DE69122343T2 - Atomkraft-Mikroskopie - Google Patents

Atomkraft-Mikroskopie

Info

Publication number
DE69122343T2
DE69122343T2 DE69122343T DE69122343T DE69122343T2 DE 69122343 T2 DE69122343 T2 DE 69122343T2 DE 69122343 T DE69122343 T DE 69122343T DE 69122343 T DE69122343 T DE 69122343T DE 69122343 T2 DE69122343 T2 DE 69122343T2
Authority
DE
Germany
Prior art keywords
atomic force
force microscopy
microscopy
atomic
force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69122343T
Other languages
English (en)
Other versions
DE69122343D1 (de
Inventor
Nabil Mahmoud Amer
Gerhard Meyer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE69122343D1 publication Critical patent/DE69122343D1/de
Publication of DE69122343T2 publication Critical patent/DE69122343T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/868—Scanning probe structure with optical means
    • Y10S977/87—Optical lever arm for reflecting light
DE69122343T 1990-09-27 1991-07-24 Atomkraft-Mikroskopie Expired - Lifetime DE69122343T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/588,795 US5144833A (en) 1990-09-27 1990-09-27 Atomic force microscopy

Publications (2)

Publication Number Publication Date
DE69122343D1 DE69122343D1 (de) 1996-10-31
DE69122343T2 true DE69122343T2 (de) 1997-04-10

Family

ID=24355333

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69122343T Expired - Lifetime DE69122343T2 (de) 1990-09-27 1991-07-24 Atomkraft-Mikroskopie

Country Status (4)

Country Link
US (2) US5144833A (de)
EP (1) EP0480136B1 (de)
JP (1) JP2516292B2 (de)
DE (1) DE69122343T2 (de)

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US5157251A (en) * 1991-03-13 1992-10-20 Park Scientific Instruments Scanning force microscope having aligning and adjusting means
EP0511662B1 (de) * 1991-04-30 1996-07-10 Matsushita Electric Industrial Co., Ltd. Raster-Abtastmikroskop, molekulares Verarbeitungsverfahren unter Verwendung des Mikroskops und Verfahren zum Wahrnehmen der DNA-Basen-Anordnung
US5155361A (en) * 1991-07-26 1992-10-13 The Arizona Board Of Regents, A Body Corporate Acting For And On Behalf Of Arizona State University Potentiostatic preparation of molecular adsorbates for scanning probe microscopy
JPH0540034A (ja) * 1991-08-08 1993-02-19 Nikon Corp 複合型顕微鏡
US5298975A (en) * 1991-09-27 1994-03-29 International Business Machines Corporation Combined scanning force microscope and optical metrology tool
US5537372A (en) * 1991-11-15 1996-07-16 International Business Machines Corporation High density data storage system with topographic contact sensor
DE69309318T2 (de) * 1992-01-10 1997-10-30 Hitachi Ltd Verfahren und Vorrichtung zum Beobachten einer Fläche
US5291775A (en) * 1992-03-04 1994-03-08 Topometrix Scanning force microscope with integrated optics and cantilever mount
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US5654546A (en) * 1995-11-07 1997-08-05 Molecular Imaging Corporation Variable temperature scanning probe microscope based on a peltier device
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DE10297054T5 (de) * 2001-07-18 2004-10-14 The Regents Of The University Of California, Oakland Messkopf für ein Rasterkraftmikroskop und weitere Anwendungen
US20030154149A1 (en) * 2002-02-13 2003-08-14 Dilip Gajendragadkar System and method of creating and executing a restricted stock sale plan
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US7041963B2 (en) * 2003-11-26 2006-05-09 Massachusetts Institute Of Technology Height calibration of scanning probe microscope actuators
US7230719B2 (en) * 2003-12-02 2007-06-12 National University Of Singapore High sensitivity scanning probe system
JP4596813B2 (ja) * 2004-04-21 2010-12-15 独立行政法人科学技術振興機構 量子線支援原子間力顕微法および量子線支援原子間力顕微鏡
US7205237B2 (en) * 2005-07-05 2007-04-17 International Business Machines Corporation Apparatus and method for selected site backside unlayering of si, GaAs, GaxAlyAszof SOI technologies for scanning probe microscopy and atomic force probing characterization
US20100294927A1 (en) * 2005-09-12 2010-11-25 Nanolnk, Inc. High throughput inspecting
US9189728B2 (en) 2009-07-23 2015-11-17 I-Property Holding Corp. Method for the authentication of dosage forms
US8726410B2 (en) 2010-07-30 2014-05-13 The United States Of America As Represented By The Secretary Of The Air Force Atomic force microscopy system and method for nanoscale measurement
ITTO20120692A1 (it) * 2012-08-02 2014-02-03 Microla Optoelectronics S R L Sistema di misura a struttura oscillante
US9383386B2 (en) 2013-03-14 2016-07-05 Oxford Instruments Asylum Research, Inc. Optical beam positioning unit for atomic force microscope
US10705114B2 (en) 2014-03-12 2020-07-07 Oxford Instruments Asylum Research Inc Metrological scanning probe microscope
US9804193B2 (en) 2014-03-12 2017-10-31 Oxford Instruments Asylum Research, Inc Metrological scanning probe microscope
DE102014010417A1 (de) * 2014-07-14 2016-01-14 Nanosurf Ag Positionsmesssystem für den Nanometerbereich
JP6588278B2 (ja) * 2015-09-01 2019-10-09 株式会社日立ハイテクサイエンス 走査プローブ顕微鏡および走査プローブ顕微鏡の光軸調整方法
CN106353535A (zh) * 2016-10-10 2017-01-25 中国科学院深圳先进技术研究院 原位光电多功能耦合原子力显微镜测试系统
CN111811939B (zh) * 2020-07-21 2022-08-02 上海交通大学 超低温环境下的高精度纳米力学检测系统

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Also Published As

Publication number Publication date
JPH04233404A (ja) 1992-08-21
USRE37299E1 (en) 2001-07-31
EP0480136B1 (de) 1996-09-25
JP2516292B2 (ja) 1996-07-24
DE69122343D1 (de) 1996-10-31
EP0480136A1 (de) 1992-04-15
US5144833A (en) 1992-09-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8328 Change in the person/name/address of the agent

Representative=s name: DUSCHER, R., DIPL.-PHYS. DR.RER.NAT., PAT.-ANW., 7