DE69428391T2 - Verfahren und Vorrichtung zur Beschichtung eines Filmes - Google Patents

Verfahren und Vorrichtung zur Beschichtung eines Filmes

Info

Publication number
DE69428391T2
DE69428391T2 DE69428391T DE69428391T DE69428391T2 DE 69428391 T2 DE69428391 T2 DE 69428391T2 DE 69428391 T DE69428391 T DE 69428391T DE 69428391 T DE69428391 T DE 69428391T DE 69428391 T2 DE69428391 T2 DE 69428391T2
Authority
DE
Germany
Prior art keywords
coating
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69428391T
Other languages
English (en)
Other versions
DE69428391D1 (de
Inventor
Keizo Hasebe
Akihiro Fujimoto
Hiroichi Inada
Hiroyuki Iino
Shinzi Kitamura
Masatoshi Deguchi
Mitsuhiro Nambu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of DE69428391D1 publication Critical patent/DE69428391D1/de
Application granted granted Critical
Publication of DE69428391T2 publication Critical patent/DE69428391T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/08—Spreading liquid or other fluent material by manipulating the work, e.g. tilting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
DE69428391T 1993-03-25 1994-03-25 Verfahren und Vorrichtung zur Beschichtung eines Filmes Expired - Lifetime DE69428391T2 (de)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP9257993 1993-03-25
JP13259493 1993-05-10
JP18344393 1993-06-30
JP18344293 1993-06-30
JP34372293 1993-12-16
JP34371793 1993-12-16
JP34734893 1993-12-24
JP34881293 1993-12-27
JP35405493 1993-12-28
JP35405293 1993-12-28

Publications (2)

Publication Number Publication Date
DE69428391D1 DE69428391D1 (de) 2001-10-31
DE69428391T2 true DE69428391T2 (de) 2002-07-04

Family

ID=27580182

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69428391T Expired - Lifetime DE69428391T2 (de) 1993-03-25 1994-03-25 Verfahren und Vorrichtung zur Beschichtung eines Filmes

Country Status (6)

Country Link
US (3) US5658615A (de)
EP (1) EP0618504B1 (de)
KR (1) KR100284556B1 (de)
CN (1) CN1059967C (de)
DE (1) DE69428391T2 (de)
SG (2) SG130022A1 (de)

Families Citing this family (179)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3276449B2 (ja) * 1993-05-13 2002-04-22 富士通株式会社 回転塗布方法
US6127279A (en) * 1994-09-26 2000-10-03 Semiconductor Energy Laboratory Co., Ltd. Solution applying method
JPH08293452A (ja) * 1995-04-25 1996-11-05 Mitsubishi Electric Corp レジスト塗布装置
US5952045A (en) * 1995-07-27 1999-09-14 Micron Technology, Inc. Method and apparatus for improved coating of a semiconductor wafer
JPH09106934A (ja) * 1995-10-12 1997-04-22 Dainippon Screen Mfg Co Ltd 基板現像装置
US6228561B1 (en) * 1996-02-01 2001-05-08 Tokyo Electron Limited Film forming method and film forming apparatus
DE19619678C1 (de) 1996-05-15 1997-11-20 Steag Hamatech Gmbh Machines Verfahren und Vorrichtung zum Beschichten von scheibenförmigen Informationsspeichermedien
US5849084A (en) * 1996-06-21 1998-12-15 Micron Technology, Inc. Spin coating dispense arm assembly
US5985031A (en) 1996-06-21 1999-11-16 Micron Technology, Inc. Spin coating spindle and chuck assembly
US5861061A (en) * 1996-06-21 1999-01-19 Micron Technology, Inc. Spin coating bowl
US6413436B1 (en) * 1999-01-27 2002-07-02 Semitool, Inc. Selective treatment of the surface of a microelectronic workpiece
US6264752B1 (en) 1998-03-13 2001-07-24 Gary L. Curtis Reactor for processing a microelectronic workpiece
US6350319B1 (en) 1998-03-13 2002-02-26 Semitool, Inc. Micro-environment reactor for processing a workpiece
US5759273A (en) * 1996-07-16 1998-06-02 Micron Technology, Inc. Cross-section sample staining tool
JP3254574B2 (ja) * 1996-08-30 2002-02-12 東京エレクトロン株式会社 塗布膜形成方法及びその装置
US6147010A (en) * 1996-11-14 2000-11-14 Micron Technology, Inc. Solvent prewet and method to dispense the solvent prewet
JP3333121B2 (ja) * 1996-12-25 2002-10-07 東京エレクトロン株式会社 塗布装置
JP3300624B2 (ja) * 1997-01-24 2002-07-08 東京エレクトロン株式会社 基板端面の洗浄方法
JP3410342B2 (ja) 1997-01-31 2003-05-26 東京エレクトロン株式会社 塗布装置
DE69814710T2 (de) * 1997-03-03 2004-03-18 Tokyo Electron Ltd. Beschichtungs-Vorrichtung und Verfahren
TW432520B (en) * 1997-03-31 2001-05-01 Tokyo Electron Ltd Photoresist coating method and apparatus
DE19718471A1 (de) * 1997-04-30 1998-11-05 Steag Hamatech Gmbh Machines Verfahren und Vorrichtung zum Verkleben von zwei Substraten
US6207231B1 (en) * 1997-05-07 2001-03-27 Tokyo Electron Limited Coating film forming method and coating apparatus
US6701941B1 (en) 1997-05-09 2004-03-09 Semitool, Inc. Method for treating the surface of a workpiece
US20050215063A1 (en) * 1997-05-09 2005-09-29 Bergman Eric J System and methods for etching a silicon wafer using HF and ozone
US7404863B2 (en) * 1997-05-09 2008-07-29 Semitool, Inc. Methods of thinning a silicon wafer using HF and ozone
US7378355B2 (en) 1997-05-09 2008-05-27 Semitool, Inc. System and methods for polishing a wafer
US20050034745A1 (en) * 1997-05-09 2005-02-17 Semitool, Inc. Processing a workpiece with ozone and a halogenated additive
US6869487B1 (en) 1997-05-09 2005-03-22 Semitool, Inc. Process and apparatus for treating a workpiece such as a semiconductor wafer
US7264680B2 (en) * 1997-05-09 2007-09-04 Semitool, Inc. Process and apparatus for treating a workpiece using ozone
US7416611B2 (en) * 1997-05-09 2008-08-26 Semitool, Inc. Process and apparatus for treating a workpiece with gases
US6240933B1 (en) * 1997-05-09 2001-06-05 Semitool, Inc. Methods for cleaning semiconductor surfaces
US7163588B2 (en) * 1997-05-09 2007-01-16 Semitool, Inc. Processing a workpiece using water, a base, and ozone
US20020157686A1 (en) * 1997-05-09 2002-10-31 Semitool, Inc. Process and apparatus for treating a workpiece such as a semiconductor wafer
DE19722407A1 (de) * 1997-05-28 1998-12-03 Singulus Technologies Ag Verfahren und Vorrichtung zur Schichtdicken- insbesondere Bondschichtdickenregelung
TW384505B (en) * 1997-07-04 2000-03-11 Tokyo Electron Ltd Coating device
TW442336B (en) * 1997-08-19 2001-06-23 Tokyo Electron Ltd Film forming method
US6103636A (en) * 1997-08-20 2000-08-15 Micron Technology, Inc. Method and apparatus for selective removal of material from wafer alignment marks
US6248168B1 (en) * 1997-12-15 2001-06-19 Tokyo Electron Limited Spin coating apparatus including aging unit and solvent replacement unit
US6423642B1 (en) * 1998-03-13 2002-07-23 Semitool, Inc. Reactor for processing a semiconductor wafer
US20050217707A1 (en) * 1998-03-13 2005-10-06 Aegerter Brian K Selective processing of microelectronic workpiece surfaces
US6318385B1 (en) 1998-03-13 2001-11-20 Semitool, Inc. Micro-environment chamber and system for rinsing and drying a semiconductor workpiece
US6632292B1 (en) 1998-03-13 2003-10-14 Semitool, Inc. Selective treatment of microelectronic workpiece surfaces
US6635113B2 (en) 1998-05-19 2003-10-21 Tokyo Electron Limited Coating apparatus and coating method
JPH11340119A (ja) * 1998-05-26 1999-12-10 Tokyo Electron Ltd 現像処理方法及び現像処理装置
US6642155B1 (en) * 1998-06-05 2003-11-04 Micron Technology, Inc. Method for applying a fluid to a rotating silicon wafer surface
JP3364155B2 (ja) * 1998-06-05 2003-01-08 東京エレクトロン株式会社 塗布膜形成装置及びその方法
US6416583B1 (en) * 1998-06-19 2002-07-09 Tokyo Electron Limited Film forming apparatus and film forming method
FR2780665B1 (fr) * 1998-07-03 2000-09-15 Oreal Procede et dispositif pour appliquer un revetement tel qu'une peinture ou un vernis
KR100537040B1 (ko) * 1998-08-19 2005-12-16 동경 엘렉트론 주식회사 현상장치
US6037275A (en) * 1998-08-27 2000-03-14 Alliedsignal Inc. Nanoporous silica via combined stream deposition
US6399425B1 (en) * 1998-09-02 2002-06-04 Micron Technology, Inc. Method of encapsulating semiconductor devices utilizing a dispensing apparatus with rotating orifices
US6248171B1 (en) * 1998-09-17 2001-06-19 Silicon Valley Group, Inc. Yield and line width performance for liquid polymers and other materials
US6689215B2 (en) 1998-09-17 2004-02-10 Asml Holdings, N.V. Method and apparatus for mitigating cross-contamination between liquid dispensing jets in close proximity to a surface
US6225240B1 (en) 1998-11-12 2001-05-01 Advanced Micro Devices, Inc. Rapid acceleration methods for global planarization of spin-on films
US6530340B2 (en) * 1998-11-12 2003-03-11 Advanced Micro Devices, Inc. Apparatus for manufacturing planar spin-on films
US6407009B1 (en) 1998-11-12 2002-06-18 Advanced Micro Devices, Inc. Methods of manufacture of uniform spin-on films
US6387825B2 (en) 1998-11-12 2002-05-14 Advanced Micro Devices, Inc. Solution flow-in for uniform deposition of spin-on films
US6200913B1 (en) 1998-11-12 2001-03-13 Advanced Micro Devices, Inc. Cure process for manufacture of low dielectric constant interlevel dielectric layers
US6317642B1 (en) 1998-11-12 2001-11-13 Advanced Micro Devices, Inc. Apparatus and methods for uniform scan dispensing of spin-on materials
JP3458063B2 (ja) * 1998-11-20 2003-10-20 東京エレクトロン株式会社 塗布装置及び塗布方法
