DE3378169D1 - Apparatus for effecting alignment and spacing control of a mask and wafer for use in x-ray lithography - Google Patents

Apparatus for effecting alignment and spacing control of a mask and wafer for use in x-ray lithography

Info

Publication number
DE3378169D1
DE3378169D1 DE8383107404T DE3378169T DE3378169D1 DE 3378169 D1 DE3378169 D1 DE 3378169D1 DE 8383107404 T DE8383107404 T DE 8383107404T DE 3378169 T DE3378169 T DE 3378169T DE 3378169 D1 DE3378169 D1 DE 3378169D1
Authority
DE
Germany
Prior art keywords
wafer
mask
ray lithography
spacing control
effecting alignment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8383107404T
Other languages
English (en)
Inventor
W Derek Buckley
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SVG Lithography Systems Inc
Original Assignee
Perkin Elmer Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Perkin Elmer Corp filed Critical Perkin Elmer Corp
Application granted granted Critical
Publication of DE3378169D1 publication Critical patent/DE3378169D1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
DE8383107404T 1982-08-04 1983-07-27 Apparatus for effecting alignment and spacing control of a mask and wafer for use in x-ray lithography Expired DE3378169D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/405,207 US4472824A (en) 1982-08-04 1982-08-04 Apparatus for effecting alignment and spacing control of a mask and wafer for use in X-ray lithography

Publications (1)

Publication Number Publication Date
DE3378169D1 true DE3378169D1 (en) 1988-11-10

Family

ID=23602735

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383107404T Expired DE3378169D1 (en) 1982-08-04 1983-07-27 Apparatus for effecting alignment and spacing control of a mask and wafer for use in x-ray lithography

Country Status (4)

Country Link
US (1) US4472824A (de)
EP (1) EP0100526B1 (de)
JP (1) JPS5933828A (de)
DE (1) DE3378169D1 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60201626A (ja) * 1984-03-27 1985-10-12 Canon Inc 位置合わせ装置
US4964146A (en) * 1985-07-31 1990-10-16 Hitachi, Ltd. Pattern transistor mask and method of using the same
DE3623891A1 (de) * 1986-07-15 1988-01-28 Siemens Ag Anordnung zur genauen gegenseitigen ausrichtung einer maske und einer halbleiterscheibe in einem lithographiegeraet und verfahren zu ihrem betrieb
US5561696A (en) * 1987-10-30 1996-10-01 Hewlett-Packard Company Method and apparatus for inspecting electrical connections
US5621811A (en) * 1987-10-30 1997-04-15 Hewlett-Packard Co. Learning method and apparatus for detecting and controlling solder defects
US5081656A (en) * 1987-10-30 1992-01-14 Four Pi Systems Corporation Automated laminography system for inspection of electronics
US5097492A (en) * 1987-10-30 1992-03-17 Four Pi Systems Corporation Automated laminography system for inspection of electronics
US4926452A (en) * 1987-10-30 1990-05-15 Four Pi Systems Corporation Automated laminography system for inspection of electronics
US4870668A (en) * 1987-12-30 1989-09-26 Hampshire Instruments, Inc. Gap sensing/adjustment apparatus and method for a lithography machine
US5319444A (en) * 1988-02-16 1994-06-07 Canon Kabushiki Kaisha Position detecting method and apparatus
US5294980A (en) * 1988-03-24 1994-03-15 Canon Kabushiki Kaisha Positioning detecting method and apparatus
JP2676933B2 (ja) * 1988-09-05 1997-11-17 キヤノン株式会社 位置検出装置
US5259012A (en) * 1990-08-30 1993-11-02 Four Pi Systems Corporation Laminography system and method with electromagnetically directed multipath radiation source
JPH05206017A (ja) * 1991-08-09 1993-08-13 Internatl Business Mach Corp <Ibm> リソグラフイ露光システム及びその方法
US5548625A (en) * 1995-03-02 1996-08-20 Motorola, Inc. Method for parallel multiple field processing in X-ray lithography
US5583904A (en) * 1995-04-11 1996-12-10 Hewlett-Packard Co. Continuous linear scan laminography system and method
US5687209A (en) * 1995-04-11 1997-11-11 Hewlett-Packard Co. Automatic warp compensation for laminographic circuit board inspection
US6089525A (en) * 1997-10-07 2000-07-18 Ultratech Stepper, Inc. Six axis active vibration isolation and payload reaction force compensation system
US6307619B1 (en) 2000-03-23 2001-10-23 Silicon Valley Group, Inc. Scanning framing blade apparatus
DE10355681A1 (de) * 2003-11-28 2005-07-07 Süss Microtec Lithography Gmbh Direkte Justierung in Maskalignern
US7437911B2 (en) * 2004-12-15 2008-10-21 Asml Holding N.V. Method and system for operating an air gauge at programmable or constant standoff
DE102005033036B4 (de) * 2005-07-15 2008-05-15 Vistec Semiconductor Systems Gmbh Vorrichtung und Verfahren zur Inspektion eines Wafers

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1312825A (en) * 1969-04-19 1973-04-11 Licentia Gmbh Method and apparatus for bringing a mask and a semiconductor body into register with one another
JPS5243692B2 (de) * 1973-03-26 1977-11-01
JPS5252579A (en) * 1975-10-27 1977-04-27 Canon Inc Clearance adjusng method
JPS5255579A (en) * 1975-10-31 1977-05-07 Asahi Glass Co Ltd Moisture sensor
US4093378A (en) * 1976-11-01 1978-06-06 International Business Machines Corporation Alignment apparatus
DE2723902C2 (de) * 1977-05-26 1983-12-08 Siemens AG, 1000 Berlin und 8000 München Verfahren zur Parallelausrichtung und Justierung der Lage einer Halbleiterscheibe relativ zu einer Bestrahlungsmaske bei der Röntgenstrahl-Fotolithografie
JPS55113330A (en) * 1979-02-23 1980-09-01 Chiyou Lsi Gijutsu Kenkyu Kumiai X-ray exposure system and device
US4335313A (en) * 1980-05-12 1982-06-15 The Perkin-Elmer Corporation Method and apparatus for aligning an opaque mask with an integrated circuit wafer
JPS5730291A (en) * 1980-07-31 1982-02-18 Fujitsu Ltd El display unit

Also Published As

Publication number Publication date
EP0100526A3 (en) 1986-03-19
EP0100526A2 (de) 1984-02-15
US4472824A (en) 1984-09-18
JPS5933828A (ja) 1984-02-23
JPH0562450B2 (de) 1993-09-08
EP0100526B1 (de) 1988-10-05

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: SVG LITHOGRAPHY SYSTEMS, INC., WILTON, CONN., US

8328 Change in the person/name/address of the agent

Free format text: GRUENECKER, A., DIPL.-ING. KINKELDEY, H., DIPL.-ING. DR.-ING. STOCKMAIR, W., DIPL.-ING. DR.-ING. AE.E. CAL TECH SCHUMANN, K., DIPL.-PHYS. DR.RER.NAT. JAKOB, P., DIPL.-ING. BEZOLD, G., DIPL.-CHEM. DR.RER.NAT. MEISTER, W., DIPL.-ING. HILGERS, H., DIPL.-ING. MEYER-PLATH, H., DIPL.-ING. DR.-ING. EHNOLD, A., DIPL.-ING. SCHUSTER, T., DIPL.-PHYS. GOLDBACH, K., DIPL.-ING.DR.-ING. AUFENANGER, M., DIPL.-ING. KLITZSCH, G., DIPL.-ING., PAT.-ANWAELTE, 8000 MUENCHEN

8339 Ceased/non-payment of the annual fee