DE69318847D1 - Gegen hohe überdrücke geschützter drucksensor mit kleinem messbereich - Google Patents

Gegen hohe überdrücke geschützter drucksensor mit kleinem messbereich

Info

Publication number
DE69318847D1
DE69318847D1 DE69318847T DE69318847T DE69318847D1 DE 69318847 D1 DE69318847 D1 DE 69318847D1 DE 69318847 T DE69318847 T DE 69318847T DE 69318847 T DE69318847 T DE 69318847T DE 69318847 D1 DE69318847 D1 DE 69318847D1
Authority
DE
Germany
Prior art keywords
measuring range
small measuring
high pressure
pressure sensor
sensor protected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69318847T
Other languages
English (en)
Other versions
DE69318847T2 (de
Inventor
Mark Lutz
William Krueger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rosemount Inc
Original Assignee
Rosemount Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rosemount Inc filed Critical Rosemount Inc
Application granted granted Critical
Publication of DE69318847D1 publication Critical patent/DE69318847D1/de
Publication of DE69318847T2 publication Critical patent/DE69318847T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0618—Overload protection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
DE69318847T 1992-09-01 1993-08-30 Gegen hohe überdrücke geschützter drucksensor mit kleinem messbereich Expired - Lifetime DE69318847T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/938,954 US5333504A (en) 1992-09-01 1992-09-01 High overpressure low range pressure sensor
PCT/US1993/008142 WO1994005986A1 (en) 1992-09-01 1993-08-30 High overpressure low range pressure sensor

Publications (2)

Publication Number Publication Date
DE69318847D1 true DE69318847D1 (de) 1998-07-02
DE69318847T2 DE69318847T2 (de) 1999-01-21

Family

ID=25472280

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69318847T Expired - Lifetime DE69318847T2 (de) 1992-09-01 1993-08-30 Gegen hohe überdrücke geschützter drucksensor mit kleinem messbereich

Country Status (18)

Country Link
US (1) US5333504A (de)
EP (1) EP0670995B1 (de)
JP (1) JP3327553B2 (de)
KR (1) KR950703140A (de)
CN (1) CN1051155C (de)
AU (1) AU680430B2 (de)
BR (1) BR9306946A (de)
CA (1) CA2141688A1 (de)
DE (1) DE69318847T2 (de)
FI (1) FI950912A0 (de)
HU (1) HUT70345A (de)
IL (1) IL106838A (de)
MX (1) MX9305342A (de)
NO (1) NO950777D0 (de)
PL (1) PL173699B1 (de)
RU (1) RU2137099C1 (de)
SG (1) SG43764A1 (de)
WO (1) WO1994005986A1 (de)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19521275A1 (de) * 1995-06-10 1996-12-12 Leybold Ag Gasdurchlaß mit selektiv wirkender Durchtrittsfläche sowie Verfahren zur Herstellung der Durchtrittsfläche
DE19521832A1 (de) * 1995-06-16 1996-12-19 Bosch Gmbh Robert Druckmeßvorrichtung
US5824910A (en) * 1997-04-16 1998-10-20 The United States Of America As Represented By The Secretary Of The Navy Miniature hydrostat fabricated using multiple microelectromechanical processes
US20020003274A1 (en) * 1998-08-27 2002-01-10 Janusz Bryzek Piezoresistive sensor with epi-pocket isolation
US6006607A (en) * 1998-08-31 1999-12-28 Maxim Integrated Products, Inc. Piezoresistive pressure sensor with sculpted diaphragm
US6351996B1 (en) 1998-11-12 2002-03-05 Maxim Integrated Products, Inc. Hermetic packaging for semiconductor pressure sensors
US6346742B1 (en) 1998-11-12 2002-02-12 Maxim Integrated Products, Inc. Chip-scale packaged pressure sensor
US6229190B1 (en) 1998-12-18 2001-05-08 Maxim Integrated Products, Inc. Compensated semiconductor pressure sensor
US6425290B2 (en) 2000-02-11 2002-07-30 Rosemount Inc. Oil-less differential pressure sensor
US6642594B2 (en) * 2001-12-06 2003-11-04 Kulite Semiconductor Products, Inc. Single chip multiple range pressure transducer device
US6868720B2 (en) * 2002-10-16 2005-03-22 Alcon, Inc. Testing of pressure sensor in surgical cassette
US6955073B2 (en) * 2002-10-16 2005-10-18 Alcon, Inc. Pressure sensing in surgical console
US6941813B2 (en) * 2003-06-30 2005-09-13 Alcon, Inc. Noninvasive pressure sensing assembly
JP5217163B2 (ja) * 2004-05-12 2013-06-19 セイコーエプソン株式会社 圧力センサ
US7997143B2 (en) 2009-04-09 2011-08-16 Kulite Semiconductor Products, Inc. Internally switched multiple range transducer
WO2012030595A2 (en) 2010-08-30 2012-03-08 Alcon Research, Ltd. Optical sensing system including electronically switched optical magnification
FR2982023B1 (fr) * 2011-10-26 2015-03-06 Auxitrol Sa Structure micromecanique a membrane deformable et a protection contre de fortes deformations
US8806964B2 (en) 2012-03-23 2014-08-19 Honeywell International Inc. Force sensor
US9003899B2 (en) 2012-03-23 2015-04-14 Honeywell International Inc. Force sensor
US9003897B2 (en) 2012-05-10 2015-04-14 Honeywell International Inc. Temperature compensated force sensor
DE102012109587A1 (de) * 2012-10-09 2014-04-10 Endress + Hauser Gmbh + Co. Kg Differenzdrucksensor und Verfahren zu seiner Herstellung
US9410861B2 (en) * 2014-03-25 2016-08-09 Honeywell International Inc. Pressure sensor with overpressure protection
CN103994854A (zh) * 2014-04-22 2014-08-20 江苏森博传感技术有限公司 一种基于微机电系统技术的硅电容真空传感器
US10060813B2 (en) 2015-09-29 2018-08-28 Rosemount Inc. High over-pressure capable silicon die pressure sensor
US9719872B2 (en) * 2015-09-29 2017-08-01 Rosemount Inc. High over-pressure capable silicon die pressure sensor with extended pressure signal output
US9963340B2 (en) * 2015-12-03 2018-05-08 Honeywell International Inc. Pressure sensor die over pressure protection for high over pressure to operating span ratios
US10197462B2 (en) 2016-05-25 2019-02-05 Honeywell International Inc. Differential pressure sensor full overpressure protection device
US10203258B2 (en) 2016-09-26 2019-02-12 Rosemount Inc. Pressure sensor diaphragm with overpressure protection
US11371899B2 (en) 2018-05-17 2022-06-28 Rosemount Inc. Measuring element with an extended permeation resistant layer
WO2020102778A1 (en) * 2018-11-15 2020-05-22 Intuitive Surgical Operations, Inc. Strain sensor with contoured deflection surface
EP4261513A1 (de) * 2022-04-14 2023-10-18 Infineon Technologies Dresden GmbH & Co . KG Druckfühler

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1226806B (de) * 1960-11-29 1966-10-13 Siemens Ag Kraftmessdose
US3341794A (en) * 1965-07-26 1967-09-12 Statham Instrument Inc Transducers with substantially linear response characteristics
US4093933A (en) * 1976-05-14 1978-06-06 Becton, Dickinson Electronics Company Sculptured pressure diaphragm
US4236137A (en) * 1979-03-19 1980-11-25 Kulite Semiconductor Products, Inc. Semiconductor transducers employing flexure frames
JPS58151536A (ja) * 1982-03-05 1983-09-08 Hitachi Ltd 差圧検出器
US5062302A (en) * 1988-04-29 1991-11-05 Schlumberger Industries, Inc. Laminated semiconductor sensor with overpressure protection
US4905575A (en) * 1988-10-20 1990-03-06 Rosemount Inc. Solid state differential pressure sensor with overpressure stop and free edge construction
US4879627A (en) * 1988-12-30 1989-11-07 United Technologies Corporation Differential capacitive pressure sensor with over-pressure protection
US4930043A (en) * 1989-02-28 1990-05-29 United Technologies Closed-loop capacitive accelerometer with spring constraint
US4930042A (en) * 1989-02-28 1990-05-29 United Technologies Capacitive accelerometer with separable damping and sensitivity
EP0400165B1 (de) * 1989-05-30 1993-09-01 Siemens Aktiengesellschaft Drucksensor und Verfahren zu seiner Herstellung
US4949581A (en) * 1989-06-15 1990-08-21 Rosemount Inc. Extended measurement capability transmitter having shared overpressure protection means
DE4111119A1 (de) * 1991-04-03 1992-10-08 Univ Chemnitz Tech Stapelbare mikromechanische kapazitive druckmesszelle

Also Published As

Publication number Publication date
JP3327553B2 (ja) 2002-09-24
IL106838A (en) 1997-08-14
BR9306946A (pt) 1999-01-12
MX9305342A (es) 1994-06-30
RU95106595A (ru) 1996-11-20
RU2137099C1 (ru) 1999-09-10
US5333504A (en) 1994-08-02
FI950912A (fi) 1995-02-28
DE69318847T2 (de) 1999-01-21
SG43764A1 (en) 1997-11-14
EP0670995A1 (de) 1995-09-13
EP0670995A4 (de) 1996-05-01
PL173699B1 (pl) 1998-04-30
IL106838A0 (en) 1994-08-26
AU4841293A (en) 1994-03-29
NO950777L (no) 1995-02-28
AU680430B2 (en) 1997-07-31
HU9500617D0 (en) 1995-04-28
FI950912A0 (fi) 1995-02-28
JPH08500903A (ja) 1996-01-30
NO950777D0 (no) 1995-02-28
HUT70345A (en) 1995-09-28
PL307591A1 (en) 1995-05-29
KR950703140A (ko) 1995-08-23
WO1994005986A1 (en) 1994-03-17
CN1051155C (zh) 2000-04-05
CN1092164A (zh) 1994-09-14
CA2141688A1 (en) 1994-03-17
EP0670995B1 (de) 1998-05-27

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Legal Events

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8364 No opposition during term of opposition