DE69127835T2 - Verfahren und Einrichtung zum Vergleichen von Mustern - Google Patents
Verfahren und Einrichtung zum Vergleichen von MusternInfo
- Publication number
- DE69127835T2 DE69127835T2 DE69127835T DE69127835T DE69127835T2 DE 69127835 T2 DE69127835 T2 DE 69127835T2 DE 69127835 T DE69127835 T DE 69127835T DE 69127835 T DE69127835 T DE 69127835T DE 69127835 T2 DE69127835 T2 DE 69127835T2
- Authority
- DE
- Germany
- Prior art keywords
- comparing patterns
- patterns
- comparing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
- G06T7/001—Industrial image inspection using an image reference approach
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
- G06V10/00—Arrangements for image or video recognition or understanding
- G06V10/40—Extraction of image or video features
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
- G06V10/00—Arrangements for image or video recognition or understanding
- G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
- G06V10/74—Image or video pattern matching; Proximity measures in feature spaces
- G06V10/75—Organisation of the matching processes, e.g. simultaneous or sequential comparisons of image or video features; Coarse-fine approaches, e.g. multi-scale approaches; using context analysis; Selection of dictionaries
- G06V10/751—Comparing pixel values or logical combinations thereof, or feature values having positional relevance, e.g. template matching
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30108—Industrial image inspection
- G06T2207/30164—Workpiece; Machine component
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005632A JPH03210679A (ja) | 1990-01-12 | 1990-01-12 | パターンマッチング方法および装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69127835D1 DE69127835D1 (de) | 1997-11-13 |
DE69127835T2 true DE69127835T2 (de) | 1998-04-30 |
Family
ID=11616527
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69127835T Expired - Fee Related DE69127835T2 (de) | 1990-01-12 | 1991-01-11 | Verfahren und Einrichtung zum Vergleichen von Mustern |
Country Status (7)
Country | Link |
---|---|
US (1) | US5253306A (de) |
EP (1) | EP0437273B1 (de) |
JP (1) | JPH03210679A (de) |
KR (1) | KR930009741B1 (de) |
CA (1) | CA2033359C (de) |
DE (1) | DE69127835T2 (de) |
FI (1) | FI910097A (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10103958C1 (de) * | 2001-01-30 | 2002-05-29 | Infineon Technologies Ag | Verfahren zur Inspektion von Defekten auf einer Maske |
Families Citing this family (61)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5600734A (en) * | 1991-10-04 | 1997-02-04 | Fujitsu Limited | Electron beam tester |
US6067379A (en) * | 1988-12-09 | 2000-05-23 | Cognex Corporation | Method and apparatus for locating patterns in an optical image |
DE4041484A1 (de) * | 1990-12-22 | 1992-06-25 | Thomson Brandt Gmbh | Entmagnetisierungsschaltung fuer die bildroehre in einem fernsehempfaenger |
JP3062338B2 (ja) * | 1991-03-01 | 2000-07-10 | キヤノン株式会社 | 画像処理装置 |
JP3237928B2 (ja) * | 1992-12-04 | 2001-12-10 | 株式会社東芝 | パターン検査方法及び装置 |
JPH07117498B2 (ja) * | 1991-12-11 | 1995-12-18 | インターナショナル・ビジネス・マシーンズ・コーポレイション | 検査システム |
IL102659A (en) * | 1992-07-27 | 1997-07-13 | Orbot Instr Ltd | Apparatus and method for comparing and aligning two digital representations of an image |
US5859923A (en) * | 1992-12-29 | 1999-01-12 | Cognex Corporation | Mark quality inspection apparatus and method |
JP3132794B2 (ja) * | 1993-06-21 | 2001-02-05 | シオノギクオリカプス株式会社 | 固形製剤の印刷文字検査装置 |
US5452368A (en) * | 1993-08-02 | 1995-09-19 | Motorola, Inc. | Method of detecting defects in semiconductor package leads |
US5479683A (en) * | 1993-12-29 | 1996-01-02 | Bausch & Lomb Incorporated | Three-dimensional eyewinder apparatus |
US6026176A (en) | 1995-07-25 | 2000-02-15 | Cognex Corporation | Machine vision methods and articles of manufacture for ball grid array inspection |
US5872870A (en) * | 1996-02-16 | 1999-02-16 | Cognex Corporation | Machine vision methods for identifying extrema of objects in rotated reference frames |
US5909504A (en) * | 1996-03-15 | 1999-06-01 | Cognex Corporation | Method of testing a machine vision inspection system |
US6298149B1 (en) | 1996-03-21 | 2001-10-02 | Cognex Corporation | Semiconductor device image inspection with contrast enhancement |
US6259827B1 (en) | 1996-03-21 | 2001-07-10 | Cognex Corporation | Machine vision methods for enhancing the contrast between an object and its background using multiple on-axis images |
US5978502A (en) * | 1996-04-01 | 1999-11-02 | Cognex Corporation | Machine vision methods for determining characteristics of three-dimensional objects |
US5835634A (en) * | 1996-05-31 | 1998-11-10 | Adobe Systems Incorporated | Bitmap comparison apparatus and method using an outline mask and differently weighted bits |
US6137893A (en) * | 1996-10-07 | 2000-10-24 | Cognex Corporation | Machine vision calibration targets and methods of determining their location and orientation in an image |
US5960125A (en) | 1996-11-21 | 1999-09-28 | Cognex Corporation | Nonfeedback-based machine vision method for determining a calibration relationship between a camera and a moveable object |
US5953130A (en) * | 1997-01-06 | 1999-09-14 | Cognex Corporation | Machine vision methods and apparatus for machine vision illumination of an object |
US6075881A (en) | 1997-03-18 | 2000-06-13 | Cognex Corporation | Machine vision methods for identifying collinear sets of points from an image |
US5974169A (en) * | 1997-03-20 | 1999-10-26 | Cognex Corporation | Machine vision methods for determining characteristics of an object using boundary points and bounding regions |
US6141033A (en) * | 1997-05-15 | 2000-10-31 | Cognex Corporation | Bandwidth reduction of multichannel images for machine vision |
US6608647B1 (en) | 1997-06-24 | 2003-08-19 | Cognex Corporation | Methods and apparatus for charge coupled device image acquisition with independent integration and readout |
US5978080A (en) * | 1997-09-25 | 1999-11-02 | Cognex Corporation | Machine vision methods using feedback to determine an orientation, pixel width and pixel height of a field of view |
AU9676298A (en) * | 1997-10-01 | 1999-04-23 | Island Graphics Corporation | Image comparing system |
US6025854A (en) * | 1997-12-31 | 2000-02-15 | Cognex Corporation | Method and apparatus for high speed image acquisition |
US6282328B1 (en) | 1998-01-28 | 2001-08-28 | Cognex Corporation | Machine vision systems and methods for morphological transformation of an image with non-uniform offsets |
US6236769B1 (en) | 1998-01-28 | 2001-05-22 | Cognex Corporation | Machine vision systems and methods for morphological transformation of an image with zero or other uniform offsets |
US6381375B1 (en) | 1998-02-20 | 2002-04-30 | Cognex Corporation | Methods and apparatus for generating a projection of an image |
US6215915B1 (en) | 1998-02-20 | 2001-04-10 | Cognex Corporation | Image processing methods and apparatus for separable, general affine transformation of an image |
US6075886A (en) * | 1998-03-09 | 2000-06-13 | Xerox Corporation | Method and apparatus for reducing the complexity of color correction using subsampling |
US6173213B1 (en) | 1998-05-11 | 2001-01-09 | Ellison Machinery Company | Motorized inbound laser orientation and wheel recognition station |
JP2000067247A (ja) * | 1998-06-08 | 2000-03-03 | Toshiba Corp | 画像認識装置 |
US6154567A (en) * | 1998-07-01 | 2000-11-28 | Cognex Corporation | Pattern similarity metric for image search, registration, and comparison |
US7016539B1 (en) | 1998-07-13 | 2006-03-21 | Cognex Corporation | Method for fast, robust, multi-dimensional pattern recognition |
US6687402B1 (en) | 1998-12-18 | 2004-02-03 | Cognex Corporation | Machine vision methods and systems for boundary feature comparison of patterns and images |
US6381366B1 (en) | 1998-12-18 | 2002-04-30 | Cognex Corporation | Machine vision methods and system for boundary point-based comparison of patterns and images |
CA2371998C (en) * | 1999-02-11 | 2006-01-24 | British Telecommunications Public Limited Company | Analysis of video signal quality |
KR100326563B1 (ko) * | 1999-03-30 | 2002-03-12 | 곽정소 | 소자회로 및 그 구동방법 |
US6735327B1 (en) | 1999-09-16 | 2004-05-11 | Shofner Engineering Associates, Inc. | Color and trash measurements by image analysis |
US6684402B1 (en) | 1999-12-01 | 2004-01-27 | Cognex Technology And Investment Corporation | Control methods and apparatus for coupling multiple image acquisition devices to a digital data processor |
JP3604993B2 (ja) * | 2000-03-16 | 2004-12-22 | シャープ株式会社 | 画像符号化装置、画像符号化方法、画像復号装置、および画像復号方法 |
US6748104B1 (en) | 2000-03-24 | 2004-06-08 | Cognex Corporation | Methods and apparatus for machine vision inspection using single and multiple templates or patterns |
US6959112B1 (en) | 2001-06-29 | 2005-10-25 | Cognex Technology And Investment Corporation | Method for finding a pattern which may fall partially outside an image |