US6302960B1 (en) * 1998-11-23 2001-10-16 Applied Materials, Inc. Photoresist coater
US7217325B2 (en) * 1999-01-22 2007-05-15 Semitool, Inc. System for processing a workpiece
US6511914B2 (en) 1999-01-22 2003-01-28 Semitool, Inc. Reactor for processing a workpiece using sonic energy
US6548411B2 (en) 1999-01-22 2003-04-15 Semitool, Inc. Apparatus and methods for processing a workpiece
US6680253B2 (en) 1999-01-22 2004-01-20 Semitool, Inc. Apparatus for processing a workpiece
US6492284B2 (en) 1999-01-22 2002-12-10 Semitool, Inc. Reactor for processing a workpiece using sonic energy
US7402467B1 (en) 1999-03-26 2008-07-22 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing a semiconductor device
KR100585448B1 (ko) 1999-04-08 2006-06-02 동경 엘렉트론 주식회사 막 형성방법 및 막 형성장치
KR100604024B1 (ko) 1999-04-19 2006-07-24 동경 엘렉트론 주식회사 도포막 형성방법 및 도포장치
JP3616732B2 (ja) * 1999-07-07 2005-02-02 東京エレクトロン株式会社 基板の処理方法及び処理装置
KR20020048376A (ko) * 1999-07-29 2002-06-22 다니가와 다다시 원형 혹은 환상 도포막의 형성방법
JP2001060542A (ja) 1999-08-19 2001-03-06 Tokyo Electron Ltd レジストパタ−ンの形成方法
US6261635B1 (en) * 1999-08-27 2001-07-17 Micron Technology, Inc. Method for controlling air over a spinning microelectronic substrate
US6232247B1 (en) 1999-09-01 2001-05-15 Micron Technology, Inc. Substrate coating apparatus and semiconductor processing method of improving uniformity of liquid deposition
US6536964B1 (en) * 1999-09-03 2003-03-25 Tokyo Electron Limited Substrate processing system and substrate processing method
US6555276B2 (en) 1999-10-04 2003-04-29 Micron Technology, Inc. Substrate coating and semiconductor processing method of improving uniformity of liquid deposition
US6322009B1 (en) * 1999-10-29 2001-11-27 Advanced Micro Devices, Inc. Common nozzle for resist development
US6170494B1 (en) * 1999-11-12 2001-01-09 Advanced Micro Devices, Inc. Method for automatically cleaning resist nozzle
JP4090648B2 (ja) * 1999-11-18 2008-05-28 東京エレクトロン株式会社 膜形成方法及び膜形成装置
SE9904345D0 (sv) * 1999-12-01 1999-12-01 Ralf Goeran Andersson method and device for producing a coherent layer of even thickness of liquid or melt on a rotating disk
US6514344B2 (en) * 1999-12-16 2003-02-04 Tokyo Electron Limited Film forming unit
US6286231B1 (en) 2000-01-12 2001-09-11 Semitool, Inc. Method and apparatus for high-pressure wafer processing and drying
EP1124252A2 (de) * 2000-02-10 2001-08-16 Applied Materials, Inc. Verfahren und Vorrichtung zur Verarbeitung von Substraten
JP2001230191A (ja) * 2000-02-18 2001-08-24 Tokyo Electron Ltd 処理液供給方法及び処理液供給装置
US6326319B1 (en) 2000-07-03 2001-12-04 Advanced Micro Devices, Inc. Method for coating ultra-thin resist films
US7102763B2 (en) * 2000-07-08 2006-09-05 Semitool, Inc. Methods and apparatus for processing microelectronic workpieces using metrology
US6746826B1 (en) 2000-07-25 2004-06-08 Asml Holding N.V. Method for an improved developing process in wafer photolithography
CA2314921A1 (en) * 2000-08-03 2002-02-03 Barry Partington Apparatus and method for producing porous polymer particles
