estimators
JPH10253892A (ja) * 1997-03-11 1998-09-25 Olympus Optical Co Ltd 位相干渉顕微鏡
US5784164A (en) * 1997-03-20 1998-07-21 Zygo Corporation Method and apparatus for automatically and simultaneously determining best focus and orientation of objects to be measured by broad-band interferometric means
US5852498A (en) * 1997-04-04 1998-12-22 Kairos Scientific Inc. Optical instrument having a variable optical filter
US6028670A (en) * 1998-01-19 2000-02-22 Zygo Corporation Interferometric methods and systems using low coherence illumination
FR2783323B1 (fr) 1998-09-10 2000-10-13 Suisse Electronique Microtech Dispositif interferometrique pour relever les caracteristiques de reflexion et/ou de transmission optiques en profondeur d'un objet
JP3796363B2 (ja) * 1998-10-30 2006-07-12 キヤノン株式会社 位置検出装置及びそれを用いた露光装置
AUPQ139899A0 (en) * 1999-07-02 1999-07-29 University Of Western Australia, The Closed loop optical coherence topography
US6195168B1 (en) 1999-07-22 2001-02-27 Zygo Corporation Infrared scanning interferometry apparatus and method
EP1332332B1 (de) * 2000-11-02 2010-04-14 Zygo Corporation Verfahren und vorrichtung zur höhenabtastenden interferometrie mit phasendifferenz-analyse
WO2002079718A1 (en) * 2001-03-29 2002-10-10 Georgia Tech Research Corporation System and method for surface profiling
US6643025B2 (en) 2001-03-29 2003-11-04 Georgia Tech Research Corporation Microinterferometer for distance measurements
KR20040058365A (ko) * 2001-12-05 2004-07-03 세미컨덕터 테크놀로지스 앤드 인스트루먼츠.인크. 백색광 간섭 측정계를 사용하는 검사 시스템 및 검사 방법
GB2385417B (en) * 2002-03-14 2004-01-21 Taylor Hobson Ltd Surface profiling apparatus
US7385707B2 (en) * 2002-03-14 2008-06-10 Taylor Hobson Limited Surface profiling apparatus
US7116430B2 (en) * 2002-03-29 2006-10-03 Georgia Technology Research Corporation Highly-sensitive displacement-measuring optical device
US7518737B2 (en) * 2002-03-29 2009-04-14 Georgia Tech Research Corp. Displacement-measuring optical device with orifice
US7440117B2 (en) * 2002-03-29 2008-10-21 Georgia Tech Research Corp. Highly-sensitive displacement-measuring optical device
US6724487B2 (en) 2002-06-06 2004-04-20 Eastman Kodak Company Apparatus and method for measuring digital imager, package and wafer bow and deviation from flatness
US7139081B2 (en) * 2002-09-09 2006-11-21 Zygo Corporation Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures
US7869057B2 (en) * 2002-09-09 2011-01-11 Zygo Corporation Multiple-angle multiple-wavelength interferometer using high-NA imaging and spectral analysis
GB2395777B (en) 2002-11-27 2005-12-28 Taylor Hobson Ltd A surface profiling apparatus
US7106454B2 (en) * 2003-03-06 2006-09-12 Zygo Corporation Profiling complex surface structures using scanning interferometry
US7324214B2 (en) * 2003-03-06 2008-01-29 Zygo Corporation Interferometer and method for measuring characteristics of optically unresolved surface features
US7177029B2 (en) 2003-07-10 2007-02-13 Zygo Corporation Stroboscopic interferometry with frequency domain analysis
US7298494B2 (en) * 2003-09-15 2007-11-20 Zygo Corporation Methods and systems for interferometric analysis of surfaces and related applications
US7280267B2 (en) * 2004-02-19 2007-10-09 Agilent Technologies, Inc. Device for remotely stimulating and measuring electronic signals through a fiber optic cable
US7277183B2 (en) * 2004-04-22 2007-10-02 Zygo Corporation Vibration resistant interferometry
US6963434B1 (en) * 2004-04-30 2005-11-08 Asml Holding N.V. System and method for calculating aerial image of a spatial light modulator
US20060012582A1 (en) * 2004-07-15 2006-01-19 De Lega Xavier C Transparent film measurements
US7485847B2 (en) * 2004-12-08 2009-02-03 Georgia Tech Research Corporation Displacement sensor employing discrete light pulse detection
WO2006078718A1 (en) * 2005-01-20 2006-07-27 Zygo Corporation Interferometer for determining characteristics of an object surface
US7884947B2 (en) * 2005-01-20 2011-02-08 Zygo Corporation Interferometry for determining characteristics of an object surface, with spatially coherent illumination
WO2007044786A2 (en) * 2005-10-11 2007-04-19 Zygo Corporation Interferometry method and system including spectral decomposition
FI20060331A0 (fi) * 2006-04-05 2006-04-05 Kari Seppaelae Menetelmä ja laitteisto muodon mittauksen/tunnistukseen
TWI428559B (zh) * 2006-07-21 2014-03-01 Zygo Corp 在低同調干涉下系統性效應之補償方法和系統
US7710580B2 (en) * 2006-10-27 2010-05-04 Zygo Corporation Vibration resistant interferometry
US7924435B2 (en) * 2006-12-22 2011-04-12 Zygo Corporation Apparatus and method for measuring characteristics of surface features
US7889355B2 (en) * 2007-01-31 2011-02-15 Zygo Corporation Interferometry for lateral metrology
US7619746B2 (en) * 2007-07-19 2009-11-17 Zygo Corporation Generating model signals for interferometry
US8072611B2 (en) * 2007-10-12 2011-12-06 Zygo Corporation Interferometric analysis of under-resolved features
JP5222954B2 (ja) * 2007-11-13 2013-06-26 ザイゴ コーポレーション 偏光スキャンを利用した干渉計
WO2009079334A2 (en) * 2007-12-14 2009-06-25 Zygo Corporation Analyzing surface structure using scanning interferometry
US8004688B2 (en) * 2008-11-26 2011-08-23 Zygo Corporation Scan error correction in low coherence scanning interferometry
US7986414B2 (en) * 2009-01-30 2011-07-26 Corning Incorporated Measurement of multiple surface test objects with frequency scanning interferometer
US8320031B1 (en) * 2009-12-10 2012-11-27 The Boeing Company Method for real time holographic fringe blazing by determining adjacent fringe minima and blazing intermediate the minima
JP5493152B2 (ja) 2010-08-06 2014-05-14 株式会社ミツトヨ 形状測定装置
GB2483481A (en) * 2010-09-09 2012-03-14 Phase Vision Ltd Method and apparatus of measuring the shape of an object
US8698891B2 (en) 2011-03-09 2014-04-15 Zygo Corporation Object thickness and surface profile measurements
JP6522344B2 (ja) * 2014-01-10 2019-05-29 Ntn株式会社 高さ検出装置、塗布装置および高さ検出方法
ES2662124T3 (es) * 2014-02-21 2018-04-05 Abb Schweiz Ag Sensor interferométrico
CN106796125B (zh) * 2014-02-21 2019-06-18 Abb 瑞士股份有限公司 具有微分调制相位检测的干涉测定传感器
KR102523972B1 (ko) * 2015-10-27 2023-04-20 삼성전자주식회사 광 셔터를 포함하는 3차원 깊이 센서를 이용한 거리측정방법
JP6749814B2 (ja) * 2015-11-12 2020-09-02 Ntn株式会社 高さ検出装置およびそれを搭載した塗布装置
EP3376156B1 (de) * 2015-11-12 2022-03-02 NTN Corporation Höhendetektionsvorrichtung und beschichtungsvorrichtung mit einer solchen vorrichtung
WO2018093637A1 (en) * 2016-11-18 2018-05-24 Zygo Corporation Method and apparatus for optimizing the optical performance of interferometers
US10948284B1 (en) * 2017-10-06 2021-03-16 Filmetrics, Inc. Optical profilometer with color outputs
JP2019152570A (ja) * 2018-03-05 2019-09-12 東芝メモリ株式会社 測定装置
CN113029366B (zh) * 2021-03-11 2022-09-23 深圳中科飞测科技股份有限公司 零相位差位置寻找方法、扫描系统及存储介质

