CN1994028B - X-ray source - Google Patents
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- CN1994028B CN1994028B CN200580026018.8A CN200580026018A CN1994028B CN 1994028 B CN1994028 B CN 1994028B CN 200580026018 A CN200580026018 A CN 200580026018A CN 1994028 B CN1994028 B CN 1994028B
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- generating unit
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
- H05G1/02—Constructional details
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
- H05G1/02—Constructional details
- H05G1/025—Means for cooling the X-ray tube or the generator
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Abstract
Disclosed is an X-ray source (1) comprising an X-ray generating unit having an X-ray tube and emitting an X-ray to the outside, and a circuit board holder (49) contained in a casing (3) and supporting circuit boards (35, 37). A driving power supply unit (39) for supplying driving power to the X-ray generating unit is arranged between a first flat plate portion (46) and a second flat plate portion (48) respectively supporting the circuit boards (35, 37). A cooling fan is disposed in the casing (3) for having a cooling wind flow between the first flat plate portion (46) and the second flat plate portion (48).
Description
Technical field
The present invention be more particularly directed to a kind of x-ray source as microfocus X-ray source (micro focus X-raysource).
Background technology
At present, as the technology in this field, the known microfocus X-ray source that record in patent documentation 1 is arranged.This microfocus X-ray source is the x-ray source of following type: possess make from the electronic impact target of electron gun and by illumination window with the X ray that produces X-ray tube to external irradiation.This microfocus X-ray source is used for according to the unusual X ray non-destructive testing apparatus that image finds to check object that sees through that is formed by the X ray that sees through the inspection object.
Patent documentation 1: No. 2634369 communiques of Japan Patent
Summary of the invention
In order to carry out the higher inspection of precision, require aforesaid testing fixture to obtain and see through image more clearly.And, as the method that obtains seeing through clearly image, consider to increase the exposure of X ray, and in such x-ray source, require high outputization.Wherein, when the object that circulates on transfer line is carried out fluoroscopic examination at high speed, must obtain at short notice and see through image clearly, therefore, the requirement of the height outputization of the x-ray source in this purposes is high especially.
But this microfocus X-ray source output is high more, just must supply with big more electric power to X-ray tube from driving power portion, and therefore, the heating of the driving power portion during from running increases, and driving power portion becomes high temperature.And because driving power portion becomes high temperature, the action that constitutes the electronic unit of driving power portion sometimes becomes unstable.Thereby, if realize the height outputization of x-ray source, must cool off driving power portion, and suppress that it is overheated with higher efficient, still, in fact also do not take any countermeasure.
Therefore, problem of the present invention is efficiently driving power portion to be cooled off in x-ray source.
In order to solve above-mentioned problem, x-ray source of the present invention is characterized in that, comprising: X ray generating unit, this X ray generating unit have X-ray tube and to the external irradiation X ray; Circuit substrate, this circuit substrate has the control circuit that the driving of this X-ray tube is controlled; Casing; Circuit substrate retainer, this circuit substrate retainer are contained in this casing and the support circuit substrate, have the 1st relative flat part and the 2nd flat part simultaneously; Driving power portion, this driving power portion are contained between the 1st flat part and the 2nd flat part and to the X ray generating unit and supply with driving electric; And cooling fan, this cooling fan flow cooling air between the 1st flat part and the 2nd flat part.
According to this x-ray source, form the ventilation road between the 1st flat part of circuit substrate retainer and the 2nd flat part, and cooling air is flowed in this ventilation road by cooling fan.Because the driving power portion that becomes thermal source is configured in this ventilation road, therefore can make cooling air circulation and cooling off around it.
Preferred this circuit substrate retainer is, the 1st parts that will have the 1st flat part are connected with the 2nd parts with the 2nd flat part and constitute.In the case, be installed in driving power portion on the 1st flat part or the 2nd flat part after, as long as connect the 1st parts and the 2nd parts, and driving power portion be configured between the 1st flat part and the 2nd flat part get final product.
According to x-ray source of the present invention, sufficient cooling air is contacted with driving power portion, can utilize this cooling air concentrated and efficiently driving power portion is cooled off.
In addition, by as above two flat parts being made up and the forming circuit substrate holder, improve the operability when being configured in driving power portion between the two.
Description of drawings
Fig. 1 is the stereogram of the 1st execution mode of expression x-ray source of the present invention.
Fig. 2 is the front view of x-ray source shown in Figure 1.
Fig. 3 is the profile of the X ray generating unit of x-ray source shown in Figure 1.
Fig. 4 is the profile of the control part of x-ray source shown in Figure 1.
Fig. 5 is the front view of the 2nd execution mode of expression x-ray source of the present invention.
Fig. 6 is the stereogram of the 3rd execution mode of expression x-ray source of the present invention.
The explanation of symbol
1,71,91 x-ray sources
3,73 casings
5X ray generating unit
The 27X ray tube
35 the 1st circuit substrates
37 the 2nd circuit substrates
39 driving power portions
45 the 1st flat boards (the 1st parts)
46 the 1st flat parts
47 the 2nd flat boards (the 2nd parts)
48 the 2nd flat parts
49b bolt (hookup mechanism)
49,85 circuit substrate retainers
55a, 77a cooling fan
83,81 flat boards
Embodiment
Below, with reference to accompanying drawing preferred implementation of the present invention is elaborated.For explanation is understood easily, in each accompanying drawing, identical inscape is added identical reference numbering as far as possible, and the repetitive description thereof will be omitted.
The 1st execution mode
The stereogram of the 1st execution mode of expression x-ray source of the present invention in Fig. 1, its front view of expression in Fig. 2.As depicted in figs. 1 and 2, x-ray source 1 is the x-ray source that possesses the type of following X-ray tube,, makes the electronic impact target from electron gun that is, and with the X ray that produces by illumination window to external irradiation, for example can be as the x-ray source in the X ray non-destructive testing apparatus.In casing 3 inside of this x-ray source 1, accommodate generation and the X ray generating unit 5 of irradiation X ray and the control part 7 that this X ray generating unit 5 is controlled.The inner space of casing 3 is made of X ray generating unit spatial accommodation R1 that holds X ray generating unit 5 and the control part spatial accommodation R2 that holds control part 7, between X ray generating unit spatial accommodation R1 and control part spatial accommodation R2, be provided with the partition wall 15 that extends from the upper inside wall of casing 3 downwards.Just, divide (separation) X ray generating unit spatial accommodation R1 and control part spatial accommodation R2 by this partition wall 15.
X ray generating unit 5, its profile as shown in Figure 3, possess the high voltage source portion 17 on the base plate 3a that is fixed on casing 3, accept the X-ray tube 27 of the supply of electric power and irradiation X ray and surround the metal cylinder (X-ray tube encirclement portion) 29 of the part of this X-ray tube 27 from this high voltage source portion 17.This high voltage source portion 17 possesses: can produce high-tension high-tension transformer 19, high voltage that multiplication is produced by high-tension transformer 19 and the high voltage supply circuit 23 that is supplied to X-ray tube 27, be electrically connected the lead 25a of high-tension transformer 19 and high voltage supply circuit 23, and the lead 25b that is electrically connected high voltage supply circuit 23 and X-ray tube 27.And in the collets of being made by electrical insulating property material (for example, epoxy resin) 21, high-tension transformer 19 is side-prominent and be provided with to control part 7 in the side of collets 21 by Cheng Mo for high voltage supply circuit 23 and each lead 25a, 25b.Structure by as above high voltage source portion 17 prevents from being applied in high-tension high voltage supply circuit 23, lead 25a, 25b to external discharge.
Be positioned at the X-ray tube 27 of the top of this high voltage source portion 17, X-ray tube for reflection-type target pattern, possess: bar-shaped anode 27b is remained under the state of insulation and the shell that holds (bulb) 27a of portion, hold the target accommodation section 27d of the target 27c of the end that is arranged on bar-shaped anode 27b, and hold the electron gun portion 27e that penetrates the electron gun 27k of electronics line to the reflecting surface of target 27c.
This 27a of shell portion and target accommodation section 27d arranged coaxial, the axis of electron gun portion 27e is this axis approximate vertical relatively.In addition, the base end part of bar-shaped anode 27b, outstanding downwards as high voltage applying unit 27g from the bottom of the 27a of shell portion.
Bottom at this high voltage applying unit 27g is connected with socket (socket) 33, and socket 33 is electrically connected with high voltage supply circuit 23 by the lead 25b of high voltage source portion 17.By such structure, supply with high voltage from high voltage supply circuit 23 to X-ray tube 27 by lead 25b.And, accept under the high voltage condition of supplying at X-ray tube 27, when the electron gun 27k in the electron gun portion 27e penetrates electronics to target 27c, produce X ray from target 27c, this X ray shines from the x-ray bombardment window 27h on the peristome that is arranged on target accommodation section 27d.
And X-ray tube 27 is a closed type, makes it inner form vacuum and seal.For example, in X-ray tube 27, be provided with not shown blast pipe, after by this blast pipe the inside of the 27a of shell portion, target accommodation section 27d and electron gun portion 27e being vacuumized, with the blast pipe sealing, thus sealing.
Metal cylinder 29 is given prominence to upward and is provided with from the upper surface of high voltage source portion 17, forms the cylindrical shape of surrounding X-ray tube 27.In order to make the thermal diffusion that produces from X-ray tube 27 efficiently, metal cylinder 29 is formed by the metal (for example, aluminium) of exothermicity excellence, is provided with a plurality of fin 29a that extend in the horizontal direction simultaneously around it.Fin 29a is set on the side face of metal cylinder 29 convex strip portions that extends to circumferencial direction, and the surface area of metal cylinder 29 is enlarged, and can make the thermal diffusion that is produced by X-ray tube 27 efficiently.
Be formed with opening 29j on the front end face of this metal cylinder 29, the 27a of shell portion from this opening 29j is inserted with X-ray tube 27 is injected with aqueous electrical insulating property substance insulation oil 31 in the inner space of metal cylinder 29.And, between the 27a of shell portion of X-ray tube 27 and target accommodation section 27d, being formed with mounting flange 27f, X-ray tube 27 is fixed on the front end face of metal cylinder 29 by this mounting flange 27f, and the 27a of shell portion is immersed in the insulating oil 31.By adopting this insulating oil 31, the 27a of shell portion with insulating oil 31 encirclement X-ray tubes 27 prevents from X-ray tube 27 to external discharge.
Then, control part 7 is described.Fig. 4 is the profile of this control part 7.As shown in Figure 1 and Figure 4, control part 7 is arranged in the control part spatial accommodation R2, has the 1st circuit substrate the 35, the 2nd circuit substrate 37 and driving power portion 39.The 1st circuit substrate 35 will be controlled to low-voltage (for example 0V) from high voltage (for example 160kV) by the voltage that high voltage source portion 17 can produce.And the 1st circuit substrate 35 also carries out the control of timing that the electronics among the electron gun portion 27e emits and tube voltage, tube current etc.The 2nd circuit substrate 37 is according to from the control signal of outside the action of the 1st circuit substrate 35 being controlled.Driving power 39 is, the electric power of supplying with from the outside is carried out the transducer of AC/DC conversion (perhaps DC/DC conversion), supply with driving electric to these the 1st circuit substrates 35 and the 2nd circuit substrate 37, simultaneously, supply with to the high-tension transformer 19 of X ray generating unit 5 and to be used to produce high-tension electric power.And these the 1st circuit substrate the 35, the 2nd circuit substrates 37, driving power portion 39 and X ray generating unit 5 suitably utilize not shown lead to be electrically connected mutually.
Preferably in this control part 7, compactly the 1st circuit substrate the 35, the 2nd circuit substrate 37 and driving power portion 39 are contained in the control part spatial accommodation R2, and fixing reliably.Therefore, in control part 7, in control part spatial accommodation R2, be provided with the circuit substrate retainer 49 that forms by heat conductivity metal (for example aluminium), form the 1st circuit substrate the 35, the 2nd circuit substrate 37 and driving power portion 39 are supported on structure on this circuit substrate retainer 49.
And the 1st flat part 46 has the 1st installed surface 45a that is used to install the 1st circuit substrate 35, and the 2nd flat part 48 has the 3rd installed surface 47c at the back side of the 2nd installed surface 47b that is used to install the 2nd circuit substrate 37 and the 2nd installed surface 47b.Like this, circuit substrate retainer 49 forms the chevron structure, thus, but the mechanical strength of holding circuit substrate holder 49 itself, and can make the circuit substrate 35,37 that is installed on the circuit substrate retainer 49 fixing reliably with respect to base plate 3a.
In addition, the lower knuckle of the 2nd flat board 47 becomes the L font with the sidewall 3f near casing 3, and the high-tension transformer 19 of high voltage source portion 17 becomes between the 2nd dull and stereotyped the 47 and the 1st flat board 45.
Along the 1st installed surface 45a of the 1st flat board 45 the 1st circuit substrate 35 is installed by pad 51.Equally, along the 2nd installed surface 47b of the 2nd flat board 47 the 2nd circuit substrate 37 is installed, and along the 3rd installed surface 47c of the 2nd flat board 47 driving power portion 39 is installed by pad 51 by pad 51.
Owing to the 1st installed surface 45a of this circuit substrate retainer 49 tilts to be provided with respect to base plate 3a, therefore, the 1st circuit substrate 35 is received among the control part spatial accommodation R2 under keeping the state that tilts, help the low level of x-ray source 1.In addition, circuit substrate retainer 49 is made of the 1st the dull and stereotyped the 45 and the 2nd dull and stereotyped 47 two parts, therefore, after being installed to circuit substrate 35,37 and driving power portion 39 on the 1st～the 3rd installed surface 45a, 47b, the 47c, can be by the 1st dull and stereotyped the 45 and the 2nd flat board 47 be configured in driving power portion 39 between the 1st dull and stereotyped the 45 and the 2nd flat board 47 by being screwed together, finish circuit substrate retainer 49, improve the assembly operation of control part 7.
Such x-ray source 1, on-stream, because X-ray tube 27 heatings, X-ray tube 27 and metal cylinder 29 are heated.The output of x-ray bombardment is high more, it is big more that the heating of this X-ray tube 27 becomes, when X-ray tube 27 becomes high temperature, can bring harmful effect to miscellaneous part, can cause the output of X-ray tube 27 to reduce simultaneously, thereby, in order efficiently X-ray tube 27 to be cooled off, must cool off metal cylinder 29 efficiently.
Therefore, in x-ray source 1, as shown in Figure 1, by comprising that the X ray generating unit 5 of metal cylinder 29 is received into the inside of casing 3, on sidewall (the 2nd wall) 3b that holds up on the vertical direction of the base plate 3a of relative casing 3, cooling fan unit 55 is set, and cooling air is flowed in casing 3, and make metal cylinder 29 coolings.
As shown in Figure 1 and Figure 4, this casing 3 has upper wall (the 1st wall) 3c, and this upper wall 3c and base plate 3a extend abreast, and, be provided with and be used for to opening (irradiation portion) 3j of external irradiation from the X ray of X-ray tube 27.This opening 3j be arranged on the corresponding position of the illumination window 27h of X-ray tube 27 on, and make illumination window 27h be exposed to the outside.In addition, in casing 3, the wall that connects upper wall 3c and sidewall 3b is formed inclined wall 3d.And, connect sidewall 3f relative and the wall of upper wall 3c and form inclined wall 3e too with sidewall 3b.Sidewall 3d and sidewall 3e can be different mutually with respect to the inclined degree of upper wall 3c, also can be identical.
, in X ray generating unit spatial accommodation R1, flow to the inside of casing 3 inhaled air by this cooling fan 55a,, around metal cylinder 29, pass through simultaneously, and flow to the direction of sidewall 3f with metal cylinder 29 even contact as cooling air.And the cooling air that passes through around metal cylinder 29 by fin 29a guiding, flows smoothly in the horizontal direction, has sufficient heat transfer area simultaneously and contacts with metal cylinder 29, removes heat from metal cylinder 29 efficiently.Consequently, can cool off metal cylinder 29 efficiently, and can cool off the X-ray tube 27 that is enclosed in the metal cylinder 29 efficiently.And, because metal cylinder 29 contacts with cooling air equably and cool off, therefore, can suppress output change and output that the temperature inequality by X-ray tube 27 produced and reduce.From metal cylinder 29 accept heat and cooling air that temperature rise by the exhaust outlet 3k that be arranged on inclined wall 3e on be discharged to outside thereafter.
At this moment, form inclined wall 3d, therefore, can suppress the stagnation of cooling air, and can be formed on flowing of cooling air stably in the casing 3 owing to connect the wall of upper wall 3c and sidewall 3b.Consequently, cooling air can flow around metal cylinder 29 reposefully, can cool off metal cylinder 29 efficiently.And the upper wall 3c of connect box 3 and the wall of sidewall 3f form inclined wall 3e too, and therefore, this also helps the smooth flow of cooling air.As mentioned above, in x-ray source 1,, can cool off X-ray tube 27 efficiently by efficiently metal cylinder 29 being cooled off, thus the height of x-ray source output to change into be possible.
And, x-ray source 1, on the part of the sidewall 3b of control part spatial accommodation R2, have the connecting portion (not shown) that is connected with personal computer etc., in x-ray source 1, carry out the input and output of the signal of relevant controlling information etc. from personal computer etc. by this connecting portion.In the casing 3 of removing base plate 3a, be connected if cooling fan unit 55 has with the distribution of control part 7 grades with connecting portion (not shown), thereby become the parts different with other positions of casing 3, on aspect assembling of x-ray source 1 etc., be preferred then.In the present embodiment, cooling fan unit 55 and connecting portion (not shown) are fixed on the base plate 3a, and are connected by distribution with control part 7.
And, by in the casing 3 of x-ray source 1, being formed with inclined wall 3d and inclined wall 3e, also can obtain as following effect.Under the situation that does not form this inclined wall 3d, 3e, between upper wall 3c and sidewall 3b, 3f, be formed with the bight.At this, when utilizing such x-ray source to obtain to make the fluoroscopy images of the state of checking that object tilts,, make illumination window 27h and check that object can not be fully approaching because the inspection object that tilts is contacted with the bight.By contrast, in x-ray source 1,, can make and check that object is further near illumination window 27h owing to there is not such bight.Therefore, can obtain the fluoroscopy images of the bigger inspection object of magnification ratio.
In addition, in x-ray source 1 as above, in the 1st and the 2nd circuit substrate 35,37 of control part 7 and driving power portion 39, various electronic units are installed.When the operating characteristics that makes each parts is stablized, must cool off these parts.Especially driving power portion 39 owing to produce a large amount of heat when carrying out AC/DC conversion (perhaps DC/DC conversion), therefore must cool off efficiently.
Thereby, partition wall 15 in the casing 3, not exclusively isolated X ray generating unit spatial accommodation R1 and control part spatial accommodation R2, and between metal cylinder 29 and control part 7, separate, and below partition wall 15, be provided with the ventilating opening 59 that is communicated with X ray generating unit spatial accommodation R1 and control part spatial accommodation R2.So, owing to separate by partition wall 15 between metal cylinder 29 and the control part 7, therefore, can be suppressed at the cooling air that becomes high temperature behind the cool metal tube 29 and flow directly into control part spatial accommodation R2.In addition, the radiant heat that is produced by metal cylinder 29 is separated wall 15 and blocks, and can suppress it and directly propagate into control part 7.Consequently, the temperature that can suppress control part 7 rises, and the action of each circuit substrate 35,37 of control part 7 is stablized.Meanwhile, owing to be communicated with X ray generating unit spatial accommodation R1 and control part spatial accommodation R2 by ventilating opening 59, therefore, the part of the cooling air that is produced by cooling fan 55a flow into control part spatial accommodation R2 by ventilating opening 59, thereby can be by this cooling air cooling control part 7.
At this moment, because circuit substrate retainer 49 constitutes as described above, as shown in Figure 4, in control part spatial accommodation R2, be formed with the channel part R2a that surrounds by the 1st flat board the 45, the 2nd dull and stereotyped 47 and base plate 3a.The direction that this channel part R2a flows into into by ventilating opening 59 at cooling air (perpendicular to the paper direction of Fig. 4) goes up extends, therefore, and the function on the ventilation road of performance cooling air.So, produce flowing to the concentrated cooling air stably of channel part R2a.And, because in channel part R2a, there is driving power portion 39, therefore, can remove the heat that produces by driving power portion 39 efficiently by cooling air, can concentrate and efficiently driving power portion 39 is cooled off.Consequently, can make the operating characteristics of driving power portion 39 stable.
In addition, owing to high-tension transformer 19 towards the direction of control part 17 from collets 21 outstanding settings, be positioned at channel part R2a, therefore, high-tension transformer 19 also becomes with cooling air mobile in this channel part R2a and contacts (with reference to Fig. 2).Therefore, the high-tension transformer 19 that becomes high temperature is also cooled off efficiently by this cooling air.And, accept heat and the cooling air of temperature rising from driving power portion 39 and high-tension transformer 19, be discharged to the outside by the exhaust outlet 3h (seeing figures.1.and.2) on the sidewall 3g that is arranged on casing 3.
In addition, at this moment, owing to flow into the cooling air that control part spatial accommodation R2 comes by ventilating opening 59, its part also flows into the space R2b in the outside of circuit substrate retainer 49, in the ventilation road that constitutes by this outer space R2b, have the 1st circuit substrate 35 and the 2nd circuit substrate 37, therefore, circuit substrate 35,37 is by the cooling air cooling of flowing in the R2b of space.
As above, since the cooling air that the 1st circuit substrate 35 and the 2nd circuit substrate 37 are cooled off with driving power portion 39 is flowed in different ventilation roads respectively with the cooling air that high-tension transformer 19 cools off, therefore, the mixing of these cooling airs is suppressed by circuit substrate retainer 49.Thus, can cool off driving power portion 39 and the high-tension transformer 19 that produces big calorimetric efficiently on the one hand, can suppress cooling air inflow channel part R2a on the other hand, the temperature of the 1st circuit substrate 35 and the 2nd circuit substrate 37 is risen because of the cooling temperature rising of driving power portion 39 and high-tension transformer 19.Consequently, the operating characteristics of each parts of the 1st circuit substrate 35 and the 2nd circuit substrate 37 is stablized.
And, these the 1st circuit substrate the 35, the 2nd circuit substrates 37 and driving power portion 39 install under the state that floats from each installed surface 45a, 47b, 47c by pad 51, therefore, cooling air contacts with the tow sides of the 1st circuit substrate the 35, the 2nd circuit substrate 37 and driving power portion 39.Therefore, such installation method also helps the efficient cooling of the 1st circuit substrate the 35, the 2nd circuit substrate 37 and driving power portion 39.
In addition, in the parts of the 1st circuit substrate 35, power transistor 61 (with reference to Fig. 2), owing to produce bigger heat, therefore, separate, and the metal radiator (heat sink) 63 that is arranged between high voltage source portion 17 and the cooling fan unit 55 is adjacent to and is provided with the 1st circuit substrate 35.At this moment, power transistor 61 is electrically connected with the 1st circuit substrate 35 by not shown lead, thereby performance is as a functions of components of the 1st circuit substrate 35.According to such configuration, radiator 63 is accepted to be cooled from the cooling air of cooling fan 55a, and the power transistor 61 that is adjacent to radiator 63 is cooled off indirectly.Like this, especially, the parts that produce big heat are cooled off separately away from the circuit substrate base side, thereby the temperature that can effectively suppress control part 7 rise.
The 2nd execution mode
Shown in its front view among Fig. 5, x-ray source 71 possesses casing 73.In this casing 73, separate the partition wall 75 of X ray generating unit spatial accommodation R1 and control part spatial accommodation R2, extend to form from the inwall of casing 73.That is, the inner space of casing 73 is isolated for X ray generating unit spatial accommodation R1 and control part spatial accommodation R2 by partition wall 75, between two spaces, does not flow into, flows out cooling air mutually.Structure according to such x-ray source 71, by cooling fan 55a cooling air is flowed in X ray generating unit spatial accommodation R1, can the concentrated area be cooled off by the X ray generating unit 5 that comprises metal cylinder 29, simultaneously, can suppress to become the cooling air inflow control part spatial accommodation R2 of high temperature reliably.
In addition, x-ray source 71 in the control part spatial accommodation R2 of casing 73 side, possesses the cooling fan unit 77 that is different from cooling fan unit 55.This cooling fan unit 77 and another cooling fan unit 55 are set up in parallel, and dispose cooling fan 77a so that the cooling air that is produced by cooling fan 77a directly contacts with the 1st circuit substrate 35 near the 1st circuit substrate 35.According to such structure, can cooling air be flowed in X ray generating unit spatial accommodation R1 by cooling fan 55a, X ray generating unit 5 be concentrated cooling, simultaneously, by cooling fan 77a cooling air is flowed in control part spatial accommodation R2, control part 7 is concentrated cooling.So, by respectively X ray generating unit spatial accommodation R1 and control part spatial accommodation R2 being cooled off separately, can be efficiently to the X ray generating unit 5 that comprises metal cylinder 29 with comprise that the control part 7 of driving power portion 39 cools off.And, in the case, if power transistor 61 and the metallic radiator 63 that is used for that power transistor 61 is cooled off be configured in control part spatial accommodation R2 cooling fan 77a near, then improve cooling effectiveness and preferably.
As mentioned above, according to x-ray source 71, owing to can efficiently cool off X-ray tube 27 by efficient cool metal tube 29, thereby can carry out the height outputization of x-ray source, by the driving power portion 39 of efficient cooling control part 7, the operating characteristics of each parts of driving power portion 39 is stablized.
The 3rd execution mode
As shown in Figure 6, the control part 7 in x-ray source 91 becomes following structure: by the circuit substrate retainer 85 that is made of separate flat board 81,83, circuit substrate 35,37 is fixed on the base plate 3a.According to such x-ray source 91, also can efficiently driving power portion 39 be cooled off by the mobile cooling air in space between dull and stereotyped 81 and dull and stereotyped 83.And this flat board 81,83 also can extend and reaches upper wall 3c and contact with upper wall 3c.
And the present invention is not limited to above-mentioned execution mode.For example, circuit substrate retainer 49 is not limited to screw togather, also can be by welding or bonding and be fixed on the base plate 3a.In addition, circuit substrate retainer 49 also can be fixed on the base plate 3a part in addition of casing 3, can also be fixed on the parts that are fixed on the casing 3.In addition, connecting the 1st dull and stereotyped the 45 and the 2nd flat board 47 by linking methods such as bolts is preferred improving aspect the assembly operation, still, is not limited thereto, also can be by welding or bonding and connect the 1st dull and stereotyped the 45 and the 2nd flat board 47.Circuit substrate retainer 49 is not limited to by 1 parts or by 2 modes that parts constitute of the 1st dull and stereotyped the 45 and the 2nd flat board 47, also can further a lot of individual parts be made up and form.In the case, also can form the circuit substrate retainer, and omit crooked processing by a lot of parts that are made of flat board are made up.In addition, circuit substrate retainer 49 is not limited to the metal of heat conductivity, also can be resinous.
In addition, in the above-described embodiment, as cooling fan 55a, 77a, use cooling fan from the outside of casing to inside that send into the air suction type of air from, still, cooling fan 55a, 77a also can be exhausts from the inside of casing to the outside that send air from.
In addition, the configuration of cooling fan 55a is not limited on sidewall 3b, so long as the position that cooling air is flowed between the 1st flat part 45 and the 2nd flat part 47 can be arranged on other positions.For example, by on casing 3, ventilating opening being set, and near this ventilating opening and at casing 3 internal configurations cooling fans, cooling air is flowed between the 1st flat part 45 and the 2nd flat part 47.In addition, also the exhaust cooling fan can be set on sidewall 3g, outside casing 3, send with the air of the channel part R2a that will have driving power portion 39.
In addition, x-ray source 1 also can possess a plurality of cooling fans.In the case, also can dispose the cooling fan of a plurality of same form, but also can air suction type cooling fan and exhaust cooling fan is combined.For example, except that the cooling fan 55a of the sidewall 3b of X ray generating unit spatial accommodation R1, can also roughly on the wall of opposite side (especially inclined wall 3e) the exhaust cooling fan be set at it.In addition, for example, except that the cooling fan 77a of the sidewall 3b of control part spatial accommodation R2, can also its roughly the wall of opposite side (especially sidewall 3f) go up or sidewall 3g on the exhaust cooling fan is set.
In addition, under the situation of not dividing X ray generating unit spatial accommodation R1 and control part spatial accommodation R2, also can in X ray generating unit spatial accommodation side R1, the air suction type cooling fan be set, the exhaust cooling fan be set in control part spatial accommodation R2 side; Can also in X ray generating unit spatial accommodation side R1, the exhaust cooling fan be set, the air suction type cooling fan be set in control part spatial accommodation R2 side.For example, except that the air suction type cooling fan 55a of X ray generating unit spatial accommodation R1 side, also in control part spatial accommodation R2, be provided with under the situation of cooling fan, also can on sidewall 3g, dispose the exhaust cooling fan, outside casing, steadily send so that have the air of the channel part R2a of driving power portion 39.
In addition, X-ray tube 27 can be the closed type X-ray tube, also can be opening X-ray tube.And, X-ray tube 27 can not be reflection-type target type but infiltration type target type.X-ray tube 27 can be all to be contained in the metal cylinder 29, in the case, in order to make X ray from X-ray tube 27 to external irradiation, the high position of X ray transmittance can be set on metal cylinder 29.In addition, the part of X-ray tube 27 also can be outstanding from metal cylinder 29, and further outstanding from casing 3.Can on the metal cylinder 29 of surrounding X-ray tube 27, fin 29a be set yet.In addition, X ray generating unit 5 also can not be contained in the casing 3.
And above-described each structure only otherwise break away from aim of the present invention can make up mutually.
Utilizability on the industry
X-ray source of the present invention is applicable to employed little focus type x-ray source in X ray non-destructive testing apparatus etc.
Claims (2)
1. an x-ray source is characterized in that,
Possess:
X ray generating unit, this X ray generating unit have X-ray tube and to the external irradiation X ray;
Circuit substrate, this circuit substrate have the control circuit of the action of the described X-ray tube of control;
Casing;
Circuit substrate retainer, this circuit substrate retainer are contained in the described casing and support described circuit substrate, have the 1st relative flat part and the 2nd flat part simultaneously;
Driving power portion, this driving power portion are contained between described the 1st flat part and described the 2nd flat part, supply with driving electric to described X ray generating unit; And
Cooling fan, this cooling fan flow cooling air between described the 1st flat part and described the 2nd flat part.
2. x-ray source as claimed in claim 1 is characterized in that:
Described circuit substrate retainer is, the 1st parts that will have described the 1st flat part are connected with the 2nd parts with described the 2nd flat part and constitute.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004256233A JP4589062B2 (en) | 2004-09-02 | 2004-09-02 | X-ray source |
| JP256233/2004 | 2004-09-02 | ||
| PCT/JP2005/015649 WO2006025318A1 (en) | 2004-09-02 | 2005-08-29 | X-ray source |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1994028A CN1994028A (en) | 2007-07-04 |
| CN1994028B true CN1994028B (en) | 2011-09-21 |
Family
ID=35999972
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200580026018.8A Active CN1994028B (en) | 2004-09-02 | 2005-08-29 | X-ray source |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP4589062B2 (en) |
| CN (1) | CN1994028B (en) |
| WO (1) | WO2006025318A1 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5288874B2 (en) * | 2008-05-02 | 2013-09-11 | 株式会社 システムスクエア | Foreign matter inspection device |
| EP2502237A4 (en) | 2009-11-16 | 2015-12-30 | Schlumberger Technology Bv | High voltage supply for compact radiation generator |
| FR2961629B1 (en) * | 2010-06-16 | 2013-08-09 | Gen Electric | REPAIRABLE MONOBLOCK X-RAY GENERATING DEVICE |
| JP5780644B2 (en) * | 2010-07-30 | 2015-09-16 | 株式会社リガク | Industrial X-ray generator |
| JP7089396B2 (en) * | 2018-04-12 | 2022-06-22 | 浜松ホトニクス株式会社 | X-ray generator |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4115697A (en) * | 1976-06-02 | 1978-09-19 | Emi Limited | X-ray tube cooling arrangement |
| CN1183022A (en) * | 1996-09-27 | 1998-05-27 | 滨松光子学株式会社 | X-ray generator and photo ionization device using it |
| CN2299374Y (en) * | 1997-05-21 | 1998-12-02 | 王涤海 | X-ray irradiator |
| CN2381094Y (en) * | 1999-07-12 | 2000-05-31 | 白景友 | X-ray generator |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2634369B2 (en) * | 1993-07-15 | 1997-07-23 | 浜松ホトニクス株式会社 | X-ray equipment |
| JP3691338B2 (en) * | 2000-05-08 | 2005-09-07 | アンリツ産機システム株式会社 | X-ray foreign object detection device |
| JP4080256B2 (en) * | 2002-06-19 | 2008-04-23 | アンリツ産機システム株式会社 | X-ray generator |
-
2004
- 2004-09-02 JP JP2004256233A patent/JP4589062B2/en active Active
-
2005
- 2005-08-29 WO PCT/JP2005/015649 patent/WO2006025318A1/en active Application Filing
- 2005-08-29 CN CN200580026018.8A patent/CN1994028B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4115697A (en) * | 1976-06-02 | 1978-09-19 | Emi Limited | X-ray tube cooling arrangement |
| CN1183022A (en) * | 1996-09-27 | 1998-05-27 | 滨松光子学株式会社 | X-ray generator and photo ionization device using it |
| CN2299374Y (en) * | 1997-05-21 | 1998-12-02 | 王涤海 | X-ray irradiator |
| CN2381094Y (en) * | 1999-07-12 | 2000-05-31 | 白景友 | X-ray generator |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2006073382A (en) | 2006-03-16 |
| WO2006025318A1 (en) | 2006-03-09 |
| CN1994028A (en) | 2007-07-04 |
| JP4589062B2 (en) | 2010-12-01 |
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