DE69218150D1 - Spektrometer mit räumlichen Lichtmodulator - Google Patents

Spektrometer mit räumlichen Lichtmodulator

Info

Publication number
DE69218150D1
DE69218150D1 DE69218150T DE69218150T DE69218150D1 DE 69218150 D1 DE69218150 D1 DE 69218150D1 DE 69218150 T DE69218150 T DE 69218150T DE 69218150 T DE69218150 T DE 69218150T DE 69218150 D1 DE69218150 D1 DE 69218150D1
Authority
DE
Germany
Prior art keywords
spectrometer
light modulator
spatial light
spatial
modulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69218150T
Other languages
English (en)
Other versions
DE69218150T2 (de
Inventor
Ronald E Stafford
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Application granted granted Critical
Publication of DE69218150D1 publication Critical patent/DE69218150D1/de
Publication of DE69218150T2 publication Critical patent/DE69218150T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J2003/2866—Markers; Calibrating of scan
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/067—Electro-optic, magneto-optic, acousto-optic elements
    • G01N2201/0675—SLM
DE69218150T 1991-12-20 1992-12-18 Spektrometer mit räumlichen Lichtmodulator Expired - Fee Related DE69218150T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US81250891A 1991-12-20 1991-12-20

Publications (2)

Publication Number Publication Date
DE69218150D1 true DE69218150D1 (de) 1997-04-17
DE69218150T2 DE69218150T2 (de) 1997-06-19

Family

ID=25209793

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69218150T Expired - Fee Related DE69218150T2 (de) 1991-12-20 1992-12-18 Spektrometer mit räumlichen Lichtmodulator

Country Status (7)

Country Link
US (1) US5504575A (de)
EP (1) EP0548830B1 (de)
JP (1) JPH06207853A (de)
KR (1) KR100275422B1 (de)
CA (1) CA2084923A1 (de)
DE (1) DE69218150T2 (de)
TW (1) TW236008B (de)

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TW236008B (de) 1994-12-11
DE69218150T2 (de) 1997-06-19
JPH06207853A (ja) 1994-07-26
EP0548830A1 (de) 1993-06-30
US5504575A (en) 1996-04-02
KR930013777A (ko) 1993-07-22
KR100275422B1 (ko) 2000-12-15
CA2084923A1 (en) 1993-06-21
EP0548830B1 (de) 1997-03-12

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