US8081820B2 (en) | 2003-07-22 | 2011-12-20 | Cognex Technology And Investment Corporation | Method for partitioning a pattern into optimized sub-patterns |
US7190834B2 (en) | 2003-07-22 | 2007-03-13 | Cognex Technology And Investment Corporation | Methods for finding and characterizing a deformed pattern in an image |
WO2005010561A2 (en) * | 2003-07-22 | 2005-02-03 | L-3 Communications Security and Detection Systems Corporation | Methods and apparatus for detecting objects in baggage using x-rays |
US7423280B2 (en) * | 2004-08-09 | 2008-09-09 | Quad/Tech, Inc. | Web inspection module including contact image sensors |
US9098932B2 (en) * | 2004-08-11 | 2015-08-04 | Ati Technologies Ulc | Graphics processing logic with variable arithmetic logic unit control and method therefor |
JP4154374B2 (ja) * | 2004-08-25 | 2008-09-24 | 株式会社日立ハイテクノロジーズ | パターンマッチング装置及びそれを用いた走査型電子顕微鏡 |
US8437502B1 (en) | 2004-09-25 | 2013-05-07 | Cognex Technology And Investment Corporation | General pose refinement and tracking tool |
US20060147707A1 (en) * | 2004-12-30 | 2006-07-06 | Jian Meng | Compacted, chopped fiber glass strands |
DE102005026630A1 (de) * | 2005-06-03 | 2006-12-07 | Würth Elektronik GmbH & Co. KG | Verfahren und Vorrichtung zum Überprüfen von Leiterplatten |
US8111904B2 (en) | 2005-10-07 | 2012-02-07 | Cognex Technology And Investment Corp. | Methods and apparatus for practical 3D vision system |
US8162584B2 (en) | 2006-08-23 | 2012-04-24 | Cognex Corporation | Method and apparatus for semiconductor wafer alignment |
US8103085B1 (en) | 2007-09-25 | 2012-01-24 | Cognex Corporation | System and method for detecting flaws in objects using machine vision |
JP5408139B2 (ja) * | 2008-10-09 | 2014-02-05 | 日本電気株式会社 | 異常検知システム、異常検知方法及び異常検知プログラム |
JP5719967B2 (ja) * | 2012-03-13 | 2015-05-20 | 富士フイルム株式会社 | プロジェクタ付き撮影装置及びその制御方法 |
US9679224B2 (en) | 2013-06-28 | 2017-06-13 | Cognex Corporation | Semi-supervised method for training multiple pattern recognition and registration tool models |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2129546B (en) * | 1982-11-02 | 1985-09-25 | Cambridge Instr Ltd | Image comparison |
US4589140A (en) * | 1983-03-21 | 1986-05-13 | Beltronics, Inc. | Method of and apparatus for real-time high-speed inspection of objects for identifying or recognizing known and unknown portions thereof, including defects and the like |
DE3347645C1 (de) * | 1983-12-30 | 1985-10-10 | Dr.-Ing. Ludwig Pietzsch Gmbh & Co, 7505 Ettlingen | Verfahren und Einrichtung zum opto-elektronischen Pruefen eines Flaechenmusters an einem Objekt |
JPS60230281A (ja) * | 1984-04-27 | 1985-11-15 | Fuji Electric Co Ltd | 文字識別装置 |
US4953224A (en) * | 1984-09-27 | 1990-08-28 | Hitachi, Ltd. | Pattern defects detection method and apparatus |
US4648053A (en) * | 1984-10-30 | 1987-03-03 | Kollmorgen Technologies, Corp. | High speed optical inspection system |
EP0195161B1 (de) * | 1985-03-14 | 1993-09-15 | Nikon Corporation | Gerät und Verfahren zum selbsttätigen Inspizieren von Objekten und zum Identifizieren oder Erkennen bekannter und unbekannter Teile davon, einschliesslich Fehler und dergleichen |
-
1990
- 1990-01-12 JP JP2005632A patent/JPH03210679A/ja active Pending
- 1990-12-28 CA CA002033359A patent/CA2033359C/en not_active Expired - Fee Related
- 1990-12-31 US US07/636,127 patent/US5253306A/en not_active Expired - Lifetime
-
1991
- 1991-01-08 FI FI910097A patent/FI910097A/fi not_active Application Discontinuation
- 1991-01-09 KR KR1019910000216A patent/KR930009741B1/ko not_active IP Right Cessation
- 1991-01-11 DE DE69127835T patent/DE69127835T2/de not_active Expired - Fee Related
- 1991-01-11 EP EP91100314A patent/EP0437273B1/de not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10103958C1 (de) * | 2001-01-30 | 2002-05-29 | Infineon Technologies Ag | Verfahren zur Inspektion von Defekten auf einer Maske |
Also Published As
Publication number | Publication date |
---|---|
EP0437273A3 (en) | 1992-09-02 |
EP0437273B1 (de) | 1997-10-08 |
KR930009741B1 (ko) | 1993-10-09 |
KR910014841A (ko) | 1991-08-31 |
DE69127835D1 (de) | 1997-11-13 |
JPH03210679A (ja) | 1991-09-13 |
EP0437273A2 (de) | 1991-07-17 |
FI910097A0 (fi) | 1991-01-08 |
CA2033359A1 (en) | 1991-07-13 |
US5253306A (en) | 1993-10-12 |
FI910097A (fi) | 1991-07-13 |
CA2033359C (en) | 1995-12-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |