DE69428965T2 - Deformierbare Spiegelvorrichtung für Direktbetrachtung - Google Patents

Deformierbare Spiegelvorrichtung für Direktbetrachtung

Info

Publication number
DE69428965T2
DE69428965T2 DE69428965T DE69428965T DE69428965T2 DE 69428965 T2 DE69428965 T2 DE 69428965T2 DE 69428965 T DE69428965 T DE 69428965T DE 69428965 T DE69428965 T DE 69428965T DE 69428965 T2 DE69428965 T2 DE 69428965T2
Authority
DE
Germany
Prior art keywords
mirror device
deformable mirror
direct viewing
viewing
direct
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69428965T
Other languages
English (en)
Other versions
DE69428965D1 (de
Inventor
Jeffrey B Sampsell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of DE69428965D1 publication Critical patent/DE69428965D1/de
Application granted granted Critical
Publication of DE69428965T2 publication Critical patent/DE69428965T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/90—Methods
DE69428965T 1993-12-01 1994-11-30 Deformierbare Spiegelvorrichtung für Direktbetrachtung Expired - Fee Related DE69428965T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/159,963 US5517347A (en) 1993-12-01 1993-12-01 Direct view deformable mirror device

Publications (2)

Publication Number Publication Date
DE69428965D1 DE69428965D1 (de) 2001-12-13
DE69428965T2 true DE69428965T2 (de) 2002-06-27

Family

ID=22574865

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69428965T Expired - Fee Related DE69428965T2 (de) 1993-12-01 1994-11-30 Deformierbare Spiegelvorrichtung für Direktbetrachtung

Country Status (8)

Country Link
US (1) US5517347A (de)
EP (1) EP0656554B1 (de)
JP (1) JPH07261102A (de)
KR (1) KR950015186A (de)
CN (1) CN1064134C (de)
CA (1) CA2137058A1 (de)
DE (1) DE69428965T2 (de)
TW (1) TW274121B (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112010004339B4 (de) * 2009-11-10 2013-07-04 International Business Machines Corp. Einheit eines nichtflüchtigen nanoelektromechanischen Systems

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CN1139215A (zh) 1997-01-01
CA2137058A1 (en) 1995-06-02
EP0656554A2 (de) 1995-06-07
JPH07261102A (ja) 1995-10-13
DE69428965D1 (de) 2001-12-13
CN1064134C (zh) 2001-04-04
TW274121B (de) 1996-04-11
EP0656554A3 (de) 1997-05-21
US5517347A (en) 1996-05-14
KR950015186A (ko) 1995-06-16
EP0656554B1 (de) 2001-11-07

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