KR100377400B1 (ko) * 2000-09-18 2003-03-26 삼성에스디아이 주식회사 스핀 코팅장치
KR100798769B1 (ko) * 2000-09-25 2008-01-29 동경 엘렉트론 주식회사 기판 처리장치
US6709699B2 (en) * 2000-09-27 2004-03-23 Kabushiki Kaisha Toshiba Film-forming method, film-forming apparatus and liquid film drying apparatus
US6500242B2 (en) * 2001-01-04 2002-12-31 Taiwan Semiconductor Manufacturing Company, Ltd Apparatus and method for degassing and preventing gelation in a viscous liquid
US20040062861A1 (en) * 2001-02-07 2004-04-01 Hiroshi Sato Method of electroless plating and apparatus for electroless plating
US20050061676A1 (en) * 2001-03-12 2005-03-24 Wilson Gregory J. System for electrochemically processing a workpiece
US6860945B2 (en) * 2001-03-22 2005-03-01 Tokyo Electron Limited Substrate coating unit and substrate coating method
JP3967618B2 (ja) * 2001-04-17 2007-08-29 東京エレクトロン株式会社 基板の処理方法及び基板の処理システム
JP2002324745A (ja) * 2001-04-25 2002-11-08 Tokyo Ohka Kogyo Co Ltd レジスト膜形成方法
JP3898906B2 (ja) * 2001-05-22 2007-03-28 東京エレクトロン株式会社 基板の塗布装置
US6592939B1 (en) * 2001-06-06 2003-07-15 Advanced Micro Devices, Inc. System for and method of using developer as a solvent to spread photoresist faster and reduce photoresist consumption
KR100857972B1 (ko) * 2001-06-07 2008-09-10 도쿄엘렉트론가부시키가이샤 도포막 형성방법 및 도포막 형성장치
JP3655576B2 (ja) 2001-07-26 2005-06-02 株式会社東芝 液膜形成方法及び半導体装置の製造方法
AU2002343330A1 (en) * 2001-08-31 2003-03-10 Semitool, Inc. Apparatus and methods for electrochemical processing of microelectronic workpieces
JP3944368B2 (ja) * 2001-09-05 2007-07-11 株式会社荏原製作所 基板処理装置及び基板処理方法
JP3658355B2 (ja) * 2001-10-03 2005-06-08 Ｈｏｙａ株式会社 塗布膜の乾燥方法、塗布膜の形成方法、及び塗布膜形成装置
US20030079679A1 (en) * 2001-10-30 2003-05-01 Toru Ikeda Spin coater
JP2003156858A (ja) * 2001-11-22 2003-05-30 Tokyo Electron Ltd 基板処理方法及び基板処理システム
JP3890229B2 (ja) * 2001-12-27 2007-03-07 株式会社コガネイ 薬液供給装置および薬液供給装置の脱気方法
JP3947398B2 (ja) * 2001-12-28 2007-07-18 株式会社コガネイ 薬液供給装置および薬液供給方法
US6992023B2 (en) * 2001-12-28 2006-01-31 Texas Instruments Incorporated Method and system for drying semiconductor wafers in a spin coating process
US6800569B2 (en) * 2002-01-30 2004-10-05 Kabushiki Kaisha Toshiba Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus
JP4570008B2 (ja) * 2002-04-16 2010-10-27 東京エレクトロン株式会社 液処理装置および液処理方法
US6645880B1 (en) * 2002-06-10 2003-11-11 Dainippon Screen Mfg. Co., Ltd. Treating solution applying method
US6736896B2 (en) * 2002-10-10 2004-05-18 Taiwan Semiconductor Manufacturing Co., Ltd Gas spray arm for spin coating apparatus
US6846360B2 (en) * 2003-01-13 2005-01-25 Aptos Corporation Apparatus and method for bubble-free application of a resin to a substrate
US7041172B2 (en) * 2003-02-20 2006-05-09 Asml Holding N.V. Methods and apparatus for dispensing semiconductor processing solutions with multi-syringe fluid delivery systems
JP3890025B2 (ja) * 2003-03-10 2007-03-07 東京エレクトロン株式会社 塗布処理装置及び塗布処理方法
JP2004335923A (ja) * 2003-05-12 2004-11-25 Sony Corp エッチング方法およびエッチング装置
US7370659B2 (en) * 2003-08-06 2008-05-13 Micron Technology, Inc. Photolithographic stepper and/or scanner machines including cleaning devices and methods of cleaning photolithographic stepper and/or scanner machines
DE602004007089T2 (de) * 2003-11-14 2008-02-21 Sharp K.K. Vorrichtung zur Herstellung von Dünnfilmen
JP4315787B2 (ja) * 2003-11-18 2009-08-19 大日本スクリーン製造株式会社 基板処理装置、並びに被充填体における液体充填度および気体混入度判定構造
US7326437B2 (en) * 2003-12-29 2008-02-05 Asml Holding N.V. Method and system for coating polymer solution on a substrate in a solvent saturated chamber
US7384878B2 (en) * 2004-05-20 2008-06-10 International Business Machines Corporation Method for applying a layer to a hydrophobic surface
US7556697B2 (en) * 2004-06-14 2009-07-07 Fsi International, Inc. System and method for carrying out liquid and subsequent drying treatments on one or more wafers
KR100634374B1 (ko) * 2004-06-23 2006-10-16 삼성전자주식회사 기판을 건조하는 장치 및 방법
JP4431461B2 (ja) * 2004-08-09 2010-03-17 オプトレックス株式会社 表示装置の製造方法
JP4464763B2 (ja) * 2004-08-20 2010-05-19 東京エレクトロン株式会社 現像装置及び現像方法
KR101057121B1 (ko) * 2004-09-03 2011-08-16 엘지전자 주식회사 플라즈마 디스플레이 패널의 전극 패드 구조
JP4216238B2 (ja) * 2004-09-24 2009-01-28 東京エレクトロン株式会社 塗布処理装置及び塗布処理方法
US7819079B2 (en) 2004-12-22 2010-10-26 Applied Materials, Inc. Cartesian cluster tool configuration for lithography type processes
US7798764B2 (en) 2005-12-22 2010-09-21 Applied Materials, Inc. Substrate processing sequence in a cartesian robot cluster tool
US7255747B2 (en) 2004-12-22 2007-08-14 Sokudo Co., Ltd. Coat/develop module with independent stations
US7699021B2 (en) 2004-12-22 2010-04-20 Sokudo Co., Ltd. Cluster tool substrate throughput optimization
US7651306B2 (en) 2004-12-22 2010-01-26 Applied Materials, Inc. Cartesian robot cluster tool architecture
TWI254358B (en) * 2005-01-21 2006-05-01 Promos Technologies Inc Method of coating photoresist and photoresist layer formed by the same
JP2006278966A (ja) * 2005-03-30 2006-10-12 Toshiba Corp 半導体製造装置
JP4606234B2 (ja) * 2005-04-15 2011-01-05 東京エレクトロン株式会社 液処理方法及び液処理装置
US7770535B2 (en) * 2005-06-10 2010-08-10 Semiconductor Energy Laboratory Co., Ltd. Chemical solution application apparatus and chemical solution application method
KR100685679B1 (ko) * 2005-06-24 2007-02-26 주식회사 하이닉스반도체 스핀 코팅 방법
US7456928B2 (en) * 2005-08-29 2008-11-25 Micron Technology, Inc. Systems and methods for controlling ambient pressure during processing of microfeature workpieces, including during immersion lithography
DE102005044796A1 (de) * 2005-09-19 2007-03-29 Hilger U. Kern Gmbh Verfahren zur Steuerung einer Dosiereinrichtung für flüssige oder pasteuse Medien
JP4493034B2 (ja) * 2005-11-21 2010-06-30 東京エレクトロン株式会社 塗布膜の成膜方法及びその装置
US8472004B2 (en) * 2006-01-18 2013-06-25 Micron Technology, Inc. Immersion photolithography scanner
JP4527670B2 (ja) * 2006-01-25 2010-08-18 東京エレクトロン株式会社 加熱処理装置、加熱処理方法、制御プログラムおよびコンピュータ読取可能な記憶媒体
