DE69229985D1 - Prüfkopfmanipulator - Google Patents
PrüfkopfmanipulatorInfo
- Publication number
- DE69229985D1 DE69229985D1 DE69229985T DE69229985T DE69229985D1 DE 69229985 D1 DE69229985 D1 DE 69229985D1 DE 69229985 T DE69229985 T DE 69229985T DE 69229985 T DE69229985 T DE 69229985T DE 69229985 D1 DE69229985 D1 DE 69229985D1
- Authority
- DE
- Germany
- Prior art keywords
- probe manipulator
- manipulator
- probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/48—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs
- B23Q1/4828—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs a single rotating pair followed parallelly by a single sliding pair
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/1005—Programme-controlled manipulators characterised by positioning means for manipulator elements comprising adjusting means
- B25J9/101—Programme-controlled manipulators characterised by positioning means for manipulator elements comprising adjusting means using limit-switches, -stops
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/734,192 US5241870A (en) | 1991-07-22 | 1991-07-22 | Test head manipulator |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69229985D1 true DE69229985D1 (de) | 1999-10-21 |
DE69229985T2 DE69229985T2 (de) | 2000-04-20 |
Family
ID=24950681
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69233241T Expired - Fee Related DE69233241T2 (de) | 1991-07-22 | 1992-07-15 | Prüfkopfmanipulator |
DE69229985T Expired - Fee Related DE69229985T2 (de) | 1991-07-22 | 1992-07-15 | Prüfkopfmanipulator |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69233241T Expired - Fee Related DE69233241T2 (de) | 1991-07-22 | 1992-07-15 | Prüfkopfmanipulator |
Country Status (7)
Country | Link |
---|---|
US (2) | US5241870A (de) |
EP (2) | EP0916955B1 (de) |
JP (1) | JP3391473B2 (de) |
KR (1) | KR100240476B1 (de) |
DE (2) | DE69233241T2 (de) |
MY (2) | MY114024A (de) |
SG (2) | SG70050A1 (de) |
Families Citing this family (57)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5600258A (en) * | 1993-09-15 | 1997-02-04 | Intest Corporation | Method and apparatus for automated docking of a test head to a device handler |
US5440943A (en) * | 1993-09-15 | 1995-08-15 | Intest Corporation | Electronic test head manipulator |
WO1996006714A1 (de) * | 1994-08-30 | 1996-03-07 | Hydrostress Ag | Ständer für eine steinbearbeitungsmaschine, insbesondere eine kernbohrmaschine |
US5982182A (en) * | 1994-09-01 | 1999-11-09 | Chiu; Michael A. | Interface apparatus for automatic test equipment with positioning modules incorporating kinematic surfaces |
KR960019641A (ko) * | 1994-11-24 | 1996-06-17 | 오우라 히로시 | 테스트·헤드 접속 장치를 장비한 반도체 시험 장치 |
EP0811167B1 (de) * | 1995-02-23 | 2001-09-05 | Aesop Inc. | Manipulator für einen testkopf einer automatischen testanlage |
US5912555A (en) * | 1995-04-10 | 1999-06-15 | Tokyo Electron Limited | Probe apparatus |
US5608334A (en) * | 1995-04-20 | 1997-03-04 | Intest Corporation | Device testing system with cable pivot and method of installation |
US5606262A (en) * | 1995-06-07 | 1997-02-25 | Teradyne, Inc. | Manipulator for automatic test equipment test head |
US5656942A (en) * | 1995-07-21 | 1997-08-12 | Electroglas, Inc. | Prober and tester with contact interface for integrated circuits-containing wafer held docked in a vertical plane |
