DE60001479D1 - Mikroelektromechanische optische Vorrichtung - Google Patents

Mikroelektromechanische optische Vorrichtung

Info

Publication number
DE60001479D1
DE60001479D1 DE60001479T DE60001479T DE60001479D1 DE 60001479 D1 DE60001479 D1 DE 60001479D1 DE 60001479 T DE60001479 T DE 60001479T DE 60001479 T DE60001479 T DE 60001479T DE 60001479 D1 DE60001479 D1 DE 60001479D1
Authority
DE
Germany
Prior art keywords
optical device
microelectromechanical optical
microelectromechanical
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60001479T
Other languages
English (en)
Other versions
DE60001479T2 (de
Inventor
Aksyuk Vladimir Anatolyevich
David John Bishop
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nokia of America Corp
Original Assignee
Lucent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lucent Technologies Inc filed Critical Lucent Technologies Inc
Application granted granted Critical
Publication of DE60001479D1 publication Critical patent/DE60001479D1/de
Publication of DE60001479T2 publication Critical patent/DE60001479T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/004—Angular deflection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0062—Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B5/00—Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0003—MEMS mechanisms for assembling automatically hinged components, self-assembly devices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0866—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches
DE60001479T 1999-09-03 2000-08-21 Mikroelektromechanische optische Vorrichtung Expired - Lifetime DE60001479T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/390,158 US6392221B1 (en) 1997-12-22 1999-09-03 Micro-electro-mechanical optical device

Publications (2)

Publication Number Publication Date
DE60001479D1 true DE60001479D1 (de) 2003-04-03
DE60001479T2 DE60001479T2 (de) 2003-12-18

Family

ID=23541325

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60001479T Expired - Lifetime DE60001479T2 (de) 1999-09-03 2000-08-21 Mikroelektromechanische optische Vorrichtung

Country Status (4)

Country Link
US (1) US6392221B1 (de)
EP (1) EP1104746B1 (de)
JP (1) JP3723431B2 (de)
DE (1) DE60001479T2 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6300619B1 (en) * 1997-12-22 2001-10-09 Lucent Technologies Inc. Micro-electro-mechanical optical device
US6449406B1 (en) 1999-05-28 2002-09-10 Omm, Inc. Micromachined optomechanical switching devices
US6445841B1 (en) 1999-05-28 2002-09-03 Omm, Inc. Optomechanical matrix switches including collimator arrays
US6445840B1 (en) 1999-05-28 2002-09-03 Omm, Inc. Micromachined optical switching devices
US6453083B1 (en) 1999-05-28 2002-09-17 Anis Husain Micromachined optomechanical switching cell with parallel plate actuator and on-chip power monitoring
EP1193530B1 (de) * 2000-09-28 2006-02-01 Xerox Corporation Verfahren zur Herstellung einer Spiegelstruktur
US6632374B1 (en) * 2000-09-28 2003-10-14 Xerox Corporation Method for an optical switch on a silicon on insulator substrate
US6504643B1 (en) * 2000-09-28 2003-01-07 Xerox Corporation Structure for an optical switch on a substrate
US6632373B1 (en) * 2000-09-28 2003-10-14 Xerox Corporation Method for an optical switch on a substrate
US6522801B1 (en) * 2000-10-10 2003-02-18 Agere Systems Inc. Micro-electro-optical mechanical device having an implanted dopant included therein and a method of manufacture therefor
US6870659B2 (en) * 2002-10-11 2005-03-22 Exajoule, Llc Micromirror systems with side-supported mirrors and concealed flexure members
US6825968B2 (en) * 2002-10-11 2004-11-30 Exajoule, Llc Micromirror systems with electrodes configured for sequential mirror attraction
US6798560B2 (en) * 2002-10-11 2004-09-28 Exajoula, Llc Micromirror systems with open support structures
US6975788B2 (en) * 2002-12-09 2005-12-13 Lucent Technologies, Inc. Optical switch having combined input/output fiber array
US6900922B2 (en) * 2003-02-24 2005-05-31 Exajoule, Llc Multi-tilt micromirror systems with concealed hinge structures
US6906848B2 (en) * 2003-02-24 2005-06-14 Exajoule, Llc Micromirror systems with concealed multi-piece hinge structures
US7038824B2 (en) * 2003-11-18 2006-05-02 Honeywell International Inc. Dynamic reflector array and method of making the same
TWI239414B (en) * 2004-06-25 2005-09-11 Ind Tech Res Inst MEMS optical switch with self-assembly structure
US7324323B2 (en) * 2005-01-13 2008-01-29 Lucent Technologies Inc. Photo-sensitive MEMS structure

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5658636A (en) * 1995-01-27 1997-08-19 Carnegie Mellon University Method to prevent adhesion of micromechanical structures
US5903380A (en) 1997-05-01 1999-05-11 Rockwell International Corp. Micro-electromechanical (MEM) optical resonator and method
US6116756A (en) * 1997-12-12 2000-09-12 Xerox Corporation Monolithic scanning light emitting devices
US5994159A (en) * 1997-12-22 1999-11-30 Lucent Technologies, Inc. Self-assemblying micro-mechanical device
US6137623A (en) * 1998-03-17 2000-10-24 Mcnc Modulatable reflectors and methods for using same
US6137941A (en) * 1998-09-03 2000-10-24 Lucent Technologies, Inc. Variable optical attenuator

Also Published As

Publication number Publication date
DE60001479T2 (de) 2003-12-18
US6392221B1 (en) 2002-05-21
EP1104746B1 (de) 2003-02-26
EP1104746A1 (de) 2001-06-06
JP3723431B2 (ja) 2005-12-07
JP2001117028A (ja) 2001-04-27

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