DE60129992D1 - Mikrosensor zur messung von geschwindigkeit und richtungswinkel eines luftstroms - Google Patents

Mikrosensor zur messung von geschwindigkeit und richtungswinkel eines luftstroms

Info

Publication number
DE60129992D1
DE60129992D1 DE60129992T DE60129992T DE60129992D1 DE 60129992 D1 DE60129992 D1 DE 60129992D1 DE 60129992 T DE60129992 T DE 60129992T DE 60129992 T DE60129992 T DE 60129992T DE 60129992 D1 DE60129992 D1 DE 60129992D1
Authority
DE
Germany
Prior art keywords
velocity
microsensor
air stream
incoming air
airflow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60129992T
Other languages
English (en)
Other versions
DE60129992T2 (de
Inventor
Ulrich Bonne
Steve R Weeres
Ernie A Satrem
David Kubisiak
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
Honeywell International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Application granted granted Critical
Publication of DE60129992D1 publication Critical patent/DE60129992D1/de
Publication of DE60129992T2 publication Critical patent/DE60129992T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G01F1/699—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters by control of a separate heating or cooling element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
DE60129992T 2000-09-01 2001-08-30 Mikrosensor zur messung von geschwindigkeit und richtungswinkel eines luftstroms Expired - Lifetime DE60129992T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US653399 2000-09-01
US09/653,399 US6502459B1 (en) 2000-09-01 2000-09-01 Microsensor for measuring velocity and angular direction of an incoming air stream
PCT/US2001/027041 WO2002018884A2 (en) 2000-09-01 2001-08-30 Microsensor for measuring velocity and angular direction of an incoming air stream

Publications (2)

Publication Number Publication Date
DE60129992D1 true DE60129992D1 (de) 2007-09-27
DE60129992T2 DE60129992T2 (de) 2008-05-15

Family

ID=24620710

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60129992T Expired - Lifetime DE60129992T2 (de) 2000-09-01 2001-08-30 Mikrosensor zur messung von geschwindigkeit und richtungswinkel eines luftstroms

Country Status (7)

Country Link
US (1) US6502459B1 (de)
EP (1) EP1314042B1 (de)
JP (1) JP2004507753A (de)
KR (1) KR100825998B1 (de)
AT (1) ATE370418T1 (de)
DE (1) DE60129992T2 (de)
WO (1) WO2002018884A2 (de)

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Also Published As

Publication number Publication date
US6502459B1 (en) 2003-01-07
DE60129992T2 (de) 2008-05-15
WO2002018884A2 (en) 2002-03-07
EP1314042B1 (de) 2007-08-15
JP2004507753A (ja) 2004-03-11
KR100825998B1 (ko) 2008-04-29
ATE370418T1 (de) 2007-09-15
EP1314042A2 (de) 2003-05-28
WO2002018884A3 (en) 2002-06-20
KR20030064396A (ko) 2003-07-31

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