DE69226603T2 - Mit einer Antireflexionszusammensetzung überzogenes Substrat und Verfahren zur Behandlung eines solchen Substrats. - Google Patents
Mit einer Antireflexionszusammensetzung überzogenes Substrat und Verfahren zur Behandlung eines solchen Substrats.Info
- Publication number
- DE69226603T2 DE69226603T2 DE69226603T DE69226603T DE69226603T2 DE 69226603 T2 DE69226603 T2 DE 69226603T2 DE 69226603 T DE69226603 T DE 69226603T DE 69226603 T DE69226603 T DE 69226603T DE 69226603 T2 DE69226603 T2 DE 69226603T2
- Authority
- DE
- Germany
- Prior art keywords
- substrate
- treating
- reflective composition
- coated
- substrate coated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/38—Treatment before imagewise removal, e.g. prebaking
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/792,482 US6165697A (en) | 1991-11-15 | 1991-11-15 | Antihalation compositions |
Publications (3)
Publication Number | Publication Date |
---|---|
DE69226603D1 DE69226603D1 (de) | 1998-09-17 |
DE69226603T2 true DE69226603T2 (de) | 1999-03-18 |
DE69226603T3 DE69226603T3 (de) | 2001-09-06 |
Family
ID=25157030
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69226603T Expired - Lifetime DE69226603T3 (de) | 1991-11-15 | 1992-10-22 | Mit einer Antireflexionszusammensetzung überzogenes Substrat und Verfahren zur Behandlung eines solchen Substrats. |
DE69232467T Expired - Lifetime DE69232467T3 (de) | 1991-11-15 | 1992-10-22 | Antireflexionszusammensetzungen |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69232467T Expired - Lifetime DE69232467T3 (de) | 1991-11-15 | 1992-10-22 | Antireflexionszusammensetzungen |
Country Status (4)
Country | Link |
---|---|
US (5) | US6165697A (de) |
EP (2) | EP0542008B2 (de) |
JP (1) | JP3050459B2 (de) |
DE (2) | DE69226603T3 (de) |
Families Citing this family (132)
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US6528235B2 (en) * | 1991-11-15 | 2003-03-04 | Shipley Company, L.L.C. | Antihalation compositions |
US6773864B1 (en) | 1991-11-15 | 2004-08-10 | Shipley Company, L.L.C. | Antihalation compositions |
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US6165697A (en) * | 1991-11-15 | 2000-12-26 | Shipley Company, L.L.C. | Antihalation compositions |
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JP4053631B2 (ja) * | 1997-10-08 | 2008-02-27 | Azエレクトロニックマテリアルズ株式会社 | 反射防止膜又は光吸収膜用組成物及びこれに用いる重合体 |
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1991
- 1991-11-15 US US07/792,482 patent/US6165697A/en not_active Expired - Lifetime
-
1992
- 1992-10-22 EP EP92118070A patent/EP0542008B2/de not_active Expired - Lifetime
- 1992-10-22 EP EP96116990A patent/EP0763781B2/de not_active Expired - Lifetime
- 1992-10-22 DE DE69226603T patent/DE69226603T3/de not_active Expired - Lifetime
- 1992-10-22 DE DE69232467T patent/DE69232467T3/de not_active Expired - Lifetime
- 1992-11-13 JP JP4328816A patent/JP3050459B2/ja not_active Expired - Lifetime
-
1996
- 1996-04-30 US US08/640,144 patent/US6451503B1/en not_active Expired - Fee Related
-
1997
- 1997-11-26 US US08/978,827 patent/US5851730A/en not_active Expired - Lifetime
- 1997-11-26 US US08/978,688 patent/US5851738A/en not_active Expired - Lifetime
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2007
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US7776508B2 (en) | 2010-08-17 |
US5851738A (en) | 1998-12-22 |
EP0542008B1 (de) | 1998-08-12 |
EP0542008A1 (de) | 1993-05-19 |
EP0542008B2 (de) | 2001-02-28 |
EP0763781A3 (de) | 1997-07-16 |
US6165697A (en) | 2000-12-26 |
EP0763781A2 (de) | 1997-03-19 |
DE69232467T2 (de) | 2002-10-17 |
JP3050459B2 (ja) | 2000-06-12 |
JPH06118631A (ja) | 1994-04-28 |
DE69232467T3 (de) | 2008-09-18 |
US5851730A (en) | 1998-12-22 |
US20080248426A1 (en) | 2008-10-09 |
EP0763781B2 (de) | 2008-03-12 |
US6451503B1 (en) | 2002-09-17 |
DE69232467D1 (de) | 2002-04-11 |
EP0763781B1 (de) | 2002-03-06 |
DE69226603T3 (de) | 2001-09-06 |
DE69226603D1 (de) | 1998-09-17 |
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