DE3474362D1 - Displacement measuring apparatus and method - Google Patents

Displacement measuring apparatus and method

Info

Publication number
DE3474362D1
DE3474362D1 DE8484304695T DE3474362T DE3474362D1 DE 3474362 D1 DE3474362 D1 DE 3474362D1 DE 8484304695 T DE8484304695 T DE 8484304695T DE 3474362 T DE3474362 T DE 3474362T DE 3474362 D1 DE3474362 D1 DE 3474362D1
Authority
DE
Germany
Prior art keywords
grating
index
gratings
carries
stepped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8484304695T
Other languages
English (en)
Inventor
Robert Martin Pettigrew
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Application granted granted Critical
Publication of DE3474362D1 publication Critical patent/DE3474362D1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
DE8484304695T 1983-07-30 1984-07-10 Displacement measuring apparatus and method Expired DE3474362D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB838320629A GB8320629D0 (en) 1983-07-30 1983-07-30 Displacement measuring apparatus

Publications (1)

Publication Number Publication Date
DE3474362D1 true DE3474362D1 (en) 1988-11-03

Family

ID=10546582

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8484304695T Expired DE3474362D1 (en) 1983-07-30 1984-07-10 Displacement measuring apparatus and method

Country Status (10)

Country Link
US (1) US4636076A (de)
EP (1) EP0132978B1 (de)
JP (2) JPS6064215A (de)
KR (1) KR890002805B1 (de)
AT (1) ATE37614T1 (de)
BR (1) BR8403768A (de)
DE (1) DE3474362D1 (de)
ES (1) ES8601460A1 (de)
GB (1) GB8320629D0 (de)
SU (1) SU1450761A3 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6117016A (ja) * 1984-07-02 1986-01-25 Okuma Mach Works Ltd 平均化回折モアレ位置検出器
DE3543179A1 (de) * 1985-12-06 1987-06-11 Philips Patentverwaltung Optischer weg-sensor mit einem filter
GB2194042A (en) * 1986-08-14 1988-02-24 Bicc Plc Displacement measurement
US5064290A (en) * 1987-12-12 1991-11-12 Renishaw Plc Opto-electronic scale-reading apparatus wherein phase-separated secondary orders of diffraction are generated
GB8729246D0 (en) * 1987-12-15 1988-01-27 Renishaw Plc Opto-electronic scale-reading apparatus
US4943716A (en) * 1988-01-22 1990-07-24 Mitutoyo Corporation Diffraction-type optical encoder with improved detection signal insensitivity to optical grating gap variations
DE3825475A1 (de) * 1988-07-27 1990-02-01 Bodenseewerk Geraetetech Optischer lagegeber
GB8903725D0 (en) * 1989-02-18 1989-04-05 Cambridge Consultants Coherent tracking sensor
DE4006365A1 (de) * 1990-03-01 1991-10-17 Heidenhain Gmbh Dr Johannes Positionsmesseinrichtung
DE9007559U1 (de) * 1990-03-13 1992-09-24 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut, De
EP0482224B1 (de) * 1990-10-20 1994-01-12 Dr. Johannes Heidenhain GmbH Interferentielle Messeinrichtung für wenigstens eine Messrichtung
GB9022969D0 (en) * 1990-10-23 1990-12-05 Rosemount Ltd Displacement measurement apparatus
EP0579846B1 (de) * 1992-07-18 1995-08-23 Dr. Johannes Heidenhain GmbH Optische Vorrichtung
GB9424969D0 (en) * 1994-12-10 1995-02-08 Renishaw Plc Opto-electronic scale reading apparatus
DE19525874A1 (de) * 1995-07-15 1997-01-16 Heidenhain Gmbh Dr Johannes Positionsmeßvorrichtung
KR20030001648A (ko) * 2001-06-25 2003-01-08 금호산업 주식회사 타이어 조립성형장치의 배치방법
NO315397B1 (no) * 2001-11-13 2003-08-25 Sinvent As Optisk forskyvnings-sensor
KR20030097242A (ko) * 2002-06-20 2003-12-31 학교법인 한양학원 광굴절재료의 이득계수 측정장치
KR100496162B1 (ko) * 2003-03-26 2005-06-20 한국전자통신연구원 레이저 변위센서의 기준 거리를 변경하는 장치
TWI245926B (en) * 2004-05-10 2005-12-21 Chroma Ate Inc Device and method of an interference scanner
CN1322304C (zh) * 2004-06-02 2007-06-20 致茂电子股份有限公司 干涉扫描装置及方法
KR100699317B1 (ko) * 2005-01-31 2007-03-23 (주)펨트론 두께 및 형상 측정 시스템
DE102005043569A1 (de) * 2005-09-12 2007-03-22 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
NO20130884A1 (no) 2013-06-21 2014-12-22 Sinvent As Sensorelement med optisk forskyvning
JP6386337B2 (ja) * 2014-10-23 2018-09-05 株式会社ミツトヨ 光学式エンコーダ
FR3031400B1 (fr) * 2015-01-06 2017-02-10 Commissariat Energie Atomique Dispositif optique de focalisation
US10277989B2 (en) * 2016-11-18 2019-04-30 Gopro, Inc. Opto-acoustic transducer and cover glass
CN107144298A (zh) * 2017-06-27 2017-09-08 常州瑞丰特科技有限公司 高容差光栅读数头
US20220178735A1 (en) * 2019-03-26 2022-06-09 Nec Corporation Displacement measurement apparatus for structure

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3344700A (en) * 1961-05-23 1967-10-03 British Aircraft Corp Ltd Displacement measuring system
US3883232A (en) * 1973-12-03 1975-05-13 Hitachi Ltd Random phase plate and optical system incorporating said plate
CH601799A5 (de) * 1974-01-12 1978-07-14 Leitz Ernst Gmbh
GB1523165A (en) * 1974-08-03 1978-08-31 Matsushita Electric Ind Co Ltd Fourier-transform holography by pseudo-random phase shifting
GB1516536A (en) * 1975-08-22 1978-07-05 Ferranti Ltd Measuring apparatus
DE3213839A1 (de) * 1982-04-15 1983-10-27 Philips Patentverwaltung Gmbh, 2000 Hamburg Optische wellenlaengen-multiplex- bzw. -demultiplexanordnung

Also Published As

Publication number Publication date
ES534432A0 (es) 1985-10-16
SU1450761A3 (ru) 1989-01-07
US4636076A (en) 1987-01-13
GB8320629D0 (en) 1983-09-01
JPS6064215A (ja) 1985-04-12
ES8601460A1 (es) 1985-10-16
EP0132978A3 (en) 1986-09-17
JPH0130088B2 (de) 1989-06-16
KR850001422A (ko) 1985-03-18
JPS60130534A (ja) 1985-07-12
KR890002805B1 (ko) 1989-07-31
EP0132978B1 (de) 1988-09-28
ATE37614T1 (de) 1988-10-15
BR8403768A (pt) 1985-07-02
EP0132978A2 (de) 1985-02-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee