DE602005006378D1 - Anschlusselemente für eine automatische Testeinrichtung zur Prüfung von integrierten Schaltungen - Google Patents

Anschlusselemente für eine automatische Testeinrichtung zur Prüfung von integrierten Schaltungen

Info

Publication number
DE602005006378D1
DE602005006378D1 DE602005006378T DE602005006378T DE602005006378D1 DE 602005006378 D1 DE602005006378 D1 DE 602005006378D1 DE 602005006378 T DE602005006378 T DE 602005006378T DE 602005006378 T DE602005006378 T DE 602005006378T DE 602005006378 D1 DE602005006378 D1 DE 602005006378D1
Authority
DE
Germany
Prior art keywords
integrated circuits
test device
connection elements
automatic test
testing integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005006378T
Other languages
English (en)
Other versions
DE602005006378T2 (de
Inventor
Rolf Harjung
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Verigy Singapore Pte Ltd
Original Assignee
Verigy Singapore Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Verigy Singapore Pte Ltd filed Critical Verigy Singapore Pte Ltd
Publication of DE602005006378D1 publication Critical patent/DE602005006378D1/de
Application granted granted Critical
Publication of DE602005006378T2 publication Critical patent/DE602005006378T2/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31917—Stimuli generation or application of test patterns to the device under test [DUT]
    • G01R31/31924—Voltage or current aspects, e.g. driver, receiver
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/30—Marginal testing, e.g. by varying supply voltage
    • G01R31/3004—Current or voltage test
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/31813—Test pattern generators
DE602005006378T 2005-03-11 2005-03-11 Anschlusselemente für eine automatische Testeinrichtung zur Prüfung von integrierten Schaltungen Active DE602005006378T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP05101915A EP1701174B1 (de) 2005-03-11 2005-03-11 Anschlusselemente für eine automatische Testeinrichtung zur Prüfung von integrierten Schaltungen

Publications (2)

Publication Number Publication Date
DE602005006378D1 true DE602005006378D1 (de) 2008-06-12
DE602005006378T2 DE602005006378T2 (de) 2009-06-04

Family

ID=34938953

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005006378T Active DE602005006378T2 (de) 2005-03-11 2005-03-11 Anschlusselemente für eine automatische Testeinrichtung zur Prüfung von integrierten Schaltungen

Country Status (4)

Country Link
US (1) US7397235B2 (de)
EP (1) EP1701174B1 (de)
JP (1) JP4624944B2 (de)
DE (1) DE602005006378T2 (de)

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US6965165B2 (en) * 1998-12-21 2005-11-15 Mou-Shiung Lin Top layers of metal for high performance IC's
JP4735976B2 (ja) * 2006-05-24 2011-07-27 横河電機株式会社 電源装置およびこれを用いた半導体試験システム
US20090063085A1 (en) * 2007-09-05 2009-03-05 Teradyne,Inc. Pmu testing via a pe stage
KR101414980B1 (ko) * 2008-06-30 2014-07-09 삼성전자주식회사 테스트 시스템
IT1398937B1 (it) * 2010-02-17 2013-03-28 St Microelectronics Srl Metodo per eseguire un testing elettrico di dispositivi elettronici
US8779796B2 (en) * 2010-09-29 2014-07-15 Taiwan Semiconductor Manufacturing Co., Ltd. Method and apparatus for device parameter measurement
CN102890231B (zh) * 2011-07-20 2016-03-30 中国科学院微电子研究所 高精度集成电路器件测试设备
KR20130126337A (ko) * 2012-05-11 2013-11-20 에스케이하이닉스 주식회사 반도체 장치의 테스트 장비, 반도체 장치의 테스트 시스템 및 반도체 장치의 테스트 방법
US8760180B1 (en) * 2013-07-29 2014-06-24 Analog Test Engines Systems and methods mitigating temperature dependence of circuitry in electronic devices
TWI567396B (zh) * 2014-06-24 2017-01-21 偉詮電子股份有限公司 過電流偵測晶片，過電流調校電路及過電流偵測調校方法
CN105301483B (zh) * 2014-07-23 2019-01-08 中芯国际集成电路制造(上海)有限公司 用于集成电路的检测电路和方法
CN107003344B (zh) * 2014-09-19 2019-11-01 艾利维特半导体公司 参数引脚测量单元高电压扩展
US10451653B2 (en) 2014-12-19 2019-10-22 Teradyne, Inc. Controlling a per-pin measurement unit
US10181853B2 (en) * 2016-03-11 2019-01-15 Analog Devices Global Configurable hardware platform for measurement or control
EP3270175B1 (de) * 2016-07-15 2020-12-16 Nxp B.V. Eingabe-/ausgabezelle
KR102526757B1 (ko) * 2017-08-30 2023-04-27 삼성전자주식회사 분광기용 집광 광학계 및 이를 포함하는 라만 분광 시스템
US10972063B2 (en) * 2018-10-17 2021-04-06 Analog Devices Global Unlimited Company Amplifier systems for measuring a wide range of current
US11165434B2 (en) * 2019-03-15 2021-11-02 Analog Devices International Unlimited Company Leakage reduction for multi-function configurable circuit
US11105843B2 (en) 2019-10-10 2021-08-31 Analog Devices International Unlimited Company Robust architecture for mode switching of a force and measure apparatus
US11531064B2 (en) * 2020-11-04 2022-12-20 Stmicroelectronics S.R.L. Method for testing a digital electronic circuit to be tested, corresponding test system and computer program product
CN112698240A (zh) * 2020-11-23 2021-04-23 苏州华兴源创科技股份有限公司 开短路测试装置
EP4177618A1 (de) * 2021-11-04 2023-05-10 Mettler-Toledo GmbH Schaltung zur impedanzmessung
CN113960456B (zh) * 2021-12-20 2022-03-29 深圳市永达电子信息股份有限公司 电路接口微损伤自动检测方法
WO2023193319A1 (en) * 2022-04-05 2023-10-12 National Instruments Corporation Digital architecture for continuity test

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US4445111A (en) * 1980-09-15 1984-04-24 John Fluke Mfg. Co., Inc. Bi-polar electronic signal converters with single polarity accurate reference source
US5059889A (en) * 1990-03-08 1991-10-22 Texas Instruments Incorporated Parametric measurement unit/device power supply for semiconductor test system
JP3119335B2 (ja) * 1994-03-08 2000-12-18 横河電機株式会社 Ｉｃ試験装置
US5773990A (en) * 1995-09-29 1998-06-30 Megatest Corporation Integrated circuit test power supply
JPH1164436A (ja) * 1997-08-21 1999-03-05 Advantest Corp 半導体試験装置
US6275023B1 (en) * 1999-02-03 2001-08-14 Hitachi Electronics Engineering Co., Ltd. Semiconductor device tester and method for testing semiconductor device
US6377065B1 (en) * 2000-04-13 2002-04-23 Advantest Corp. Glitch detection for semiconductor test system
JP2001311758A (ja) * 2000-04-28 2001-11-09 Ando Electric Co Ltd 半導体集積回路試験装置
JP4627924B2 (ja) * 2001-05-30 2011-02-09 株式会社アドバンテスト 半導体デバイス試験装置
JP2003185716A (ja) * 2001-10-12 2003-07-03 Hitachi Electronics Eng Co Ltd 半導体試験装置のデバイス用電源制御方法及びデバイス用電源装置
US6750797B1 (en) * 2003-01-31 2004-06-15 Inovys Corporation Programmable precision current controlling apparatus
JP3978672B2 (ja) * 2003-03-26 2007-09-19 横河電機株式会社 電圧印加電流測定器

Also Published As

Publication number Publication date
US20060202707A1 (en) 2006-09-14
US7397235B2 (en) 2008-07-08
JP4624944B2 (ja) 2011-02-02
JP2006250941A (ja) 2006-09-21
EP1701174B1 (de) 2008-04-30
DE602005006378T2 (de) 2009-06-04
EP1701174A1 (de) 2006-09-13

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