DE69206872D1 - Magnetische Antriebsvorrichtung - Google Patents

Magnetische Antriebsvorrichtung

Info

Publication number
DE69206872D1
DE69206872D1 DE69206872T DE69206872T DE69206872D1 DE 69206872 D1 DE69206872 D1 DE 69206872D1 DE 69206872 T DE69206872 T DE 69206872T DE 69206872 T DE69206872 T DE 69206872T DE 69206872 D1 DE69206872 D1 DE 69206872D1
Authority
DE
Germany
Prior art keywords
drive device
magnetic drive
magnetic
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69206872T
Other languages
English (en)
Other versions
DE69206872T2 (de
Inventor
Taisaku Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koyo Seiko Co Ltd
Original Assignee
Koyo Seiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koyo Seiko Co Ltd filed Critical Koyo Seiko Co Ltd
Application granted granted Critical
Publication of DE69206872D1 publication Critical patent/DE69206872D1/de
Publication of DE69206872T2 publication Critical patent/DE69206872T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B25J18/02—Arms extensible
    • B25J18/04—Arms extensible rotatable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K49/00—Dynamo-electric clutches; Dynamo-electric brakes
    • H02K49/10—Dynamo-electric clutches; Dynamo-electric brakes of the permanent-magnet type
    • H02K49/104—Magnetic couplings consisting of only two coaxial rotary elements, i.e. the driving element and the driven element
    • H02K49/106—Magnetic couplings consisting of only two coaxial rotary elements, i.e. the driving element and the driven element with a radial air gap
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08—Structural association with bearings
    • H02K7/09—Structural association with bearings with magnetic bearings
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/12—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas
    • H02K5/128—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas using air-gap sleeves or air-gap discs
DE69206872T 1991-05-08 1992-05-06 Magnetische Antriebsvorrichtung Expired - Fee Related DE69206872T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10281591 1991-05-08

Publications (2)

Publication Number Publication Date
DE69206872D1 true DE69206872D1 (de) 1996-02-01
DE69206872T2 DE69206872T2 (de) 1996-07-25

Family

ID=14337530

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69206872T Expired - Fee Related DE69206872T2 (de) 1991-05-08 1992-05-06 Magnetische Antriebsvorrichtung

Country Status (3)

Country Link
US (1) US5270600A (de)
EP (1) EP0512516B1 (de)
DE (1) DE69206872T2 (de)

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US5376862A (en) * 1993-01-28 1994-12-27 Applied Materials, Inc. Dual coaxial magnetic couplers for vacuum chamber robot assembly
EP0696242B2 (de) * 1993-04-16 2004-10-13 Brooks Automation, Inc. Handhabungseinrichtung mit gelenkarm
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FR2715011B1 (fr) * 1994-01-13 1996-03-29 Schlumberger Ind Sa Système d'entraînement en rotation de deux organes mécaniques par accouplement magnétique et compteur de fluide comportant un tel système.
DE4405701A1 (de) * 1994-02-23 1995-08-24 Philips Patentverwaltung Magnetisches Getriebe mit mehreren magnetisch zusammenwirkenden, relativ zueinander beweglichen Teilen
WO1996019034A1 (en) * 1994-12-12 1996-06-20 Jorge De Armas Electromagnetic-coupled/levitated apparatus and method for rotating equipment
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US6231297B1 (en) 1995-10-27 2001-05-15 Brooks Automation, Inc. Substrate transport apparatus with angled arms
US6481956B1 (en) 1995-10-27 2002-11-19 Brooks Automation Inc. Method of transferring substrates with two different substrate holding end effectors
US5647724A (en) * 1995-10-27 1997-07-15 Brooks Automation Inc. Substrate transport apparatus with dual substrate holders
US6299404B1 (en) * 1995-10-27 2001-10-09 Brooks Automation Inc. Substrate transport apparatus with double substrate holders
JP3740770B2 (ja) * 1995-12-28 2006-02-01 日本精工株式会社 密閉型アクチュエ−タ
US6102164A (en) * 1996-02-28 2000-08-15 Applied Materials, Inc. Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers
US20040005211A1 (en) * 1996-02-28 2004-01-08 Lowrance Robert B. Multiple independent robot assembly and apparatus and control system for processing and transferring semiconductor wafers
US6062798A (en) * 1996-06-13 2000-05-16 Brooks Automation, Inc. Multi-level substrate processing apparatus
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EP0899855B1 (de) * 1997-08-25 2006-03-08 Levitronix LLC Magnetgelagerte Rotationsanordnung
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US6547510B1 (en) 1998-05-04 2003-04-15 Brooks Automation Inc. Substrate transport apparatus with coaxial drive shafts and dual independent scara arms
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CN1942288B (zh) * 2005-02-12 2010-12-22 应用材料公司 一种多轴真空电机组件
JP2006262637A (ja) * 2005-03-17 2006-09-28 Toshiba Corp 静電アクチュエータ及びそれを用いた撮像装置
US8573919B2 (en) * 2005-07-11 2013-11-05 Brooks Automation, Inc. Substrate transport apparatus
US7571780B2 (en) 2006-03-24 2009-08-11 Hall David R Jack element for a drill bit
US8360174B2 (en) 2006-03-23 2013-01-29 Schlumberger Technology Corporation Lead the bit rotary steerable tool
US8297375B2 (en) 2005-11-21 2012-10-30 Schlumberger Technology Corporation Downhole turbine
US8267196B2 (en) 2005-11-21 2012-09-18 Schlumberger Technology Corporation Flow guide actuation
US8522897B2 (en) 2005-11-21 2013-09-03 Schlumberger Technology Corporation Lead the bit rotary steerable tool
EP1801420A3 (de) 2005-12-23 2009-10-21 H. Wernert & Co. oHG Kreiselpumpe mit permanentmagnetischer berührungsfreier Radialdrehkupplung
DE202005020288U1 (de) * 2005-12-23 2007-05-03 H. Wernert & Co. Ohg Permanentmagnetische berührungsfreie Radialdrehkupplung
DE102006003117A1 (de) * 2006-01-18 2007-07-19 Institut für Bioprozess- und Analysenmesstechnik e.V. Vorrichtung zur Energieübertragung zwischen einem Antriebsbereich und einem räumlich davon getrennten Arbeitsbereich
EP1826889B1 (de) * 2006-02-24 2015-09-30 ThyssenKrupp Aufzugswerke GmbH Verfahren und Vorrichtung zum Anbringen von Magneten
EP1845259B1 (de) * 2006-04-12 2011-03-16 Aisin Seiki Kabushiki Kaisha Magnetgetriebene Pumpe
US7834618B2 (en) 2007-06-27 2010-11-16 Brooks Automation, Inc. Position sensor system
KR101496654B1 (ko) * 2007-06-27 2015-02-27 브룩스 오토메이션 인코퍼레이티드 리프트 능력 및 감소된 코깅 특성들을 가지는 전동기 고정자
US8283813B2 (en) * 2007-06-27 2012-10-09 Brooks Automation, Inc. Robot drive with magnetic spindle bearings
KR101659931B1 (ko) 2007-06-27 2016-09-26 브룩스 오토메이션 인코퍼레이티드 다차원 위치 센서
US9752615B2 (en) 2007-06-27 2017-09-05 Brooks Automation, Inc. Reduced-complexity self-bearing brushless DC motor
US8823294B2 (en) 2007-06-27 2014-09-02 Brooks Automation, Inc. Commutation of an electromagnetic propulsion and guidance system
KR20230079518A (ko) 2007-07-17 2023-06-07 브룩스 오토메이션 인코퍼레이티드 기판 이송 장치
US7451835B1 (en) 2007-11-14 2008-11-18 Hall David R Downhole turbine
KR20230084597A (ko) 2011-09-16 2023-06-13 퍼시몬 테크놀로지스 코포레이션 운송 장치 및 이를 포함하는 처리 장치
KR102499348B1 (ko) 2011-09-16 2023-02-13 퍼시몬 테크놀로지스 코포레이션 패시브 회전자를 가진 로봇 구동
WO2015112538A1 (en) 2014-01-21 2015-07-30 Persimmon Technologies, Corp. Substrate transport vacuum platform
DE102014224151A1 (de) * 2014-11-26 2016-06-02 Mahle International Gmbh Vorrichtung zur berührungslosen Übertragung von Drehbewegungen
TWI765936B (zh) 2016-11-29 2022-06-01 美商東京威力科創Ｆｓｉ股份有限公司 用以對處理腔室中之微電子基板進行處理的平移與旋轉夾頭
US10843236B2 (en) 2017-01-27 2020-11-24 Tel Manufacturing And Engineering Of America, Inc. Systems and methods for rotating and translating a substrate in a process chamber
DE102017124981B4 (de) 2017-10-25 2024-03-07 Schölly Fiberoptic GmbH Magnetische Kupplung
US11545387B2 (en) * 2018-07-13 2023-01-03 Tel Manufacturing And Engineering Of America, Inc. Magnetic integrated lift pin system for a chemical processing chamber
CN109501983B (zh) * 2018-11-20 2023-06-23 西安工业大学 一种水下执行器及其方法
JP2021158751A (ja) * 2020-03-26 2021-10-07 セイコーエプソン株式会社 ロボット及びロボットシステム
CN114673728B (zh) * 2020-12-24 2024-01-26 迈格钠磁动力股份有限公司 一种永磁推力悬浮轴承及其控制方法

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Also Published As

Publication number Publication date
DE69206872T2 (de) 1996-07-25
EP0512516B1 (de) 1995-12-20
EP0512516A1 (de) 1992-11-11
US5270600A (en) 1993-12-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee