DE60036754D1 - Vorrichtung zur Kalibrierung von Temperaturmessungen und zur Messung von elektrischen Strömen - Google Patents

Vorrichtung zur Kalibrierung von Temperaturmessungen und zur Messung von elektrischen Strömen

Info

Publication number
DE60036754D1
DE60036754D1 DE60036754T DE60036754T DE60036754D1 DE 60036754 D1 DE60036754 D1 DE 60036754D1 DE 60036754 T DE60036754 T DE 60036754T DE 60036754 T DE60036754 T DE 60036754T DE 60036754 D1 DE60036754 D1 DE 60036754D1
Authority
DE
Germany
Prior art keywords
temperature measurements
electrical currents
measuring electrical
calibrating temperature
calibrating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60036754T
Other languages
English (en)
Other versions
DE60036754T2 (de
Inventor
David Blau
Elia Jadushlever
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Application granted granted Critical
Publication of DE60036754D1 publication Critical patent/DE60036754D1/de
Publication of DE60036754T2 publication Critical patent/DE60036754T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/10—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void
    • G01J1/16—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void using electric radiation detectors
    • G01J1/18—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void using electric radiation detectors using comparison with a reference electric value
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/52—Radiation pyrometry, e.g. infrared or optical thermometry using comparison with reference sources, e.g. disappearing-filament pyrometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Radiation Pyrometers (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
DE60036754T 1999-07-09 2000-07-07 Vorrichtung zur Kalibrierung von Temperaturmessungen und zur Messung von elektrischen Strömen Expired - Fee Related DE60036754T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US351039 1999-07-09
US09/351,039 US6280081B1 (en) 1999-07-09 1999-07-09 Methods and apparatus for calibrating temperature measurements and measuring currents

Publications (2)

Publication Number Publication Date
DE60036754D1 true DE60036754D1 (de) 2007-11-29
DE60036754T2 DE60036754T2 (de) 2008-07-24

Family

ID=23379329

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60036754T Expired - Fee Related DE60036754T2 (de) 1999-07-09 2000-07-07 Vorrichtung zur Kalibrierung von Temperaturmessungen und zur Messung von elektrischen Strömen

Country Status (6)

Country Link
US (1) US6280081B1 (de)
EP (1) EP1067371B1 (de)
JP (1) JP4531212B2 (de)
KR (1) KR20010015266A (de)
DE (1) DE60036754T2 (de)
TW (1) TW493064B (de)

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US6280081B1 (en) * 1999-07-09 2001-08-28 Applied Materials, Inc. Methods and apparatus for calibrating temperature measurements and measuring currents
US6688119B2 (en) * 2000-12-22 2004-02-10 General Electric Company Methods and apparatus for increasing appliance measuring system accuracy
US7052180B2 (en) * 2002-01-04 2006-05-30 Kelvin Shih LED junction temperature tester
US6835914B2 (en) * 2002-11-05 2004-12-28 Mattson Technology, Inc. Apparatus and method for reducing stray light in substrate processing chambers
US6842133B2 (en) * 2003-04-30 2005-01-11 Intel Corporation Strobe through differential signaling
US7455448B2 (en) * 2004-07-26 2008-11-25 Texas Instruments Incorporated Rapid thermal anneal equipment and method using sichrome film
US7197421B2 (en) * 2004-11-30 2007-03-27 Broadcom Corporation Method and system for a temperature sensor for transmitter output power compensation
US7693491B2 (en) * 2004-11-30 2010-04-06 Broadcom Corporation Method and system for transmitter output power compensation
KR100608111B1 (ko) * 2005-02-07 2006-08-02 삼성전자주식회사 센싱온도를 조절할 수 있는 온도센서
US8372203B2 (en) * 2005-09-30 2013-02-12 Applied Materials, Inc. Apparatus temperature control and pattern compensation
US7691204B2 (en) * 2005-09-30 2010-04-06 Applied Materials, Inc. Film formation apparatus and methods including temperature and emissivity/pattern compensation
CN101371492B (zh) 2006-01-17 2012-08-15 美国博通公司 以太网供电控制器及对供电设备检测和分级的方法
JP2007256251A (ja) * 2006-02-24 2007-10-04 Hitachi High-Technologies Corp データ収集処理装置
EP1903653B1 (de) * 2006-08-31 2018-09-26 Avago Technologies General IP (Singapore) Pte. Ltd. Überspannungsschutz für Strom- und Datenanwendungen
US7679878B2 (en) * 2007-12-21 2010-03-16 Broadcom Corporation Capacitor sharing surge protection circuit
US8182139B2 (en) * 2008-05-30 2012-05-22 Apple Inc. Calibration of temperature sensing circuitry in an electronic device
EP2659245B1 (de) 2010-12-30 2023-06-07 Exergen Corporation Infrarotsensor und verfahren für elektrische überwachung
CN102759661A (zh) * 2011-04-28 2012-10-31 鸿富锦精密工业（深圳）有限公司 温度补偿电阻测定电路及方法
US9347836B2 (en) * 2011-11-15 2016-05-24 Ati Technologies Ulc Dynamic voltage reference for sampling delta based temperature sensor
US9506953B2 (en) * 2012-01-18 2016-11-29 Ut-Battelle, Llc High speed high dynamic range high accuracy measurement system
WO2013148066A1 (en) * 2012-03-30 2013-10-03 Applied Materials, Inc. Laser noise elimination in transmission thermometry
FR2989777B1 (fr) * 2012-04-23 2014-10-24 Snecma Correction d'une mesure de temperature d'une sonde de temperature de type a resistance thermometrique
CN102818637B (zh) * 2012-08-03 2014-06-04 中国科学院上海技术物理研究所 短波红外探测器阵列读出电路适用的ctia结构输入级
CN102818639A (zh) * 2012-08-03 2012-12-12 中国科学院上海技术物理研究所 一种短波红外探测器弱信号读出的模拟信号链结构
US9752929B2 (en) * 2014-05-08 2017-09-05 Pinnacle Imaging Corporation Light-detecting device and method for converting optical radiation on switched conductivity diodes
JP6024938B1 (ja) * 2014-12-16 2016-11-16 株式会社東京精密 半導体ウェーハの検査装置及び半導体ウェーハの検査方法
US10378969B2 (en) * 2017-05-10 2019-08-13 Infineon Technologies Ag Temperature sensor
CN109116403A (zh) * 2017-06-23 2019-01-01 北京中科信电子装备有限公司 一种精确采集束流电路
WO2020139208A1 (en) * 2018-12-25 2020-07-02 Ozyegin Universitesi A preferred system for measuring junction temperature of photonics devices
CN111366837B (zh) * 2020-02-26 2022-03-25 上海申矽凌微电子科技有限公司 自适应温度芯片量产校准方法及系统
US20230243987A1 (en) * 2020-07-06 2023-08-03 Westinghouse Electric Company Llc Self-powered nuclear radiation detector and method of correcting a temperature-related change of an output signal of same

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JPS55166635A (en) * 1979-06-15 1980-12-25 Canon Inc Voltage detecting device of camera
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WO1996010865A1 (en) * 1994-10-03 1996-04-11 Motorola Inc. Method and apparatus for providing a low voltage level shift
US5660472A (en) 1994-12-19 1997-08-26 Applied Materials, Inc. Method and apparatus for measuring substrate temperatures
US5755511A (en) * 1994-12-19 1998-05-26 Applied Materials, Inc. Method and apparatus for measuring substrate temperatures
US5646619A (en) * 1995-04-26 1997-07-08 Lucent Technologies Inc. Self-calibrating high speed D/A converter
US5820261A (en) 1995-07-26 1998-10-13 Applied Materials, Inc. Method and apparatus for infrared pyrometer calibration in a rapid thermal processing system
US5712590A (en) * 1995-12-21 1998-01-27 Dries; Michael F. Temperature stabilized bandgap voltage reference circuit
JP3181528B2 (ja) * 1996-03-07 2001-07-03 松下電器産業株式会社 基準電圧源回路及び電圧フィードバック回路
JPH10112614A (ja) * 1996-10-07 1998-04-28 Hitachi Ltd バイアス電流供給方法およびその回路
FR2755806B1 (fr) * 1996-11-14 1999-01-08 Sgs Thomson Microelectronics Convertisseur numerique-analogique a sources de courant a autocalibration
US6037577A (en) * 1997-03-11 2000-03-14 Kabushiki Kaisha Toshiba Amplifying solid-state image pickup device and operating method of the same
US6052020A (en) * 1997-09-10 2000-04-18 Intel Corporation Low supply voltage sub-bandgap reference
US6140868A (en) * 1999-03-09 2000-10-31 Lucent Technologies, Inc. Master tuning circuit for adjusting a slave transistor to follow a master resistor
US6280081B1 (en) * 1999-07-09 2001-08-28 Applied Materials, Inc. Methods and apparatus for calibrating temperature measurements and measuring currents

Also Published As

Publication number Publication date
EP1067371B1 (de) 2007-10-17
DE60036754T2 (de) 2008-07-24
KR20010015266A (ko) 2001-02-26
TW493064B (en) 2002-07-01
EP1067371A2 (de) 2001-01-10
EP1067371A3 (de) 2005-01-05
JP2001091361A (ja) 2001-04-06
JP4531212B2 (ja) 2010-08-25
US6280081B1 (en) 2001-08-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee