DE69121156D1 - Mit flüssigkkeitsstrahl arbeitender aufzeichnungskopf - Google Patents

Mit flüssigkkeitsstrahl arbeitender aufzeichnungskopf

Info

Publication number
DE69121156D1
DE69121156D1 DE69121156T DE69121156T DE69121156D1 DE 69121156 D1 DE69121156 D1 DE 69121156D1 DE 69121156 T DE69121156 T DE 69121156T DE 69121156 T DE69121156 T DE 69121156T DE 69121156 D1 DE69121156 D1 DE 69121156D1
Authority
DE
Germany
Prior art keywords
recording head
heat
electricity
liquid jet
head working
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69121156T
Other languages
English (en)
Other versions
DE69121156T2 (de
Inventor
Keiichi Murakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69121156D1 publication Critical patent/DE69121156D1/de
Application granted granted Critical
Publication of DE69121156T2 publication Critical patent/DE69121156T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1646Manufacturing processes thin film formation thin film formation by sputtering
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14016Structure of bubble jet print heads
    • B41J2/14088Structure of heating means
    • B41J2/14112Resistive element
    • B41J2/14129Layer structure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1601Production of bubble jet print heads
    • B41J2/1604Production of bubble jet print heads of the edge shooter type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • B41J2/1628Manufacturing processes etching dry etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1631Manufacturing processes photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1642Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1643Manufacturing processes thin film formation thin film formation by plating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1645Manufacturing processes thin film formation thin film formation by spincoating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01Embodiments of or processes related to ink-jet heads
    • B41J2202/03Specific materials used

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Ink Jet (AREA)
  • Catching Or Destruction (AREA)
  • Surgical Instruments (AREA)
  • Printers Or Recording Devices Using Electromagnetic And Radiation Means (AREA)
DE69121156T 1990-03-27 1991-03-27 Mit flüssigkkeitsstrahl arbeitender aufzeichnungskopf Expired - Fee Related DE69121156T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP7543490 1990-03-27
PCT/JP1991/000400 WO1991014575A1 (en) 1990-03-27 1991-03-27 Liquid injection recording head

Publications (2)

Publication Number Publication Date
DE69121156D1 true DE69121156D1 (de) 1996-09-05
DE69121156T2 DE69121156T2 (de) 1996-12-12

Family

ID=13576121

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69121156T Expired - Fee Related DE69121156T2 (de) 1990-03-27 1991-03-27 Mit flüssigkkeitsstrahl arbeitender aufzeichnungskopf

Country Status (5)

Country Link
US (1) US5187499A (de)
EP (1) EP0477378B1 (de)
AT (1) ATE140897T1 (de)
DE (1) DE69121156T2 (de)
WO (1) WO1991014575A1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69328134T2 (de) * 1992-06-23 2000-09-21 Canon Kk Flüssigkeitsstrahlaufzeichnungskopf und Verfahren seiner Herstellung
US6406740B1 (en) * 1992-06-23 2002-06-18 Canon Kabushiki Kaisha Method of manufacturing a liquid jet recording apparatus and such a liquid jet recording apparatus
US5334415A (en) * 1992-09-21 1994-08-02 Compaq Computer Corporation Method and apparatus for film coated passivation of ink channels in ink jet printhead
KR0131179B1 (ko) * 1993-02-22 1998-04-14 슌뻬이 야마자끼 전자회로 제조프로세스
US5660739A (en) * 1994-08-26 1997-08-26 Canon Kabushiki Kaisha Method of producing substrate for ink jet recording head, ink jet recording head and ink jet recording apparatus
US5901425A (en) 1996-08-27 1999-05-11 Topaz Technologies Inc. Inkjet print head apparatus
JP3619036B2 (ja) * 1997-12-05 2005-02-09 キヤノン株式会社 インクジェット記録ヘッドの製造方法
US6142606A (en) * 1997-12-22 2000-11-07 Canon Kabushiki Kaisha Ink jet recording head, substrate for use of such head, ink jet cartridge, and ink jet recording apparatus
JP4298066B2 (ja) 1999-06-09 2009-07-15 キヤノン株式会社 インクジェット記録ヘッドの製造方法、インクジェット記録ヘッドおよびインクジェット記録装置
WO2009134225A1 (en) 2008-04-29 2009-11-05 Hewlett-Packard Development Company, L.P. Printing device
JP5350205B2 (ja) * 2009-12-16 2013-11-27 キヤノン株式会社 液体吐出ヘッド用基板及び液体吐出ヘッド、およびその製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0624855B2 (ja) * 1983-04-20 1994-04-06 キヤノン株式会社 液体噴射記録ヘッド
US4626875A (en) * 1983-09-26 1986-12-02 Canon Kabushiki Kaisha Apparatus for liquid-jet recording wherein a potential is applied to the liquid
JPH0643130B2 (ja) * 1985-10-31 1994-06-08 キヤノン株式会社 液体噴射記録ヘツド
JPS6422443A (en) * 1987-07-17 1989-01-25 Asano Seisakusho Kk Manufacture of lock bolt
JPH01122443A (ja) * 1987-11-07 1989-05-15 Alps Electric Co Ltd インクジェットヘッド基板の製造方法
US5010355A (en) * 1989-12-26 1991-04-23 Xerox Corporation Ink jet printhead having ionic passivation of electrical circuitry

Also Published As

Publication number Publication date
EP0477378A4 (en) 1992-06-10
US5187499A (en) 1993-02-16
ATE140897T1 (de) 1996-08-15
EP0477378B1 (de) 1996-07-31
WO1991014575A1 (en) 1991-10-03
EP0477378A1 (de) 1992-04-01
DE69121156T2 (de) 1996-12-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee