DE69129677D1 - Verfahren zum Ansaugen von Substraten und Vorrichtung für deren Ausführung - Google Patents

Verfahren zum Ansaugen von Substraten und Vorrichtung für deren Ausführung

Info

Publication number
DE69129677D1
DE69129677D1 DE69129677T DE69129677T DE69129677D1 DE 69129677 D1 DE69129677 D1 DE 69129677D1 DE 69129677 T DE69129677 T DE 69129677T DE 69129677 T DE69129677 T DE 69129677T DE 69129677 D1 DE69129677 D1 DE 69129677D1
Authority
DE
Germany
Prior art keywords
sucking
substrates
carrying
sucking substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69129677T
Other languages
English (en)
Other versions
DE69129677T2 (de
Inventor
Yuichiro Shimose
Haruo Ikeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
Sony Corp
Original Assignee
Shibaura Engineering Works Co Ltd
Shibaura Mechatronics Corp
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Engineering Works Co Ltd, Shibaura Mechatronics Corp, Sony Corp filed Critical Shibaura Engineering Works Co Ltd
Publication of DE69129677D1 publication Critical patent/DE69129677D1/de
Application granted granted Critical
Publication of DE69129677T2 publication Critical patent/DE69129677T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S294/00—Handling: hand and hoist-line implements
    • Y10S294/907—Sensor controlled device
DE69129677T 1990-04-27 1991-04-26 Verfahren zum Ansaugen von Substraten und Vorrichtung für deren Ausführung Expired - Fee Related DE69129677T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11258290A JPH0797599B2 (ja) 1990-04-27 1990-04-27 基板検出装置

Publications (2)

Publication Number Publication Date
DE69129677D1 true DE69129677D1 (de) 1998-08-06
DE69129677T2 DE69129677T2 (de) 1998-10-22

Family

ID=14590334

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69129677T Expired - Fee Related DE69129677T2 (de) 1990-04-27 1991-04-26 Verfahren zum Ansaugen von Substraten und Vorrichtung für deren Ausführung

Country Status (4)

Country Link
US (1) US5324087A (de)
EP (1) EP0454161B1 (de)
JP (1) JPH0797599B2 (de)
DE (1) DE69129677T2 (de)

Families Citing this family (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0569996A (ja) * 1991-09-05 1993-03-23 Smc Corp 真空ユニツト
JP3091619B2 (ja) 1993-12-27 2000-09-25 富士写真フイルム株式会社 生化学分析装置の操作制御方法
US5904697A (en) 1995-02-24 1999-05-18 Heartport, Inc. Devices and methods for performing a vascular anastomosis
US7445594B1 (en) 1995-09-20 2008-11-04 Medtronic, Inc. Method and apparatus for temporarily immobilizing a local area of tissue
US5836311A (en) 1995-09-20 1998-11-17 Medtronic, Inc. Method and apparatus for temporarily immobilizing a local area of tissue
FR2755119B1 (fr) * 1996-10-29 1999-01-15 Coval Procede et dispositif integre de detection de la presence d'une piece a deplacer sous une ventouse de manipulation par le vide
US6183354B1 (en) * 1996-11-08 2001-02-06 Applied Materials, Inc. Carrier head with a flexible membrane for a chemical mechanical polishing system
JP3705670B2 (ja) * 1997-02-19 2005-10-12 株式会社荏原製作所 ポリッシング装置及び方法
DE29704755U1 (de) * 1997-03-15 1998-07-16 Pfankuch Maschinen Gmbh Vorrichtung zum Vereinzeln von scheibenförmigen Datenträgern, insbesondere CD's
DE19817426B4 (de) * 1998-04-18 2004-06-09 J. Schmalz Gmbh Greifersystem, insbesondere Vakuumgreifersystem
US6450755B1 (en) 1998-07-10 2002-09-17 Equipe Technologies Dual arm substrate handling robot with a batch loader
US5961169A (en) * 1998-07-27 1999-10-05 Strasbaugh Apparatus for sensing the presence of a wafer
BR9913759A (pt) * 1998-09-15 2001-06-12 Medtronic Inc Sistema para imobilizar temporariamente uma área de tecido, e, sistema para estabilizar tecido
JP2000207033A (ja) 1999-01-18 2000-07-28 Myotoku Ltd 圧力センサ装置
US6209293B1 (en) 1999-06-25 2001-04-03 Box Loader, Llc Packing apparatus for packing multiple layers of containers into a receptacle
US7338434B1 (en) 2002-08-21 2008-03-04 Medtronic, Inc. Method and system for organ positioning and stabilization
EP1189496B1 (de) * 2000-09-13 2009-10-28 Esec AG Vorrichtung für die Montage von Halbleiterchips
KR100779771B1 (ko) * 2000-09-13 2007-11-27 언액시스 인터내셔널 트레이딩 엘티디 반도체 칩을 장착하는 장치
EP1191831A1 (de) * 2000-09-13 2002-03-27 Esec Trading S.A. Vorrichtung für die Montage von Halbleiterchips
US6676597B2 (en) 2001-01-13 2004-01-13 Medtronic, Inc. Method and device for organ positioning
JP2002263981A (ja) * 2001-03-14 2002-09-17 Murata Mach Ltd 板材吸着持ち上げ装置の吸着制御装置
US7494460B2 (en) * 2002-08-21 2009-02-24 Medtronic, Inc. Methods and apparatus providing suction-assisted tissue engagement through a minimally invasive incision
KR20050061462A (ko) * 2002-08-22 2005-06-22 인티그레이티드 다이나믹스 엔지니어링, 인크. 기판 처리 공정 시스템
DE10241270B4 (de) * 2002-09-06 2005-12-22 Netstal-Maschinen Ag Entnahmevorrichtung für Spritzgiessteile sowie Verfahren zum automatischen Entnehmen
US7399272B2 (en) 2004-03-24 2008-07-15 Medtronic, Inc. Methods and apparatus providing suction-assisted tissue engagement
US7794387B2 (en) 2006-04-26 2010-09-14 Medtronic, Inc. Methods and devices for stabilizing tissue
TWI333248B (en) * 2006-08-18 2010-11-11 King Yuan Electronics Co Ltd Pick-up head device with a pushing mechanism
KR100981608B1 (ko) * 2008-03-10 2010-09-10 서승환 진공흡입을 이용한 연성기판의 굴곡 신뢰성 검사장치 및이를 이용한 굴곡 검사방법
CN101890683A (zh) * 2009-05-21 2010-11-24 鸿富锦精密工业（深圳）有限公司 工件吸取装置
MY175166A (en) * 2009-09-04 2020-06-12 Alcon Inc Gripper for a contact lens and process for transporting a contact lens
US8485579B2 (en) * 2011-03-17 2013-07-16 Western Digital (Fremont), Llc Vacuum pickup assemblies for picking up articles and minimizing contamination thereof
JP5880710B2 (ja) * 2012-07-10 2016-03-09 日産自動車株式会社 燃料電池用ガスケットの把持装置
CN104428933B (zh) * 2012-07-10 2018-04-10 日产自动车株式会社 燃料电池用电解质膜的把持装置
US9022444B1 (en) 2013-05-20 2015-05-05 Western Digital Technologies, Inc. Vacuum nozzle having back-pressure release hole
JP5657751B1 (ja) * 2013-07-04 2015-01-21 ファナック株式会社 対象物を吸引して搬送する搬送装置
JP2015079828A (ja) * 2013-10-16 2015-04-23 株式会社ディスコ フレームクランプ装置
CN103658233A (zh) * 2013-11-25 2014-03-26 昆山市三众模具制造有限公司 一种真空压力传感器检测装置
CA2865140A1 (en) * 2014-09-24 2016-03-24 9155-0020 Quebec Inc. Vacuum control system and method for a vacuum filling assembly
US9817407B2 (en) * 2014-12-01 2017-11-14 Varian Semiconductor Equipment Associates, Inc. System and method of opening a load lock door valve at a desired pressure after venting
JP6486114B2 (ja) * 2015-01-16 2019-03-20 株式会社東芝 荷役装置
JP2017154888A (ja) * 2016-03-04 2017-09-07 株式会社東芝 物品保持システム、物品保持装置及び物品保持方法
CN105692198B (zh) * 2016-03-11 2019-01-01 青岛创想智能技术有限公司 一种用于控制夹具的控制系统
CN105666513A (zh) * 2016-03-16 2016-06-15 江苏双能太阳能有限公司 一种真空装置
DE102016011618A1 (de) * 2016-09-28 2018-03-29 Broetje-Automation Gmbh Endeffektoranordnung
JP6773588B2 (ja) * 2017-03-10 2020-10-21 株式会社東芝 搬送装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3008747A (en) * 1960-05-25 1961-11-14 Whiting Corp Vacuum-type material handling system
US3485393A (en) * 1967-05-25 1969-12-23 Waukesha Culvert Co Apparatus for handling material having an irregular surface and vacuum head therefor
US4047532A (en) * 1975-04-21 1977-09-13 Phillips Jack L Vacuum forcep and method of using same
JPS56122724A (en) * 1980-02-25 1981-09-26 Sanyo Electric Co Ltd Goods conveyor
US4557659A (en) * 1982-09-14 1985-12-10 M. Scaglia S.P.A. Device for supporting and handling loads by means of vacuum operated suction pads
US4589648A (en) * 1984-10-22 1986-05-20 Westvaco Corporation Pinch-action suction cup
JPS61254436A (ja) * 1985-05-02 1986-11-12 Mitsubishi Electric Corp ウエハ吸着検出器
JPH07274B2 (ja) * 1986-11-28 1995-01-11 株式会社東芝 吸着検出装置
US4799854A (en) * 1987-07-20 1989-01-24 Hughes Aircraft Company Rotatable pick and place vacuum sense head for die bonding apparatus
US5033730A (en) * 1990-02-28 1991-07-23 Sri International Variable position vacuum article pickup apparatus

Also Published As

Publication number Publication date
JPH0797599B2 (ja) 1995-10-18
DE69129677T2 (de) 1998-10-22
US5324087A (en) 1994-06-28
JPH0412936A (ja) 1992-01-17
EP0454161B1 (de) 1998-07-01
EP0454161A1 (de) 1991-10-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee