DE3274767D1 - Optical beam homogenizer - Google Patents

Optical beam homogenizer

Info

Publication number
DE3274767D1
DE3274767D1 DE8282109774T DE3274767T DE3274767D1 DE 3274767 D1 DE3274767 D1 DE 3274767D1 DE 8282109774 T DE8282109774 T DE 8282109774T DE 3274767 T DE3274767 T DE 3274767T DE 3274767 D1 DE3274767 D1 DE 3274767D1
Authority
DE
Germany
Prior art keywords
optical beam
beam homogenizer
homogenizer
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8282109774T
Other languages
English (en)
Inventor
Robert Joseph Pressley
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Allied Corp
Original Assignee
Allied Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Allied Corp filed Critical Allied Corp
Application granted granted Critical
Publication of DE3274767D1 publication Critical patent/DE3274767D1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/0977—Reflective elements
    • G02B27/0983—Reflective elements being curved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073—Shaping the laser spot
    • B23K26/0732—Shaping the laser spot into a rectangular shape
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Recrystallisation Techniques (AREA)
  • Laser Beam Processing (AREA)
  • Lasers (AREA)
  • Optical Communication System (AREA)
DE8282109774T 1981-11-17 1982-10-22 Optical beam homogenizer Expired DE3274767D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/322,124 US4475027A (en) 1981-11-17 1981-11-17 Optical beam homogenizer

Publications (1)

Publication Number Publication Date
DE3274767D1 true DE3274767D1 (en) 1987-01-29

Family

ID=23253531

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8282109774T Expired DE3274767D1 (en) 1981-11-17 1982-10-22 Optical beam homogenizer

Country Status (5)

Country Link
US (1) US4475027A (de)
EP (1) EP0080597B1 (de)
JP (1) JPS5891422A (de)
CA (1) CA1188553A (de)
DE (1) DE3274767D1 (de)

Families Citing this family (132)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3145278C2 (de) * 1981-11-14 1985-02-14 Schott-Zwiesel-Glaswerke Ag, 8372 Zwiesel Verfahren zum berührungslosen Abtragen von Material von der Oberfläche eines Glasgegenstandes und Vorrichtung zur Durchführung des Verfahrens
GB8306951D0 (en) * 1983-03-14 1983-04-20 Ici Plc Energy beam focusing apparatus
US4518232A (en) * 1983-08-24 1985-05-21 Avco Everett Research Laboratory, Inc. Method and apparatus for optical beam shaping
JPS619517A (ja) * 1984-06-22 1986-01-17 Mitsubishi Electric Corp 回転体機械部品の表面改質装置
US4685780A (en) * 1984-09-12 1987-08-11 Kabushiki Kaisha Toshiba Reflection type optical device
JPS6167821A (ja) * 1984-09-12 1986-04-08 Toshiba Corp 反射光学装置
JPS6237350A (ja) * 1985-08-12 1987-02-18 Toshiba Corp 表面熱処理装置
DE3530326A1 (de) * 1985-08-24 1987-02-26 Hell Rudolf Dr Ing Gmbh Integrierender kondensor
US4793694A (en) * 1986-04-23 1988-12-27 Quantronix Corporation Method and apparatus for laser beam homogenization
US4749840A (en) * 1986-05-16 1988-06-07 Image Micro Systems, Inc. Intense laser irradiation using reflective optics
US4810093A (en) * 1986-08-11 1989-03-07 Laser Precision Corporation Versatile and efficient radiation transmission apparatus and method for spectrometers
US5148442A (en) * 1986-09-30 1992-09-15 The United States Of America As Represented By The Department Of Energy Dye lasing arrangement including an optical assembly for altering the cross-section of its pumping beam and method
JPS63272092A (ja) * 1987-04-30 1988-11-09 Yoshiaki Arata 超強力複合レ−ザ・ビ−ム造出法
JPH03500620A (ja) * 1987-08-28 1991-02-14 ツェントラルノエ、コンストルクトルスコエ　ビューロー、ウニカルノボ、プリボロストロエニア、アカデミー、ナウク、エスエスエスエル 目的物のレーザ処理方法及びその方法を実施するための装置
DE3912237A1 (de) * 1989-04-14 1990-10-18 Zeiss Carl Fa Spiegel zur veraenderung der geometrischen gestalt eines lichtbuendels
US5138490A (en) * 1989-04-29 1992-08-11 Carl-Zeiss-Stiftung Arrangement for changing the geometrical form of a light beam
DE4023904A1 (de) * 1990-07-27 1992-01-30 Zeiss Carl Fa Spiegel zur veraenderung der geometrischen gestalt eines lichtbuendels
US5578520A (en) 1991-05-28 1996-11-26 Semiconductor Energy Laboratory Co., Ltd. Method for annealing a semiconductor
US5310990A (en) * 1991-06-03 1994-05-10 The United Stated Of America As Represented By The Secretary Of The Navy Method of laser processing ferroelectric materials
US5766344A (en) * 1991-09-21 1998-06-16 Semiconductor Energy Laboratory Co., Ltd. Method for forming a semiconductor
US5657138A (en) * 1991-10-13 1997-08-12 Lewis; Aaron Generating defined structures on materials using combined optical technologies for transforming the processing beam
US5872663A (en) * 1992-03-06 1999-02-16 Quantum Corporation Apparatus and method for fabricating a deflection mirror tower
JPH06124913A (ja) * 1992-06-26 1994-05-06 Semiconductor Energy Lab Co Ltd レーザー処理方法
US7097712B1 (en) * 1992-12-04 2006-08-29 Semiconductor Energy Laboratory Co., Ltd. Apparatus for processing a semiconductor
JPH06232069A (ja) * 1993-02-04 1994-08-19 Semiconductor Energy Lab Co Ltd 半導体装置の作製方法
US5484980A (en) * 1993-02-26 1996-01-16 General Electric Company Apparatus and method for smoothing and densifying a coating on a workpiece
US5485309A (en) * 1993-04-05 1996-01-16 Baranetz; Oleg N. Compact display for animating polarized images
AU7682594A (en) * 1993-09-08 1995-03-27 Uvtech Systems, Inc. Surface processing
US5814156A (en) * 1993-09-08 1998-09-29 Uvtech Systems Inc. Photoreactive surface cleaning
US5645740A (en) * 1993-11-01 1997-07-08 Naiman; Charles S. System and assemblage for producing microtexturized substrates and implants
KR100299292B1 (ko) * 1993-11-02 2001-12-01 이데이 노부유끼 다결정실리콘박막형성방법및그표면처리장치
CN1052566C (zh) 1993-11-05 2000-05-17 株式会社半导体能源研究所 制造半导体器件的方法
US6897100B2 (en) * 1993-11-05 2005-05-24 Semiconductor Energy Laboratory Co., Ltd. Method for processing semiconductor device apparatus for processing a semiconductor and apparatus for processing semiconductor device
US5465780A (en) * 1993-11-23 1995-11-14 Alliedsignal Inc. Laser machining of ceramic cores
JPH07249591A (ja) * 1994-03-14 1995-09-26 Matsushita Electric Ind Co Ltd 半導体薄膜のレーザーアニール方法及び薄膜半導体素子
US6293938B1 (en) 1994-04-08 2001-09-25 Summit Technology, Inc. Photo-refractive keratectomy
AU2276395A (en) * 1994-04-08 1995-10-30 Summit Technology, Inc. Control of photorefractive keratectomy
AU2205395A (en) * 1994-04-08 1995-10-30 Summit Technology, Inc. Profiling the intensity distribution of optical beams
US6015503A (en) * 1994-06-14 2000-01-18 Fsi International, Inc. Method and apparatus for surface conditioning
US5548444A (en) * 1994-07-06 1996-08-20 Hughes Danbury Optical Systems, Inc. Optical beam homogenizing apparatus and method
US5609780A (en) * 1994-11-14 1997-03-11 International Business Machines, Corporation Laser system
TW305063B (de) 1995-02-02 1997-05-11 Handotai Energy Kenkyusho Kk
US5715345A (en) * 1995-02-27 1998-02-03 Hughes Danbury Optical Systems, Inc. Optical beam regeneration by optical fiber remapping
US6524977B1 (en) * 1995-07-25 2003-02-25 Semiconductor Energy Laboratory Co., Ltd. Method of laser annealing using linear beam having quasi-trapezoidal energy profile for increased depth of focus
DE19541126C2 (de) * 1995-10-27 2000-01-20 Manfred Goellner Vorrichtung zur Ablenkung und Veränderung eines Strahlenbündels
US6350326B1 (en) 1996-01-15 2002-02-26 The University Of Tennessee Research Corporation Method for practicing a feedback controlled laser induced surface modification
JPH09234579A (ja) 1996-02-28 1997-09-09 Semiconductor Energy Lab Co Ltd レーザー照射装置
US5864430A (en) * 1996-09-10 1999-01-26 Sandia Corporation Gaussian beam profile shaping apparatus, method therefor and evaluation thereof
JP3917698B2 (ja) * 1996-12-12 2007-05-23 株式会社半導体エネルギー研究所 レーザーアニール方法およびレーザーアニール装置
US6002102A (en) * 1997-02-25 1999-12-14 Lsp Technologies, Inc. Hidden surface laser shock processing
JP4056577B2 (ja) 1997-02-28 2008-03-05 株式会社半導体エネルギー研究所 レーザー照射方法
JPH10244392A (ja) * 1997-03-04 1998-09-14 Semiconductor Energy Lab Co Ltd レーザー照射装置
JPH10253916A (ja) * 1997-03-10 1998-09-25 Semiconductor Energy Lab Co Ltd レーザー光学装置
JP4238390B2 (ja) * 1998-02-27 2009-03-18 株式会社ニコン 照明装置、該照明装置を備えた露光装置および該露光装置を用いて半導体デバイスを製造する方法
ATE241813T1 (de) 1998-03-10 2003-06-15 Hentze Lissotschenko Patentver Vorrichtung und verfahren zur optischen strahltransformation
US6072631A (en) * 1998-07-09 2000-06-06 3M Innovative Properties Company Diffractive homogenizer with compensation for spatial coherence
US6016227A (en) * 1998-07-31 2000-01-18 The University Of Tennessee Research Corporation Apparatus and method for producing an improved laser beam
TW445545B (en) 1999-03-10 2001-07-11 Mitsubishi Electric Corp Laser heat treatment method, laser heat treatment apparatus and semiconductor device
US6294225B1 (en) 1999-05-10 2001-09-25 The University Of Tennessee Research Corporation Method for improving the wear and corrosion resistance of material transport trailer surfaces
US6299707B1 (en) 1999-05-24 2001-10-09 The University Of Tennessee Research Corporation Method for increasing the wear resistance in an aluminum cylinder bore
US6173886B1 (en) 1999-05-24 2001-01-16 The University Of Tennessee Research Corportion Method for joining dissimilar metals or alloys
TW482705B (en) 1999-05-28 2002-04-11 Electro Scient Ind Inc Beam shaping and projection imaging with solid state UV Gaussian beam to form blind vias
US6791060B2 (en) * 1999-05-28 2004-09-14 Electro Scientific Industries, Inc. Beam shaping and projection imaging with solid state UV gaussian beam to form vias
US6497985B2 (en) 1999-06-09 2002-12-24 University Of Tennessee Research Corporation Method for marking steel and aluminum alloys
US6423162B1 (en) 1999-07-02 2002-07-23 The University Of Tennesse Research Corporation Method for producing decorative appearing bumper surfaces
US6284067B1 (en) 1999-07-02 2001-09-04 The University Of Tennessee Research Corporation Method for producing alloyed bands or strips on pistons for internal combustion engines
DE60045653D1 (de) 1999-08-13 2011-04-07 Semiconductor Energy Lab Laserbestrahlungsgerät
US6229111B1 (en) 1999-10-13 2001-05-08 The University Of Tennessee Research Corporation Method for laser/plasma surface alloying
US6328026B1 (en) 1999-10-13 2001-12-11 The University Of Tennessee Research Corporation Method for increasing wear resistance in an engine cylinder bore and improved automotive engine
US6573162B2 (en) * 1999-12-24 2003-06-03 Semiconductor Energy Laboratory Co., Ltd. Laser irradiation apparatus and method of fabricating a semiconductor device
US6856630B2 (en) * 2000-02-02 2005-02-15 Semiconductor Energy Laboratory Co., Ltd. Beam homogenizer, laser irradiation apparatus, semiconductor device, and method of fabricating the semiconductor device
JP4659300B2 (ja) * 2000-09-13 2011-03-30 浜松ホトニクス株式会社 レーザ加工方法及び半導体チップの製造方法
US6568846B1 (en) * 2000-11-15 2003-05-27 The United States Of America As Represented By The Secretary Of The Army Pulsed laser heating simulation of thermal damage on coated surface
DE50207722D1 (de) * 2001-03-20 2006-09-14 Thomson Licensing Element zur kombinierten symmetrisierung und homogenisierung eines strahlenbündels
US6887233B2 (en) * 2001-03-22 2005-05-03 Lumenis, Inc. Scanning laser handpiece with shaped output beam
WO2003013779A1 (de) * 2001-08-07 2003-02-20 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum laserstrahlschweissen
JP3977038B2 (ja) 2001-08-27 2007-09-19 株式会社半導体エネルギー研究所 レーザ照射装置およびレーザ照射方法
US6819490B2 (en) 2001-09-10 2004-11-16 Micronic Laser Systems Ab Homogenization of a spatially coherent radiation beam and printing and inspection, respectively, of a pattern on a workpiece
JP3973882B2 (ja) * 2001-11-26 2007-09-12 株式会社半導体エネルギー研究所 レーザ照射装置およびレーザ照射方法
US6903859B2 (en) * 2001-12-07 2005-06-07 Micronic Laser Systems Ab Homogenizer
ATE534142T1 (de) 2002-03-12 2011-12-15 Hamamatsu Photonics Kk Verfahren zum auftrennen eines substrats
EP2216128B1 (de) 2002-03-12 2016-01-27 Hamamatsu Photonics K.K. Verfahren zum Schneiden eines bearbeiteten Gegenstands
TWI326626B (en) 2002-03-12 2010-07-01 Hamamatsu Photonics Kk Laser processing method
US7263255B2 (en) * 2002-04-08 2007-08-28 Lumenis Inc. System, method and apparatus for providing uniform illumination
US6801298B2 (en) * 2002-07-25 2004-10-05 Intel Corporation Light condenser
TWI520269B (zh) 2002-12-03 2016-02-01 Hamamatsu Photonics Kk Cutting method of semiconductor substrate
FR2852250B1 (fr) 2003-03-11 2009-07-24 Jean Luc Jouvin Fourreau de protection pour canule, un ensemble d'injection comportant un tel fourreau et aiguille equipee d'un tel fourreau
US8685838B2 (en) 2003-03-12 2014-04-01 Hamamatsu Photonics K.K. Laser beam machining method
JP2009514188A (ja) * 2003-07-09 2009-04-02 カール・ツァイス・エスエムティー・アーゲー ファセットミラーおよび鏡面ファセットの製造方法
JP4311158B2 (ja) * 2003-10-14 2009-08-12 株式会社デンソー 樹脂成形品およびその製造方法
DE102004028471A1 (de) * 2004-06-11 2005-12-29 Leica Microsystems (Schweiz) Ag Beleuchtungseinrichtung, insbesondere Spaltlampe
DE102004034966A1 (de) * 2004-07-16 2006-02-02 Carl Zeiss Jena Gmbh Beleuchtungsvorrichtung für ein Lichtrastermikroskop mit linienförmiger Abtastung und Verwendung
DE102004034967A1 (de) * 2004-07-16 2006-02-02 Carl Zeiss Jena Gmbh Beleuchtungsvorrichtung für ein Lichtrastermikroskop mit punktförmiger Lichtquellenverteilung
DE102005005355B4 (de) 2005-02-05 2018-05-09 Adc Automotive Distance Control Systems Gmbh Vorrichtung zur Formung eines Lichtstrahls
US7569463B2 (en) 2006-03-08 2009-08-04 Applied Materials, Inc. Method of thermal processing structures formed on a substrate
US7548364B2 (en) 2006-07-31 2009-06-16 Applied Materials, Inc. Ultra-fast beam dithering with surface acoustic wave modulator
US20080025354A1 (en) * 2006-07-31 2008-01-31 Dean Jennings Ultra-Fast Beam Dithering with Surface Acoustic Wave Modulator
US8148663B2 (en) * 2007-07-31 2012-04-03 Applied Materials, Inc. Apparatus and method of improving beam shaping and beam homogenization
US7944624B2 (en) * 2007-08-29 2011-05-17 Scaggs Michael J Method for homogenizing light
DE102009009366A1 (de) 2009-02-18 2010-08-19 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Homogenisierung von Laserstrahlung
US8624155B1 (en) * 2009-05-12 2014-01-07 Vinyl Technologies, Inc. Apparatus for scribing thin films in photovoltaic cells
DE102013101856B4 (de) * 2013-02-25 2016-09-08 Martin Berz Vorrichtung zur Veränderung eines Strahlprofils eines einfallenden Lichtstrahls, insbesondere Strahlaufweiter
US10226837B2 (en) 2013-03-15 2019-03-12 Nlight, Inc. Thermal processing with line beams
US10069271B2 (en) 2014-06-02 2018-09-04 Nlight, Inc. Scalable high power fiber laser
CN105720463B (zh) 2014-08-01 2021-05-14 恩耐公司 光纤和光纤传输的激光器中的背向反射保护与监控
US9837783B2 (en) 2015-01-26 2017-12-05 Nlight, Inc. High-power, single-mode fiber sources
US10050404B2 (en) 2015-03-26 2018-08-14 Nlight, Inc. Fiber source with cascaded gain stages and/or multimode delivery fiber with low splice loss
US10520671B2 (en) 2015-07-08 2019-12-31 Nlight, Inc. Fiber with depressed central index for increased beam parameter product
JP6743136B2 (ja) 2015-09-24 2020-08-19 エヌライト，インコーポレーテッド ファイバ対ファイバ角度を変更することによるビームパラメータ積（ｂｐｐ）制御
US10073221B2 (en) 2015-09-30 2018-09-11 Nokia Of America Corporation Beamforming for an optical switch
US11179807B2 (en) 2015-11-23 2021-11-23 Nlight, Inc. Fine-scale temporal control for laser material processing
CN108367389B (zh) 2015-11-23 2020-07-28 恩耐公司 激光加工方法和装置
US10466494B2 (en) * 2015-12-18 2019-11-05 Nlight, Inc. Reverse interleaving for laser line generators
US10668537B2 (en) * 2016-09-29 2020-06-02 Nlight, Inc. Systems for and methods of temperature control in additive manufacturing
US10739621B2 (en) * 2016-09-29 2020-08-11 Nlight, Inc. Methods of and systems for materials processing using optical beams
US10656440B2 (en) * 2016-09-29 2020-05-19 Nlight, Inc. Fiber optical beam delivery device producing output exhibiting intensity distribution profile having non-zero ellipticity
US10646963B2 (en) * 2016-09-29 2020-05-12 Nlight, Inc. Use of variable beam parameters to control a melt pool
US10668535B2 (en) * 2016-09-29 2020-06-02 Nlight, Inc. Method of forming three-dimensional objects
US10730785B2 (en) * 2016-09-29 2020-08-04 Nlight, Inc. Optical fiber bending mechanisms
US10661391B2 (en) * 2016-09-29 2020-05-26 Nlight, Inc. Method of forming pores in three-dimensional objects
US10663742B2 (en) * 2016-09-29 2020-05-26 Nlight, Inc. Method and system for cutting a material using a laser having adjustable beam characteristics
US10649241B2 (en) * 2016-09-29 2020-05-12 Nlight, Inc. Multi-function semiconductor and electronics processing
US10684487B2 (en) * 2016-09-29 2020-06-16 Nlight, Inc. Frequency-converted optical beams having adjustable beam characteristics
US10673197B2 (en) * 2016-09-29 2020-06-02 Nlight, Inc. Fiber-based optical modulator
CN109791252B (zh) 2016-09-29 2021-06-29 恩耐公司 可调整的光束特性
US10670872B2 (en) * 2016-09-29 2020-06-02 Nlight, Inc. All-fiber optical beam switch
US10673199B2 (en) * 2016-09-29 2020-06-02 Nlight, Inc. Fiber-based saturable absorber
US10673198B2 (en) * 2016-09-29 2020-06-02 Nlight, Inc. Fiber-coupled laser with time varying beam characteristics
US10656427B2 (en) * 2016-09-29 2020-05-19 Nlight, Inc. Multicore fiber-coupled optical probing techniques
US10668567B2 (en) * 2016-09-29 2020-06-02 Nlight, Inc. Multi-operation laser tooling for deposition and material processing operations
US10661342B2 (en) * 2016-09-29 2020-05-26 Nlight, Inc. Additive manufacturing systems and methods for the same
US10732439B2 (en) * 2016-09-29 2020-08-04 Nlight, Inc. Fiber-coupled device for varying beam characteristics

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2156911A (en) * 1937-11-06 1939-05-02 Leo H Brown Microscope
US2890622A (en) * 1954-08-11 1959-06-16 Panavision Inc Anamorphosing system
US3705758A (en) * 1969-12-30 1972-12-12 Honeywell Inc Apparatus for controlling a beam of coherent electro-magnetic waves
US3877777A (en) * 1972-11-15 1975-04-15 Columbia Broadcasting Syst Inc Beam expander subsystem for film scanner
US3848104A (en) * 1973-04-09 1974-11-12 Avco Everett Res Lab Inc Apparatus for heat treating a surface
US4059461A (en) * 1975-12-10 1977-11-22 Massachusetts Institute Of Technology Method for improving the crystallinity of semiconductor films by laser beam scanning and the products thereof
US4030816A (en) * 1976-04-22 1977-06-21 Caterpillar Tractor Co. Variable focus right angle mirror for laser beam manipulation
FR2357834A1 (fr) * 1976-07-06 1978-02-03 Commissariat Energie Atomique Capteur solaire a recepteur fixe et a miroirs mobiles
GB2012065B (en) * 1977-08-10 1982-01-13 Secr Defence Mirrors and their uses
US4195913A (en) * 1977-11-09 1980-04-01 Spawr Optical Research, Inc. Optical integration with screw supports
US4272733A (en) * 1978-10-20 1981-06-09 Allied Chemical Corporation Broadly tunable chromium-doped beryllium aluminate lasers and operation thereof
US4198246A (en) * 1978-11-27 1980-04-15 Rca Corporation Pulsed laser irradiation for reducing resistivity of a doped polycrystalline silicon film
US4316074A (en) * 1978-12-20 1982-02-16 Quantronix Corporation Method and apparatus for laser irradiating semiconductor material
GB2044948B (en) * 1979-02-27 1983-10-05 Boc Ltd Power density of a laser beam heater
US4289380A (en) * 1980-04-03 1981-09-15 The United States Of America As Represented By The Secretary Of The Navy Laser beam linear adjustable integrating mirror

Also Published As

Publication number Publication date
EP0080597B1 (de) 1986-12-17
EP0080597A1 (de) 1983-06-08
US4475027A (en) 1984-10-02
JPS5891422A (ja) 1983-05-31
CA1188553A (en) 1985-06-11

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