DE69224272D1 - Modulator oder Schalter mit vertikal gekoppelten, antiresonanten reflektierenden optischen Wellenleitern ("ARROW") auf Silizium - Google Patents
Modulator oder Schalter mit vertikal gekoppelten, antiresonanten reflektierenden optischen Wellenleitern ("ARROW") auf SiliziumInfo
- Publication number
- DE69224272D1 DE69224272D1 DE69224272T DE69224272T DE69224272D1 DE 69224272 D1 DE69224272 D1 DE 69224272D1 DE 69224272 T DE69224272 T DE 69224272T DE 69224272 T DE69224272 T DE 69224272T DE 69224272 D1 DE69224272 D1 DE 69224272D1
- Authority
- DE
- Germany
- Prior art keywords
- modulator
- arrow
- silicon
- switch
- optical waveguides
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/011—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour in optical waveguides, not otherwise provided for in this subclass
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
- G02F1/025—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
- G02F1/0151—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction modulating the refractive index
- G02F1/0152—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction modulating the refractive index using free carrier effects, e.g. plasma effect
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/06—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 integrated waveguide
- G02F2201/063—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 integrated waveguide ridge; rib; strip loaded
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/30—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 grating
- G02F2201/302—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 grating grating coupler
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2202/00—Materials and properties
- G02F2202/10—Materials and properties semiconductor
- G02F2202/101—Ga×As and alloy
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2202/00—Materials and properties
- G02F2202/10—Materials and properties semiconductor
- G02F2202/105—Materials and properties semiconductor single crystal Si
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/797,520 US5276748A (en) | 1991-11-22 | 1991-11-22 | Vertically-coupled arrow modulators or switches on silicon |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69224272D1 true DE69224272D1 (de) | 1998-03-05 |
DE69224272T2 DE69224272T2 (de) | 1998-07-23 |
Family
ID=25171065
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69224272T Expired - Fee Related DE69224272T2 (de) | 1991-11-22 | 1992-11-19 | Modulator oder Schalter mit vertikal gekoppelten, antiresonanten reflektierenden optischen Wellenleitern ("ARROW") auf Silizium |
Country Status (5)
Country | Link |
---|---|
US (3) | US5276748A (de) |
EP (1) | EP0543369B1 (de) |
JP (1) | JP3396498B2 (de) |
CA (1) | CA2080672C (de) |
DE (1) | DE69224272T2 (de) |
Families Citing this family (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5276748A (en) * | 1991-11-22 | 1994-01-04 | Texas Instruments Incorporated | Vertically-coupled arrow modulators or switches on silicon |
US5568574A (en) * | 1995-06-12 | 1996-10-22 | University Of Southern California | Modulator-based photonic chip-to-chip interconnections for dense three-dimensional multichip module integration |
US5577138A (en) * | 1995-08-17 | 1996-11-19 | Lucent Technologies Inc. | Integrated-circuit optical network unit |
US5577139A (en) * | 1995-08-17 | 1996-11-19 | Lucent Technologies Inc. | Integrated-circuit optical network unit |
CA2165119C (en) * | 1995-12-13 | 2006-10-03 | Vincent Delisle | Antiresonant waveguide apparatus for periodically selecting a series of at least one optical wavelength from an incoming light signal |
US5903683A (en) * | 1997-09-10 | 1999-05-11 | The United States Of America As Represented By The National Security Agency | Device for modulating an optical signal using a single wave guide |
US5987196A (en) * | 1997-11-06 | 1999-11-16 | Micron Technology, Inc. | Semiconductor structure having an optical signal path in a substrate and method for forming the same |
US6075908A (en) * | 1997-12-19 | 2000-06-13 | Intel Corporation | Method and apparatus for optically modulating light through the back side of an integrated circuit die |
US6330376B1 (en) | 1997-12-19 | 2001-12-11 | Intel Corporation | Higher order rejection method and apparatus for optical modulator |