WO2008030474A2 (en) * 2006-09-08 2008-03-13 Krogman Kevin C Automated layer by layer spray technology
JP4866196B2 (ja) * 2006-10-02 2012-02-01 Ｈｏｙａ株式会社 光学膜の形成方法及び形成装置
KR100818674B1 (ko) 2007-02-07 2008-04-02 주식회사 에스앤에스텍 블랭크 마스크의 레지스트 코팅방법 및 이를 이용하여제조된 블랭크 마스크 및 포토마스크
JP4341686B2 (ja) * 2007-02-23 2009-10-07 セイコーエプソン株式会社 成膜装置および成膜方法
JP5091722B2 (ja) * 2008-03-04 2012-12-05 東京エレクトロン株式会社 塗布処理方法、プログラム、コンピュータ記憶媒体及び塗布処理装置
US7718551B2 (en) * 2008-03-07 2010-05-18 United Microelectronics Corp. Method for forming photoresist layer
WO2009119226A1 (ja) * 2008-03-27 2009-10-01 セントラル硝子株式会社 吸水性物品の製法
US8235068B2 (en) * 2008-05-12 2012-08-07 Fsi International, Inc. Substrate processing systems and related methods
JP5029486B2 (ja) * 2008-05-13 2012-09-19 東京エレクトロン株式会社 塗布装置、塗布方法及び記憶媒体
US20100015322A1 (en) * 2008-07-18 2010-01-21 Cheng Uei Precision Industry Co., Ltd. Method And Apparatus For Coating A Film On A Substrate
KR101036592B1 (ko) * 2008-11-28 2011-05-24 세메스 주식회사 처리액 공급 유닛과, 이를 이용한 기판 처리 장치
CN101664731B (zh) * 2009-09-11 2014-05-07 晶能光电（江西）有限公司 实现半导体圆片连续涂胶的方法及其净化系统
WO2012075309A1 (en) * 2010-12-01 2012-06-07 Yale University Spin spray layer-by-layer assembly systems and methods
JP4812897B1 (ja) * 2010-12-22 2011-11-09 ミクロ技研株式会社 基板処理装置及び基板処理方法
JP5944132B2 (ja) 2011-10-05 2016-07-05 株式会社Ｓｃｒｅｅｎセミコンダクターソリューションズ 塗布方法および塗布装置
CN102698926B (zh) * 2012-05-03 2014-06-04 信华精机有限公司 一种uv镜套环自动涂油装置
DE102014113927B4 (de) 2014-09-25 2023-10-05 Suss Microtec Lithography Gmbh Verfahren zum Beschichten eines Substrats sowie Beschichtungsanlage
JP6212066B2 (ja) * 2015-03-03 2017-10-11 東京エレクトロン株式会社 塗布処理方法、コンピュータ記憶媒体及び塗布処理装置
JP6482919B2 (ja) 2015-03-23 2019-03-13 株式会社Ｓｃｒｅｅｎホールディングス ネガティブ現像処理方法およびネガティブ現像処理装置
US9482957B1 (en) * 2015-06-15 2016-11-01 I-Shan Ke Solvent for reducing resist consumption and method using solvent for reducing resist consumption
US10655019B2 (en) * 2015-06-30 2020-05-19 Taiwan Semiconductor Manufacturing Company, Ltd. Priming material for substrate coating
JP6612172B2 (ja) * 2016-04-25 2019-11-27 Ｔｏｗａ株式会社 樹脂成形装置、樹脂成形方法、樹脂成形品の製造方法及び製品の製造方法
CN105964488B (zh) * 2016-05-30 2019-12-03 中国科学院半导体研究所 带基片加热和气氛处理的匀胶机
CN106252263A (zh) * 2016-10-10 2016-12-21 上海华虹宏力半导体制造有限公司 光阻管路及光阻涂布设备
CN107552362A (zh) * 2017-08-28 2018-01-09 京东方科技集团股份有限公司 保护膜形成方法及设备
JP6873011B2 (ja) * 2017-08-30 2021-05-19 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
CN108196431A (zh) * 2018-01-02 2018-06-22 京东方科技集团股份有限公司 光刻胶涂覆方法及涂布机
US11592748B2 (en) 2018-11-30 2023-02-28 Taiwan Semiconductor Manufacturing Co., Ltd. Method and apparatus for multi-spray RRC process with dynamic control
KR102093279B1 (ko) * 2019-07-09 2020-03-25 (주)에스티글로벌 케미컬 용액의 파티클 모니터링 장치 및 방법
JP7232737B2 (ja) * 2019-08-07 2023-03-03 東京エレクトロン株式会社 基板処理装置
CN110620065A (zh) * 2019-08-26 2019-12-27 石狮市纳傲贸易有限公司 一种晶圆加工设备
JP7331568B2 (ja) * 2019-09-12 2023-08-23 東京エレクトロン株式会社 液処理装置及び液処理装置の液検出方法
CN111897049A (zh) * 2020-08-27 2020-11-06 四川天邑康和通信股份有限公司 一种光分路器芯片自动贴片生产工艺
KR20220108560A (ko) * 2021-01-27 2022-08-03 삼성전자주식회사 기판 처리 장치
KR102573825B1 (ko) * 2023-05-15 2023-09-04 주식회사 기술공작소바다 이비알 장치

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49114402A (de) * 1973-02-28 1974-10-31
JPS5085638A (de) * 1973-11-30 1975-07-10
DE2809286C3 (de) * 1978-03-01 1981-09-03 Mannesmann AG, 4000 Düsseldorf Vorrichtung zum Auftragen von flüssigen Korrosionsschutzmitteln auf metallische Oberfläche
JPS6053675B2 (ja) * 1978-09-20 1985-11-27 富士写真フイルム株式会社 スピンコ−テイング方法
FR2458363A1 (fr) * 1979-06-13 1981-01-02 Matrasur Manipulateur d'outil
JPS5743422A (en) * 1980-08-29 1982-03-11 Toshiba Corp Resist coating apparatus
JPS5882521A (ja) * 1981-07-10 1983-05-18 Hitachi Ltd スピンナ
JPS5911895A (ja) * 1982-07-13 1984-01-21 株式会社東芝 衣類乾燥機
US4564280A (en) * 1982-10-28 1986-01-14 Fujitsu Limited Method and apparatus for developing resist film including a movable nozzle arm
US4451507A (en) * 1982-10-29 1984-05-29 Rca Corporation Automatic liquid dispensing apparatus for spinning surface of uniform thickness
JPS59141220A (ja) * 1983-02-02 1984-08-13 Nec Corp 塗布方法
JPS6191655A (ja) * 1984-10-12 1986-05-09 Matsushita Electronics Corp ホトレジストの塗布方法
JPS61150332A (ja) * 1984-12-25 1986-07-09 Toshiba Corp 半導体レジスト塗布方法
JPS61280618A (ja) * 1985-05-17 1986-12-11 Asahi Glass Co Ltd 回転塗布方法および回転塗布装置
JPS6286719A (ja) * 1985-10-11 1987-04-21 Nec Corp レジスト塗布装置
JPS62126640A (ja) * 1985-11-27 1987-06-08 Mitsubishi Electric Corp 揮発性コ−テイング剤塗布装置の発塵防止装置
JPS63301520A (ja) * 1987-05-30 1988-12-08 Nec Corp フォトレジスト塗布装置
JPH01150332A (ja) * 1987-12-07 1989-06-13 Nec Corp プリント回路基板
US5002008A (en) * 1988-05-27 1991-03-26 Tokyo Electron Limited Coating apparatus and method for applying a liquid to a semiconductor wafer, including selecting a nozzle in a stand-by state
SG63582A1 (en) * 1989-06-14 1999-03-30 Hewlett Packard Co Method for improving deposit of photoresist on wafers
US5066616A (en) * 1989-06-14 1991-11-19 Hewlett-Packard Company Method for improving photoresist on wafers by applying fluid layer of liquid solvent
US5366759A (en) * 1990-11-14 1994-11-22 Nokia (Deutschland) Gmbh Method of lacquering the luminophore layer of a color picture tube
KR100230753B1 (ko) * 1991-01-23 1999-11-15 도꾜 일렉트론 큐슈리미티드 액도포 시스템
NL9201825A (nl) * 1992-10-21 1994-05-16 Od & Me Bv Inrichting voor het vervaardigen van een matrijs voor een schijfvormige registratiedrager.
US5366757A (en) * 1992-10-30 1994-11-22 International Business Machines Corporation In situ resist control during spray and spin in vapor

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US6063190A (en) 2000-05-16
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KR940022743A (ko) 1994-10-21
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US5658615A (en) 1997-08-19
KR100284556B1 (ko) 2001-04-02
CN1102505A (zh) 1995-05-10
EP0618504A3 (de) 1996-04-10
DE69428391D1 (de) 2001-10-31
SG93216A1 (en) 2002-12-17

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