DE69429071D1 - DMD-Struktur mit erhöhtem horizontalen Auflösungsvermögen - Google Patents

DMD-Struktur mit erhöhtem horizontalen Auflösungsvermögen

Info

Publication number
DE69429071D1
DE69429071D1 DE69429071T DE69429071T DE69429071D1 DE 69429071 D1 DE69429071 D1 DE 69429071D1 DE 69429071 T DE69429071 T DE 69429071T DE 69429071 T DE69429071 T DE 69429071T DE 69429071 D1 DE69429071 D1 DE 69429071D1
Authority
DE
Germany
Prior art keywords
horizontal resolution
increased horizontal
dmd structure
dmd
increased
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69429071T
Other languages
English (en)
Other versions
DE69429071T2 (de
Inventor
Robert J Gove
Jeffrey B Sampsell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Application granted granted Critical
Publication of DE69429071D1 publication Critical patent/DE69429071D1/de
Publication of DE69429071T2 publication Critical patent/DE69429071T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00Details of television systems
    • H04N5/74Projection arrangements for image reproduction, e.g. using eidophor
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
DE69429071T 1993-12-03 1994-12-02 DMD-Struktur mit erhöhtem horizontalen Auflösungsvermögen Expired - Fee Related DE69429071T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US16183293A 1993-12-03 1993-12-03

Publications (2)

Publication Number Publication Date
DE69429071D1 true DE69429071D1 (de) 2001-12-20
DE69429071T2 DE69429071T2 (de) 2002-06-20

Family

ID=22582939

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69429071T Expired - Fee Related DE69429071T2 (de) 1993-12-03 1994-12-02 DMD-Struktur mit erhöhtem horizontalen Auflösungsvermögen

Country Status (8)

Country Link
US (1) US6232936B1 (de)
EP (1) EP0665458B1 (de)
JP (1) JP3526480B2 (de)
KR (1) KR950022934A (de)
CN (1) CN1058123C (de)
CA (1) CA2137059C (de)
DE (1) DE69429071T2 (de)
TW (1) TW283290B (de)

Families Citing this family (111)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6674562B1 (en) * 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
US6680792B2 (en) * 1994-05-05 2004-01-20 Iridigm Display Corporation Interferometric modulation of radiation
US8014059B2 (en) 1994-05-05 2011-09-06 Qualcomm Mems Technologies, Inc. System and method for charge control in a MEMS device
JPH08265672A (ja) * 1994-10-31 1996-10-11 Texas Instr Inc <Ti> 横長ディスプレイ用超小型ディジタルミラー構造体
GB2307814A (en) * 1995-11-28 1997-06-04 Rank Brimar Ltd Dmd display system
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
KR100703140B1 (ko) 1998-04-08 2007-04-05 이리다임 디스플레이 코포레이션 간섭 변조기 및 그 제조 방법
WO2003007049A1 (en) * 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US20030020809A1 (en) * 2000-03-15 2003-01-30 Gibbon Michael A Methods and apparatuses for superimposition of images
CA2376411C (en) * 2000-03-31 2009-01-20 Imax Corporation Digital projection equipment and techniques
US6962771B1 (en) * 2000-10-13 2005-11-08 Taiwan Semiconductor Manufacturing Company, Ltd. Dual damascene process
US6504641B2 (en) * 2000-12-01 2003-01-07 Agere Systems Inc. Driver and method of operating a micro-electromechanical system device
EP1244304B1 (de) * 2001-03-19 2009-01-21 Texas Instruments Incorporated Steuerungstakt für räumlichen Lichtmodulator
US6574033B1 (en) 2002-02-27 2003-06-03 Iridigm Display Corporation Microelectromechanical systems device and method for fabricating same
KR100451737B1 (ko) * 2002-05-17 2004-10-08 엘지전자 주식회사 Dmd 패널
US20030218590A1 (en) * 2002-05-23 2003-11-27 Kiser David K. Optics engine having multi-array spatial light modulating device and method of operation
US6947020B2 (en) 2002-05-23 2005-09-20 Oregonlabs, Llc Multi-array spatial light modulating devices and methods of fabrication
US20040004753A1 (en) * 2002-06-19 2004-01-08 Pan Shaoher X. Architecture of a reflective spatial light modulator
US7781850B2 (en) 2002-09-20 2010-08-24 Qualcomm Mems Technologies, Inc. Controlling electromechanical behavior of structures within a microelectromechanical systems device
DE10245104B4 (de) * 2002-09-27 2008-08-07 Carl Zeiss Jena Gmbh Projektionsanordnung und Projektionsverfahren
US6825968B2 (en) * 2002-10-11 2004-11-30 Exajoule, Llc Micromirror systems with electrodes configured for sequential mirror attraction
US6798560B2 (en) * 2002-10-11 2004-09-28 Exajoula, Llc Micromirror systems with open support structures
US6870659B2 (en) * 2002-10-11 2005-03-22 Exajoule, Llc Micromirror systems with side-supported mirrors and concealed flexure members
US20040109140A1 (en) * 2002-12-10 2004-06-10 Kiser David K. Apparatus for combining a number of images into a single image
US20040109139A1 (en) * 2002-12-10 2004-06-10 Kiser David K. Apparatus for combining a number of images into a single image
US20040108973A1 (en) * 2002-12-10 2004-06-10 Kiser David K. Apparatus for generating a number of color light components
US20040109138A1 (en) * 2002-12-10 2004-06-10 Kiser David K. Apparatus for generating a number of color light components
US7042622B2 (en) * 2003-10-30 2006-05-09 Reflectivity, Inc Micromirror and post arrangements on substrates
US6906848B2 (en) * 2003-02-24 2005-06-14 Exajoule, Llc Micromirror systems with concealed multi-piece hinge structures
US6900922B2 (en) * 2003-02-24 2005-05-31 Exajoule, Llc Multi-tilt micromirror systems with concealed hinge structures
JP2004294756A (ja) * 2003-03-27 2004-10-21 Tdk Corp 空間光変調器及びホログラム記録再生装置
TW570896B (en) 2003-05-26 2004-01-11 Prime View Int Co Ltd A method for fabricating an interference display cell
CN100378496C (zh) * 2003-06-02 2008-04-02 明锐有限公司 具有隐藏铰链的高填充率反射式空间光调制器
GB2403864A (en) * 2003-07-10 2005-01-12 Ocuity Ltd Pixel arrangement for an autostereoscopic display
US7385750B2 (en) 2003-08-29 2008-06-10 Asml Holding N.V. Spatial light modulator using an integrated circuit actuator
US6888521B1 (en) * 2003-10-30 2005-05-03 Reflectivity, Inc Integrated driver for use in display systems having micromirrors
US20080088651A1 (en) * 2003-11-01 2008-04-17 Yoshihiro Maeda Divided mirror pixels for deformable mirror device
US7142346B2 (en) * 2003-12-09 2006-11-28 Idc, Llc System and method for addressing a MEMS display
US7161728B2 (en) 2003-12-09 2007-01-09 Idc, Llc Area array modulation and lead reduction in interferometric modulators
US7333260B2 (en) * 2004-08-09 2008-02-19 Stereo Display, Inc. Two-dimensional image projection system
US7474454B2 (en) * 2004-06-18 2009-01-06 Angstrom, Inc. Programmable micromirror motion control system
US7706050B2 (en) 2004-03-05 2010-04-27 Qualcomm Mems Technologies, Inc. Integrated modulator illumination
US7060895B2 (en) * 2004-05-04 2006-06-13 Idc, Llc Modifying the electro-mechanical behavior of devices
US7164520B2 (en) 2004-05-12 2007-01-16 Idc, Llc Packaging for an interferometric modulator
US7304718B2 (en) * 2004-08-17 2007-12-04 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7889163B2 (en) 2004-08-27 2011-02-15 Qualcomm Mems Technologies, Inc. Drive method for MEMS devices
US7602375B2 (en) * 2004-09-27 2009-10-13 Idc, Llc Method and system for writing data to MEMS display elements
US7355780B2 (en) 2004-09-27 2008-04-08 Idc, Llc System and method of illuminating interferometric modulators using backlighting
US8878825B2 (en) 2004-09-27 2014-11-04 Qualcomm Mems Technologies, Inc. System and method for providing a variable refresh rate of an interferometric modulator display
US8008736B2 (en) 2004-09-27 2011-08-30 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device
US7289259B2 (en) 2004-09-27 2007-10-30 Idc, Llc Conductive bus structure for interferometric modulator array
US7532195B2 (en) 2004-09-27 2009-05-12 Idc, Llc Method and system for reducing power consumption in a display
US7893919B2 (en) 2004-09-27 2011-02-22 Qualcomm Mems Technologies, Inc. Display region architectures
US7372613B2 (en) 2004-09-27 2008-05-13 Idc, Llc Method and device for multistate interferometric light modulation
BRPI0509575A (pt) * 2004-09-27 2007-10-09 Idc Llc método e dispositivo para modulação de luz interferométrica de multi-estados
US7684104B2 (en) 2004-09-27 2010-03-23 Idc, Llc MEMS using filler material and method
US7583429B2 (en) 2004-09-27 2009-09-01 Idc, Llc Ornamental display device
US7808703B2 (en) 2004-09-27 2010-10-05 Qualcomm Mems Technologies, Inc. System and method for implementation of interferometric modulator displays
US7916103B2 (en) * 2004-09-27 2011-03-29 Qualcomm Mems Technologies, Inc. System and method for display device with end-of-life phenomena
US20060076634A1 (en) 2004-09-27 2006-04-13 Lauren Palmateer Method and system for packaging MEMS devices with incorporated getter
US7420725B2 (en) 2004-09-27 2008-09-02 Idc, Llc Device having a conductive light absorbing mask and method for fabricating same
US7724993B2 (en) 2004-09-27 2010-05-25 Qualcomm Mems Technologies, Inc. MEMS switches with deforming membranes
US8310441B2 (en) 2004-09-27 2012-11-13 Qualcomm Mems Technologies, Inc. Method and system for writing data to MEMS display elements
US7692839B2 (en) 2004-09-27 2010-04-06 Qualcomm Mems Technologies, Inc. System and method of providing MEMS device with anti-stiction coating
US7843410B2 (en) 2004-09-27 2010-11-30 Qualcomm Mems Technologies, Inc. Method and device for electrically programmable display
US7813026B2 (en) 2004-09-27 2010-10-12 Qualcomm Mems Technologies, Inc. System and method of reducing color shift in a display
US7920135B2 (en) 2004-09-27 2011-04-05 Qualcomm Mems Technologies, Inc. Method and system for driving a bi-stable display
US7944599B2 (en) 2004-09-27 2011-05-17 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US7668415B2 (en) 2004-09-27 2010-02-23 Qualcomm Mems Technologies, Inc. Method and device for providing electronic circuitry on a backplate
US7424198B2 (en) 2004-09-27 2008-09-09 Idc, Llc Method and device for packaging a substrate
US7136213B2 (en) 2004-09-27 2006-11-14 Idc, Llc Interferometric modulators having charge persistence
US7710629B2 (en) 2004-09-27 2010-05-04 Qualcomm Mems Technologies, Inc. System and method for display device with reinforcing substance
US7936497B2 (en) 2004-09-27 2011-05-03 Qualcomm Mems Technologies, Inc. MEMS device having deformable membrane characterized by mechanical persistence
US8124434B2 (en) 2004-09-27 2012-02-28 Qualcomm Mems Technologies, Inc. Method and system for packaging a display
US7675669B2 (en) 2004-09-27 2010-03-09 Qualcomm Mems Technologies, Inc. Method and system for driving interferometric modulators
US7653371B2 (en) 2004-09-27 2010-01-26 Qualcomm Mems Technologies, Inc. Selectable capacitance circuit
US7679627B2 (en) 2004-09-27 2010-03-16 Qualcomm Mems Technologies, Inc. Controller and driver features for bi-stable display
US7719500B2 (en) 2004-09-27 2010-05-18 Qualcomm Mems Technologies, Inc. Reflective display pixels arranged in non-rectangular arrays
US7701631B2 (en) 2004-09-27 2010-04-20 Qualcomm Mems Technologies, Inc. Device having patterned spacers for backplates and method of making the same
US7330239B2 (en) * 2005-04-08 2008-02-12 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method utilizing a blazing portion of a contrast device
EP1878001A1 (de) 2005-05-05 2008-01-16 QUALCOMM Incorporated, Inc. Dynamische treiber-ic und anzeigetafelkonfiguration
US7948457B2 (en) 2005-05-05 2011-05-24 Qualcomm Mems Technologies, Inc. Systems and methods of actuating MEMS display elements
US7920136B2 (en) 2005-05-05 2011-04-05 Qualcomm Mems Technologies, Inc. System and method of driving a MEMS display device
US7390869B2 (en) 2005-06-13 2008-06-24 Eastman Chemical Company Process for removing metal species in the presence of hydrogen and a porous material and polyester polymer containing reduced amounts of metal species
US20070041077A1 (en) * 2005-08-19 2007-02-22 Stereo Display, Inc. Pocket-sized two-dimensional image projection system
US8391630B2 (en) 2005-12-22 2013-03-05 Qualcomm Mems Technologies, Inc. System and method for power reduction when decompressing video streams for interferometric modulator displays
US7795061B2 (en) 2005-12-29 2010-09-14 Qualcomm Mems Technologies, Inc. Method of creating MEMS device cavities by a non-etching process
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US8194056B2 (en) 2006-02-09 2012-06-05 Qualcomm Mems Technologies Inc. Method and system for writing data to MEMS display elements
US7903047B2 (en) 2006-04-17 2011-03-08 Qualcomm Mems Technologies, Inc. Mode indicator for interferometric modulator displays
US7711239B2 (en) 2006-04-19 2010-05-04 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing nanoparticles
US8049713B2 (en) 2006-04-24 2011-11-01 Qualcomm Mems Technologies, Inc. Power consumption optimized display update
US7649671B2 (en) 2006-06-01 2010-01-19 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device with electrostatic actuation and release
US7702192B2 (en) 2006-06-21 2010-04-20 Qualcomm Mems Technologies, Inc. Systems and methods for driving MEMS display
US7835061B2 (en) 2006-06-28 2010-11-16 Qualcomm Mems Technologies, Inc. Support structures for free-standing electromechanical devices
US7777715B2 (en) 2006-06-29 2010-08-17 Qualcomm Mems Technologies, Inc. Passive circuits for de-multiplexing display inputs
US7527998B2 (en) 2006-06-30 2009-05-05 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
US7763546B2 (en) 2006-08-02 2010-07-27 Qualcomm Mems Technologies, Inc. Methods for reducing surface charges during the manufacture of microelectromechanical systems devices
WO2008033441A2 (en) * 2006-09-12 2008-03-20 Olympus Corporation Divided mirror pixels for deformable mirror device
US7403180B1 (en) * 2007-01-29 2008-07-22 Qualcomm Mems Technologies, Inc. Hybrid color synthesis for multistate reflective modulator displays
US7719752B2 (en) 2007-05-11 2010-05-18 Qualcomm Mems Technologies, Inc. MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
US7847795B2 (en) * 2007-05-25 2010-12-07 Texas Instruments Incorporated Method and system for controlling spatial light modulator interface buses
US8451298B2 (en) * 2008-02-13 2013-05-28 Qualcomm Mems Technologies, Inc. Multi-level stochastic dithering with noise mitigation via sequential template averaging
US8736590B2 (en) 2009-03-27 2014-05-27 Qualcomm Mems Technologies, Inc. Low voltage driver scheme for interferometric modulators
WO2010141767A1 (en) 2009-06-05 2010-12-09 Qualcomm Mems Technologies, Inc. System and method for improving the quality of halftone video using an adaptive threshold
US8371702B2 (en) * 2009-09-22 2013-02-12 Christie Digital Systems Usa, Inc. Method and system for digital light processing projection using pulsed lamps
KR20130100232A (ko) 2010-04-09 2013-09-10 퀄컴 엠이엠에스 테크놀로지스, 인크. 전기 기계 디바이스의 기계층 및 그 형성 방법
US8963159B2 (en) 2011-04-04 2015-02-24 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
CN102608875A (zh) * 2012-03-27 2012-07-25 深圳市华星光电技术有限公司 基于修补机台的玻璃基板补刻号方法及玻璃基板补刻号装置
JP6690400B2 (ja) 2016-05-23 2020-04-28 セイコーエプソン株式会社 電気光学装置および電子機器

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5061049A (en) 1984-08-31 1991-10-29 Texas Instruments Incorporated Spatial light modulator and method
US4793699A (en) * 1985-04-19 1988-12-27 Canon Kabushiki Kaisha Projection apparatus provided with an electro-mechanical transducer element
JPS6234460A (ja) * 1985-08-08 1987-02-14 Canon Inc 感光フイルムの露光装置
JPS6235323A (ja) * 1985-08-09 1987-02-16 Canon Inc 光走査光学系
US5028939A (en) 1988-08-23 1991-07-02 Texas Instruments Incorporated Spatial light modulator system
US5083857A (en) * 1990-06-29 1992-01-28 Texas Instruments Incorporated Multi-level deformable mirror device
EP0467048B1 (de) * 1990-06-29 1995-09-20 Texas Instruments Incorporated Deformierbare Spiegelvorrichtung mit aktualisiertem Raster
US5151718A (en) * 1990-12-31 1992-09-29 Texas Instruments Incorporated System and method for solid state illumination for dmd devices
US5146356A (en) 1991-02-04 1992-09-08 North American Philips Corporation Active matrix electro-optic display device with close-packed arrangement of diamond-like shaped
CA2063744C (en) * 1991-04-01 2002-10-08 Paul M. Urbanus Digital micromirror device architecture and timing for use in a pulse-width modulated display system
US5168406A (en) * 1991-07-31 1992-12-01 Texas Instruments Incorporated Color deformable mirror device and method for manufacture
US5240818A (en) * 1991-07-31 1993-08-31 Texas Instruments Incorporated Method for manufacturing a color filter for deformable mirror device
US5233385A (en) * 1991-12-18 1993-08-03 Texas Instruments Incorporated White light enhanced color field sequential projection
GB2265064B (en) * 1992-02-26 1995-08-23 Rank Cintel Ltd Projection systems

Also Published As

Publication number Publication date
EP0665458A2 (de) 1995-08-02
JP3526480B2 (ja) 2004-05-17
CN1058123C (zh) 2000-11-01
CA2137059C (en) 2004-11-23
TW283290B (de) 1996-08-11
EP0665458A3 (de) 1996-04-17
DE69429071T2 (de) 2002-06-20
CA2137059A1 (en) 1995-06-04
US6232936B1 (en) 2001-05-15
CN1126923A (zh) 1996-07-17
JPH0836141A (ja) 1996-02-06
EP0665458B1 (de) 2001-11-14
KR950022934A (ko) 1995-07-28

Similar Documents

Publication Publication Date Title
DE69429071D1 (de) DMD-Struktur mit erhöhtem horizontalen Auflösungsvermögen
DE69415595D1 (de) Projektor
DE69215436D1 (de) Projektor
DE69430568D1 (de) Flacher bildschirm mit innerer tragstruktur
DE69225538D1 (de) Hochauflösende Multimediaanzeige
DE69421186D1 (de) Stereo-optisches bildanzeigesystem mit verbesserter auflösung
DE69131394T2 (de) Maschinenlesbares Zeichen mit Mehrfachauflösung
DE68920670D1 (de) Fernsehsystem mit vergrösserter Auflösung.
FI910782A (fi) Foerfarande foer oekning av spektruminformationens resolution
DE69429548D1 (de) Projektionsschirm
DE69028981T2 (de) Fernsehen mit verbesserter Auflösung
DE69415270D1 (de) Ultraviolett Sensor mit Ortsäuflösung
DE69211225T2 (de) Projektor
DE69416662T2 (de) Bewegtbildkodierer
ITRM920614A1 (it) Proiettore per veicoli
DE59407205D1 (de) Gerippestruktur
DE69116902T2 (de) Fernsehen mit verbesserter Auflösung
DE69416143T2 (de) Hochauflösender komparator mit verbesserter empfindlichkeit
DE9301963U1 (de) Tragwerk
DE9318280U1 (de) Tragwerk
KR950020487U (ko) 프로젝터
KR950012325U (ko) 투영기
ITTO910276A1 (it) Proiettore per veicoli
NL191850C (nl) Bouwpaneel.
ITFE910011A0 (it) Pannello fotosensibile

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee