DE69222745D1 - Piezoelektrischer kraft-, beschleunigings- und magnetfeld-sensor - Google Patents
Piezoelektrischer kraft-, beschleunigings- und magnetfeld-sensorInfo
- Publication number
- DE69222745D1 DE69222745D1 DE69222745T DE69222745T DE69222745D1 DE 69222745 D1 DE69222745 D1 DE 69222745D1 DE 69222745 T DE69222745 T DE 69222745T DE 69222745 T DE69222745 T DE 69222745T DE 69222745 D1 DE69222745 D1 DE 69222745D1
- Authority
- DE
- Germany
- Prior art keywords
- acceleration
- magnetic field
- field sensor
- piezoelectric force
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000001133 acceleration Effects 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/167—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using piezoelectric means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
- G01P15/0922—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the bending or flexing mode type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP03203876A JP3141954B2 (ja) | 1991-07-17 | 1991-07-17 | 圧電素子を用いた力・加速度・磁気のセンサ |
PCT/JP1992/000882 WO1993002342A1 (en) | 1991-07-17 | 1992-07-09 | Sensor for force, acceleration and magnetism using piezoelectric devices |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69222745D1 true DE69222745D1 (de) | 1997-11-20 |
DE69222745T2 DE69222745T2 (de) | 1998-02-12 |
Family
ID=16481181
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69222745T Expired - Fee Related DE69222745T2 (de) | 1991-07-17 | 1992-07-09 | Piezoelektrischer kraft-, beschleunigings- und magnetfeld-sensor |
Country Status (5)
Country | Link |
---|---|
US (1) | US5365799A (de) |
EP (1) | EP0549807B1 (de) |
JP (1) | JP3141954B2 (de) |
DE (1) | DE69222745T2 (de) |
WO (1) | WO1993002342A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6622575B1 (en) | 1999-07-07 | 2003-09-23 | Agency Of Industrial Science And Technology | Fingertip-mounted six-axis force sensor |
Families Citing this family (89)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01136313U (de) * | 1988-02-26 | 1989-09-19 | ||
US6864677B1 (en) * | 1993-12-15 | 2005-03-08 | Kazuhiro Okada | Method of testing a sensor |
US5295386A (en) | 1989-12-28 | 1994-03-22 | Kazuhiro Okada | Apparatus for detecting acceleration and method for testing this apparatus |
US5421213A (en) * | 1990-10-12 | 1995-06-06 | Okada; Kazuhiro | Multi-dimensional force detector |
US6314823B1 (en) | 1991-09-20 | 2001-11-13 | Kazuhiro Okada | Force detector and acceleration detector and method of manufacturing the same |
JP3027457B2 (ja) * | 1991-10-25 | 2000-04-04 | 和廣 岡田 | 多次元方向に関する力・加速度・磁気の検出装置 |
JPH0581717U (ja) * | 1992-04-14 | 1993-11-05 | 富士電気化学株式会社 | 加速度センサ |
US6282956B1 (en) * | 1994-12-29 | 2001-09-04 | Kazuhiro Okada | Multi-axial angular velocity sensor |
US5646346A (en) * | 1994-11-10 | 1997-07-08 | Okada; Kazuhiro | Multi-axial angular velocity sensor |
JP3256346B2 (ja) * | 1993-07-29 | 2002-02-12 | 和廣 岡田 | 圧電素子を用いた力・加速度・磁気のセンサ |
US5636807A (en) * | 1994-08-01 | 1997-06-10 | H. Koch & Sons Co., Inc. | Acceleration sensor having inertia weight responsive to accelerations in every direction |
JP3549590B2 (ja) * | 1994-09-28 | 2004-08-04 | 和廣 岡田 | 加速度・角速度センサ |
JP3585980B2 (ja) * | 1995-02-21 | 2004-11-10 | 株式会社ワコー | 角速度センサ |
US6003371A (en) * | 1995-02-21 | 1999-12-21 | Wacoh Corporation | Angular velocity sensor |
