CN203301454U - Electronic circuit - Google Patents
Electronic circuit Download PDFInfo
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- CN203301454U CN203301454U CN2013201654653U CN201320165465U CN203301454U CN 203301454 U CN203301454 U CN 203301454U CN 2013201654653 U CN2013201654653 U CN 2013201654653U CN 201320165465 U CN201320165465 U CN 201320165465U CN 203301454 U CN203301454 U CN 203301454U
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5614—Signal processing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0228—Inertial sensors
- B81B2201/0242—Gyroscopes
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- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Gyroscopes (AREA)
Abstract
An electronic circuit comprises a driving signal circuit that is used for an MEMS sensor. The driving signal circuit includes an input end which is configured to receive voltage signals which represents charges generated by the MEMS sensor; a phase shift circuit which is electrically coupled to the input end and is configured to phase shift input signals generally by 90 DEC; a lagging comparator circuit, an input end of which is electrically coupled to an output end of the phase shift circuit, and an output end of which is electrically coupled to an output end of the driving signal circuit; and a feedback circuit which extends to the input end of the phase shift circuit from the output end of the driving signal circuit, and is configured to generate self-oscillation signals at the output end of the driving signal circuit. Output signals generated by the driving signal circuit are applied to a driving input end of the MEMS sensor.
Description
Technical field
Put it briefly, the application relates to electronic circuit, and is particularly related to the MEMS sensor circuit.
Background technology
MEMS (micro electro mechanical system) (MEMS) comprises small mechanical equipment, and these small mechanical equipments are carried out electric function and mechanical function, and these electric functions are to use the photoetching technique similar to the technology for the manufacture of integrated circuit to make with mechanical function.Some MEMS equipment are the transducer (for example, accelerometer) that can detect motion or the transducer (for example, gyroscope) that detects angular speed.
The MEMS gyroscope becomes and is widely used, and multiaxis gyroscope MEMS structure can be integrated in an equipment.The size of MEMS gyro sensor and complexity still can be considered to excessive in some application (for example, personal electronic equipments or mobile electronic device).Further, the demand to three axle acceleration detection constantly increases in user/mobile phone, automobile and Aero-Space/defence application.Therefore, for the MEMS gyroscope, wish to reduce to drive size and complexity with sensing electronic equipment.
The utility model content
Except other aspects, the application has also discussed equipment, the system and method that coordinates with the MEMS transducer.A kind of example of installing comprises drive signal circuit for the MEMS transducer.This drive signal circuit comprises: input, and it is configured to the receiver voltage signal, and described voltage signal represents the electric charge that is produced by described MEMS transducer; Phase-shift circuit, it is electrically coupled to described input, and be configured to phase shifted input signal substantially 90 the degree; And the comparator circuit with hysteresis.The input of described comparator is electrically coupled to the output of described phase-shift circuit, and the output of described comparator circuit is electrically coupled to the output of described drive signal circuit.Feedback loop extends to the input of described phase-shift circuit from the output of described drive signal circuit, and described feedback loop is configured to produce the self-oscillation signal at the output of described drive signal circuit.The output signal that is produced by described drive signal circuit is applied to the driving input of described MEMS transducer.
This part aims to provide the general introduction to subject of this patent application.This part not aims to provide explanation exclusiveness of the present utility model or detailed.This paper has comprised detailed description, so that the further information about present patent application to be provided.
Description of drawings
(these accompanying drawings not necessarily are drawn to scale) in the accompanying drawings, identical numeral can be described the like in different views.Same numbers with different letter suffix can represent the different examples of like.Accompanying drawing by example unrestriced mode briefly example each embodiment that discusses in the application.
Fig. 1 is the block diagram of a part of an example that comprises the electronic system of MEMS transducer and IC.
Fig. 2 is the flow chart of a kind of generation for the method for the driving signal of MEMS transducer.
Fig. 3 is the circuit diagram of a part of an example of drive signal circuit.
Fig. 4 is the circuit diagram of a part of another example of drive signal circuit.
Fig. 5 is the circuit diagram of a part of the another example of drive signal circuit.
Fig. 6 is the circuit diagram of the part of an example again of drive signal circuit.
Fig. 7 is the also circuit diagram of the part of an example of drive signal circuit.
Fig. 8 is a kind of flow chart of an example of method of drive signal circuit of the MEMS of being formed for transducer.
Embodiment
Fig. 1 is the block diagram of a part of an example that comprises the electronic system of MEMS transducer 105 and IC110.The MEMS transducer can comprise the MEMS gyroscope, for example, and vibratory gyroscope.Vibratory gyroscope can comprise the test block (proof mass) that is suspended in the substrate top.Test block is in driving direction and mechanically vibration on the induction direction perpendicular to driving direction.Test block is ordered about by external drive source and be in resonance state on driving direction.When gyroscope is rotated by angle, produce Coriolis force (Coriolis force) on induction mode, Coriolis force detects with sense capacitor.In the figure, capacitor gdp and gdn represent the driving input to MEMS transducer 105, and capacitor gp and gn represent the sensing signal output of MEMS transducer 105.
IC110 comprises configuration or is designed to the mechanical oscillation of MEMS transducer 105 is remained to the circuit of target mechanical oscillation.These circuit comprise electric charge-voltage translator circuit 115(C2V) and transducer driving amplifier circuit 120.The charge conversion that C2V will be produced by the mechanical oscillation of MEMS transducer becomes voltage.Transducer driving amplifier circuit 120 provides electrostatic force to transducer, to cause mechanical oscillation.IC110 also comprises automatic gain control (AGC) circuit 125 and drive signal circuit 130.Agc circuit 125 is regulated electrostatic force, so that mechanical oscillation is remained to desired value.
Drive signal in order to create initial reference, drive signal circuit 130 produces an oscillator signal when powering on.Therefore, even when ought be non-existent from the sensing signal of MEMS transducer 105, drive signal and also can be provided to transducer driving amplifier circuit 120.This oscillator signal causes mechanical oscillation in MEMS transducer 105, mechanical oscillation then produces electric charge and at the output of C2V circuit, produces sensing signal.The initial signal that drives can comprise a plurality of harmonic frequencies.When the sensing signal that produces reached threshold amplitude, the referenced drive signal was locked into the frequency of the sensing signal that produces.Due to the mechanical resonance of MEMS transducer 105, the sensing signal that is produced by the MEMS transducer is high Q signal, and with this signal, produces high Q referenced drive signal.
Fig. 2 is the flow chart of a kind of generation for the method 200 of the driving signal of MEMS transducer (for example, MEMS free gyroscope or gyroscope).At square frame 205 places, oscillator signal is certainly to be produced by the output of drive signal circuit in drive signal circuit.Oscillator signal is applied to the driving input of MEMS transducer.
At square frame 210 places, in response to the driving input that oscillator signal is applied to the MEMS transducer, expression is received at the input end of drive signal circuit by the voltage signal of the electric charge that the MEMS transducer produces.
At square frame 215 places, the phase place of received voltage signal is offset 90 degree substantially, and through the signal of phase shift, is used to produce the driving signal, rather than uses from the signal that produces.At square frame 220 places, the driving signal that produces is applied to the driving input of MEMS transducer.
Fig. 3 is the circuit diagram of a part of an example of drive signal circuit.Drive signal circuit provides the referenced drive signal for the MEMS transducer.Drive signal circuit comprises input 335, and input 335 receives the voltage signal that represents the electric charge that is produced by the MEMS transducer.In some instances, voltage signal receives from electric charge-voltage translator circuit.
Voltage signal circuit also comprises phase-shift circuit 340 and comparator circuit 345.Phase-shift circuit 340 can be electrically coupled to input 335.Phase-shift circuit 340 with the phase deviation of input signal substantially 90 the degree (90 °).In some instances, phase-shift circuit 340 comprises integrator circuit.Comparator circuit 345 has hysteresis.When input during greater than first threshold, the output of comparator circuit 345 is from the low height that is transformed into, and when input during less than the Second Threshold different from first threshold, export be transformed into from height low.The input of comparator circuit 345 can be electrically coupled to the output of phase-shift circuit 340, and the output of comparator circuit 345 can be electrically coupled to the output 350 of drive signal circuit.
Drive signal circuit comprises feedback loop, and the output that this feedback loop prolongs from drive signal circuit reaches the input of phase-shift circuit 340.If phase-shift circuit 340 comprises integrator circuit, feedback loop can be electrically coupled to from the output of comparator circuit 345 input of the amplifier circuit 355 of integrator circuit.As shown in the example of Fig. 3, feedback loop can comprise: the first transconductance amplifier circuit 360(is sometimes referred to as operation transconductance amplifier or OTA), it has the input of the output that is electrically coupled to comparator circuit 350; And second transconductance amplifier circuit 365, the output that it has the input of the output that is electrically coupled to the first transconductance amplifier circuit 360 and is electrically coupled to the input of phase-shift circuit 340.Feedback loop can comprise capacitor 370(C1), capacitor 370 is coupled to output and the circuit ground of the first transconductance amplifier circuit 360.
The output that is configured in drive signal circuit 350 places of feedback loop are from producing vibration signal or self-oscillation signal.Hysteresis comparator circuit keeps minimum with the amplitude of the vibration of (output of integrator) in loop, and controls the scope of self-oscillating frequency.The binary system output of comparator is carried out charge/discharge by 360 pairs of capacitors of the first transconductance amplifier circuit 370.Error in the self-oscillation signal that is caused by 50% duty ratio is stored on capacitor 370, and by the second transconductance amplifier circuit 365, feeds back to phase-shift circuit 340.This feedback arrangement is proofreaied and correct input signal skew, amplifier offset and comparator offset, so that the output signal of 50% duty ratio substantially to be provided.
The output signal that is produced by drive signal circuit is applied to the driving input of MEMS transducer.Can be drive circuit output 350(output as the output signal that provides with reference to driving signal) signal located of the signal of locating or the output (output-sine wave) of phase-shift circuit 340.For the example shown in Fig. 1, the self-oscillation signal of drive signal circuit is the referenced drive signal of being selected when powering on by agc circuit 125 as being used for driving amplifier circuit 120.Should be that to be marked with the circuit node place of output in drive signal circuit available from the oscillator signal that produces.When the amplitude of the signal of institute's sensing be enough (for example, meet the prearranged signal threshold amplitude) time, agc circuit 125 can be switched to the available signal of output-sine wave with the referenced drive signal by from the available signal of output, coming and be used as the referenced drive signal.This is that output-sine wave provides the referenced drive signal of harmonic wave purer (for example, higher Q) for the MEMS transducer because after reaching amplitude threshold.Due to less harmonic frequency, high Q signal is improved driving and the mechanical resonance in the MEMS transducer.The high Q signal at output-sine wave place provides 90 degree phase shifts and 50% duty ratio accurately substantially.
If phase-shift circuit 340 comprises integrator circuit, feedback arrangement provides stable operating point for the forward path integrator.Stable operating point has been avoided problem out of control (run-away problem), and problem out of control can be carried out integration and be caused by the biasing to less.In addition, use makes the self-oscillation signal minimize with the frequency displacement of temperature for the amplifier circuit 355 that direct current (DC) signal has controlled signal gain.Feedback network should be designed to the DC electric current that provides enough large, so that skew compensates to input signal, but should have low-down interchange (AC) gain, so that the 90 degree phase shifts that provided by the forward path integrator not to be provided.
It is the mutual conductance gm value that is difficult to realize that the design of feedback loop can require for the second transconductance amplifier circuit.Less gm value can be by output current is shunted to avoid before the output current with the second trsanscondutance amplifier feeds back to phase-shift circuit.Fig. 4 is the circuit diagram of a part of another example of drive signal circuit, and this drive signal circuit has the feedback loop that comprises the first transconductance amplifier circuit 460 and the second transconductance amplifier circuit 465.Drive signal circuit comprises splitter circuit 475, and splitter circuit 475 is electrically coupled to the output of the second transconductance amplifier circuit 465, with the output current to the second transconductance amplifier circuit 465, shunts.
Fig. 5 is the circuit diagram of a part of the another example of drive signal circuit, and this drive signal circuit has the feedback loop that comprises the first transconductance amplifier circuit 560 and the second transconductance amplifier circuit 565.Drive signal circuit comprises resitstance voltage divider 575, and resitstance voltage divider 575 is electrically coupled to the output of the second transconductance amplifier circuit 565 and the input of phase-shift circuit 540, with the output current to the second transconductance amplifier circuit 565, shunts.
The amplifier of feedforward integrator circuit should have low gain, in larger input signal operating period, to provide good phase margin.A kind of alternative method is to use high-gain amplifier, but changes the configuration of feedback loop.Fig. 6 is the circuit diagram of a part of another example of drive signal circuit, and this drive signal circuit has the feedback loop that comprises the first transconductance amplifier circuit 660 and the second transconductance amplifier circuit 665.The second transconductance amplifier circuit 665 has the input of the output that is electrically coupled to the first transconductance amplifier circuit, and has the output of the input that is electrically coupled to the integrator amplifier circuit.Feedback loop also comprises the resistor 680 of the output that is coupled to the first transconductance amplifier circuit 660 and the capacitor 670 that is coupled to resistor 680 and circuit ground.This compensating resistor R
1Increased a zero point to feedback transfer function.It is leading that this has increased phase place, with the phase margin to the high-amplitude input signal, improves.
For be provided effective zero point in feedback, the value of compensating resistor may be too large for the realization on IC.Fig. 7 is the also circuit diagram of the part of an example of drive signal circuit, and this drive signal circuit has the feedback loop that comprises the 3rd transconductance amplifier circuit 785.The input of the 3rd transconductance amplifier circuit 785 is electrically coupled to the input of the output sum-product intergrator amplifier circuit of comparator circuit 745, to form the feedback loop of the second parallel connection.The transconductance stage of this increase has been eliminated the needs to the large compensation resistor, and can be provided effective zero point, to provide phase place in advance and the phase margin of high-amplitude input signal is improved.
Fig. 8 is a kind of flow chart of an example of method 800 of drive signal circuit of the MEMS of being formed for transducer.At square frame 805 places, the input of drive signal circuit is electrically coupled to the input of integrator circuit.Integrator circuit can have circuit topological structure as shown in example herein.At square frame 810 places, the output of integrator circuit is electrically coupled to the comparator circuit with hysteresis.
At square frame 815 places, when circuit power was applied to drive signal circuit, the output that the feedback loop in drive signal circuit is formed in drive signal circuit produced the self-oscillation signal.Feedback loop extends to the input of the amplifier (for example, operational amplifier or opamp) of integrator circuit from the output of comparator circuit.Integrator circuit will be offset at the phase angle of the received input signal of input end 90 degree substantially.Received input signal is in response to the driving input that the self-oscillation signal is applied to the MEMS transducer and produces.Drive signal circuit can be electrically coupled to the capacitance-voltage converter circuit, and input signal can be in response to the voltage signal that the self-oscillation signal is applied to the MEMS transducer and from the electric charge by the generation of MEMS transducer, changes.
Drive signal circuit provides reliable self-starting that the driving oscillator signal is provided, and 50% duty ratio is provided reliably.Drive signal circuit further provides 90 ° of phase shifts accurately, and the noise that is associated with the differentiator phase shifter has been avoided in 90 ° of phase shifts accurately.
Extra explanation and example
Example 1 can comprise theme (for example, a kind of device), and this theme comprises the drive signal circuit for MEMS (micro electro mechanical system) (MEMS) transducer.This drive signal circuit comprises: input, and it is configured to the receiver voltage signal, and described voltage signal represents the electric charge that is produced by described MEMS transducer; Phase-shift circuit, it is electrically coupled to described input, and be configured to phase shifted input signal substantially 90 the degree; Comparator circuit with hysteresis; And feedback loop, its output from described drive signal circuit extends to the input of described phase-shift circuit.The input of described comparator can be electrically coupled to the output of described phase-shift circuit, and the output of described comparator circuit is electrically coupled to the output of described drive signal circuit.Described feedback loop can be configured to produce the self-oscillation signal at the output of described drive signal circuit, and is applied to the driving input of described MEMS transducer by the output signal that described drive signal circuit produces.
Example 2 can comprise or can optionally with the theme of example 1, combine optionally to comprise: the first transconductance amplifier circuit, and it has the input of the output that is electrically coupled to described comparator circuit; The second transconductance amplifier circuit, it has the input of the output that is electrically coupled to described the first transconductance amplifier circuit, and is electrically coupled to the output of the input of described phase-shift circuit; And capacitor, it is coupled to output and the circuit ground of described the first transconductance amplifier circuit.
Example 3 can comprise or can be optionally with example 1 and example 2 in one or the theme of combination in any combine optionally to comprise: splitter circuit, it is electrically coupled to the output of described the second transconductance amplifier circuit.
Example 4 can comprise or can be optionally with example 1-3 in one or the theme of combination in any combine optionally to comprise: resistive divider circuit, it is electrically coupled to the output of described the second transconductance amplifier circuit and the input of described phase-shift circuit, wherein, described resitstance voltage divider is configured to the output current of described the second transconductance amplifier circuit is shunted.
Example 5 can comprise or can be optionally with example 1-4 in one or the theme of combination in any combine optionally to comprise: phase-shift circuit, it comprises integrator circuit, described integrator circuit comprises amplifier circuit; And feedback loop, its output from described comparator circuit optionally is electrically coupled to the input of described integrator amplifier circuit.
Example 6 can comprise or can be optionally with example 5 in theme combine optionally to comprise: the integrator amplifier circuit, it is that direct current (DC) signal provides controlled signal gain.
Example 7 can comprise or can be optionally with example 5 and example 6 in one or the theme of combination in any combine optionally to comprise the 3rd transconductance amplifier circuit, and, the input of described the 3rd transconductance amplifier circuit is electrically coupled to the output of described comparator circuit and the input of described integrator amplifier circuit, to form the second feedback loop.
Example 8 can comprise or can be optionally with example 5-7 in one or the theme of combination in any combine optionally to comprise: feedback loop, it comprises: the first transconductance amplifier circuit, and it has the input of the output that is electrically coupled to described comparator circuit; The second transconductance amplifier circuit, it has the input of the output that is electrically coupled to described the first transconductance amplifier circuit, and has the output of the input that is electrically coupled to described integrator amplifier circuit; Resistor, it is coupled to the output of described the first transconductance amplifier circuit; And capacitor, it is coupled to described resistor and circuit ground.
Example 9 can comprise or can be optionally with example 1-8 in one or the theme of combination in any combine optionally to comprise the MEMS transducer, wherein, described MEMS transducer comprises the MEMS gyroscope.
Example 10 can comprise or can be optionally with example 1-9 in one or the theme of combination in any combine optionally to comprise that theme (for example, a kind of method, a kind of device be used to performing an action, the machine readable media that perhaps comprises instruction, when by machine, being carried out, instruction can cause machine to perform an action), this theme comprises: the output in drive signal circuit produces oscillator signal certainly, and described oscillator signal is applied to the driving input of described MEMS transducer; In response to described oscillator signal being applied to the driving input of described MEMS transducer, at the input end receiver voltage signal of described drive signal circuit, described voltage signal represents the electric charge that is produced by described MEMS transducer; , with the phase deviation of received voltage signal 90 degree substantially, and with described signal through phase shift, produce described driving signal; And the driving input that the driving signal that produces is applied to described MEMS transducer.
Example 11 can comprise or can be optionally with example 10 in theme combine optionally to comprise: with integrator circuit, received voltage signal is carried out integration.
Example 12 can comprise or can be optionally with example 11 in theme combine optionally to comprise: will be applied to the comparator circuit with hysteresis through the received voltage signal of integration, and the output of described comparator circuit is fed back to the input of the amplifier of described integrator circuit, to form feedback loop.
Example 13 can comprise or can be optionally with example 12 in theme combine optionally to comprise: use the output of described comparator circuit, by the first transconductance amplifier circuit, capacitor charged; And the electric charge of described capacitor is applied to the input of the described amplifier of described integrator circuit by the second transconductance amplifier circuit.
Example 14 can comprise or can be optionally with example 13 in one or the theme of combination in any combine optionally to comprise: the output current to described the second transconductance amplifier circuit is shunted, to reduce the mutual conductance of described the second transconductance amplifier circuit.
Example 15 can comprise or can be optionally with example 13 and example 14 in one or the theme of combination in any combine optionally to comprise: the input that the output of described comparator circuit is electrically coupled to the 3rd transconductance amplifier circuit, and the output of described the 3rd transconductance amplifier circuit is electrically coupled to the input of the described amplifier circuit of described integrator circuit, to form the second feedback loop.
Example 16 can comprise or can be optionally with example 13-15 in one or the theme of combination in any combine optionally to comprise: by described the 3rd trsanscondutance amplifier and resistor, described capacitor is charged.
Example 17 can comprise or can be optionally with example 11-16 in one or the theme of combination in any combine optionally to comprise: the driving input that the driving signal that produces is applied to the MEMS gyro sensor.
Example 18 can comprise or can be optionally with example 1-17 in one or the theme of combination in any combine optionally to comprise that theme (for example, a kind of method, a kind of device be used to performing an action, the machine readable media that perhaps comprises instruction, when by machine, being carried out, instruction can cause machine to perform an action), this theme comprises: the input of described drive signal circuit is electrically coupled to integrator circuit; The output of described integrator circuit is electrically coupled to the comparator circuit with hysteresis; And form feedback loop in described drive circuit, with when circuit power is applied to described drive signal circuit, output in described drive signal circuit produces the self-oscillation signal, wherein, described feedback loop extends to the input of the amplifier of described integrator circuit from the output of described comparator circuit.Described integrator circuit will be at the phase angle of the received input signal of the input end of described drive signal circuit skew 90 degree substantially, and described input signal is in response to the driving input that described self-oscillation signal is applied to described MEMS transducer and produces.
Example 19 can comprise or can be optionally with example 18 in theme combine optionally to comprise: the output of described comparator circuit is electrically coupled to capacitor by the first transconductance amplifier circuit, and with the second trsanscondutance amplifier, described capacitor electrode is coupled to described phase-shift circuit.
Example 20 can comprise or can be optionally with example 19 in theme combine optionally to comprise: the output that splitter circuit is electrically coupled to described the second trsanscondutance amplifier.
Example 21 can comprise or can be optionally with example 18-20 in one or the theme of combination in any combine optionally to comprise: at described input end, resistive divider circuit is electrically coupled to described integrator circuit.
Example 22 can comprise or can be optionally with example 18-21 in one or the theme of combination in any combine optionally to comprise: amplifier circuit, it has controlled signal gain for the DC signal.
Example 23 can comprise or can be optionally with example 18-22 in one or the theme of combination in any combine optionally to comprise: the input that the output of described comparator circuit is electrically coupled to the 3rd transconductance amplifier circuit, and the output of described the 3rd transconductance amplifier circuit is electrically coupled to the input of the described amplifier circuit of described integrator circuit, to form the second feedback loop.
Example 24 can comprise or can be optionally with example 18-23 in one or the theme of combination in any combine optionally to comprise: produce input signal in response to described self-oscillation signal is applied to the gyrostatic driving input of MEMS.
Example 25 can comprise or can be optionally with example 1-24 in one or the theme of combination in any combine optionally to comprise theme, this theme can comprise: the device of one or more functions that is used for carrying out the function of example 1-24; The machine readable media that perhaps comprises instruction, when by machine, being carried out, instruction causes machine to carry out one or more functions in the function of example 1-24.
Above-mentioned detail specifications is with reference to accompanying drawing, and accompanying drawing is also the part of described detail specifications.Accompanying drawing has shown and can apply specific embodiment of the utility model in graphic mode.These embodiment are known as " example " in the utility model.Related all publications, patent and the patent document of the utility model be all as reference content of the present utility model, although they are in addition references respectively., if there is purposes difference between the utility model and reference paper, with reference to the purposes of file, regard supplementing purposes of the present utility model as; , if there is implacable difference between the two, with purposes of the present utility model, be as the criterion.
In this article, normally used the same with patent document, term " " or " a certain " expression comprises one or more, but other situations or when using " at least one " or " one or more " should except.In this article, except as otherwise noted, otherwise use the term "or" refer to without exclusiveness or, make " A or B " comprising: " A but be not B ", " B but be not A " and " A and B ".In claims, term " comprises " and " therein " is equal to that each term " comprises " and the popular English of " wherein ".Equally, in this article, term " comprises " and " comprising " is open, namely, system, equipment, article or step comprise parts those parts listed after in claim this term, within still being considered as dropping on the scope of this claim.And in claim below, term " first ", " second " and " the 3rd " etc. only, as label, not have quantitative requirement to object.
The effect of above-mentioned specification is to explain orally and unrestricted.In other examples, above-mentioned example (or one or more aspects of example) can be combined with.Can on the basis of understanding above-mentioned specification, utilize certain routine techniques of prior art to carry out other embodiment.In accordance with 37C.F.R. § 1.72(b) regulation summary is provided, allow the reader to determine fast the disclosed character of present technique.Should be understood that while submitting this summary to that this summary is not used in scope or the meaning of explaining or limiting claim.Equally, in superincumbent embodiment, various features can be classified into rationalizes the disclosure.This open feature that does not should be understood to failed call is essential to any claim.On the contrary, the theme of the present utility model feature that can be is less than all features of specific disclosed embodiment.Therefore, following claim is incorporated in embodiment accordingly, and each claim is all as an independent embodiment.Should be referring to appended claim, and all scopes of the equivalent enjoyed of these claims, determine the application's scope.
Claims (9)
1. electronic circuit comprises:
Drive signal circuit, it is used for MEMS (micro electro mechanical system) (MEMS) transducer, and described drive signal circuit comprises:
Input, it is configured to the receiver voltage signal, and described voltage signal represents the electric charge that is produced by described MEMS transducer;
Phase-shift circuit, it is electrically coupled to described input, and be configured to phase shifted input signal substantially 90 the degree;
Comparator circuit with hysteresis, wherein, the input of described comparator is electrically coupled to the output of described phase-shift circuit, and the output of described comparator circuit is electrically coupled to the output of described drive signal circuit; And
Feedback loop, its output from described drive signal circuit extends to the input of described phase-shift circuit, and wherein, described feedback loop is configured to produce the self-oscillation signal at the output of described drive signal circuit, and
Wherein, the output signal that is produced by described drive signal circuit is applied to the driving input of described MEMS transducer.
2. electronic circuit according to claim 1, wherein, described feedback loop comprises:
The first transconductance amplifier circuit, it has the input of the output that is electrically coupled to described comparator circuit;
The second transconductance amplifier circuit, it has the input of the output that is electrically coupled to described the first transconductance amplifier circuit, and is electrically coupled to the output of the input of described phase-shift circuit; And
Capacitor, it is coupled to output and the circuit ground of described the first transconductance amplifier circuit.
3. electronic circuit according to claim 1, comprise splitter circuit, and it is electrically coupled to the output of described the second transconductance amplifier circuit.
4. electronic circuit according to claim 2, comprise resistive divider circuit, it is electrically coupled to the output of described the second transconductance amplifier circuit and the input of described phase-shift circuit, wherein, described resitstance voltage divider is configured to the output current of described the second transconductance amplifier circuit is shunted.
5. the described electronic circuit of any one according to claim 1 to 4,
Wherein, described phase-shift circuit comprises integrator circuit, and described integrator circuit comprises amplifier circuit, and
Wherein, described feedback loop is electrically coupled to the input of described integrator amplifier circuit from the output of described comparator circuit.
6. electronic circuit according to claim 5, wherein, described integrator amplifier circuit is that direct current (DC) signal provides controlled signal gain.
7. electronic circuit according to claim 5 comprises:
The 3rd transconductance amplifier circuit, and
Wherein, the input of described the 3rd transconductance amplifier circuit is electrically coupled to the output of described comparator circuit and the input of described integrator amplifier circuit, to form the second feedback loop.
8. electronic circuit according to claim 5,
Wherein, described feedback loop comprises:
The first transconductance amplifier circuit, it has the input of the output that is electrically coupled to described comparator circuit;
The second transconductance amplifier circuit, it has the input of the output that is electrically coupled to described the first transconductance amplifier circuit, and has the output of the input that is electrically coupled to described integrator amplifier circuit;
Resistor, it is coupled to the output of described the first transconductance amplifier circuit; And
Capacitor, it is coupled to described resistor and circuit ground.
9. electronic circuit according to claim 1, comprise described MEMS transducer, and wherein, described MEMS transducer comprises the MEMS gyroscope.
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| Application Number | Priority Date | Filing Date | Title |
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| US201261619604P | 2012-04-03 | 2012-04-03 | |
| US61/619,604 | 2012-04-03 |
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| CN203301454U true CN203301454U (en) | 2013-11-20 |
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| CN201310115550.3A Active CN103368562B (en) | 2012-04-03 | 2013-04-03 | 90 degree of phase-shifting devices accurately |
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| CN201310115550.3A Active CN103368562B (en) | 2012-04-03 | 2013-04-03 | 90 degree of phase-shifting devices accurately |
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| CN103368562A (en) * | 2012-04-03 | 2013-10-23 | 快捷半导体(苏州)有限公司 | Accurate ninety degree phase shifter |
| US9246018B2 (en) | 2010-09-18 | 2016-01-26 | Fairchild Semiconductor Corporation | Micromachined monolithic 3-axis gyroscope with single drive |
| US9278846B2 (en) | 2010-09-18 | 2016-03-08 | Fairchild Semiconductor Corporation | Micromachined monolithic 6-axis inertial sensor |
| US9278845B2 (en) | 2010-09-18 | 2016-03-08 | Fairchild Semiconductor Corporation | MEMS multi-axis gyroscope Z-axis electrode structure |
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| US9444404B2 (en) | 2012-04-05 | 2016-09-13 | Fairchild Semiconductor Corporation | MEMS device front-end charge amplifier |
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| US9802814B2 (en) | 2012-09-12 | 2017-10-31 | Fairchild Semiconductor Corporation | Through silicon via including multi-material fill |
| US9856132B2 (en) | 2010-09-18 | 2018-01-02 | Fairchild Semiconductor Corporation | Sealed packaging for microelectromechanical systems |
| US10060757B2 (en) | 2012-04-05 | 2018-08-28 | Fairchild Semiconductor Corporation | MEMS device quadrature shift cancellation |
| US10065851B2 (en) | 2010-09-20 | 2018-09-04 | Fairchild Semiconductor Corporation | Microelectromechanical pressure sensor including reference capacitor |
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| US8710599B2 (en) | 2009-08-04 | 2014-04-29 | Fairchild Semiconductor Corporation | Micromachined devices and fabricating the same |
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| KR101999745B1 (en) | 2012-04-12 | 2019-10-01 | 페어차일드 세미컨덕터 코포레이션 | Micro-electro-mechanical-system(mems) driver |
| KR101462772B1 (en) * | 2013-04-12 | 2014-11-20 | 삼성전기주식회사 | Self-oscillation circuit having means for eliminating quadrature error and method for eliminating quadrature error using the circuit |
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| CN1206110A (en) * | 1997-07-14 | 1999-01-27 | 利顿系统有限公司 | Signal processing system for inertial sensor |
| JP3363862B2 (en) * | 1999-01-22 | 2003-01-08 | キヤノン株式会社 | Gyro, camera, lens and automobile having the same |
| GB0000619D0 (en) * | 2000-01-13 | 2000-03-01 | British Aerospace | Accelerometer |
| JP4336946B2 (en) * | 2003-03-20 | 2009-09-30 | セイコーエプソン株式会社 | Method and apparatus for measuring rotational angular velocity |
| JP4645013B2 (en) * | 2003-10-03 | 2011-03-09 | パナソニック株式会社 | Acceleration sensor and composite sensor using the same |
| US7895894B2 (en) * | 2006-11-06 | 2011-03-01 | Seiko Epson Corporation | Driver device, physical quantity measuring device, and electronic instrument |
| JP2010190766A (en) * | 2009-02-19 | 2010-09-02 | Seiko Epson Corp | Oscillation drive device, physical quantity measurement device and electronic apparatus |
| KR102048393B1 (en) * | 2012-04-03 | 2019-11-25 | 페어차일드 세미컨덕터 코포레이션 | Accurate ninety degree phase shifter |
-
2013
- 2013-04-03 KR KR1020130036261A patent/KR102048393B1/en active IP Right Grant
- 2013-04-03 CN CN2013201654653U patent/CN203301454U/en not_active Expired - Lifetime
- 2013-04-03 CN CN201310115550.3A patent/CN103368562B/en active Active
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| US9246018B2 (en) | 2010-09-18 | 2016-01-26 | Fairchild Semiconductor Corporation | Micromachined monolithic 3-axis gyroscope with single drive |
| US9278846B2 (en) | 2010-09-18 | 2016-03-08 | Fairchild Semiconductor Corporation | Micromachined monolithic 6-axis inertial sensor |
| US9278845B2 (en) | 2010-09-18 | 2016-03-08 | Fairchild Semiconductor Corporation | MEMS multi-axis gyroscope Z-axis electrode structure |
| US9352961B2 (en) | 2010-09-18 | 2016-05-31 | Fairchild Semiconductor Corporation | Flexure bearing to reduce quadrature for resonating micromachined devices |
| US10050155B2 (en) | 2010-09-18 | 2018-08-14 | Fairchild Semiconductor Corporation | Micromachined monolithic 3-axis gyroscope with single drive |
| US10065851B2 (en) | 2010-09-20 | 2018-09-04 | Fairchild Semiconductor Corporation | Microelectromechanical pressure sensor including reference capacitor |
| CN103368562B (en) * | 2012-04-03 | 2016-03-23 | 快捷半导体(苏州)有限公司 | 90 degree of phase-shifting devices accurately |
| CN103368562A (en) * | 2012-04-03 | 2013-10-23 | 快捷半导体(苏州)有限公司 | Accurate ninety degree phase shifter |
| US9488693B2 (en) | 2012-04-04 | 2016-11-08 | Fairchild Semiconductor Corporation | Self test of MEMS accelerometer with ASICS integrated capacitors |
| US9444404B2 (en) | 2012-04-05 | 2016-09-13 | Fairchild Semiconductor Corporation | MEMS device front-end charge amplifier |
| US10060757B2 (en) | 2012-04-05 | 2018-08-28 | Fairchild Semiconductor Corporation | MEMS device quadrature shift cancellation |
| US9618361B2 (en) | 2012-04-05 | 2017-04-11 | Fairchild Semiconductor Corporation | MEMS device automatic-gain control loop for mechanical amplitude drive |
| US9802814B2 (en) | 2012-09-12 | 2017-10-31 | Fairchild Semiconductor Corporation | Through silicon via including multi-material fill |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103368562B (en) | 2016-03-23 |
| KR102048393B1 (en) | 2019-11-25 |
| CN103368562A (en) | 2013-10-23 |
| KR20130112789A (en) | 2013-10-14 |
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