US5756908A (en) * | 1996-07-15 | 1998-05-26 | Framatome Technologies, Inc. | Probe positioner |
DE19718398B4 (de) * | 1997-04-30 | 2006-02-02 | Heigl, Helmuth, Dr.-Ing. | Handhabungsvorrichtung |
US5821440A (en) * | 1997-04-30 | 1998-10-13 | Credence Systems Corporation | Cable tray assembly for testing device |
US6023173A (en) * | 1997-04-30 | 2000-02-08 | Credence Systems Corporation | Manipulator with expanded range of motion |
US6006616A (en) * | 1997-07-11 | 1999-12-28 | Credence Systems Corporation | Semiconductor tester with power assist for vertical test head movement |
US5949002A (en) * | 1997-11-12 | 1999-09-07 | Teradyne, Inc. | Manipulator for automatic test equipment with active compliance |
US6000290A (en) * | 1997-11-12 | 1999-12-14 | Rosemount Analytical Inc. | Quick-connect industrial process sensor |
US6271658B1 (en) | 1998-10-19 | 2001-08-07 | St Assembly Test Services Pte, Ltd. | Universal Docking System |
US6888343B1 (en) * | 1999-01-13 | 2005-05-03 | Intest Ip Corporation | Test head manipulator |
US6310486B1 (en) | 1999-10-01 | 2001-10-30 | Teradyne, Inc. | Integrated test cell |
MY144519A (en) | 2000-03-01 | 2011-09-30 | Intest Corp | Vertical counter balanced test head manipulator |
US6396257B1 (en) * | 2000-04-26 | 2002-05-28 | Credence Systems Corporation | Test head manipulator for semiconductor tester with manual assist for vertical test head movement |
US6408500B1 (en) * | 2000-09-15 | 2002-06-25 | James Orsillo | Method of retrofitting a probe station |
WO2002024400A2 (en) * | 2000-09-20 | 2002-03-28 | Intest Ip Corp. | Electronic test head positioner |
CN1280635C (zh) * | 2001-07-16 | 2006-10-18 | 因泰斯特Ip公司 | 测试头对接系统及方法 |
US6766996B1 (en) | 2001-07-16 | 2004-07-27 | Reid-Ashman Manufacturing, Inc. | Manipulator |
KR100583949B1 (ko) * | 2002-01-07 | 2006-05-26 | 삼성전자주식회사 | 웨이퍼 프로빙 장치 및 테스트 헤드 도킹 제어방법 |
US6646431B1 (en) | 2002-01-22 | 2003-11-11 | Elite E/M, Inc. | Test head manipulator |
US7276894B2 (en) * | 2002-04-15 | 2007-10-02 | Intest Corporation | Dynamic cradle assembly positioner system for positioning an electronic device test head |
US6717432B2 (en) * | 2002-04-16 | 2004-04-06 | Teradyne, Inc. | Single axis manipulator with controlled compliance |
US6867578B1 (en) * | 2002-09-03 | 2005-03-15 | Credence Systems Corporation | Semiconductor integrated circuit tester with pivoting interface unit |
ITTO20020783A1 (it) * | 2002-09-06 | 2004-03-07 | Spea Spa | Dispositivo di posizionamento di una testa elettronica |
DE20214629U1 (de) * | 2002-09-20 | 2002-11-21 | Esmo Ag | Verschiebbare Befestigungsplatte |
US20040197180A1 (en) * | 2003-02-04 | 2004-10-07 | Sausen Earl William | Fall protected test-head manipulator |
EP1947466B1 (de) | 2003-08-06 | 2012-07-04 | inTEST Corporation | Testkopfpositionierungssystem |
JP2005091041A (ja) | 2003-09-12 | 2005-04-07 | Advantest Corp | 半導体試験装置 |
DE102004008487B4 (de) * | 2004-02-20 | 2007-01-04 | Heigl, Helmuth, Dr. | Handhabungsvorrichtung zum Positionieren eines Testkopfs |
US7042239B1 (en) | 2004-06-25 | 2006-05-09 | Credence Systems Corporation | Arrangement for manual disengagement of a device interface board from a personal tester |
US7301326B1 (en) * | 2004-07-13 | 2007-11-27 | Intest Corporation | Modular interface |
US7312604B2 (en) * | 2005-07-29 | 2007-12-25 | Nextest Systems Corporation | Portable manipulator for stackable semiconductor test system |
US8607935B2 (en) * | 2005-12-20 | 2013-12-17 | Intuitive Surgical Operations, Inc. | Guide systems for laminated spring assemblies |
TWI439709B (zh) | 2006-12-29 | 2014-06-01 | Intest Corp | 用於使負載沿平移軸線平移之操縱器與負載定位系統 |
WO2008085463A1 (en) * | 2006-12-29 | 2008-07-17 | In Test Corporation | Test head positioning system and method |
US7758295B2 (en) * | 2007-05-09 | 2010-07-20 | Datatronics Technology, Inc. | Handling device and method for the same |
US7802764B2 (en) * | 2007-05-14 | 2010-09-28 | Leinen Chris M | Adjustable wheeled IV stand |
US8212578B1 (en) | 2008-03-17 | 2012-07-03 | Intest Corporation | Test head positioner system |
DE102008044756A1 (de) * | 2008-08-28 | 2010-03-04 | Esmo Ag | Manipulator |
KR100939224B1 (ko) | 2009-04-07 | 2010-02-01 | 주식회사 일성에프에이 | 전자부품의 고온테스트용 지그 |
CN101870102B (zh) * | 2009-04-25 | 2013-12-11 | 鸿富锦精密工业(深圳)有限公司 | 码垛机器人 |
US9682484B2 (en) * | 2009-07-24 | 2017-06-20 | GM Global Technology Operations LLC | Counterbalance mechanism for end-effector configuration and method of use |
US8981807B2 (en) | 2010-07-27 | 2015-03-17 | Intest Corporation | Positioner system and method of positioning |
WO2013009817A1 (en) | 2011-07-12 | 2013-01-17 | Intest Corporation | Method and apparatus for docking a test head with a peripheral |
TWI553763B (zh) * | 2014-01-23 | 2016-10-11 | 先進科技新加坡有限公司 | 拾取電子器件進行測試的測試分選機及其方位改變裝置 |
CN104034922B (zh) * | 2014-06-10 | 2017-02-01 | 同济大学 | 一种用于轮毂电机及轮边电机的台架试验夹持装置 |
US10978262B2 (en) * | 2017-10-20 | 2021-04-13 | Otis Elevator Company | Reach tool for use in low voltage applications |
CN108453788B (zh) * | 2018-04-20 | 2020-07-10 | 华中科技大学 | 一种可换向的机械臂重力矩平衡装置 |
US10933525B2 (en) * | 2018-07-04 | 2021-03-02 | Fanuc Corporation | Horizontal articulated robot |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1386025A (en) * | 1920-09-01 | 1921-08-02 | Reinhart W Pittman | Tripod for cameras |
US1638086A (en) * | 1925-02-07 | 1927-08-09 | Ray L Carter | Adjustable support for routing machines |
US3040434A (en) * | 1958-01-31 | 1962-06-26 | Roman S Yarosz | Rotatable work table |
US3128887A (en) * | 1960-02-25 | 1964-04-14 | Mechanical manipulators for the displacement of | |
US3262593A (en) * | 1963-07-10 | 1966-07-26 | Gen Mills Inc | Wall-mounted support structure |
US3269681A (en) * | 1965-01-27 | 1966-08-30 | Wakeem R Azim | Adjustable support apparatus |
US3727873A (en) * | 1971-07-19 | 1973-04-17 | J Hill | Adjustable crane seat |
US3884365A (en) * | 1974-03-19 | 1975-05-20 | Thomson Ind Inc | Workpiece manipulator |
US4062455A (en) * | 1976-11-22 | 1977-12-13 | Flatau Carl R | Remote manipulator |
US4132318A (en) * | 1976-12-30 | 1979-01-02 | International Business Machines Corporation | Asymmetric six-degree-of-freedom force-transducer system for a computer-controlled manipulator system |
DE2861285D1 (en) * | 1977-10-20 | 1982-01-14 | Ici Plc | An industrial manipulator for placing articles in close proximity to adjacent articles and a method of close packing articles therewith |
JPS571116Y2 (de) * | 1978-01-31 | 1982-01-08 | ||
JPS5548598A (en) * | 1978-09-29 | 1980-04-07 | Fujitsu Fanuc Ltd | Load reducing device of industrial robot |
DE2852821B1 (de) * | 1978-12-07 | 1980-04-30 | Walter Reis Maschinenbau, 8753 Obernburg | Manipulator |
FR2461556A1 (fr) * | 1979-07-18 | 1981-02-06 | Bretagne Atel Chantiers | Bras de manipulation a distance |
DE7921541U1 (de) * | 1979-07-27 | 1979-10-31 | Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar | Instrumentenbasis fuer optische geraete |
US4345847A (en) * | 1979-12-19 | 1982-08-24 | Technicare Corporation | Automatic brake sequencing for overhead support arm assemblies |
GB2074337B (en) * | 1980-04-15 | 1983-11-16 | Univ Technology | Adjustable support for an optical or other instrument |
US4705447A (en) * | 1983-08-11 | 1987-11-10 | Intest Corporation | Electronic test head positioner for test systems |
US4588346A (en) * | 1982-08-25 | 1986-05-13 | Intest Corporation | Positioner for maintaining an object in a substantially weightless condition |
US4527942A (en) * | 1982-08-25 | 1985-07-09 | Intest Corporation | Electronic test head positioner for test systems |
US4866998A (en) * | 1985-09-20 | 1989-09-19 | Temple University Of The Commonwealth System Of Higher Education | Medical examination table with probe holder |
US4744552A (en) * | 1986-05-20 | 1988-05-17 | Glendo Corporation | Craftsman's jewelry support tool |
EP0308348B1 (de) * | 1987-09-17 | 1993-02-10 | Schlumberger Industries | Prüfkopfmanipulator für das automatische Prüfen |
DE3813477C1 (en) * | 1988-04-21 | 1989-11-23 | Ekkehard 8201 Raubling De Ueberreiter | Apparatus for holding an object |
JP2881865B2 (ja) * | 1989-11-24 | 1999-04-12 | 日本電気株式会社 | フライング・プローブ・ヘッド |
-
1991
- 1991-07-22 US US07/734,192 patent/US5241870A/en not_active Expired - Lifetime
-
1992
- 1992-07-15 EP EP99101970A patent/EP0916955B1/de not_active Expired - Lifetime
- 1992-07-15 SG SG1997004327A patent/SG70050A1/en unknown
- 1992-07-15 SG SG1996000935A patent/SG45172A1/en unknown
- 1992-07-15 DE DE69233241T patent/DE69233241T2/de not_active Expired - Fee Related
- 1992-07-15 EP EP92306504A patent/EP0526996B1/de not_active Expired - Lifetime
- 1992-07-15 DE DE69229985T patent/DE69229985T2/de not_active Expired - Fee Related
- 1992-07-21 MY MYPI96003453A patent/MY114024A/en unknown
- 1992-07-21 MY MYPI92001290A patent/MY125577A/en unknown
- 1992-07-22 KR KR1019920013068A patent/KR100240476B1/ko not_active IP Right Cessation
- 1992-07-22 JP JP19514292A patent/JP3391473B2/ja not_active Expired - Fee Related
-
1994
- 1994-08-29 US US08/297,326 patent/US5450766A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69233241D1 (de) | 2003-12-04 |
KR100240476B1 (ko) | 2000-01-15 |
DE69229985T2 (de) | 2000-04-20 |
JPH06226681A (ja) | 1994-08-16 |
MY125577A (en) | 2006-08-30 |
US5241870A (en) | 1993-09-07 |
EP0526996A2 (de) | 1993-02-10 |
SG45172A1 (en) | 1998-01-16 |
EP0916955A2 (de) | 1999-05-19 |
EP0916955A3 (de) | 1999-09-15 |
MY114024A (en) | 2002-07-31 |
EP0526996A3 (en) | 1993-07-07 |
US5450766A (en) | 1995-09-19 |
DE69233241T2 (de) | 2004-05-27 |
SG70050A1 (en) | 2000-01-25 |
EP0916955B1 (de) | 2003-10-29 |
JP3391473B2 (ja) | 2003-03-31 |
EP0526996B1 (de) | 1999-09-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |