DE4401253A1 - Device for focusing a plurality of spatially mutually offset input laser beams to form a single output laser beam - Google Patents
Device for focusing a plurality of spatially mutually offset input laser beams to form a single output laser beamInfo
- Publication number
- DE4401253A1 DE4401253A1 DE4401253A DE4401253A DE4401253A1 DE 4401253 A1 DE4401253 A1 DE 4401253A1 DE 4401253 A DE4401253 A DE 4401253A DE 4401253 A DE4401253 A DE 4401253A DE 4401253 A1 DE4401253 A1 DE 4401253A1
- Authority
- DE
- Germany
- Prior art keywords
- mirror
- laser beams
- laser beam
- focusing
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
- B23K26/0613—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams having a common axis
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/02—Catoptric systems, e.g. image erecting and reversing system
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/106—Beam splitting or combining systems for splitting or combining a plurality of identical beams or images, e.g. image replication
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/14—Beam splitting or combining systems operating by reflection only
- G02B27/143—Beam splitting or combining systems operating by reflection only using macroscopically faceted or segmented reflective surfaces
Abstract
Description
Für die Behandlung von Substraten, z. B. zum Schneiden oder Verschweißen von Stahl, werden möglichst homogene Laserstrahlen mit hoher Leistung verlangt. Diese Aufforderungen können zur Zeit nicht immer voll erfüllt werden, da die auf dem Markt befindlichen Laserstrahlerzeuger mit Leistungen von ca. 20 kW in bezug auf die Strahlqualität und die Standzeit nicht zufriedenstellend sind.For the treatment of substrates, e.g. B. for cutting or Welding steel becomes as homogeneous as possible High power laser beams are required. This At the moment, requests cannot always be fully met because the laser beam generators on the market with outputs of approx. 20 kW in terms of beam quality and the service life is not satisfactory.
Der Erfindung liegt die Aufgabe zugrunde, eine mit Laserstrahlung arbeitende Vorrichtung zu schaffen, die eine wesentlich höhere Laserstrahlleistung liefert, als mit den heute am Markt befindlichen Laserstrahlerzeugern (maximal 20 kW) zu erzielen ist.The invention has for its object a Laser radiation working device to create a delivers significantly higher laser beam power than with the Laser beam generators currently on the market (maximum 20 kW) can be achieved.
Diese Aufgabe wird mit einer Vorrichtung zur Bündelung mehrerer, räumlich gegeneinander versetzter Eingangslaserstrahlen zu einem einzigen Ausgangslaserstrahl gelöst, die aus einem um eine Achse, insbesondere um die Strahlachse des Ausgangslaserstrahls, rotierenden Ablenkspiegelsystem und einer ihr im Strahleingang vorgeordneten stationären Ablenkspiegeleinheit besteht, von der die Eingangslaserstrahlen als zur Rotationsachse des Ablenkspiegelsystems parallele Laserstrahlen auf einem in der Rotationsachse angeordneten Ablenkspiegel umgelenkt werden, wobei das rotierende Ablenkspiegelsystem solche Spiegel zum Fokussieren und Defokussieren der Laserstrahlen aufweist, daß die Laserstrahlen als gebündelter Parallelstrahl auf einem in der Rotationsachse angeordneten Ablenkspiegel als Ausgangsspiegel umgelenkt werden.This task is accomplished with a bundling device several, spatially offset from each other Input laser beams to a single output laser beam solved that from an about an axis, especially around the Beam axis of the output laser beam, rotating Deflecting mirror system and one in the beam entrance upstream stationary deflecting mirror unit consists of which the input laser beams than to the axis of rotation of the Deflecting mirror system parallel laser beams on one in the Deflecting mirror arranged in the axis of rotation are deflected, the rotating deflecting mirror system for such mirrors Focusing and defocusing the laser beams has that the laser beams as a bundled parallel beam on an in the deflection mirror arranged as a Output mirror can be redirected.
Mit der erfindungsgemäßen Vorrichtung wird ein Laserstrahl mit einer Leistung erzeugt, die ein Vielfaches der Leistung ausmacht, die am Markt befindliche Laserstrahlerzeuger liefern. Auf rein optischem Weg werden einzelne Laserstrahlen zu einem einzigen Laserstrahl vereinigt. Diese Vereinigung verschiedener Einzellaserstrahlen macht es auch möglich, die Qualität des Ausgangslaserstrahls zu beeinflussen. So ist es nach einer ersten Ausgestaltung der Erfindung möglich, die räumliche Verteilung der Laserstrahlen an der stationären Ablenkspiegeleinheit so zu gestalten, daß sie einer für den Ausgangslaserstrahl vorgegebenen Energiedichteverteilung entspricht. Zusätzlich oder auch alternativ können die Eingangslaserstrahlen verschiedene Frequenzen haben. Mit einem Ausgangslaserstrahl mit verschiedenen Frequenzen ist es möglich, nun Anwendungsbereiche für die Nutzung der Lasertechnik zu erschließen.With the device according to the invention, a laser beam generated with an output that is a multiple of the output makes up the laser beam generator on the market deliver. Individual laser beams are made in a purely optical way united into a single laser beam. This union different individual laser beams also makes it possible to To influence the quality of the output laser beam. That's the way it is According to a first embodiment of the invention, the spatial distribution of the laser beams on the stationary Deflecting mirror unit so that it is one for the Output laser beam predetermined energy density distribution corresponds. Additionally or alternatively, the Input laser beams have different frequencies. With it is an output laser beam with different frequencies possible, application areas for the use of the Open up laser technology.
In der praktischen Ausführung hat sich als vorteilhaft erwiesen, wenn der Eingangsspiegel des Ablenkspiegelsystems als Fokussierspiegel und der dem Ausgangsspiegel vorgeordnete Spiegel als Defokussierspiegel ausgebildet sind.In practical execution has proven to be advantageous proven when the input mirror of the deflecting mirror system as a focusing mirror and the one preceding the output mirror Mirrors are designed as defocusing mirrors.
Im folgenden wird die Erfindung anhand einer ein Ausführungsbeispiel darstellenden Zeichnung näher erläutert. Im einzelnen zeigen:In the following the invention is based on a Exemplary embodiment illustrating the drawing. In detail show:
Fig. 1 die Vorrichtung zur Bündelung mehrerer Eingangslaserstrahlen zu einem einzigen Ausgangslaserstrahl im Axialschnitt und Fig. 1 shows the device for bundling several input laser beams into a single output laser beam in axial section and
Fig. 2 eine stationäre Ablenkspiegeleinheit der Vorrichtung gemäß Fig. 1 in vergrößerter Darstellung mit einer Darstellung der räumlichen Verteilung der Eingangslaserstrahlen. FIG. 2 shows a stationary deflecting mirror unit of the device according to FIG. 1 in an enlarged view with a representation of the spatial distribution of the input laser beams.
In einem stationären Gehäuse 1 ist drehbar ein rotierendes Ablenkspiegelsystem 2 mit Hohlzapfen 2a, 2b gelagert. Der Antrieb und die Zufuhr von Kühlmittel kann über den längeren Hohlzapfen 2b erfolgen.In a stationary housing 1 , a rotating deflecting mirror system 2 with hollow pins 2 a, 2 b is rotatably mounted. The drive and the supply of coolant can take place via the longer hollow pin 2 b.
Am Gehäuse 1 ist ein Halter 3 mit zwei Prismenspiegeln 4, 5 angebaut. Der Halter 3 weist Fenster 3a, 3b auf, über die räumlich zueinander versetzte Einzellaserstrahlen 6, 7, 8, 9 auf die Prismenspiegel 4, 5 fallen. In Fig. 2 ist die Verteilung der an den Prismenspiegeln 4, 5 um 90 Grad umgelenkten Einzellaserstrahlen 6, 7, 8, 9 in einem Wirkkreis 10 schematisch dargestellt. Die Verteilung ist hierbei so zu gestalten, daß bei um die Rotationsachse 12 des Ablenkspiegelsystems 2 umlaufenden Brennflecken 6a, 7a, 8a, 9a der gesamte Wirkkreis 10 überstrichen wird. Über die Anzahl und die Lage der im Wirkkreis 10 liegenden Brennflecke 6a, 7a, 8a, 9a läßt sich die Energiedichte des zu erzeugenden Ausgangslaserstrahls 11 beeinflussen. Eine weitere Beeinflussungsmöglichkeit besteht darin, daß die Eingangslaserstrahlen 6 bis 9 unterschiedliche Frequenzen und Leistungen haben können.A holder 3 with two prism mirrors 4 , 5 is attached to the housing 1 . The holder 3 has windows 3 a, 3 b, through which individual laser beams 6 , 7 , 8 , 9, spatially offset from one another, fall onto the prism mirrors 4 , 5 . In FIG. 2, the distribution of the prism mirrors 4, 5, deflected by 90 degrees individual laser beams 6, 7, 8, shown schematically in a pitch circle 10 9. The distribution is to be designed in such a way that in the case of focal spots 6 a, 7 a, 8 a, 9 a rotating around the axis of rotation 12 of the deflection mirror system 2 , the entire effective circle 10 is swept. The energy density of the output laser beam 11 to be generated can be influenced via the number and the position of the focal spots 6 a, 7 a, 8 a, 9 a in the active circuit 10 . Another possibility of influencing is that the input laser beams 6 to 9 can have different frequencies and powers.
Die an den Prismenspiegeln 4, 5 abgelenkten parallelen Laserstrahlen fallen durch den hohlen Zapfen 2a parallel zur Rotationsachse 12 in das Ablenkspiegelsystem 2 ein. Das Ablenkspiegelsystem 2 umfaßt vier Ablenkspiegel 13, 14, 15 und 16. Ihr Eingangsspiegel 13 ist als fokussierender Hohlspiegel in der Rotationsachse 12 angeordnet und lenkt die Laserstrahlen auf einen exzentrisch angeordneten Planspiegel 14. Von diesem Planspiegel 14 gelangen die Laserstrahlen auf einen ebenfalls exzentrisch angeordneten Defokussierspiegel 15, von dem die Laserstrahlen als Parallelstrahl umgelenkt auf einen Planspiegel 16 in der Rotationsachse 12 gelangen, der als Ausgangsspiegel den gebündelten Laserstrahl 11 parallel zur Rotationsachse 12 ablenkt, so daß er über den Hohlzapfen 2b die Vorrichtung nach außen verlassen kann.The parallel laser beams deflected at the prism mirrors 4 , 5 fall through the hollow pin 2 a parallel to the axis of rotation 12 into the deflecting mirror system 2 . The deflection mirror system 2 comprises four deflection mirrors 13 , 14 , 15 and 16 . Its input mirror 13 is arranged as a focusing concave mirror in the axis of rotation 12 and directs the laser beams onto an eccentrically arranged plane mirror 14 . From this plane mirror 14 , the laser beams arrive at a likewise eccentrically arranged defocusing mirror 15 , from which the laser beams are deflected as a parallel beam to a plane mirror 16 in the axis of rotation 12 , which deflects the bundled laser beam 11 parallel to the axis of rotation 12 as an output mirror, so that it passes over the Hollow pin 2 b can leave the device to the outside.
Im Ausführungsbeispiel werden also vier Eingangslaserstrahlen 6 bis 9 zu einem einzigen, vollflächigen Ausgangslaserstrahl 11 zusammengefaßt. Die Qualität dieses Ausgangslaserstrahls hängt von der Verteilung der Brennflecke 7a bis 9a im Wirkkreis 10 und von der Art der Einzellaserstrahlen sowie von der Rotationsgeschwindigkeit des Ablenkspiegelsystems 2 ab. Sowohl die Verteilung der Energiedichte im Ausgangslaserstrahl 11 als auch die flächenbezogene frequenzmäßige Zusammensetzung des Ausgangslaserstrahls 11 läßt sich über die Eingangslaserstrahlen 6 bis 9 bestimmen. Der Querschnitt des Ausgangslaserstrahls 11 wird über den Fokussier- und Defokussierspiegel 13, 15 bestimmt. Im Ergebnis wird mit der erfindungsgemäßen Vorrichtung somit ein Laserstrahl erzeugt, der sowohl in der Leistung als auch in der Qualität den Laserstrahlen überlegen ist, die die auf dem Markt befindlichen Laserstrahlerzeuger direkt erzeugen.In the exemplary embodiment, four input laser beams 6 to 9 are combined to form a single, full-area output laser beam 11 . The quality of this output laser beam depends on the distribution of the focal spots 7 a to 9 a in the active circle 10 and on the type of individual laser beams and on the rotational speed of the deflecting mirror system 2 . Both the distribution of the energy density in the output laser beam 11 and the area-related frequency composition of the output laser beam 11 can be determined via the input laser beams 6 to 9 . The cross section of the output laser beam 11 is determined via the focusing and defocusing mirrors 13 , 15 . As a result, with the device according to the invention, a laser beam is thus generated which is superior in both performance and quality to the laser beams which are generated directly by the laser beam generators on the market.
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4401253A DE4401253C2 (en) | 1993-04-08 | 1994-01-18 | Device for bundling several input laser beams spatially offset from one another to form a single output laser beam |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4311392 | 1993-04-08 | ||
DE4401253A DE4401253C2 (en) | 1993-04-08 | 1994-01-18 | Device for bundling several input laser beams spatially offset from one another to form a single output laser beam |
Publications (2)
Publication Number | Publication Date |
---|---|
DE4401253A1 true DE4401253A1 (en) | 1994-10-13 |
DE4401253C2 DE4401253C2 (en) | 1999-12-09 |
Family
ID=6484937
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE4401253A Expired - Fee Related DE4401253C2 (en) | 1993-04-08 | 1994-01-18 | Device for bundling several input laser beams spatially offset from one another to form a single output laser beam |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE4401253C2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102020215129A1 (en) | 2020-12-01 | 2022-06-02 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein | Device for directing, rotating and/or shaping a laser beam |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4491383A (en) * | 1982-09-20 | 1985-01-01 | Centro Ricerche Fiat S.P.A. | Device for modifying and uniforming the distribution of the intensity of a power laser beam |
DE3709351C2 (en) * | 1987-03-21 | 1989-05-03 | W.C. Heraeus Gmbh, 6450 Hanau, De |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63272092A (en) * | 1987-04-30 | 1988-11-09 | Yoshiaki Arata | Forming method for superpowered composite laser beam |
-
1994
- 1994-01-18 DE DE4401253A patent/DE4401253C2/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4491383A (en) * | 1982-09-20 | 1985-01-01 | Centro Ricerche Fiat S.P.A. | Device for modifying and uniforming the distribution of the intensity of a power laser beam |
DE3709351C2 (en) * | 1987-03-21 | 1989-05-03 | W.C. Heraeus Gmbh, 6450 Hanau, De |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102020215129A1 (en) | 2020-12-01 | 2022-06-02 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein | Device for directing, rotating and/or shaping a laser beam |
Also Published As
Publication number | Publication date |
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DE4401253C2 (en) | 1999-12-09 |
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Legal Events
Date | Code | Title | Description |
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8110 | Request for examination paragraph 44 | ||
8125 | Change of the main classification |
Ipc: G02B 17/06 |
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D2 | Grant after examination | ||
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: THYSSEN KRUPP STAHL AG, 40211 DUESSELDORF, DE |
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8327 | Change in the person/name/address of the patent owner |
Owner name: THYSSENKRUPP STAHL AG, 47166 DUISBURG, DE |
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8339 | Ceased/non-payment of the annual fee |