DE60013118D1 - Mikromechanischer elektrostatischer betätiger mit luftspalt - Google Patents

Mikromechanischer elektrostatischer betätiger mit luftspalt

Info

Publication number
DE60013118D1
DE60013118D1 DE60013118T DE60013118T DE60013118D1 DE 60013118 D1 DE60013118 D1 DE 60013118D1 DE 60013118 T DE60013118 T DE 60013118T DE 60013118 T DE60013118 T DE 60013118T DE 60013118 D1 DE60013118 D1 DE 60013118D1
Authority
DE
Germany
Prior art keywords
air gap
electrostatic
electromagnetic radiation
flexible composite
medial portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60013118T
Other languages
English (en)
Inventor
Halden Goodwin-Johansson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MCNC
Original Assignee
MCNC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MCNC filed Critical MCNC
Application granted granted Critical
Publication of DE60013118D1 publication Critical patent/DE60013118D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N11/00—Generators or motors not provided for elsewhere; Alleged perpetua mobilia obtained by electric or magnetic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00642—Manufacture or treatment of devices or systems in or on a substrate for improving the physical properties of a device
    • B81C1/0065—Mechanical properties
    • B81C1/00666—Treatments for controlling internal stress or strain in MEMS structures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/032—Bimorph and unimorph actuators, e.g. piezo and thermo
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0118—Cantilevers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0161—Controlling physical properties of the material
    • B81C2201/0163—Controlling internal stress of deposited layers
    • B81C2201/0167—Controlling internal stress of deposited layers by adding further layers of materials having complementary strains, i.e. compressive or tensile strain
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/353—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being a shutter, baffle, beam dump or opaque element
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3566—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details involving bending a beam, e.g. with cantilever
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3594—Characterised by additional functional means, e.g. means for variably attenuating or branching or means for switching differently polarized beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0081—Electrostatic relays; Electro-adhesion relays making use of micromechanics with a tapered air-gap between fixed and movable electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
DE60013118T 1999-05-27 2000-05-19 Mikromechanischer elektrostatischer betätiger mit luftspalt Expired - Lifetime DE60013118D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/320,891 US6236491B1 (en) 1999-05-27 1999-05-27 Micromachined electrostatic actuator with air gap
PCT/US2000/013759 WO2000073839A1 (en) 1999-05-27 2000-05-19 Micromachined electrostatic actuator with air gap

Publications (1)

Publication Number Publication Date
DE60013118D1 true DE60013118D1 (de) 2004-09-23

Family

ID=23248265

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60013118T Expired - Lifetime DE60013118D1 (de) 1999-05-27 2000-05-19 Mikromechanischer elektrostatischer betätiger mit luftspalt

Country Status (9)

Country Link
US (1) US6236491B1 (de)
EP (1) EP1183566B1 (de)
JP (2) JP4068346B2 (de)
KR (1) KR100614140B1 (de)
AT (1) ATE274196T1 (de)
AU (1) AU4857800A (de)
CA (1) CA2368129C (de)
DE (1) DE60013118D1 (de)
WO (1) WO2000073839A1 (de)

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Also Published As

Publication number Publication date
US6236491B1 (en) 2001-05-22
ATE274196T1 (de) 2004-09-15
JP2003501274A (ja) 2003-01-14
WO2000073839A1 (en) 2000-12-07
CA2368129A1 (en) 2000-12-07
EP1183566B1 (de) 2004-08-18
JP4068346B2 (ja) 2008-03-26
AU4857800A (en) 2000-12-18
EP1183566A1 (de) 2002-03-06
JP2004312999A (ja) 2004-11-04
JP4465219B2 (ja) 2010-05-19
CA2368129C (en) 2005-04-26
KR100614140B1 (ko) 2006-08-25
KR20020023942A (ko) 2002-03-29

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