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3574280D1 (en) * 1985-12-23 1989-12-21 Ibm Deutschland Method and arrangement for optically determining surface profiles
US4818110A (en) * 1986-05-06 1989-04-04 Kla Instruments Corporation Method and apparatus of using a two beam interference microscope for inspection of integrated circuits and the like
US4732483A (en) * 1987-03-19 1988-03-22 Zygo Corporation Interferometric surface profiler
US4869593A (en) * 1988-04-22 1989-09-26 Zygo Corporation Interferometric surface profiler
JPH01282411A (ja) * 1988-05-06 1989-11-14 Brother Ind Ltd レーザ走査型表面粗さ測定装置
US4978219A (en) * 1988-05-06 1990-12-18 Brother Kogyo Kabushiki Kaisha Surface roughness measuring apparatus utilizing deflectable laser beams
US4948253A (en) * 1988-10-28 1990-08-14 Zygo Corporation Interferometric surface profiler for spherical surfaces
JPH02173505A (ja) * 1988-12-26 1990-07-05 Brother Ind Ltd 光波干渉型微細表面形状測定装置
JPH0378609A (ja) * 1989-08-23 1991-04-03 Brother Ind Ltd 光スキッド式表面粗さ計測装置
US5112129A (en) * 1990-03-02 1992-05-12 Kla Instruments Corporation Method of image enhancement for the coherence probe microscope with applications to integrated circuit metrology
US5122648A (en) * 1990-06-01 1992-06-16 Wyko Corporation Apparatus and method for automatically focusing an interference microscope
DE4108944A1 (de) * 1991-03-19 1992-09-24 Haeusler Gerd Verfahren und einrichtung zur beruehrungslosen erfassung der oberflaechengestalt von diffus streuenden objekten
US5133601A (en) * 1991-06-12 1992-07-28 Wyko Corporation Rough surface profiler and method
US5204734A (en) * 1991-06-12 1993-04-20 Wyko Corporation Rough surface profiler and method
US5210591A (en) * 1991-08-02 1993-05-11 Hughes Aircraft Company Interferometric ball bearing test station

Also Published As

Publication number Publication date
US5402234A (en) 1995-03-28
EP0746745A1 (de) 1996-12-11
EP0746745B1 (de) 2002-10-02
WO1994018523A1 (en) 1994-08-18
EP0746745A4 (de) 1997-12-17
JP2682742B2 (ja) 1997-11-26
JPH08502828A (ja) 1996-03-26
DE69431488T2 (de) 2003-06-26

Similar Documents

Publication Publication Date Title
DE69431488D1 (de) Verfahren für die schnelle Datenerfassung bei der Köhärenz-Scanning-Interferometrie
DE69228369D1 (de) Berührungslose Testsonde
DE69024833D1 (de) Spiegelinterferometer für Linear- und Winkelmessungen
DE69118250T2 (de) Zugriff für komprimierte daten
DE69104721D1 (de) Verfahren und anordnung für datensynchronisierung.
DE69104047T2 (de) Ein in der Hand haltbares System für einen invasiven Sondenkopf.
DE69310947T2 (de) Kompakte Lasersonde für Profilometrie
DE69118617D1 (de) Einschrittest für absolute Zellzahlen
EP0694756A3 (de) Verlängerungsmessung mit einem kontaktlosen Laserextensometer
DE59509461D1 (de) Tastkopf für Koordinatenmessgeräte
DE69528339D1 (de) Applikationspezifische Konfliktlösung für schwachkonsistente replizierte Datenbanken
DE69020411D1 (de) Verfahren und Gerät für augenoptische Messungen.
DE69211497D1 (de) Ständer für Kleinmotoren
DE69306858T2 (de) Messapparat für Konturen
DE69203522T2 (de) Verfahren zum dimensionalen Messen von beweglichen Gegenständen.
DE59404928D1 (de) Mehrkoordinaten-Tastkopf
IL100284A0 (en) Probe for an extensometer
DE69020410D1 (de) Verfahren und Gerät für augenoptische Messungen.
DE59404926D1 (de) Mehrkoordinaten-Tastkopf
DE59105392D1 (de) Verfahren zum Messen von Werkstücken.
ATA49790A (de) Interferometer insbesondere zur längenmessung
DE69125597D1 (de) Tastköpfe
DE69317685T2 (de) Schaltung für die Synchronisierung eines Teilers
IL94429A0 (en) Interferometric measurement
DE59406472D1 (de) Mehrkoordinaten-Tastkopf

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: EFFERT UND KOLLEGEN, 12487 BERLIN

8328 Change in the person/name/address of the agent

Representative=s name: WABLAT-LANGE-KARTHAUS, 14129 BERLIN