DE3379553D1 - Laser source apparatus - Google Patents

Laser source apparatus

Info

Publication number
DE3379553D1
DE3379553D1 DE8383110264T DE3379553T DE3379553D1 DE 3379553 D1 DE3379553 D1 DE 3379553D1 DE 8383110264 T DE8383110264 T DE 8383110264T DE 3379553 T DE3379553 T DE 3379553T DE 3379553 D1 DE3379553 D1 DE 3379553D1
Authority
DE
Germany
Prior art keywords
laser source
source apparatus
laser
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8383110264T
Other languages
English (en)
Inventor
Tateoki Miyauchi
Mikio Hongo
Katsuro Mizukoshi
Hiroshi Yamaguchi
Akira Shimase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE3379553D1 publication Critical patent/DE3379553D1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073—Shaping the laser spot
    • B23K26/0734—Shaping the laser spot into an annular shape
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0905—Dividing and/or superposing multiple light beams
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/0977—Reflective elements
DE8383110264T 1982-10-15 1983-10-14 Laser source apparatus Expired DE3379553D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57179821A JPS5969979A (ja) 1982-10-15 1982-10-15 レ−ザ光源装置

Publications (1)

Publication Number Publication Date
DE3379553D1 true DE3379553D1 (en) 1989-05-11

Family

ID=16072475

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383110264T Expired DE3379553D1 (en) 1982-10-15 1983-10-14 Laser source apparatus

Country Status (4)

Country Link
US (1) US4566765A (de)
EP (1) EP0106336B1 (de)
JP (1) JPS5969979A (de)
DE (1) DE3379553D1 (de)

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IT1165499B (it) * 1983-12-20 1987-04-22 Alfa Romeo Auto Spa Sisteam per la composizione flessibile di fasci laser
US4917084A (en) * 1985-07-31 1990-04-17 C. R. Bard, Inc. Infrared laser catheter system
US5196004A (en) * 1985-07-31 1993-03-23 C. R. Bard, Inc. Infrared laser catheter system
EP0214712B1 (de) * 1985-07-31 1992-09-02 C.R. Bard, Inc. Infrarot Laser-Kathetergerät
CA1284823C (en) * 1985-10-22 1991-06-11 Kenneth K. York Systems and methods for creating rounded work surfaces by photoablation
US4678422A (en) * 1985-11-12 1987-07-07 York Kenneth K Systems and methods for precise, accurate formation of products by photoablation
JPS63272092A (ja) * 1987-04-30 1988-11-09 Yoshiaki Arata 超強力複合レ−ザ・ビ−ム造出法
GB8811532D0 (en) * 1988-05-16 1988-06-22 Lumonics Ltd Beam combining unit
US5173799A (en) * 1988-10-12 1992-12-22 Fuji Electric Co., Ltd. Wavelength conversion device
US5048911A (en) * 1988-11-15 1991-09-17 Universiti Malaya Coupling of multiple laser beams to a single optical fiber
US5073702A (en) * 1990-03-26 1991-12-17 Ncr Corporation Multiple beam bar code scanner
AU649707B2 (en) * 1990-08-01 1994-06-02 Diomed Limited High power light source
US5638211A (en) 1990-08-21 1997-06-10 Nikon Corporation Method and apparatus for increasing the resolution power of projection lithography exposure system
US7656504B1 (en) 1990-08-21 2010-02-02 Nikon Corporation Projection exposure apparatus with luminous flux distribution
US5719704A (en) 1991-09-11 1998-02-17 Nikon Corporation Projection exposure apparatus
US6252647B1 (en) 1990-11-15 2001-06-26 Nikon Corporation Projection exposure apparatus
US6967710B2 (en) 1990-11-15 2005-11-22 Nikon Corporation Projection exposure apparatus and method
US6897942B2 (en) * 1990-11-15 2005-05-24 Nikon Corporation Projection exposure apparatus and method
US6885433B2 (en) * 1990-11-15 2005-04-26 Nikon Corporation Projection exposure apparatus and method
US6710855B2 (en) 1990-11-15 2004-03-23 Nikon Corporation Projection exposure apparatus and method
JP2807371B2 (ja) * 1992-04-27 1998-10-08 株式会社東芝 遠隔保全装置
US5475197A (en) * 1992-06-17 1995-12-12 Carl-Zeiss-Stiftung Process and apparatus for the ablation of a surface
DE4230496A1 (de) * 1992-09-11 1994-03-17 Bergmann Hans Wilhelm Verfahren zum Feinabtrag mit gepulster Laserstrahlung
DE4412443A1 (de) * 1994-04-12 1995-10-19 Atz Evus Verfahren und Vorrichtung zur Materialbearbeitung mit einem Kupferdampflasersystem mit hohen Wiederholfrequenzen und hohem Wirkungsgrad
JP3531014B2 (ja) * 1994-06-22 2004-05-24 株式会社トプコン レーザ照準装置
JP3305147B2 (ja) * 1994-07-06 2002-07-22 三菱重工業株式会社 光ファイバの結合方法及びその結合系
US20050155956A1 (en) * 2002-08-30 2005-07-21 Sumitomo Heavy Industries, Ltd. Laser processing method and processing device
GB0312443D0 (en) * 2003-05-30 2003-07-09 Newoptics Ltd Optical multiplexer
US7023620B1 (en) * 2003-07-03 2006-04-04 Research Electro-Optics, Inc. Beam array pitch controller
FR2873606B1 (fr) * 2004-07-27 2008-10-10 Snecma Moteurs Sa Procede de soudage par laser d'au moins deux pieces metalliques et dispositifs associes pour la mise en oeuvre du procede
US20070238046A1 (en) * 2006-04-07 2007-10-11 The Domino Corporation Laser marking
US20080259284A1 (en) * 2007-04-19 2008-10-23 Sanyo Electric Co., Ltd. Illumination device and projection video display device
US8345724B2 (en) 2008-10-27 2013-01-01 Trumpf Photonics Inc. Laser beam interleaving
US8592768B1 (en) * 2009-04-06 2013-11-26 University Of South Florida Angularly partitioned evanescent wave absorption sensor
JP5658012B2 (ja) * 2010-11-25 2015-01-21 ギガフォトン株式会社 極端紫外光生成装置
CN103399407B (zh) * 2013-08-13 2015-04-22 哈尔滨工业大学 一种用于实现圆形光束整形为点环形光束的方法
DE102015119737A1 (de) * 2015-11-16 2017-05-18 Deutsches Zentrum für Luft- und Raumfahrt e.V. Strahlformungseinrichtung
TWI599427B (zh) 2015-11-27 2017-09-21 財團法人工業技術研究院 加熱產生均勻熔池之裝置
DE102016103230B3 (de) * 2016-02-24 2017-07-06 Jenoptik Automatisierungstechnik Gmbh Vorrichtung zum Lasertransmissionsschweißen einer ringförmigen Schweißnaht
JP2022077223A (ja) * 2020-11-11 2022-05-23 株式会社ディスコ レーザー加工装置
DE102021200021A1 (de) * 2021-01-05 2022-07-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Anordnung zur Ausrichtung, Rotation und/oder Formung eines Laserstrahls
DE102021121948B4 (de) 2021-08-24 2023-10-05 Holochrom Gmbh Systeme und Verfahren zur Erzeugung von hohlzylinderförmigen Lichteffekten mittels Laserlicht

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3453425A (en) * 1965-10-21 1969-07-01 Sidney L Whitaker Structure for concentrating radiant energy
US3588440A (en) * 1969-06-26 1971-06-28 Hughes Aircraft Co Laser combination energy system
US3892488A (en) * 1974-02-22 1975-07-01 Us Air Force Laser site marking system
US4174150A (en) * 1976-02-23 1979-11-13 Jersey Nuclear-Avco Isotopes, Inc. System for combining laser beams of diverse frequencies
GB1553582A (en) * 1977-04-14 1979-09-26 Boc Ltd Laser beam splitting apparatus
FR2402187A1 (fr) * 1977-09-02 1979-03-30 Ind Automation Gmbh Et Co Dispositif pour la mise en parallele de plusieurs axes optiques
US4289378A (en) * 1978-06-21 1981-09-15 Ernst Remy Apparatus for adjusting the focal point of an operating laser beam focused by an objective
DE2937352C2 (de) * 1979-09-13 1982-03-11 Müller, Gerhard, Prof. Dr.-Ing., 7080 Aalen Multipass-Anordnung
US4344671A (en) * 1979-12-17 1982-08-17 Raymus K. Payton Multiple pulse laser assemblies
IE53138B1 (en) * 1981-03-06 1988-07-20 Perkin Elmer Corp Optical beam splitter

Also Published As

Publication number Publication date
EP0106336A2 (de) 1984-04-25
JPH0412039B2 (de) 1992-03-03
EP0106336B1 (de) 1989-04-05
EP0106336A3 (en) 1986-03-26
US4566765A (en) 1986-01-28
JPS5969979A (ja) 1984-04-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee