DE102005048237B3 - Precision positioner for head of instrument testing semiconductor components, includes arm swinging about axis, carrying head in holder turned about further axis - Google Patents

Abstract

The test head (70) is positioned in three dimensions. The instrument includes a first arm (30) which swings about an axis (S1). The head (70) is attached to a holder (40) turned about an axis of rotation (R) in a bearing on the arm, by a drive system attached to the arm. The drive shaft extends along an axis (G1). It includes a drive shaft extending along a second axis (G2). The axes (G1, S1) run coincidently. The first arm includes a hollow cylinder extending along the first axis and coaxial within the drive shaft. The axes (G2, G1) cross at right angles. The first axis (G1) is vertical, the second horizontal. The drive system includes a worm gear and/or bevel gear and/or a belt drive. Drive is taken from a handwheel or motor. The drive shaft is connected at one end to a handwheel and at the other to a motor. The second drive axis (G2) and rotation axis (R) are parallel. Further details of the drive system, its variants, support and tensioning are provided. The positioner runs on a column. A second arm (23) swinging about an axis (S2) is included; it is connected to the first arm. This is fastened to a vertical carriage (22). The axes (S1, S2) are parallel, the arms being joined by a linking section (24). A horizontal (xy) carriage is included, the first arm being fastened to it. One or more of the arms, connecting section, vertical carriage and/or horizontal carriage may be arrested (31) in position.

Description

The The invention relates to a handling device, in particular for positioning a test head on a tester. The handling device is provided with positioning means by which the test head is positionable in space. About that In addition, the handling device has a about an axis of rotation rotatable holder on which the test head can be fastened.

A Handling device or manipulator for positioning a Test head usually has several Translational and rotational degrees of freedom that allow position the test head exactly in the room. Application finds such Handling device therefore usually in the examination of electronic components, such as integrated circuits (IC) or wafer. To the functionality of the electronic components to be able to test It is necessary that the relatively heavy Test head accurate to a test facility : approaching. The testing device, for example, a so-called device handler or wafer prober, represents the electronic components to be tested by the test head ready. An unadulterated Measurement result during the test The electronic components requires an accurate docking of the test head at the test facility ahead. For this reason, a precise and smooth adjustment the position of the test head positioning means essential.

A handling device, which is provided with a rotatable about a rotation axis holder, is in the DE 103 25 818 B3 described. The holder has a rotary guide which comprises a bearing plate connected to positioning means and a support plate rotatably mounted about the rotation axis relative to the bearing plate and to which the test head can be fastened. The bearing plate and the carrier plate are provided with concentric openings, which serve to receive a connecting cable connected to the test head. In order to achieve a relatively simple insertion of the connection cable into the openings, the bearing plate and the support plate each have a Zuführungssekfor, which is formed by a cut-out to the edge of the plates. To rotate the test head about the axis of rotation, the carrier plate is connected by a traction mechanism with a drive attached to the bearing plate. The drive comprises a manually operated handwheel and a gearbox which transmits the torque generated by the handwheel to the traction mechanism.

A handling device which serves to position a test head is also disclosed in US Pat US 6,023,173 A described. The handling device comprises a holder rotatable about an axis of rotation, to which the test head can be fastened, a column extending in the vertical direction, a horizontal slide displaceably arranged on the column in the vertical direction, a horizontally adjustable expansion unit arranged on the horizontal slide, a rotary arm disposed on the expansion unit and rotatable about a vertical axis; and a tumble unit pivotable about a horizontal axis disposed between the rotary arm and the bracket. The holder is composed of a mounting flange which is fixed to a tumble plate of the tumble unit, a hollow cylindrical bearing flange which is fixed to the mounting flange, and a rotatably mounted on the bearing flange carrier flange to which the test head is fastened, together , The support flange is connected by means of a chain with a gear which is rotatably mounted on the bearing flange and connected to the output shaft of a wheel gear arranged above the tumble plate. The gearbox can be driven either by an electric motor or a manually operated handwheel. For this purpose, the handwheel is arranged on a drive shaft extending in the horizontal direction of the gear train, whereas the electric motor is connected by means of a belt to the drive shaft.

A handling device that serves to position a test head is also disclosed in US 5,436,866 US 6,614,222 B1 described. The handling device is provided with a drive, by means of which a holder for the test head can be rotated about an axis of rotation.

The known handling devices have in common that the connection cable of the test head by a coaxially to the axis of rotation extending opening of Holder passed will allow an unimpeded rotational movement of the holder and thus of the test head to ensure the rotation axis. Disadvantage here is a relatively complex and extensive design of the holder. The latter is especially unsatisfactory, if a relatively difficult Test head is to be positioned by the handling device, so that comparatively due to the expansion of the holder result in large torques that absorb from the handling device are.

In comparison, has a handling device, as for example in the EP 0 237 698 A2 is described, a comparatively simple design of the holder on by ge the connection cable of the test head on the bracket leads. However, such a cable guide is associated with the disadvantage that the usually also cooling lines containing and thus comparatively thick connection cable can obscure a rotation of the holder causing rotation shaft and thus affects the drive of the rotary shaft, for example by means of a handwheel. In the prior art, it is therefore also known to design the drive shaft connected to the rotation shaft gear as a flexible shaft, so as to be able to shift the drive of the drive shaft in a region outside the cable guide. However, the use of a flexible shaft in turn contributes to a comparatively complicated design.

Of the Invention is based on the object, a handling device to further develop that a simple and compact Design can achieve.

These Task is by a handling device with the features according to Claim 1 solved.

preferred Embodiments of the present invention are described in claims 2 to 15 defined.

The invention Handling device is based on the knowledge, a transmission, which serves to rotate the holder, so on to a pivot axis pivotable swivel arm of the handling device to arrange that the drive shaft of the transmission in the direction of a transmission axis extends, coincident to the pivot axis of the pivot arm extends. On this way it is possible to arrange the drive shaft in an area outside the cable guide, in such a way that the drive axle with the drive shaft connected drive, for example a handwheel or an electric motor, coincides with the transmission axis. The use of a flexible shaft, as is conventional in the art, it does not need that. The coincidence of transmission axis and Swivel axle carries Furthermore to a particularly compact design.

Of the first pivot arm has at least one hollow cylinder, which is extends in the direction of the first pivot axis and in which the drive shaft coaxial is arranged. The hollow cylinder provides an unobstructed Rotary movement of the drive shaft safe. On the other hand, the For example, in a bore of the pivot arm pressed hollow cylinder a pivotable mounting of the pivot arm, for example, by the outer peripheral surface of the Hollow cylinder in a rolling bearing is recorded. Such an embodiment has proven to be expedient when the first gear axis and the first pivot axis coincide.

In a preferred embodiment of the inventive handling device becomes the first transmission axis of the second transmission axis in a Angle, which is preferably 90 °, crossed. In this context, it has proved to be advantageous if the first transmission axis extends substantially in the vertical direction and the second transmission axis therefore essentially in horizontal Direction runs. The parallel to the first transmission axis or coincident with this extending pivot axis thus also extends in vertical Direction, so that the swivel arm a so-called "swing" movement of the test head allows. The second transmission axis extending essentially in the horizontal direction on the other hand allows it to drive the bracket by means of the output shaft so that the Test head a so-called "twist" movement around the Performs rotation axis.

Conveniently, the transmission comprises a worm gear and a bevel gear, which make it possible the first gear axis and the second gear axis offset by 90 ° to arrange each other. Dependent on from the respective application case but also other types of gears, such as a harmonic drive gear, are used. Especially if the gearbox a worm gear is where the worm with the drive shaft and the worm wheel is connected to the output shaft, it has proved to be advantageous to provide a catchy screw, which is self-locking and therefore an automatic turning of the output shaft and thus prevents the test head without any additional Arrestierungsmittel are required.

The drive shaft can preferably be driven by a handwheel and / or by a motor which is preferably designed as an electric motor. In this context, the inventive arrangement of the transmission axis comes into play, which makes it possible, the drive shaft at a first end with the handwheel and at a second end with the. Motor to connect. The use of a traction mechanism, at the same time to connect the handwheel and the motor to the drive shaft, as it is from the US 6,023,173 A is known, it does not need this. In addition, the inventive arrangement of the handwheel and the motor contributes to the drive shaft to a compact design.

In a further preferred embodiment of the handling device according to the invention, the second transmission axis and the axis of rotation run parallel to one another. The second transmission Axes and the axis of rotation can coincide or be arranged at a distance from each other. In the latter case, it has proven to be advantageous to connect the output shaft and the holder by a traction mechanism with each other. The traction mechanism makes it possible to convert the speed of the output shaft, and is designed for this purpose advantageously as a positive synchronous belt transmission.

In In this context, it has also proved to be advantageous the holder rotatably with a rotating shaft, which is in the direction the axis of rotation extends to connect. The traction mechanism includes a first disc, the rotation with the output shaft is connected, a second disc which is rotationally fixed to the rotary shaft is connected, and a traction means, for example, a synchronous or Timing belt, through which the first disc and the second disc with each other are connected. To be a reliable power transmission from the first disc to ensure the second disc is it is expedient when the transmission has a tensioning roller which is connected to the traction means is applied.

In a further preferred embodiment of the inventive handling device the positioning means a column, which extends in the vertical direction and on a base is arranged, and a vertical slide, in the vertical direction slidably mounted on the column is. The linearly movable vertical slide allows a so-called "vertical" movement of the test head.

The In addition, positioning means comprise in a further preferred embodiment a second pivot arm pivotable about a second pivot axis and connected to the first pivot arm. The second swivel arm is preferably attached to the vertical slide. Run the first pivot axis and the second pivot axis parallel to each other, For example, in the vertical direction, then let the rotational movements overlay the first pivot arm and the second pivot arm, so as to perform a so-called "side-to-side" and "in-and-out" movement of the test head. Of the first pivot arm and the second pivot arm are preferably through a bridge connected. The bridge can be both with the first Swivel arm and hingedly connected to the second pivot arm and be arranged so that at the junction of web and second pivot arm results in a third pivot axis parallel to the first and second pivot axis and a variety of adjustability ensures the positioning means.

In an alternative embodiment of the inventive handling device the positioning means comprise a horizontal slide, the is displaceable in the horizontal direction. The first swivel arm is preferably attached to the horizontal slide, wherein the first swivel arm directly or, for example by means of the web, can be indirectly attached to the horizontal slide. The one Translational movement exporting Horizontal carriage ensured a precise one and reproducible adjustment in the horizontal direction allows in dependence orientation either a side-to-side movement or an in-and-out movement of the test head.

Prefers are the first pivot arm and / or the second pivot arm and / or the web and / or the vertical slide and / or the horizontal slide Lockable by means of locking means in a predetermined position, for a reliable positioning of the test head.

details and further advantages of the inventive handling device will be apparent from the following description of two preferred Embodiments. In the the embodiments illustrate only schematically representing drawings in detail:

1 a perspective view of a handling device in a first embodiment, on which a test head is arranged;

2 a plan view of the handling device according to 1 showing the test head in a different position;

3 a partially sectioned view of a pivoting arm of the handling device in a second embodiment;

4 a perspective view of a pivot arm of the handling device, which shows a holder connected to the pivot arm;

5 a perspective view according to 4 showing a worm gear fixed to the swing arm and a traction mechanism connected thereto;

6 a perspective view according to 5 showing a web pivotally connected to the pivot arm;

7 a perspective view according to 6 showing the bearing of the drive shaft of the worm gear in hollow cylinders;

8th a perspective view according to 7 showing the connection of the drive shaft of the worm gear with a hand wheel and an electric motor;

9 a side view of the pivot arm and the bracket, showing the test head in a first position;

10 a side view according 9 showing the test head in a second position, and

11 a side view according to the 9 and 10 showing the test head in a third position.

The in the 1 and 2 illustrated handling device is used for positioning a test head 70 on an electronic component testing device, not shown, such as integrated circuits or wafers. For this purpose, the handling device has a holder 40 on, on which the test head 70 is attached. In addition, the handling device is provided with positioning means by which the test head can be positioned in space and a first pivot arm 30 have, which is pivotable about a first pivot axis S ₁ . The positioning means further comprises a column extending in the vertical direction z 20 and a vertical slide 22 , The vertical slide 22 can be mounted on two parallel guide rails 21 standing at the pillar 20 are arranged to move linearly in the vertical direction z and may be driven by drive means for this purpose. By means of a locking lever, not shown, the vertical slide 22 in a predetermined position on the column 20 be arrested. The pillar 20 is on a base 10 arranged, the two horizontally extending stringers 11 that has two trusses 12 that are orthogonal to the stringers 11 extend, be supported. In order to ensure a sufficient stability of the handling device even on an uneven ground, the support beams can 11 and the traverses 12 be stored on not shown, height-adjustable plate feet. The undercarriage 10 may further be provided with a rotary plate, which is a rotation of the column 20 allows an axis extending in the vertical direction z.

The positioning means also have in the in the 1 and 2 shown embodiment, a second pivot arm 23 on, which is pivotable about a second pivot axis S ₂ and on the vertical slide 22 is attached. The first pivot axis S ₁ and the second pivot axis S ₂ parallel to each other and extend in the vertical direction z. In particular 1 to recognize, are the first swivel arm 30 and the second swing arm 23 through a footbridge 24 hinged together. The jetty 24 is at the junction with the second pivot arm 23 about a third pivot axis S ₃ pivotally extending parallel to the first pivot axis S ₁ and the second pivot axis S ₂ . As well as the vertical slide 22 can be the first swivel arm 30 , the second swivel arm 23 and / or the jetty 24 be locked by means of locking means in a predetermined position, as exemplified by the first pivot arm 30 arresting locking lever 31 is shown.

In the 3 illustrated embodiment differs from the embodiment according to the 1 and 2 especially in that instead of the second swing arm 23 a horizontally displaceable in a horizontal direction x, y horizontal slide 25 is provided, by means of rails 26 linearly movable on the vertical slide 22 is arranged. The operation of such a horizontal slide 25 , which can also be locked by means of locking means in a predetermined position, is known per se.

The previously described embodiments of a handling device have in common that the holder 40 about a rotation axis R rotatable on the pivot arm 30 is stored and that for rotating the holder 40 a gearbox 50 on the swivel arm 30 is attached, in particular the 4 to 8th make known. In the present case designed as a worm gear transmission 50 has a drive shaft 51 which extends in the direction of a first transmission axis G ₁ , and an output shaft 54 , which extends in the direction of a second transmission axis G ₂ , on. The first transmission axis G ₁ and the first pivot axis S ₁ coincide, in particular 1 to recognize. The second transmission axis G ₂ intersects the first transmission axis G ₁ at an angle α, which is approximately 90 °, and runs parallel to the rotation axis R. The rotation axis R and the second transmission axis G ₂ consequently run in the horizontal direction x, y.

How the particular 1 and 2 to identify, has the bracket 40 One Base 41 and two side arms 42 between which the test head 70 is clamped on. The base 41 is non-rotatable with a rotary shaft 43 connected, which extends in the direction of the axis of rotation R. The rotation shaft 43 and the output shaft 54 of the worm gear 50 are by a designed in the present case as a form-locking synchronous belt transmission traction mechanism 60 connected with each other. How the particular 5 to 8th to identify, includes the traction mechanism 60 a first synchronizing disc 61 , the rotation with the output shaft 54 connected, a second synchronizing disk 62 , the rotation with the rotation shaft 43 is connected, and designed as a timing belt traction means 63 through which the synchronizer disc 61 and the synchronizer disc 62 connected to each other. The traction mechanism 60 also has a tension roller 64 on, on the timing belt 63 is applied to give this a given voltage.

To the holder 40 and thus the attached to this test head 70 Turning becomes one of a handwheel 55 or an electric motor 56 generated torque via the worm gear 50 and the traction mechanism 60 to the rotation shaft 43 transfer. How the particular 3 and 8th to recognize, is the drive shaft 51 for this purpose at a first end 52 with the handwheel 55 and a second end 53 with the electric motor 56 connected. Depending on the structural design of the drive shaft 51 can the handwheel 55 and the electric motor 56 directly or, as in the present case, via couplings 57 and intermediate waves 58 to the drive shaft 51 be connected.

On the one hand, an unobstructed rotation of the drive shaft 51 to the first transmission axis G ₁ and on the other hand pivoting of the pivot arm 30 to reach the coincident with the transmission axis G ₁ pivot axis S ₁ , is the pivot arm 30 with two hollow cylinders 32 . 33 provided, which extend in the direction of the pivot axis S ₁ and the transmission axis G ₁ and in which the drive shaft 51 Is arranged coaxially, in particular the 3 and 7 make known. The hollow cylinder 32 . 33 are in holes of the swivel arm 30 Pressed and thus rotatably connected to this. The hollow cylinder 32 . 33 protrude at the top 35 and at the bottom 36 of the swivel arm 30 beyond this, so that the outer circumferential surface of the hollow cylinder 32 . 33 outside the swivel arm 30 form a bearing surface, which allow the swivel arm 30 for example in a cross bearing 27 to store pivotally, as in 3 can be seen. 3 further indicates that the hollow cylinder 32 . 33 inside the swivel arm 30 at a recess 37 in which the worm gear 50 is arranged. To ensure reliable positioning of the worm gear 50 and a simple insertion of the worm gear 50 into the recess 37 Ensure the swivel arm 30 also slots 34 on, at the recess 37 open and serve, when inserting the worm gear 50 into the recess 37 the ends 52 . 53 the drive shaft 51 respectively.

The previously described embodiments of a handling device for positioning a test head 70 are characterized by a simple and compact design. The reason for this is primarily the coincident course of transmission axis G ₁ and pivot axis S ₁ , which is based on the coaxial arrangement of the drive shaft 51 in the extending in the direction of the pivot axis S ₁ hollow cylinders 32 . 33 is due. This design allows the drive shaft of the handwheel 55 and the electric motor 56 to coincide with the transmission axis G ₁ , to ensure a compact design. It also carries the connection of the handwheel 55 with the upper end 52 and the connection of the electric motor 56 with the lower end 53 , the drive shaft extending in the vertical direction z 51 to a practice-oriented handling. Not least ensures the coaxial arrangement of the drive shaft 51 in the hollow cylinders 32 . 33 an unobstructed rotation of the holder 40 and thus the test head 70 in the relevant in practice angle of about 270 °, like the 9 to 11 to identify the connection cable 71 of the test head 70 upon rotation of the test head 70 always runs around the axis of rotation R outside the range of the transmission axis G ₁ or pivot axis S ₁ .

10

undercarriage

11

stringers

12

traverse

20

pillar

21

guide rail

22

vertical slide

23

swivel arm

24

web

25

horizontal slide

26

runner

27

cross camp

30

swivel arm

31

Locking lever

32

hollow cylinder

33

hollow cylinder

34

slot

35

top

36

bottom

37

recess

40

bracket

41

Base

42

sidearm

43

rotary shaft

50

worm gear

51

drive shaft

52

first The End

53

second The End

54

output shaft

55

handwheel

56

electric motor

57

clutch

58

intermediate shaft

60

traction drives

61

Synchronizing pulley

62

Synchronizing pulley

63

timing belts

64

idler

70

test head

71

connection cable

α

angle

G ₁

first Drive shaft

G ₂

second Drive shaft

R

axis of rotation

S ₁

first swivel axis

S ₂

second swivel axis

S ₃

third swivel axis

x

horizontal direction

y

horizontal direction

z

vertical direction

Claims (15)

Handling device for positioning a test head ( 70 ), in particular on a test device, with positioning means by which the test head ( 70 ) is positionable in space and the at least one first pivot arm ( 30 ), which is pivotable about a first pivot axis (S ₁ ) include; a holder ( 40 ) on which the test head ( 70 ) and which is rotatable about an axis of rotation (R) on the first pivot arm ( 30 ) is mounted, and a transmission ( 50 . 60 ) used to rotate the bracket ( 40 ) and on the first pivot arm ( 30 ) is attached; the gearbox ( 50 . 60 ) a drive shaft ( 51 ), which extends in the direction of a first transmission axis (G ₁ ), and an output shaft ( 54 ) extending in the direction of a second transmission axis (G ₂ ); wherein the first gear axis (G ₁ ) and the first pivot axis (S ₁ ) coincide, and wherein the first pivot arm ( 30 ) at least one hollow cylinder ( 32 . 33 ), which extends in the direction of the first pivot axis (S ₁ ) and in which the drive shaft ( 51 ) is arranged coaxially. Handling device according to claim 1, characterized in that the second transmission axis (G ₂ ), the first transmission axis (G ₁ ) at an angle (α), which is preferably 90 °, crosses. Handling device according to claim 2, characterized in that the first transmission axis (G ₁ ) extends substantially in the vertical direction (z) and the second transmission axis (G ₂ ) substantially in the horizontal direction (x, y). Handling device according to one of claims 1 to 3, characterized in that the transmission ( 50 . 60 ) comprises a worm gear and / or a bevel gear and / or a traction mechanism. Handling device according to one of claims 1 to 4, characterized in that the drive shaft ( 51 ) from a handwheel ( 55 ) or from an engine ( 56 ) is drivable. Handling device according to claim 5, characterized in that the drive shaft ( 51 ) at a first end ( 52 ) with the handwheel ( 55 ) and at a second end ( 53 ) with the engine ( 56 ) connected is. Handling device according to one of claims 1 to 6, characterized in that the second transmission axis (G ₂ ) and the rotation axis (R) parallel to each other. Handling device according to claim 7, characterized in that the output shaft ( 54 ) and the bracket ( 40 ) by a traction mechanism ( 60 ), wherein preferably the traction mechanism ( 60 ) is a positive synchronous belt transmission. Handling device according to claim 8, characterized in that the holder ( 40 ) rotatably with a rotary shaft ( 43 ), which extends in the direction of the axis of rotation (R), is connected, where in the traction mechanism ( 60 ) a first disc ( 61 ), the non-rotatably with the output shaft ( 54 ), a second disc ( 62 ), which rotatably with the rotary shaft ( 43 ), and a traction means ( 63 ) through which the first disc ( 61 ) and the second disc ( 62 ) are interconnected. Handling device according to claim 9, characterized in that the traction mechanism ( 60 ) a tension roller ( 64 ), which on the traction means ( 63 ) is present. Handling device according to one of claims 1 to 10, characterized in that the positioning means comprise a column ( 20 ) which extends in the vertical direction (z) and on a subframe ( 10 ) is arranged, and a vertical slide ( 22 ), which in the vertical direction (z) displaceable on the column ( 10 ). Handling device according to one of claims 1 to 11, characterized in that the positioning means a second pivot arm ( 23 ), which is pivotable about a second pivot axis (S ₂ ) and with the first pivot arm ( 30 ), wherein preferably the second arm ( 23 ) on the vertical slide ( 22 ) is attached. Handling device according to claim 12, characterized in that the first pivot axis (S ₁ ) and the second pivot axis (S ₂ ) in parallel to each other, wherein preferably the first pivot arm ( 30 ) and the second gift arm ( 23 ) by a bridge ( 24 ) are hinged together. Handling device according to one of claims 1 to 13, characterized in that the positioning means a Horizon talschlitten ( 25 ) which is displaceable in the horizontal direction (x, y), wherein preferably the first pivot arm ( 30 ) on the horizontal slide ( 25 ) is attached. Handling device according to one of claims 1 to 14, characterized in that the first pivot arm ( 30 ) and / or the second pivot arm ( 23 ) and / or the bridge ( 24 ) and / or the vertical slide ( 22 ) and / or the horizontal slide ( 25 ) by means of locking means ( 31 ) can be locked in a predetermined position.