JPH0949856A (ja) * | 1995-05-31 | 1997-02-18 | Wako:Kk | 加速度センサ |
JP3079961B2 (ja) * | 1995-07-11 | 2000-08-21 | 株式会社村田製作所 | 衝撃センサ |
JPH0972929A (ja) * | 1995-09-07 | 1997-03-18 | Whitaker Corp:The | 多軸加速度センサビーム |
JPH09119943A (ja) * | 1995-10-24 | 1997-05-06 | Wako:Kk | 加速度センサ |
JPH09215808A (ja) * | 1995-12-07 | 1997-08-19 | Hokuriku Electric Ind Co Ltd | スイング型運動用具の練習装置及びスイング型運動用具 |
WO1998001722A1 (fr) * | 1996-07-10 | 1998-01-15 | Wacoh Corporation | Detecteur de vitesse angulaire |
US6367326B1 (en) | 1996-07-10 | 2002-04-09 | Wacoh Corporation | Angular velocity sensor |
EP0828140A1 (de) * | 1996-09-04 | 1998-03-11 | AB Elektronik GmbH | Füllstandsensor |
US5777239A (en) * | 1996-10-29 | 1998-07-07 | Fuglewicz; Daniel P. | Piezoelectric pressure/force transducer |
JP3311633B2 (ja) * | 1997-04-04 | 2002-08-05 | 日本碍子株式会社 | センサユニット |
JP3200026B2 (ja) * | 1997-04-04 | 2001-08-20 | 日本碍子株式会社 | 周設センサ |
US6247371B1 (en) * | 1997-04-04 | 2001-06-19 | Ngk Insulators, Ltd. | Three-axis sensor |
JP2001525061A (ja) * | 1997-04-21 | 2001-12-04 | ファン ベルゲン ミヒャエル | 力センサー |
JP4176849B2 (ja) * | 1997-05-08 | 2008-11-05 | 株式会社ワコー | センサの製造方法 |
TW425478B (en) * | 1997-09-26 | 2001-03-11 | Hokuriku Elect Ind | Acceleration sensor and 3-axis acceleration sensor |
JP3328574B2 (ja) | 1998-03-25 | 2002-09-24 | 日本碍子株式会社 | 加速度センサ素子、加速度センサ及びこれらの製造方法 |
JP3328575B2 (ja) | 1998-03-25 | 2002-09-24 | 日本碍子株式会社 | 加速度センサ素子、加速度センサ及びこれらの製造方法 |
TW418318B (en) | 1998-07-27 | 2001-01-11 | Hokuriku Electric Co Ltd | Acceleration detecting apparatus |
JP2000193544A (ja) | 1998-12-25 | 2000-07-14 | Ngk Insulators Ltd | 力センサ |
US6360612B1 (en) * | 1999-01-29 | 2002-03-26 | Constantin M. Trantzas | Pressure sensor apparatus |
JP2000338129A (ja) | 1999-03-19 | 2000-12-08 | Ngk Insulators Ltd | 加速度センサ素子の感度較正方法 |
JP2000346865A (ja) | 1999-03-26 | 2000-12-15 | Ngk Insulators Ltd | 加速度センサ素子の感度調整方法 |
JP2000275127A (ja) | 1999-03-26 | 2000-10-06 | Ngk Insulators Ltd | 力センサ回路 |
US7789742B1 (en) * | 1999-05-12 | 2010-09-07 | Wilbert Q. Murdock | Smart golf club multiplayer system for the internet |
US6378384B1 (en) * | 1999-08-04 | 2002-04-30 | C-Cubed Limited | Force sensing transducer and apparatus |
JP4295883B2 (ja) | 1999-12-13 | 2009-07-15 | 株式会社ワコー | 力検出装置 |
KR20020095314A (ko) * | 2001-06-14 | 2002-12-26 | (주)한국아이엔디 | 발판형 3차원센서 |
DE60229028D1 (de) | 2001-07-10 | 2008-11-06 | Michelin Soc Tech | Eine Messeinrichtung beinhaltender Reifen |
US6809529B2 (en) * | 2001-08-10 | 2004-10-26 | Wacoh Corporation | Force detector |
DE10143489C2 (de) * | 2001-09-05 | 2003-07-17 | Deutsch Zentr Luft & Raumfahrt | Anordnung zum Erfassen von Relativbewegungen zweier Objekte |
US6853315B2 (en) * | 2002-01-23 | 2005-02-08 | Triad Sensors, Inc. | Piezoelectric rate sensor system and method |
JP4216525B2 (ja) * | 2002-05-13 | 2009-01-28 | 株式会社ワコー | 加速度センサおよびその製造方法 |
AUPS264302A0 (en) * | 2002-05-29 | 2002-06-20 | Neopraxis Pty Ltd | Implantable bladder sensor |
JP4125931B2 (ja) * | 2002-08-26 | 2008-07-30 | 株式会社ワコー | 回転操作量の入力装置およびこれを利用した操作装置 |
EP1537609A2 (de) * | 2002-09-04 | 2005-06-08 | Triad Sensors Inc. | Interface-elektronik für piezoelektrische bauelemente |
WO2004031711A1 (ja) * | 2002-10-01 | 2004-04-15 | National Institute Of Advanced Industrial Science And Technology | 圧電センサおよびそれを備えた入力装置 |
US20040159166A1 (en) * | 2003-02-13 | 2004-08-19 | Schiller Peter J. | Solid-state piezoelectric motion transducer |
JP4907050B2 (ja) * | 2003-03-31 | 2012-03-28 | 株式会社ワコー | 力検出装置 |
JP4271475B2 (ja) * | 2003-03-31 | 2009-06-03 | 株式会社ワコー | 力検出装置 |
JP4387691B2 (ja) * | 2003-04-28 | 2009-12-16 | 株式会社ワコー | 力検出装置 |
WO2005116580A1 (en) * | 2003-05-08 | 2005-12-08 | Triad Sensors, Inc. | Force balanced piezoelectric rate sensor |
US7470288B2 (en) * | 2003-07-11 | 2008-12-30 | Depuy Products, Inc. | Telemetric tibial tray |
US7259574B2 (en) * | 2005-04-15 | 2007-08-21 | Vaidya Avinash Shrikrishna | Sensor device for measuring frequency and amplitude of varying force signals |
FR2885409B1 (fr) * | 2005-05-04 | 2007-08-31 | Commissariat Energie Atomique | Dispositif de mesure de force a tige rigide |
US20070041273A1 (en) * | 2005-06-21 | 2007-02-22 | Shertukde Hemchandra M | Acoustic sensor |
AT504851B1 (de) * | 2006-11-07 | 2009-03-15 | Arc Seibersdorf Res Gmbh | Schlagpolster |
JP2008190931A (ja) * | 2007-02-02 | 2008-08-21 | Wacoh Corp | 加速度と角速度との双方を検出するセンサ |
JP4946763B2 (ja) * | 2007-10-01 | 2012-06-06 | ブラザー工業株式会社 | 屈曲検出装置 |
JP2010071793A (ja) | 2008-09-18 | 2010-04-02 | Toshiba Corp | 多軸加速度センサ及び角速度センサ |
FR2942316B1 (fr) * | 2009-02-13 | 2011-07-22 | Commissariat Energie Atomique | Capteur de force de contact |
US8334159B1 (en) * | 2009-03-30 | 2012-12-18 | Advanced Numicro Systems, Inc. | MEMS pressure sensor using capacitive technique |
JP5439068B2 (ja) * | 2009-07-08 | 2014-03-12 | 株式会社ワコー | 力検出装置 |
KR101119283B1 (ko) * | 2009-12-22 | 2012-06-05 | 삼성전기주식회사 | 관성 센서 및 그 제조 방법 |
DE102010002274A1 (de) * | 2010-02-24 | 2011-08-25 | Robert Bosch GmbH, 70469 | Vorrichtung zur Messung von Torsionen, Biegungen und dergleichen sowie entsprechendes Herstellungsverfahren |
JP5258816B2 (ja) | 2010-02-27 | 2013-08-07 | 三菱電機株式会社 | 空気調和機 |
US11117033B2 (en) | 2010-04-26 | 2021-09-14 | Wilbert Quinc Murdock | Smart system for display of dynamic movement parameters in sports and training |
US8650965B2 (en) | 2010-08-31 | 2014-02-18 | Kabushiki Kaisha Yaskawa Denki | Robot, robot system, robot control device, and state determining method |
JP2012051042A (ja) * | 2010-08-31 | 2012-03-15 | Yaskawa Electric Corp | ロボットシステム及びロボット制御装置 |
CN102175892B (zh) * | 2011-01-26 | 2013-05-01 | 边义祥 | 含芯压电棒多维加速度传感器及加速度测量方法 |
WO2013027736A1 (ja) * | 2011-08-24 | 2013-02-28 | 日本電気株式会社 | 圧電振動センサ |
CN103454596B (zh) * | 2012-06-04 | 2017-04-12 | 国民技术股份有限公司 | 一种交变磁场感应装置 |
ITTO20120890A1 (it) * | 2012-10-11 | 2014-04-12 | Fond Istituto Italiano Di Tecnologia | Unita' elettronica di misura per un dispositivo polimorfico per la misura di forze, e dispositivo polimorfico includente la medesima |
JP6106011B2 (ja) * | 2013-04-05 | 2017-03-29 | 日本写真印刷株式会社 | 圧力検出装置 |
CN103335754B (zh) * | 2013-06-19 | 2015-04-22 | 合肥工业大学 | 全柔性三维力触觉传感器 |
JP5529328B1 (ja) | 2013-09-04 | 2014-06-25 | 株式会社トライフォース・マネジメント | 発電素子 |
US10416030B2 (en) | 2015-01-26 | 2019-09-17 | Wacoh-Tech Inc. | Force sensor |
FR3033087B1 (fr) * | 2015-02-23 | 2018-03-23 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Dispositif piezoelectrique |
CN106255870B (zh) | 2015-04-07 | 2018-04-27 | 三角力量管理株式会社 | 力觉传感器及用于其的结构体 |
JP5996078B1 (ja) | 2015-10-19 | 2016-09-21 | 株式会社トライフォース・マネジメント | 発電素子 |
EP3384295B1 (de) * | 2015-12-04 | 2019-06-19 | Kistler Holding AG | Beschleunigungs-messgeraet und verfahren zur herstellung eines solchen beschleunigungs-messgeraetes |
CN106289619A (zh) * | 2016-09-13 | 2017-01-04 | 中国科学院长春光学精密机械与物理研究所 | 一种高精度高刚度六维力测量平台 |
JP6843726B2 (ja) * | 2017-10-17 | 2021-03-17 | キヤノン株式会社 | 力覚センサ及びロボット |
US11611835B2 (en) * | 2020-06-09 | 2023-03-21 | Infineon Technologies Ag | Combined corrugated piezoelectric microphone and corrugated piezoelectric vibration sensor |
US11693021B2 (en) * | 2020-06-09 | 2023-07-04 | Infineon Technologies Ag | Combined corrugated piezoelectric microphone and corrugated piezoelectric vibration sensor |
US11691871B2 (en) | 2021-06-18 | 2023-07-04 | Infineon Technologies Ag | Microelectromechanical system (MEMS) vibration sensor having a segmented backplate |
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US3124770A (en) * | 1964-03-10 | Ciavatta | ||
US2386279A (en) * | 1942-07-21 | 1945-10-09 | Raymond W Tibbetts | Piezoelectric device |
US2848892A (en) * | 1954-10-21 | 1958-08-26 | Hoffman Donald Bernard | Elevator load transducer |
US3149488A (en) * | 1962-08-13 | 1964-09-22 | Gulton Ind Inc | Strain gauge measuring apparatus |
US3252016A (en) * | 1962-09-11 | 1966-05-17 | Gulton Ind Inc | Electro-mechanical transducer |
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CH476990A (de) * | 1968-07-30 | 1969-08-15 | Kistler Instrumente Ag | Kraftaufnehmer mit mindestens einem zwischen zwei Kraftübertragungslagern angeordneten Piezoelement |
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JPS584967B2 (ja) * | 1977-05-30 | 1983-01-28 | 横河電機株式会社 | 流速流量測定装置 |
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US4905523A (en) * | 1987-04-24 | 1990-03-06 | Wacoh Corporation | Force detector and moment detector using resistance element |
EP0625701A1 (de) * | 1987-04-24 | 1994-11-23 | Enplas Laboratories, Inc. | Kraftwandler mit piezoresistiven Elementen |
EP0333872B1 (de) * | 1987-09-18 | 1995-08-23 | Wacoh Corporation | Greifer für Roboter |
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US4896543A (en) * | 1988-11-15 | 1990-01-30 | Sri International, Inc. | Three-axis force measurement stylus |
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JP3091766B2 (ja) * | 1990-02-14 | 2000-09-25 | エンデブコ・コーポレーション | 表面取付け型圧電セラミツク式加速度計及びその製造方法 |
-
1991
- 1991-07-17 JP JP03203876A patent/JP3141954B2/ja not_active Expired - Lifetime
-
1992
- 1992-07-09 EP EP92914919A patent/EP0549807B1/de not_active Expired - Lifetime
- 1992-07-09 US US07/984,435 patent/US5365799A/en not_active Expired - Lifetime
- 1992-07-09 DE DE69222745T patent/DE69222745T2/de not_active Expired - Fee Related
- 1992-07-09 WO PCT/JP1992/000882 patent/WO1993002342A1/ja active IP Right Grant
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6622575B1 (en) | 1999-07-07 | 2003-09-23 | Agency Of Industrial Science And Technology | Fingertip-mounted six-axis force sensor |
Also Published As
Publication number | Publication date |
---|---|
JP3141954B2 (ja) | 2001-03-07 |
JPH0526744A (ja) | 1993-02-02 |
DE69222745T2 (de) | 1998-02-12 |
EP0549807B1 (de) | 1997-10-15 |
US5365799A (en) | 1994-11-22 |
WO1993002342A1 (en) | 1993-02-04 |
EP0549807A1 (de) | 1993-07-07 |
EP0549807A4 (en) | 1994-06-15 |
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