DE3485576D1 - Verfahren zur abbildung einer waermewelle. - Google Patents
Verfahren zur abbildung einer waermewelle.Info
- Publication number
- DE3485576D1 DE3485576D1 DE8484115241T DE3485576T DE3485576D1 DE 3485576 D1 DE3485576 D1 DE 3485576D1 DE 8484115241 T DE8484115241 T DE 8484115241T DE 3485576 T DE3485576 T DE 3485576T DE 3485576 D1 DE3485576 D1 DE 3485576D1
- Authority
- DE
- Germany
- Prior art keywords
- imaging
- heat wave
- wave
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000003384 imaging method Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/72—Investigating presence of flaws
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/073—Investigating materials by wave or particle radiation secondary emission use of a laser
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/10—Different kinds of radiation or particles
- G01N2223/102—Different kinds of radiation or particles beta or electrons
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/30—Accessories, mechanical or electrical features
- G01N2223/306—Accessories, mechanical or electrical features computer control
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/30—Accessories, mechanical or electrical features
- G01N2223/33—Accessories, mechanical or electrical features scanning, i.e. relative motion for measurement of successive object-parts
- G01N2223/3302—Accessories, mechanical or electrical features scanning, i.e. relative motion for measurement of successive object-parts object and detector fixed
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/30—Accessories, mechanical or electrical features
- G01N2223/348—Accessories, mechanical or electrical features ellipsoidal collector
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/40—Imaging
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/40—Imaging
- G01N2223/401—Imaging image processing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/40—Imaging
- G01N2223/418—Imaging electron microscope
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/40—Imaging
- G01N2223/427—Imaging stepped imaging (selected area of sample is changed)
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/50—Detectors
- G01N2223/509—Detectors infrared
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/60—Specific applications or type of materials
- G01N2223/629—Specific applications or type of materials welds, bonds, sealing compounds
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/60—Specific applications or type of materials
- G01N2223/651—Specific applications or type of materials dust
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US06/573,075 US4578584A (en) | 1984-01-23 | 1984-01-23 | Thermal wave microscopy using areal infrared detection |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE3485576D1 true DE3485576D1 (de) | 1992-04-16 |
Family
ID=24290538
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE8484115241T Expired - Fee Related DE3485576D1 (de) | 1984-01-23 | 1984-12-14 | Verfahren zur abbildung einer waermewelle. |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4578584A (de) |
| EP (1) | EP0150384B1 (de) |
| JP (1) | JPS60154224A (de) |
| DE (1) | DE3485576D1 (de) |
Families Citing this family (43)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2163564A (en) * | 1984-08-25 | 1986-02-26 | Stc Plc | Thermal image sensor |
| IE58049B1 (en) * | 1985-05-21 | 1993-06-16 | Tekscan Ltd | Surface analysis microscopy apparatus |
| US4678913A (en) * | 1986-01-06 | 1987-07-07 | Walter C. Mccrone Associates, Inc. | Method and apparatus for analyzing the nature of a sample |
| JPH0676970B2 (ja) * | 1987-02-25 | 1994-09-28 | 東京エレクトロン東北株式会社 | 光学検査装置 |
| JPH079406B2 (ja) * | 1987-05-28 | 1995-02-01 | 東京エレクトロン東北株式会社 | 半導体ウエハの表面検査装置 |
| US4950897A (en) * | 1989-01-04 | 1990-08-21 | University Of Toronto Innovations Foundation | Thermal wave sub-surface defect imaging and tomography apparatus |
| US5075552A (en) * | 1989-01-13 | 1991-12-24 | Iowa State University Research Foundation Inc. | Apparatus and method for transient thermal infrared emission spectrometry |
| EP0406399A4 (en) * | 1989-01-13 | 1992-05-06 | Iowa State University Research Foundation, Inc. | Apparatus and method for transient thermal infrared emission spectrometry |
| US4910593A (en) * | 1989-04-14 | 1990-03-20 | Entech Engineering, Inc. | System for geological defect detection utilizing composite video-infrared thermography |
| US5020920A (en) * | 1989-11-03 | 1991-06-04 | The United States Of America As Represented By The United States Department Of Energy | Method and apparatus for millimeter-wave detection of thermal waves for materials evaluation |
| GB9010444D0 (en) * | 1990-05-09 | 1990-06-27 | Secretary Trade Ind Brit | Non-destructive evaluation |
| EP0465082A3 (en) * | 1990-07-02 | 1992-03-11 | Iowa State University Research Foundation, Inc. | Apparatus and method for transient thermal infrared spectrometry |
| KR950010392B1 (ko) * | 1991-07-31 | 1995-09-16 | 한국과학기술원 | 표면 열진동을 이용한 초소성 성형 제품의 내부 기공 측정 장치 및 방법 |
| EP0566852B1 (de) * | 1992-04-21 | 1998-08-26 | Mitsubishi Denki Kabushiki Kaisha | Menschliche Körper-Detektionsanordnung |
| US5659397A (en) * | 1995-06-08 | 1997-08-19 | Az Technology | Method and apparatus for measuring total specular and diffuse optical properties from the surface of an object |
| US7083327B1 (en) * | 1999-04-06 | 2006-08-01 | Thermal Wave Imaging, Inc. | Method and apparatus for detecting kissing unbond defects |
| US6140617A (en) * | 1999-10-22 | 2000-10-31 | General Electric Company | Cooktop control and monitoring system including detecting properties of a utensil through a solid-surface cooktop |
| US6452136B1 (en) | 2000-12-13 | 2002-09-17 | General Electric Company | Monitoring and control system and method for sensing of a vessel and other properties of a cooktop |
| SE0100379D0 (sv) * | 2001-02-07 | 2001-02-07 | Siemens Elema Ab | Arrangement for and method of acoustic determination of fluid temperature |
| GB2379743B (en) * | 2001-07-04 | 2005-05-25 | Amersham Pharm Biotech Uk Ltd | A method, a measuring cell and a system for measuring very small heat changes in a sample |
| BG65607B1 (bg) * | 2002-05-07 | 2009-02-27 | Петър ДИНЕВ | Метод за откриване и идентифициране на опасни вещества |
| US7179553B2 (en) * | 2002-09-06 | 2007-02-20 | General Motors Corporation | Method for detecting electrical defects in membrane electrode assemblies |
| US7064331B2 (en) * | 2002-09-13 | 2006-06-20 | Siemens Power Generation, Inc. | Method for calibrating and enhancing flaw detection of an acoustic thermography system |
| US7595312B2 (en) * | 2002-10-25 | 2009-09-29 | Boehringer Ingelheim Pharma Gmbh & Co. Kg | Selected CGRP antagonists, processes for preparing them and their use as pharmaceutical compositions |
| US7327448B2 (en) * | 2004-07-29 | 2008-02-05 | Optech Ventures Llc | Laser-ultrasonic detection of flip chip attachment defects |
| US7278315B1 (en) * | 2005-10-04 | 2007-10-09 | Op Tech Ventures Llc | Laser-ultrasonic detection of subsurface defects in processed metals |
| US7716987B2 (en) | 2006-07-31 | 2010-05-18 | University Of Dayton | Non-contact thermo-elastic property measurement and imaging system for quantitative nondestructive evaluation of materials |
| US20090000382A1 (en) * | 2006-07-31 | 2009-01-01 | University Of Dayton | Non-contact acousto-thermal method and apparatus for detecting incipient damage in materials |
| JP5179243B2 (ja) * | 2008-04-25 | 2013-04-10 | 日置電機株式会社 | ショート位置検出装置 |
| CA2796098C (en) * | 2010-04-09 | 2018-06-05 | Max Diem | A tunable laser-based infrared imaging system and method of use thereof |
| US8878926B2 (en) * | 2010-09-17 | 2014-11-04 | Applied Materials, Inc. | Apparatus and method for analyzing thermal properties of composite structures |
| US9117149B2 (en) | 2011-10-07 | 2015-08-25 | Industrial Technology Research Institute | Optical registration carrier |
| CN103245668B (zh) * | 2013-04-22 | 2015-03-25 | 南京诺威尔光电系统有限公司 | 一种激光扫描热波成像方法 |
| FR3020678B1 (fr) * | 2014-04-30 | 2021-06-25 | Areva Np | Procede d'examen photothermique et ensemble d'examen correspondant |
| US9322776B2 (en) * | 2014-08-19 | 2016-04-26 | The Boeing Company | Method and system for imaging a target |
| CN104914133B (zh) | 2015-06-19 | 2017-12-22 | 合肥京东方光电科技有限公司 | 摩擦缺陷检测装置 |
| CN110036285B (zh) * | 2016-11-22 | 2022-09-20 | Ta仪器-沃特世有限责任公司 | 直接热注射热分析 |
| CN106841303B (zh) * | 2016-12-30 | 2020-07-28 | 爱德森（厦门）电子有限公司 | 一种复合管道内衬陶瓷层质量的检测装置及方法 |
| CN109856071A (zh) * | 2019-03-11 | 2019-06-07 | 西北核技术研究所 | 一种光谱在线诊断方法及装置 |
| CN109781671B (zh) * | 2019-03-11 | 2021-11-05 | 西北核技术研究所 | 一种透射率在线测试方法及装置 |
| CN109814243B (zh) * | 2019-03-11 | 2021-12-24 | 西北核技术研究所 | 一种用于高温状态下在线监测的光学显微成像方法及装置 |
| DE102019210253A1 (de) * | 2019-07-11 | 2021-01-14 | Robert Bosch Gmbh | Reflektoreinrichtung für eine optische Analyseeinrichtung und Verfahren zum Betreiben einer Reflektoreinrichtung |
| CN113715229B (zh) * | 2021-09-07 | 2022-07-15 | 健大电业制品（昆山）有限公司 | 一种注塑制品质量检测的方法和系统 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AT306804B (de) * | 1971-10-05 | 1973-04-25 | Oesterr Studien Atomenergie | Kathodolumineszenzeinrichtung für Rasterelektronenmikroskope |
| JPS5519637B2 (de) * | 1974-01-11 | 1980-05-27 | ||
| US4255971A (en) * | 1978-11-01 | 1981-03-17 | Allan Rosencwaig | Thermoacoustic microscopy |
| FI63115C (fi) * | 1980-06-10 | 1983-04-11 | Valmet Oy | Foerfarande foer undersoekning av ytkvaliteten av material i fasttillstaond och anordning foer genomfoerande av foerfarandet |
| US4393311A (en) * | 1980-06-13 | 1983-07-12 | Bell Telephone Laboratories, Incorporated | Method and apparatus for surface characterization and process control utilizing radiation from desorbed particles |
| DE3034944C2 (de) * | 1980-09-01 | 1985-01-17 | Gerhard Dr. 8029 Sauerlach Busse | Verfahren und Einrichtung zur photothermischen Struktur-Untersuchung fester Körper |
| JPS584257A (ja) * | 1981-06-30 | 1983-01-11 | Toshiba Corp | 走査型電子ビ−ムアニ−ル装置 |
| GB2112131B (en) * | 1981-12-18 | 1985-03-13 | Barr & Stroud Ltd | Apparatus for measuring the temperature of an object from the ir radiation emitted thereby |
| FI64465C (fi) * | 1982-03-15 | 1983-11-10 | Mauri Luukkala | Foerfarande och apparat foer att maeta ytornas egenskaper av fasta tillstaondets materialer |
| US4484820A (en) * | 1982-05-25 | 1984-11-27 | Therma-Wave, Inc. | Method for evaluating the quality of the bond between two members utilizing thermoacoustic microscopy |
-
1984
- 1984-01-23 US US06/573,075 patent/US4578584A/en not_active Expired - Fee Related
- 1984-10-20 JP JP59219409A patent/JPS60154224A/ja active Pending
- 1984-12-14 EP EP84115241A patent/EP0150384B1/de not_active Expired - Lifetime
- 1984-12-14 DE DE8484115241T patent/DE3485576D1/de not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| EP0150384B1 (de) | 1992-03-11 |
| JPS60154224A (ja) | 1985-08-13 |
| EP0150384A2 (de) | 1985-08-07 |
| EP0150384A3 (en) | 1988-01-27 |
| US4578584A (en) | 1986-03-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |