DE69005502T2 - Aus Silizium geätzter Kraftaufnehmer und Verfahren zu seiner Herstellung. - Google Patents

Aus Silizium geätzter Kraftaufnehmer und Verfahren zu seiner Herstellung.

Info

Publication number
DE69005502T2
DE69005502T2 DE90300415T DE69005502T DE69005502T2 DE 69005502 T2 DE69005502 T2 DE 69005502T2 DE 90300415 T DE90300415 T DE 90300415T DE 69005502 T DE69005502 T DE 69005502T DE 69005502 T2 DE69005502 T2 DE 69005502T2
Authority
DE
Germany
Prior art keywords
etched
silicon
production
force transducer
transducer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE90300415T
Other languages
English (en)
Other versions
DE69005502D1 (de
Inventor
Edward Nathan Sickafus
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ford Werke GmbH
Original Assignee
Ford Werke GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ford Werke GmbH filed Critical Ford Werke GmbH
Publication of DE69005502D1 publication Critical patent/DE69005502D1/de
Application granted granted Critical
Publication of DE69005502T2 publication Critical patent/DE69005502T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/132—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electromagnetic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S73/00—Measuring and testing
    • Y10S73/01—Vibration
DE90300415T 1989-03-06 1990-01-15 Aus Silizium geätzter Kraftaufnehmer und Verfahren zu seiner Herstellung. Expired - Lifetime DE69005502T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/319,495 US4945773A (en) 1989-03-06 1989-03-06 Force transducer etched from silicon

Publications (2)

Publication Number Publication Date
DE69005502D1 DE69005502D1 (de) 1994-02-10
DE69005502T2 true DE69005502T2 (de) 1994-04-28

Family

ID=23242476

Family Applications (1)

Application Number Title Priority Date Filing Date
DE90300415T Expired - Lifetime DE69005502T2 (de) 1989-03-06 1990-01-15 Aus Silizium geätzter Kraftaufnehmer und Verfahren zu seiner Herstellung.

Country Status (3)

Country Link
US (1) US4945773A (de)
EP (1) EP0391512B1 (de)
DE (1) DE69005502T2 (de)

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EP0419021A3 (en) * 1989-08-30 1991-10-09 Schlumberger Industries Limited Sensors with vibrating elements
DE4000903C1 (de) * 1990-01-15 1990-08-09 Robert Bosch Gmbh, 7000 Stuttgart, De
US5146389A (en) * 1991-07-22 1992-09-08 Motorola, Inc. Differential capacitor structure and method
US5241864A (en) * 1992-06-17 1993-09-07 Motorola, Inc. Double pinned sensor utilizing a tensile film
US5456111A (en) * 1994-01-24 1995-10-10 Alliedsignal Inc. Capacitive drive vibrating beam accelerometer
US5646348A (en) 1994-08-29 1997-07-08 The Charles Stark Draper Laboratory, Inc. Micromechanical sensor with a guard band electrode and fabrication technique therefor
US5581035A (en) * 1994-08-29 1996-12-03 The Charles Stark Draper Laboratory, Inc. Micromechanical sensor with a guard band electrode
US5587518A (en) * 1994-12-23 1996-12-24 Ford Motor Company Accelerometer with a combined self-test and ground electrode
US5726480A (en) * 1995-01-27 1998-03-10 The Regents Of The University Of California Etchants for use in micromachining of CMOS Microaccelerometers and microelectromechanical devices and method of making the same
US5834646A (en) * 1995-04-12 1998-11-10 Sensonor Asa Force sensor device
US5742222A (en) * 1995-05-26 1998-04-21 Avi Systems, Inc. Direct adhering polysilicon based strain gage
US5747705A (en) * 1996-12-31 1998-05-05 Honeywell Inc. Method for making a thin film resonant microbeam absolute
US6303986B1 (en) 1998-07-29 2001-10-16 Silicon Light Machines Method of and apparatus for sealing an hermetic lid to a semiconductor die
US6707591B2 (en) 2001-04-10 2004-03-16 Silicon Light Machines Angled illumination for a single order light modulator based projection system
US6747781B2 (en) 2001-06-25 2004-06-08 Silicon Light Machines, Inc. Method, apparatus, and diffuser for reducing laser speckle
US6782205B2 (en) 2001-06-25 2004-08-24 Silicon Light Machines Method and apparatus for dynamic equalization in wavelength division multiplexing
US6829092B2 (en) 2001-08-15 2004-12-07 Silicon Light Machines, Inc. Blazed grating light valve
US6930364B2 (en) * 2001-09-13 2005-08-16 Silicon Light Machines Corporation Microelectronic mechanical system and methods
US6800238B1 (en) 2002-01-15 2004-10-05 Silicon Light Machines, Inc. Method for domain patterning in low coercive field ferroelectrics
US6728023B1 (en) 2002-05-28 2004-04-27 Silicon Light Machines Optical device arrays with optimized image resolution
US6767751B2 (en) * 2002-05-28 2004-07-27 Silicon Light Machines, Inc. Integrated driver process flow
US6822797B1 (en) 2002-05-31 2004-11-23 Silicon Light Machines, Inc. Light modulator structure for producing high-contrast operation using zero-order light
US6829258B1 (en) 2002-06-26 2004-12-07 Silicon Light Machines, Inc. Rapidly tunable external cavity laser
US6714337B1 (en) 2002-06-28 2004-03-30 Silicon Light Machines Method and device for modulating a light beam and having an improved gamma response
US6813059B2 (en) 2002-06-28 2004-11-02 Silicon Light Machines, Inc. Reduced formation of asperities in contact micro-structures
US6801354B1 (en) 2002-08-20 2004-10-05 Silicon Light Machines, Inc. 2-D diffraction grating for substantially eliminating polarization dependent losses
US6712480B1 (en) 2002-09-27 2004-03-30 Silicon Light Machines Controlled curvature of stressed micro-structures
US6806997B1 (en) 2003-02-28 2004-10-19 Silicon Light Machines, Inc. Patterned diffractive light modulator ribbon for PDL reduction
US6829077B1 (en) 2003-02-28 2004-12-07 Silicon Light Machines, Inc. Diffractive light modulator with dynamically rotatable diffraction plane
WO2009120193A1 (en) * 2008-03-26 2009-10-01 Hewlett-Packard Development Company, L.P. Capacitive sensor having cyclic and absolute electrode sets
CN110361116B (zh) * 2019-08-14 2020-11-20 合肥工业大学 一种四压力膜结构差动型石英梁谐振压力传感器

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2454103A1 (fr) * 1979-04-11 1980-11-07 Sagem Perfectionnements aux accelerometres pendulaires asservis
US4286459A (en) * 1979-10-30 1981-09-01 Johnson & Johnson Force sensor
CH642461A5 (fr) * 1981-07-02 1984-04-13 Centre Electron Horloger Accelerometre.
US4435737A (en) * 1981-12-16 1984-03-06 Rockwell International Corporation Low cost capacitive accelerometer
US4674319A (en) * 1985-03-20 1987-06-23 The Regents Of The University Of California Integrated circuit sensor
US4679434A (en) * 1985-07-25 1987-07-14 Litton Systems, Inc. Integrated force balanced accelerometer
JPS6263828A (ja) * 1985-09-06 1987-03-20 Yokogawa Electric Corp 振動式トランスジューサ
US4736629A (en) * 1985-12-20 1988-04-12 Silicon Designs, Inc. Micro-miniature accelerometer
GB8610253D0 (en) * 1986-04-26 1986-05-29 Stc Plc Resonator device
US4751849A (en) * 1986-06-17 1988-06-21 Paroscientific, Inc. Force-sensitive resonator load cell
US4805456A (en) * 1987-05-19 1989-02-21 Massachusetts Institute Of Technology Resonant accelerometer

Also Published As

Publication number Publication date
US4945773A (en) 1990-08-07
EP0391512B1 (de) 1993-12-29
EP0391512A1 (de) 1990-10-10
DE69005502D1 (de) 1994-02-10

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