DE69107244D1 - Industrielle Diamant-Beschichtung und Verfahren zu ihrer Herstellung. - Google Patents

Industrielle Diamant-Beschichtung und Verfahren zu ihrer Herstellung.

Info

Publication number
DE69107244D1
DE69107244D1 DE69107244T DE69107244T DE69107244D1 DE 69107244 D1 DE69107244 D1 DE 69107244D1 DE 69107244 T DE69107244 T DE 69107244T DE 69107244 T DE69107244 T DE 69107244T DE 69107244 D1 DE69107244 D1 DE 69107244D1
Authority
DE
Germany
Prior art keywords
manufacture
diamond coating
industrial diamond
industrial
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69107244T
Other languages
English (en)
Other versions
DE69107244T2 (de
Inventor
Shunpei Yamazaki
Masaya Kadono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Application granted granted Critical
Publication of DE69107244D1 publication Critical patent/DE69107244D1/de
Publication of DE69107244T2 publication Critical patent/DE69107244T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • C23C16/274—Diamond only using microwave discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • C23C16/277—Diamond only using other elements in the gas phase besides carbon and hydrogen; using other elements besides carbon, hydrogen and oxygen in case of use of combustion torches; using other elements besides carbon, hydrogen and inert gas in case of use of plasma jets
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/56—After-treatment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
DE69107244T 1990-05-30 1991-05-30 Industrielle Diamant-Beschichtung und Verfahren zu ihrer Herstellung. Expired - Fee Related DE69107244T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2140226A JP2840788B2 (ja) 1990-05-30 1990-05-30 ダイヤモンド成分を含む表面保護膜

Publications (2)

Publication Number Publication Date
DE69107244D1 true DE69107244D1 (de) 1995-03-23
DE69107244T2 DE69107244T2 (de) 1995-05-24

Family

ID=15263842

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69107244T Expired - Fee Related DE69107244T2 (de) 1990-05-30 1991-05-30 Industrielle Diamant-Beschichtung und Verfahren zu ihrer Herstellung.

Country Status (5)

Country Link
US (1) US5254141A (de)
EP (1) EP0459807B1 (de)
JP (1) JP2840788B2 (de)
KR (1) KR930007149B1 (de)
DE (1) DE69107244T2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2651947B2 (ja) * 1990-03-26 1997-09-10 株式会社半導体エネルギー研究所 ダイヤモンド薄膜コーティング部材およびダイヤモンド薄膜コーティング方法
JPH059735A (ja) * 1991-07-09 1993-01-19 Kobe Steel Ltd ダイヤモンドの気相合成方法
US6007591A (en) * 1995-03-07 1999-12-28 Nihon Micro Coating Co., Ltd. Abrasive sheet and method for producing same
JP2983154B2 (ja) * 1995-03-29 1999-11-29 株式会社椿本チエイン 工具保持装置
FR2738832B1 (fr) * 1995-09-18 1997-12-12 Suisse Electronique Microtech Procede d'obtention d'une couche de diamant sur un support en matiere plastique et produit ainsi obtenu
CA2258388C (en) * 1998-01-20 2002-04-16 Philip M. Fabis Surface processing of thin film cvd diamond coatings for improved resistive properties and integrated circuit packages incorporating processed coatings
US6524357B2 (en) 2000-06-30 2003-02-25 Saint-Gobain Abrasives Technology Company Process for coating superabrasive with metal
EP1294960A2 (de) 2000-06-30 2003-03-26 Saint-Gobain Abrasives, Inc. Verfahren zum beschichten von abrasiven teilchen mit metall
US20060147631A1 (en) * 2005-01-04 2006-07-06 Lev Leonid C Method for making diamond coated substrates, articles made therefrom, and method of drilling
US20080187769A1 (en) * 2006-04-13 2008-08-07 3M Innovative Properties Metal-coated superabrasive material and methods of making the same

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3942959A (en) * 1967-12-22 1976-03-09 Fabriksaktiebolaget Eka Multilayered flexible abrasive containing a layer of electroconductive material
US4101698A (en) * 1975-07-14 1978-07-18 Avery International Corp. Elastomeric reflective metal surfaces
US4179324A (en) * 1977-11-28 1979-12-18 Spire Corporation Process for fabricating thin film and glass sheet laminate
JPS622133A (ja) * 1985-06-28 1987-01-08 Shin Etsu Chem Co Ltd ミクロト−ム用ダイヤモンドコ−テイング刃およびその製造方法
US4776862A (en) * 1987-12-08 1988-10-11 Wiand Ronald C Brazing of diamond
JPH01153228A (ja) * 1987-12-10 1989-06-15 Asahi Daiyamondo Kogyo Kk 気相合成ダイヤモンド工具の製造法
JP2607592B2 (ja) * 1988-02-18 1997-05-07 住友電気工業株式会社 高耐摩耗性多結晶ダイヤモンド工具及びその製造方法
JP2631708B2 (ja) * 1988-07-29 1997-07-16 株式会社石塚研究所 改良された微細ダイヤモンド砥粒およびその製造方法
US4919974A (en) * 1989-01-12 1990-04-24 Ford Motor Company Making diamond composite coated cutting tools
ZA901817B (en) * 1989-06-15 1991-04-24 Gen Electric Tools employing a large or irregularly shaped diamond abrasive
US4968326A (en) * 1989-10-10 1990-11-06 Wiand Ronald C Method of brazing of diamond to substrate
US5082359A (en) * 1989-11-28 1992-01-21 Epion Corporation Diamond films and method of growing diamond films on nondiamond substrates
JP2651947B2 (ja) * 1990-03-26 1997-09-10 株式会社半導体エネルギー研究所 ダイヤモンド薄膜コーティング部材およびダイヤモンド薄膜コーティング方法

Also Published As

Publication number Publication date
JPH0437695A (ja) 1992-02-07
US5254141A (en) 1993-10-19
EP0459807A1 (de) 1991-12-04
KR930007149B1 (ko) 1993-07-30
DE69107244T2 (de) 1995-05-24
KR910020197A (ko) 1991-12-19
JP2840788B2 (ja) 1998-12-24
EP0459807B1 (de) 1995-02-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee