DE60323405D1 - Zuverlässige gegenkontaktstruktur und techniken zu ihrer herstellung - Google Patents

Zuverlässige gegenkontaktstruktur und techniken zu ihrer herstellung

Info

Publication number
DE60323405D1
DE60323405D1 DE60323405T DE60323405T DE60323405D1 DE 60323405 D1 DE60323405 D1 DE 60323405D1 DE 60323405 T DE60323405 T DE 60323405T DE 60323405 T DE60323405 T DE 60323405T DE 60323405 D1 DE60323405 D1 DE 60323405D1
Authority
DE
Germany
Prior art keywords
techniques
manufacture
contact structure
reliable contact
contact surfaces
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60323405T
Other languages
English (en)
Inventor
Qing Ma
Kramadhati Ravi
Valluri Rao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Intel Corp
Original Assignee
Intel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intel Corp filed Critical Intel Corp
Application granted granted Critical
Publication of DE60323405D1 publication Critical patent/DE60323405D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/10—Auxiliary devices for switching or interrupting
    • H01P1/12—Auxiliary devices for switching or interrupting by mechanical chopper
    • H01P1/127—Strip line switches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0052—Special contact materials used for MEMS

Landscapes

  • Micromachines (AREA)
  • Manufacture Of Switches (AREA)
  • Coupling Device And Connection With Printed Circuit (AREA)
  • Bipolar Transistors (AREA)
  • Contacts (AREA)
  • Waveguide Switches, Polarizers, And Phase Shifters (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Electrical Connectors (AREA)
  • Air Bags (AREA)
DE60323405T 2002-08-29 2003-08-28 Zuverlässige gegenkontaktstruktur und techniken zu ihrer herstellung Expired - Lifetime DE60323405D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/231,565 US6621022B1 (en) 2002-08-29 2002-08-29 Reliable opposing contact structure
PCT/US2003/027383 WO2004021383A2 (en) 2002-08-29 2003-08-28 Reliable opposing contact structure and techniques to fabricate the same

Publications (1)

Publication Number Publication Date
DE60323405D1 true DE60323405D1 (de) 2008-10-16

Family

ID=27804818

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60323405T Expired - Lifetime DE60323405D1 (de) 2002-08-29 2003-08-28 Zuverlässige gegenkontaktstruktur und techniken zu ihrer herstellung

Country Status (10)

Country Link
US (2) US6621022B1 (de)
EP (1) EP1627403B1 (de)
JP (1) JP4293989B2 (de)
CN (1) CN100361253C (de)
AT (1) ATE407443T1 (de)
AU (1) AU2003265874A1 (de)
DE (1) DE60323405D1 (de)
MY (1) MY130484A (de)
TW (1) TWI241606B (de)
WO (1) WO2004021383A2 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3119255B2 (ja) * 1998-12-22 2000-12-18 日本電気株式会社 マイクロマシンスイッチおよびその製造方法
US6686820B1 (en) * 2002-07-11 2004-02-03 Intel Corporation Microelectromechanical (MEMS) switching apparatus
US6621022B1 (en) * 2002-08-29 2003-09-16 Intel Corporation Reliable opposing contact structure
US7317232B2 (en) * 2002-10-22 2008-01-08 Cabot Microelectronics Corporation MEM switching device
US20060232365A1 (en) * 2002-10-25 2006-10-19 Sumit Majumder Micro-machined relay
KR100513723B1 (ko) * 2002-11-18 2005-09-08 삼성전자주식회사 Ｍｅｍｓ스위치
US6809328B2 (en) * 2002-12-20 2004-10-26 Intel Corporation Protective coatings for radiation source components
US6847044B2 (en) * 2002-12-31 2005-01-25 Intel Corporation Electrical discharge gas plasma EUV source insulator components
US6825428B1 (en) * 2003-12-16 2004-11-30 Intel Corporation Protected switch and techniques to manufacture the same
CN100451737C (zh) * 2004-04-23 2009-01-14 研究三角协会 柔性静电激励器
US7977137B1 (en) * 2004-05-24 2011-07-12 The United States Of America As Represented By The Secretary Of The Air Force Latching zip-mode actuated mono wafer MEMS switch method
US7960804B1 (en) * 2004-05-24 2011-06-14 The United States of America as respresented by the Secretary of the Air Force Latching zip-mode actuated mono wafer MEMS switch
US7230513B2 (en) * 2004-11-20 2007-06-12 Wireless Mems, Inc. Planarized structure for a reliable metal-to-metal contact micro-relay MEMS switch
KR100744543B1 (ko) * 2005-12-08 2007-08-01 한국전자통신연구원 미세전자기계적 구조 스위치 및 그 제조방법
FR2901781B1 (fr) * 2006-05-31 2008-07-04 Thales Sa Structure de micro-commutateurs radiofrequence ou hyperfrequence et procede de fabrication d'une telle structure
US7468327B2 (en) * 2006-06-13 2008-12-23 Taiwan Semiconductor Manufacturing Co., Ltd. Methods of fabricating a micromechanical structure
KR100840644B1 (ko) * 2006-12-29 2008-06-24 동부일렉트로닉스 주식회사 스위칭 소자 및 그 제조 방법
JP4492677B2 (ja) * 2007-11-09 2010-06-30 セイコーエプソン株式会社 アクティブマトリクス装置、電気光学表示装置、および電子機器
US8210411B2 (en) 2008-09-23 2012-07-03 Ethicon Endo-Surgery, Inc. Motor-driven surgical cutting instrument
CN101620952B (zh) * 2008-12-19 2012-06-20 清华大学 一种欧姆接触式射频开关及其集成工艺
US20140268427A1 (en) * 2013-03-15 2014-09-18 Nhk Spring Co., Ltd Head gimbal assembly with diamond-like coating (dlc) at tongue/dimple interface to reduce friction and fretting wear

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4959515A (en) * 1984-05-01 1990-09-25 The Foxboro Company Micromechanical electric shunt and encoding devices made therefrom
US5083697A (en) * 1990-02-14 1992-01-28 Difrancesco Louis Particle-enhanced joining of metal surfaces
GB9111474D0 (en) * 1991-05-29 1991-07-17 De Beers Ind Diamond Boron doped diamond
US5258591A (en) * 1991-10-18 1993-11-02 Westinghouse Electric Corp. Low inductance cantilever switch
JPH05217451A (ja) * 1992-02-05 1993-08-27 Furukawa Electric Co Ltd:The 封入接点材料
US5479042A (en) * 1993-02-01 1995-12-26 Brooktree Corporation Micromachined relay and method of forming the relay
GB9309327D0 (en) * 1993-05-06 1993-06-23 Smith Charles G Bi-stable memory element
JPH07256820A (ja) * 1994-03-24 1995-10-09 Olympus Optical Co Ltd 摺動部材
DE4437259C1 (de) * 1994-10-18 1995-10-19 Siemens Ag Mikromechanisches Relais
US5638946A (en) * 1996-01-11 1997-06-17 Northeastern University Micromechanical switch with insulated switch contact
DE19736674C1 (de) * 1997-08-22 1998-11-26 Siemens Ag Mikromechanisches elektrostatisches Relais und Verfahren zu dessen Herstellung
US6054659A (en) * 1998-03-09 2000-04-25 General Motors Corporation Integrated electrostatically-actuated micromachined all-metal micro-relays
US6196738B1 (en) * 1998-07-31 2001-03-06 Shin-Etsu Polymer Co., Ltd. Key top element, push button switch element and method for manufacturing same
JP3860348B2 (ja) * 1998-11-19 2006-12-20 ローム株式会社 サーマルプリントヘッド、およびその製造方法
US6765300B1 (en) * 1999-02-04 2004-07-20 Tyco Electronics Logistics, Ag Micro-relay
US6396368B1 (en) * 1999-11-10 2002-05-28 Hrl Laboratories, Llc CMOS-compatible MEM switches and method of making
JP2001152319A (ja) * 1999-11-25 2001-06-05 Kohan Kogyo Kk 密着性に優れた表面処理層を有する表面処理金属部材、その表面処理方法、及びその表面処理方法を用いてなる回転機器用部材
US6496351B2 (en) * 1999-12-15 2002-12-17 Jds Uniphase Inc. MEMS device members having portions that contact a substrate and associated methods of operating
US6384353B1 (en) * 2000-02-01 2002-05-07 Motorola, Inc. Micro-electromechanical system device
WO2002001584A1 (en) * 2000-06-28 2002-01-03 The Regents Of The University Of California Capacitive microelectromechanical switches
JP2002025346A (ja) * 2000-07-13 2002-01-25 Sumitomo Electric Ind Ltd 導電部材
US6653730B2 (en) * 2000-12-14 2003-11-25 Intel Corporation Electronic assembly with high capacity thermal interface
US6440767B1 (en) * 2001-01-23 2002-08-27 Hrl Laboratories, Llc Monolithic single pole double throw RF MEMS switch
KR100467318B1 (ko) * 2002-06-04 2005-01-24 한국전자통신연구원 저항식 전자기계적 접촉을 이용하는 미세전자기계적 소자
US6621022B1 (en) * 2002-08-29 2003-09-16 Intel Corporation Reliable opposing contact structure

Also Published As

Publication number Publication date
CN1695217A (zh) 2005-11-09
ATE407443T1 (de) 2008-09-15
US6706981B1 (en) 2004-03-16
CN100361253C (zh) 2008-01-09
AU2003265874A1 (en) 2004-03-19
WO2004021383A2 (en) 2004-03-11
EP1627403A1 (de) 2006-02-22
TWI241606B (en) 2005-10-11
US20040040825A1 (en) 2004-03-04
EP1627403B1 (de) 2008-09-03
TW200405371A (en) 2004-04-01
MY130484A (en) 2007-06-29
US6621022B1 (en) 2003-09-16
JP4293989B2 (ja) 2009-07-08
JP2005537616A (ja) 2005-12-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition