DE59811004D1 - Herstellungsverfahren für mikromechanische vorrichtung - Google Patents

Herstellungsverfahren für mikromechanische vorrichtung

Info

Publication number
DE59811004D1
DE59811004D1 DE59811004T DE59811004T DE59811004D1 DE 59811004 D1 DE59811004 D1 DE 59811004D1 DE 59811004 T DE59811004 T DE 59811004T DE 59811004 T DE59811004 T DE 59811004T DE 59811004 D1 DE59811004 D1 DE 59811004D1
Authority
DE
Germany
Prior art keywords
manufacturing
micromechanical device
micromechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE59811004T
Other languages
English (en)
Inventor
Karsten Funk
Wilhelm Frey
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE59811004T priority Critical patent/DE59811004D1/de
Application granted granted Critical
Publication of DE59811004D1 publication Critical patent/DE59811004D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/004—Angular deflection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00142—Bridges
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0292—Sensors not provided for in B81B2201/0207 - B81B2201/0285
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
    • B81C2201/019—Bonding or gluing multiple substrate layers
DE59811004T 1997-12-22 1998-10-26 Herstellungsverfahren für mikromechanische vorrichtung Expired - Lifetime DE59811004D1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE59811004T DE59811004D1 (de) 1997-12-22 1998-10-26 Herstellungsverfahren für mikromechanische vorrichtung

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19757197A DE19757197A1 (de) 1997-12-22 1997-12-22 Herstellungsverfahren für mikromechanische Vorrichtung
PCT/DE1998/003129 WO1999032919A1 (de) 1997-12-22 1998-10-26 Herstellungsverfahren für mikromechanische vorrichtung
DE59811004T DE59811004D1 (de) 1997-12-22 1998-10-26 Herstellungsverfahren für mikromechanische vorrichtung

Publications (1)

Publication Number Publication Date
DE59811004D1 true DE59811004D1 (de) 2004-04-22

Family

ID=7852965

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19757197A Withdrawn DE19757197A1 (de) 1997-12-22 1997-12-22 Herstellungsverfahren für mikromechanische Vorrichtung
DE59811004T Expired - Lifetime DE59811004D1 (de) 1997-12-22 1998-10-26 Herstellungsverfahren für mikromechanische vorrichtung

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19757197A Withdrawn DE19757197A1 (de) 1997-12-22 1997-12-22 Herstellungsverfahren für mikromechanische Vorrichtung

Country Status (5)

Country Link
US (1) US6369931B1 (de)
EP (1) EP0976005B1 (de)
JP (1) JP4401442B2 (de)
DE (2) DE19757197A1 (de)
WO (1) WO1999032919A1 (de)

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WO2000025170A1 (de) * 1998-10-28 2000-05-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanisches bauelement mit schwingkörper
US6798312B1 (en) 1999-09-21 2004-09-28 Rockwell Automation Technologies, Inc. Microelectromechanical system (MEMS) analog electrical isolator
US6452238B1 (en) * 1999-10-04 2002-09-17 Texas Instruments Incorporated MEMS wafer level package
JP4161493B2 (ja) * 1999-12-10 2008-10-08 ソニー株式会社 エッチング方法およびマイクロミラーの製造方法
DE10004964B4 (de) * 2000-02-04 2010-07-29 Robert Bosch Gmbh Mikromechanische Kappenstruktur
JP2001326367A (ja) * 2000-05-12 2001-11-22 Denso Corp センサおよびその製造方法
GB2371119A (en) * 2000-09-25 2002-07-17 Marconi Caswell Ltd Micro electro-mechanical systems
FI111457B (fi) * 2000-10-02 2003-07-31 Nokia Corp Mikromekaaninen rakenne
JP2002258174A (ja) * 2001-03-02 2002-09-11 Seiko Epson Corp 光変調装置及びそれを有する電子機器
US6815243B2 (en) * 2001-04-26 2004-11-09 Rockwell Automation Technologies, Inc. Method of fabricating a microelectromechanical system (MEMS) device using a pre-patterned substrate
US6756310B2 (en) * 2001-09-26 2004-06-29 Rockwell Automation Technologies, Inc. Method for constructing an isolate microelectromechanical system (MEMS) device using surface fabrication techniques
US6761829B2 (en) * 2001-04-26 2004-07-13 Rockwell Automation Technologies, Inc. Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void
JP3827977B2 (ja) * 2001-08-20 2006-09-27 富士通株式会社 マイクロミラー素子の製造方法
US6690178B2 (en) 2001-10-26 2004-02-10 Rockwell Automation Technologies, Inc. On-board microelectromechanical system (MEMS) sensing device for power semiconductors
US6660564B2 (en) * 2002-01-25 2003-12-09 Sony Corporation Wafer-level through-wafer packaging process for MEMS and MEMS package produced thereby
US6972883B2 (en) 2002-02-15 2005-12-06 Ricoh Company, Ltd. Vibration mirror, optical scanning device, and image forming using the same, method for making the same, and method for scanning image
US6992810B2 (en) * 2002-06-19 2006-01-31 Miradia Inc. High fill ratio reflective spatial light modulator with hidden hinge
DE10235371A1 (de) 2002-08-02 2004-02-12 Robert Bosch Gmbh Verfahren zur Herstellung einer mikromechanischen Vorrichtung, insbesondere einer mikromechanischen Schwingspiegelvorrichtung
US6825968B2 (en) * 2002-10-11 2004-11-30 Exajoule, Llc Micromirror systems with electrodes configured for sequential mirror attraction
US6798560B2 (en) * 2002-10-11 2004-09-28 Exajoula, Llc Micromirror systems with open support structures
US6870659B2 (en) * 2002-10-11 2005-03-22 Exajoule, Llc Micromirror systems with side-supported mirrors and concealed flexure members
US6770506B2 (en) * 2002-12-23 2004-08-03 Motorola, Inc. Release etch method for micromachined sensors
US6900922B2 (en) * 2003-02-24 2005-05-31 Exajoule, Llc Multi-tilt micromirror systems with concealed hinge structures
US6906848B2 (en) * 2003-02-24 2005-06-14 Exajoule, Llc Micromirror systems with concealed multi-piece hinge structures
US6975193B2 (en) * 2003-03-25 2005-12-13 Rockwell Automation Technologies, Inc. Microelectromechanical isolating circuit
EP1636628A4 (de) * 2003-06-02 2009-04-15 Miradia Inc Reflektiver raum-lichtmodulator mit hohem füllverhältnis mit verborgenem schwenkglied
JP2006526806A (ja) * 2003-06-02 2006-11-24 ミラディア インク 隠れヒンジを備えた高充填率反射型空間光変調器の作製
FR2864634B1 (fr) * 2003-12-26 2006-02-24 Commissariat Energie Atomique Composants optiques et leur procede de realisation
CN100444317C (zh) * 2004-03-03 2008-12-17 日本航空电子工业株式会社 微型移动装置及其制作方法
US7718457B2 (en) * 2005-04-05 2010-05-18 Analog Devices, Inc. Method for producing a MEMS device
TWI284953B (en) * 2005-05-20 2007-08-01 Ind Tech Res Inst A liquid-based gravity-driven etching-stop technique for controlling structure dimension
JP4610447B2 (ja) * 2005-08-31 2011-01-12 Ｏｋｉセミコンダクタ株式会社 半導体装置とその製造方法及び検査方法
US7459093B1 (en) * 2006-04-13 2008-12-02 Advanced Numicro Systems, Inc. MEMS mirror made from topside and backside etching of wafer
WO2008107870A1 (en) * 2007-03-06 2008-09-12 Btendo Ltd. A mems device having reduced deformations
DE102008044371B4 (de) * 2008-12-05 2016-10-27 Robert Bosch Gmbh Verfahren zur Herstellung einer Sensoranordnung
US8053265B2 (en) * 2009-02-06 2011-11-08 Honeywell International Inc. Mitigation of high stress areas in vertically offset structures
US10768365B2 (en) * 2018-03-21 2020-09-08 Futurewei Technologies, Inc. Enabling thermal efficiency on a silicon-on-insulator (SOI) platform
US10570011B1 (en) * 2018-08-30 2020-02-25 United States Of America As Represented By Secretary Of The Navy Method and system for fabricating a microelectromechanical system device with a movable portion using anodic etching of a sacrificial layer

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3886310A (en) 1973-08-22 1975-05-27 Westinghouse Electric Corp Electrostatically deflectable light valve with improved diffraction properties
US4596992A (en) * 1984-08-31 1986-06-24 Texas Instruments Incorporated Linear spatial light modulator and printer
US5291473A (en) * 1990-06-06 1994-03-01 Texas Instruments Incorporated Optical storage media light beam positioning system
US5583688A (en) 1993-12-21 1996-12-10 Texas Instruments Incorporated Multi-level digital micromirror device
US5444566A (en) * 1994-03-07 1995-08-22 Texas Instruments Incorporated Optimized electronic operation of digital micromirror devices
US5526951A (en) * 1994-09-30 1996-06-18 Texas Instruments Incorporated Fabrication method for digital micro-mirror devices using low temperature CVD
US5552924A (en) * 1994-11-14 1996-09-03 Texas Instruments Incorporated Micromechanical device having an improved beam
US5717513A (en) * 1995-01-10 1998-02-10 Texas Instruments Incorporated Unsticking mirror elements of digital micromirror device
US5504614A (en) * 1995-01-31 1996-04-02 Texas Instruments Incorporated Method for fabricating a DMD spatial light modulator with a hardened hinge
US5567334A (en) * 1995-02-27 1996-10-22 Texas Instruments Incorporated Method for creating a digital micromirror device using an aluminum hard mask
US5696619A (en) * 1995-02-27 1997-12-09 Texas Instruments Incorporated Micromechanical device having an improved beam
US5535047A (en) * 1995-04-18 1996-07-09 Texas Instruments Incorporated Active yoke hidden hinge digital micromirror device
US5742419A (en) * 1995-11-07 1998-04-21 The Board Of Trustees Of The Leland Stanford Junior Universtiy Miniature scanning confocal microscope
US5872880A (en) * 1996-08-12 1999-02-16 Ronald S. Maynard Hybrid-optical multi-axis beam steering apparatus
US6028689A (en) * 1997-01-24 2000-02-22 The United States Of America As Represented By The Secretary Of The Air Force Multi-motion micromirror

Also Published As

Publication number Publication date
WO1999032919A1 (de) 1999-07-01
US6369931B1 (en) 2002-04-09
EP0976005B1 (de) 2004-03-17
JP2001513223A (ja) 2001-08-28
JP4401442B2 (ja) 2010-01-20
EP0976005A1 (de) 2000-02-02
DE19757197A1 (de) 1999-06-24

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