US6393169B1 (en) | 1997-12-19 | 2002-05-21 | Intel Corporation | Method and apparatus for providing optical interconnection |
US6374003B1 (en) | 1997-12-19 | 2002-04-16 | Intel Corporation | Method and apparatus for optically modulating light through the back side of an integrated circuit die using a plurality of optical beams |
US6049639A (en) * | 1997-12-19 | 2000-04-11 | Intel Corporation | Method and apparatus providing optical input/output through the back side of an integrated circuit die |
US6052498A (en) * | 1997-12-19 | 2000-04-18 | Intel Corporation | Method and apparatus providing an optical input/output bus through the back side of an integrated circuit die |
US6587605B2 (en) | 1999-01-06 | 2003-07-01 | Intel Corporation | Method and apparatus for providing optical interconnection |
US6215577B1 (en) | 1999-10-25 | 2001-04-10 | Intel Corporation | Method and apparatus for optically modulating an optical beam with a multi-pass wave-guided optical modulator |
US6501092B1 (en) | 1999-10-25 | 2002-12-31 | Intel Corporation | Integrated semiconductor superlattice optical modulator |
US6268953B1 (en) | 1999-12-02 | 2001-07-31 | Intel Corporation | Method and apparatus for optically modulating an optical beam with long interaction length optical modulator |
US6351326B1 (en) | 1999-12-14 | 2002-02-26 | Intel Corporation | Method and apparatus for optically modulating light utilizing a resonant cavity structure |
GB2373343A (en) * | 2001-03-16 | 2002-09-18 | Bookham Technology Plc | Rib waveguide for connection to an optical component |
US6912330B2 (en) * | 2001-05-17 | 2005-06-28 | Sioptical Inc. | Integrated optical/electronic circuits and associated methods of simultaneous generation thereof |
US6891685B2 (en) * | 2001-05-17 | 2005-05-10 | Sioptical, Inc. | Anisotropic etching of optical components |
US6646747B2 (en) | 2001-05-17 | 2003-11-11 | Sioptical, Inc. | Interferometer apparatus and associated method |
US6608945B2 (en) | 2001-05-17 | 2003-08-19 | Optronx, Inc. | Self-aligning modulator method and associated apparatus |
US6654511B2 (en) | 2001-05-17 | 2003-11-25 | Sioptical, Inc. | Optical modulator apparatus and associated method |
US6947615B2 (en) | 2001-05-17 | 2005-09-20 | Sioptical, Inc. | Optical lens apparatus and associated method |
CA2725883C (en) * | 2001-05-17 | 2013-11-19 | Sioptical, Inc. | Integrated optical waveguide device comprising a polysilicon layer-based passive optical waveguide device in combination with an active optical waveguide device, and method for making same |
US6603889B2 (en) | 2001-05-17 | 2003-08-05 | Optronx, Inc. | Optical deflector apparatus and associated method |
US6526187B1 (en) | 2001-05-17 | 2003-02-25 | Optronx, Inc. | Polarization control apparatus and associated method |
US6690844B2 (en) | 2001-05-17 | 2004-02-10 | Optronx, Inc. | Optical fiber apparatus and associated method |
US6748125B2 (en) | 2001-05-17 | 2004-06-08 | Sioptical, Inc. | Electronic semiconductor control of light in optical waveguide |
US6493502B1 (en) | 2001-05-17 | 2002-12-10 | Optronx, Inc. | Dynamic gain equalizer method and associated apparatus |
US6625348B2 (en) | 2001-05-17 | 2003-09-23 | Optron X, Inc. | Programmable delay generator apparatus and associated method |
US6963118B2 (en) * | 2001-05-17 | 2005-11-08 | Sioptical, Inc. | Hybrid active and electronic circuit with evanescent coupling |
US6993224B1 (en) | 2001-11-15 | 2006-01-31 | UNIVERSITé LAVAL | Segmented waveguide array gratings (SWAG)-based archival optical memory |
US6999662B2 (en) * | 2001-11-15 | 2006-02-14 | UNIVERSITé LAVAL | Segmented waveguide array grating filters |
US6580864B1 (en) * | 2002-01-14 | 2003-06-17 | Applied Wdm, Inc. | Birefringence free optical waveguide structures |
KR100418262B1 (ko) * | 2002-05-14 | 2004-02-14 | 한국전자통신연구원 | 다중 모드 간섭형 결합기, 이를 이용한 다층 평면형광도파로 및 그 제조 방법 |
US6993236B1 (en) * | 2002-06-24 | 2006-01-31 | Luxtera, Inc. | Polysilicon and silicon dioxide light scatterers for silicon waveguides on five layer substrates |
US7010208B1 (en) * | 2002-06-24 | 2006-03-07 | Luxtera, Inc. | CMOS process silicon waveguides |
CA2557509C (en) * | 2004-02-26 | 2014-09-30 | Sioptical, Inc. | Active manipulation of light in a silicon-on-insulator (soi) structure |
US8031991B2 (en) * | 2008-05-28 | 2011-10-04 | Lightwire Inc. | Low index, large mode field diameter optical coupler |
SE1051151A1 (sv) * | 2010-11-03 | 2012-05-04 | Brokk Ab | Brythammare vid en med manöverbar arm utrustad arbetsmaskin |
JP2015064413A (ja) * | 2013-09-24 | 2015-04-09 | 富士通株式会社 | 光半導体素子とその製造方法 |
US9726913B2 (en) * | 2014-01-30 | 2017-08-08 | Awenyx Inc. | Semiconductor interferometric device |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2169134B (en) * | 1984-11-16 | 1988-11-16 | Canon Kk | Multibeam emitting device |
US4715672A (en) * | 1986-01-06 | 1987-12-29 | American Telephone And Telegraph Company | Optical waveguide utilizing an antiresonant layered structure |
US4745607A (en) * | 1986-10-08 | 1988-05-17 | American Telephone And Telegraph Company, At&T Bell Laboratories | Interlayer directional coupling in antiresonant reflecting optical waveguides |
EP0309744A3 (de) * | 1987-09-29 | 1989-06-28 | Siemens Aktiengesellschaft | Anordnung mit einem flächig sich erstreckenden Dünnfilmwellenleiter |
US4904045A (en) * | 1988-03-25 | 1990-02-27 | American Telephone And Telegraph Company | Grating coupler with monolithically integrated quantum well index modulator |
FR2647965A1 (fr) * | 1989-05-30 | 1990-12-07 | Thomson Csf | Modulateur electro-optique du type transistor a effet de champ |
DE3931588A1 (de) * | 1989-09-22 | 1991-04-04 | Standard Elektrik Lorenz Ag | Interferometrischer halbleiterlaser |
JPH03228032A (ja) * | 1990-02-01 | 1991-10-09 | Mitsubishi Electric Corp | 光方向性結合器 |
DE4011860A1 (de) * | 1990-04-09 | 1991-10-10 | Siemens Ag | Halbleiterelement mit einer silizium-schicht |
DE69125888T2 (de) * | 1990-07-09 | 1997-11-20 | Canon Kk | Verfahren zur Lichtmodulation und optischer Modulator |
US5165105A (en) * | 1991-08-02 | 1992-11-17 | Minnesota Minning And Manufacturing Company | Separate confinement electroabsorption modulator utilizing the Franz-Keldysh effect |
US5276748A (en) * | 1991-11-22 | 1994-01-04 | Texas Instruments Incorporated | Vertically-coupled arrow modulators or switches on silicon |
US5253314A (en) * | 1992-01-31 | 1993-10-12 | At&T Bell Laboratories | Tunable optical waveguide coupler |
-
1991
- 1991-11-22 US US07/797,520 patent/US5276748A/en not_active Expired - Lifetime
-
1992
- 1992-10-15 CA CA002080672A patent/CA2080672C/en not_active Expired - Fee Related
- 1992-11-19 EP EP92119714A patent/EP0543369B1/de not_active Expired - Lifetime
- 1992-11-19 DE DE69224272T patent/DE69224272T2/de not_active Expired - Fee Related
- 1992-11-20 JP JP31232192A patent/JP3396498B2/ja not_active Expired - Fee Related
-
1993
- 1993-07-30 US US08/100,837 patent/US5367582A/en not_active Expired - Lifetime
-
1994
- 1994-11-07 US US08/335,233 patent/US5502779A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5502779A (en) | 1996-03-26 |
EP0543369B1 (de) | 1998-01-28 |
CA2080672C (en) | 2002-09-24 |
CA2080672A1 (en) | 1993-05-23 |
JPH06202052A (ja) | 1994-07-22 |
JP3396498B2 (ja) | 2003-04-14 |
US5276748A (en) | 1994-01-04 |
DE69224272T2 (de) | 1998-07-23 |
US5367582A (en) | 1994-11-22 |
EP0543369A1 (de) | 1993-05-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69224272D1 (de) | Modulator oder Schalter mit vertikal gekoppelten, antiresonanten reflektierenden optischen Wellenleitern ("ARROW") auf Silizium | |
DE69023342D1 (de) | Optische vorrichtungen. | |
DE69023489T2 (de) | Optische Koppelvorrichtung. | |
DE68903825T2 (de) | Optisches fluorphosphatglas. | |
KR910006740A (ko) | 평판형 플라스틱 광 도파로 | |
DE69215558D1 (de) | Optischer Wellenleiter-Schalter | |
NL193153B (nl) | Optische koppelinrichting. | |
DE3888293D1 (de) | Optische schalter. | |
DE3854059D1 (de) | Optische Wellenleitervorrichtung. | |
DE68919880D1 (de) | Magnetisch aktivierende optische Datenstrecke. | |
DE69111943D1 (de) | Optische Kodiereinrichtung. | |
DE69316464D1 (de) | Optische Kodiereinrichtung | |
DE59203172D1 (de) | Glasfaserverstärkte Styrol-Copolymerisate. | |
DE68922472D1 (de) | Optisches Gerät. | |
DE69223916T2 (de) | Optische Kodiereinrichtung | |
DE69031968T2 (de) | Optischer Wellenleiterschalter | |
DE69014837T2 (de) | Optische Verbindungsvorrichtung. | |
DE3887125D1 (de) | Optische kodiervorrichtung. | |
DE69021891D1 (de) | Faseroptischer schalter. | |
DE68921301T2 (de) | Optische Abtastvorrichtungen. | |
DE69012243D1 (de) | Optische kodiervorrichtung. | |
DE3787065T2 (de) | Optische Schaltvorrichtungen. | |
DK0498320T3 (da) | Optisk bølgelederovergang | |
DE68925460D1 (de) | Optische Abtasteinrichtungen | |
DE59205992D1 (de) | Optischer Wellenleiter |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |