CN1954138A - 具有改进电能产生的过程设备 - Google Patents
具有改进电能产生的过程设备 Download PDFInfo
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- G—PHYSICS
- G08—SIGNALLING
- G08C—TRANSMISSION SYSTEMS FOR MEASURED VALUES, CONTROL OR SIMILAR SIGNALS
- G08C17/00—Arrangements for transmitting signals characterised by the use of a wireless electrical link
- G08C17/02—Arrangements for transmitting signals characterised by the use of a wireless electrical link using a radio link
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- G—PHYSICS
- G08—SIGNALLING
- G08C—TRANSMISSION SYSTEMS FOR MEASURED VALUES, CONTROL OR SIMILAR SIGNALS
- G08C17/00—Arrangements for transmitting signals characterised by the use of a wireless electrical link
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E70/00—Other energy conversion or management systems reducing GHG emissions
- Y02E70/30—Systems combining energy storage with energy generation of non-fossil origin
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T10/00—Road transport of goods or passengers
- Y02T10/10—Internal combustion engine [ICE] based vehicles
- Y02T10/12—Improving ICE efficiencies
Abstract
公开了一种无线现场设备(34,50,70,80,91,100)。现场设备(34,50,70,80,91,100)包括无线通信模块(32)和能量转换模块(38)。无线通信模块(32)被配置成与另一个设备无线地通信过程相关信息。能量转换模块(38)连接到无线通信模块(32)。能量转换模块(38)被配置成与热源相连,并从热源的热势能中产生电。
Description
技术领域
本发明涉及工业过程控制和监控系统。更具体地,本发明涉及针对这种系统中的现场设备来产生电能。
在工业环境中,控制系统用于监控和控制工业和化学过程中的库存(inventory)等。典型地,控制系统使用现场设备执行这些操作。控制系统利用在工业过程的关键位置处分布、并且通过过程控制回路与控制室中的控制电路相连的现场设备,来执行这些功能。术语“现场设备”是指在分布式控制或过程监控系统中执行功能的任意设备,包括用于对工业过程进行测量、控制和监控的所有设备。
现场设备在过程控制和测量工业中有广泛的应用。通常,这样的设备具有现场强化(field-hardened)的外壳以便安装在环境相对恶劣的户外,并且能够经受极端的温度、湿度、振动、机械撞击等。典型地,这些设备也能够在相对低的功率下操作。例如,目前,从已知的4-20mA的回路中接收所有其操作功率的现场设备是可用的。
一些现场设备包括换能器。换能器是指基于物理输入产生输出信号或基于输入信号产生物理输出的器件。典型地,换能器将输入信号转换为不同形式的输出信号。各类换能器包括多种分析装备、压力传感器、热敏电阻器、热电偶、应变仪、流量变送器、定位器、传动器、螺线管、指示灯及其它。
典型地,每一个现场设备还包括通过过程控制回路与过程控制室或其它电路进行通信的通信电路。在一些设置中,过程控制回路还被用于向现场设备传送已调节的电流和/或电压来给现场设备供电。
传统地,模拟现场设备通过两线过程控制电流回路与控制室相连,其中每一个设备都通过单个的两线控制回路与控制室相连。典型地,在两条线之间保持差动电压,模拟方式下电压在12-45伏的范围内,数字方式下电压在9-50伏的范围内。通过将通过电流回路中的电流调制为与感知的过程变量成比例的电流,一些模拟现场设备向控制室传输信号。其它模拟现场设备能够通过控制通过回路的电流的幅度,在控制室的控制下来执行操作。除外或可选地,过程控制回路能够承载用于与现场设备进行通信的数字信号。数字通信具有远大于模拟通信的通信程度。此外,数字设备也不需要向每一个现场设备提供单独的配线。以数字方式进行通信的现场设备能够响应控制室和/或其它现场设备,并且有选择地与控制室和/或其它现场设备进行通信。此外,这样的设备能够提供附加的信令,例如诊断和/或告警。
在一些设置中,无线技术开始用于与现场设备进行通信。无线操作简化了现场设备的布线和设置。目前使用的无线设置中,制造现场设备,以使其包括内部电池,可以通过太阳能电池对内部电池进行充电,无需任何形式的有线连接。使用内部电池存在一些问题,例如取决于多种因素,无线设备对能量的要求可以变化很大,例如设备的报告速度、设备组件等。
难题也出现在太阳能不可靠的设置中。例如,在一天24小时经历阴暗的地方、一周7天位于室内的地方、或在世界上太阳照射值非常小的地方,例如北极圈,难以使用太阳能电池。因此,在这些设置中,使用太阳能向无线过程设备供电是不可靠的。因此,存在对使用不依赖于太阳的充足且可更新的电源来进行操作的无线过程设备的明显需求。
发明内容
公开了一种无线现场设备。所述现场设备包括无线通信模块和能量转换模块。无线通信模块被配置成无线地与另一个设备通信过程相关信息。能量转换模块连接到无线通信模块。能量转换模块被配置成与热源相连接,并从热源的热势能中产生电。
现场设备包括控制器、无线通信模块和电能产生模块。无线通信模块与控制器相连。电能产生模块放置于现场设备内部,并与控制器和无线通信模块相连。电能产生模块被配置成与现场设备的外部附近的分子共同作用来产生电。优选地,电能产生模块是从现场设备附近的温差中获得能量的热发生器。
附图说明
图1是典型现场设备的示意图,利用所述设备,本发明的实施例尤其有用。
图2是图1所示现场设备的方框图。
图3是现场设备的方框图,包括用于与远程设备进行通信的无线通信电路。
图4是根据本发明实施例操作的无线现场设备的示意图。
图5A和图5B是根据本发明实施例得到电能的温度感测现场设备的示意图。
图6A和图6B是根据本发明实施例从半导体热电发生器中得到电能的现场设备的示意图。
图7是根据本发明实施例从半导体热电发生器中得到电能的现场设备的示意图。
具体实施方式
图1和图2是典型现场设备的示意图和方框图,利用该现场设备,本发明的实施例是有用的。过程控制或监控系统10包括通过两线过程控制回路16与一个或多个现场设备14相连的控制室或控制系统12。过程控制回路16的示例包括:模拟4-20mA通信、包括模拟和数字通信的混合协议(例如高速可寻址远程换能器(HART)标准)以及全数字协议(例如FOUNDATIONTM现场总线标准)。通常,过程控制回路协议可以向现场设备供电,并允许现场设备和其它设备之间的通信。
在该示例中,现场设备14包括与传动器/换能器20相连并且通过外壳23中的接线板21与过程控制回路16相连的电路18。将现场设备14演示为过程变量(PV)发生器,它和过程相连,检测例如温度、压力、PH值、流量等过程的特性,并提供该特性的指示。现场设备的其它示例包括阀门、传动器、控制器和显示器。
通常,现场设备的特性在于:可以在例如温度、湿度和压力的环境压力下表现出的“现场”操作能力。除了环境压力之外,现场设备还必须经常暴露于腐蚀性、危险和/或甚至爆炸的气体中。此外,这样的设备还必须能在存在振动和/或电磁干扰的情况下进行操作。
图3是根据本发明实施例的无线现场设备的方框图。现场设备34包括:能量转换模块38、控制器35、无线通信模块32和传动器/换能器20。转换模块38可以是能够将过程中的热势能转换成电能的任意器件。转换模块38可以是已知或以后待开发、能够将现场设备34附近的分子中可用的热势能转换为电的任意器件。例如,模块38可以使用已知的热电堆(thermopile)器件,利用珀耳帖效应(Peltier Effect)从完全不同的温度中产生电。基于温度的其它转换器件可以用于模块38。这样的器件包括热电二极管;固态热发生器;和半导体热电发生器。此外,已知或以后待开发的、将热势能转换为电流的任意器件可以用作模块38或与模块38相结合。转换模块38能够单独为无线通信模块32、现场设备34的其它部分、或甚至现场设备34内的所有组件供电。
无线通信模块32与控制器35相连,并基于来自控制器35的命令和/或数据,通过天线26与外部无线设备相互作用。无线通信32能够传输过程相关信息和设备相关信息。取决于应用,无线通信模块32可以适于依照任何适当的无线通信协议进行通信,这些协议包括但不限于:无线网络技术(例如IEEE802.11b无线接入点和由Linksys ofIrvine,California构建的无线网络设备)、蜂窝或数字网络技术(例如Aeris Communications Inc. of San Jose,California的Microburst)、超宽波段、自由空间光学器件、全球移动通信系统(GSM)、通用分组无线服务(GPRS)、码分多址(CDMA)、扩频技术、红外通信技术、SMS(短消息服务/文本消息)或任意其它适当的无线技术。此外,可以使用已知的数据冲突技术,以便多个单元可以彼此共存于彼此的无线操作范围内。可以使用多种不同的射频信道和/或扩频技术来避免冲突。
无线通信模块32还可以包括用于多种无线通信方法的换能器。例如,可以使用相对长距离的通信方法来执行主要无线通信,例如GSM或GPRS,同时,例如利用IEEE 802.11b或蓝牙,次要或附加的通信方法可以提供给技术员或单元附近的操作员使用。
一些无线通信模块可以包括能够与全球定位系统(GPS)相互作用的电路。有利地,可以针对移动设备在设备34中使用GPS,以便在远程位置找到各个设备34。然而,也可以使用基于其它技术的位置感测方法。
图3中的存储器37被显示为与控制器35分离,然而,实际上存储器37可以是控制器35的一部分。存储器37可以是任意适合类型的存储器,包括易失性存储器(例如随机存取存储器)、非易失性存储器(例如快闪存储器、EEPROM存储器等)和关于它们的任意组合。存储器37可以包含用于控制器35的程序指令和用于设备34的任意适合的系统管理数据。存储器37可以包含用于识别设备34的唯一标识符,由此设备34可以从其它无线通信中区分出自身所使用的无线通信。这种标识符的示例包括媒体接入控制(MAC)地址、电子序列号、全球电话号码、因特网协议(IP)地址或任意其它适合的标识符。此外,存储器37可以包括附加的现场设备的信息,例如它们的唯一标识符、配置信息以及功能。最后,控制器35利用存储器37,使得能够以使任意适合的形式来提供设备34的输出。例如,可以提供配置信息以及与现场设备34和/或一个或多个关联的现场设备相互作用,作为超文本标记语言(HTML)的网页。
图4是根据本发明实施例与能量转换模块38相连的无线现场设备的示意图。在图4所示的实施例中,模块38放置于现场设备34的外部。此外,图4中将换能器20演示为传感器。通过相连的过程,将传感器或传感器抽头(tap)20和无线现场设备34维持在不同的温度。例如,传感器20可以连接到处于更高温度的过程流体(process fluid),所述温度高于设备34所暴露的环境的温度。如虚线40、42所示,转换模块38分别与传感器20和现场设备34热连接。与转换模块38相关的温差在转换模块38内产生了电流,并通过线路44将该温差提供给无线现场设备34。当如此供电时,现场设备34产生无线信息并将其传输给一个或多个远程收发器46,事实上,收发器46可以是控制系统12的一部分。
假设转换模块38通常将过程流体中或附近的热势能转换为电,温度测量现场设备是本发明实施例的一种增效应用。在这种实施例中,传感器20是一种温度传感器,例如热电偶、热敏电阻器或电阻温度器件(RTD)。尽管本发明实施例的描述关于温感现场设备,本发明的实施例适用于任何现场设备。
图5A和图5B是根据本发明实施例从热能中获取电能的现场设备的示意图。图5A示出了一种温度感测现场设备50,具有连接到热电偶套管54的电子隔间(electronics compartment)52,它被塑型或配置来从事过程流体。在热电偶套管(thermowell)54内,温度传感器56提供了热电偶套管54中紧邻末端58的过程流体温度的指示。此外,转换模块38的一部分(图4所示)被放置于紧邻末端58。具体地,器件60紧邻末端58放置,并通过电源线62、64与电子隔间52电连接。优选地,器件60是将热能转换为电的任意适合的器件。因此,器件60可以是热电堆、热二极管(热电二极管)、固态热发生器、半导体热电发生器、或其任意组合。现场设备50的温度感测是通过温度传感器56经由信号线66和68向电子隔间52提供信号来实现的。
图5B示出了具有电子隔间52和热电偶套管54的现场设备70。与现场设备50相比,现场设备70使用器件72,产生与其所暴露的环境温度相关的电。适于器件72的器件示例包括热电堆或热电二极管。这样的器件是适合的,因为它们无需通过器件的热流,而是基于暴露于特定的热源而产生电。
当前技术的进步增加了如图5A和5B所示的现场设备的可行性。对于电能产生,固态热发生器变得越来越有效。此外,无线技术的进步也增加了这种现场设备的可行性。具体地,无线发射机覆盖相同区域所需要的电能越来越小。此外,尽管实施例中特定现场设备的发射距离受到限制,例如半径大约为20米,本发明的实施例设想了使用中继或网状网络来增大该设备覆盖的区域。因此,在多个无线现场设备逐一地放置在无线传输半径内的情况下,第一设备可以将其无线信息中继给第二设备,这样就通过第二设备的网络范围扩展了第一设备的网络范围。
图6A和6B示出了根据本发明实施例使用半导体热电发生器来清除热能的现场设备。当保持设备两端的温差时,半导体热电发生器产生电能。这样,存在通过器件的热流,因此,冷端应适当地散热以利于电能产生。
在图6A中,现场设备80包括电子隔间52和热电偶套管54,热电偶套管54具有紧邻热电偶套管54的远端58设置的半导体热电发生器82。为了使器件52中能有热流通过,例如热传导构件的热导体84与器件82的冷侧86相连,并且沿箭头88的方向将热传递给一个或多个任意的冷却片90,在一些实施例中,冷却片90可以放置于电子隔间52的内部。导体84可以是有效传递热的任意设置。例如,导体84可以是铜棒。
图6B示出了一种用于从热能中产生电的替代设置。现场设备91包括电子隔间52和热电偶套管54。然而,半导体热电发生器器件92放置在热电偶套管54上面,紧邻电子隔间52。这样就允许器件92与器件82相比相对较大。有利地,为了保持热通过器件92,热导体84仍与远端58相连,并沿箭头88的方向给器件92的热侧94传递热。器件92的冷侧96与一个或多个任意的冷却片90相连,冷却片90可以放置或不放置在外壳52内。
如图6A和6B所示,存在不同的方式从概念上获得通过半导体热电元件的热流。尽管图6A和6B演示了两个示例,还可以根据本发明的实施例来实践其它可能性。事实上,热电电能发生元件不需要紧邻地放置在现场设备本身旁边。
图7示出了现场设备100的示意图,现场设备100具有连接到热电偶套管54的电子隔间52,用于感测过程温度。热电电能发生器件102远离现场设备100放置,并通过电能导体104、106连接到现场设备100。升高的过程温度连接到半导体热电发生器器件110的热侧108,半导体热电发生器器件110具有连接到其冷侧112的一个或多个任意的冷却片90。因为器件102远离现场设备100放置,设计现场设备100时,器件102的物理尺寸不受约束。这点是有利的,因为通常只有小的热电发生器器件才适合放置在热电偶套管54内部。商业上可用的热电发生器器件具有定制的尺寸,2mm×4mm×2mm厚的尺寸被认为能够适合放置在热电偶套管内部,并且在横跨热侧和冷侧有50度的温差下产生大约48毫伏的电压和80毫安的电流。所产生的电压通常较低,优选地,使用现场设备所处技术领域内的升压转换电路来进行升压。因此,在该条件下大约0.22瓦的热流通过热电发生器器件。尽管操作效率相对较低(大约2%),产生的大约4毫瓦的功率被认为足以用于无线现场设备的操作。
然而,如果热电发生器件远离现场设备放置,有理由认为热电发生器件的尺寸可以比例子中给出的更大。具体地,可以使用具有大约15mm×15mm×2mm厚的尺寸的热电发生器件。这样的器件在商业上可用,并且被认为在50度的温差下可以产生375毫伏的电压和300毫安的电流。当仍升压转换电路使用时,产生的大约112毫瓦的功率使得设计这样的电路变得更加简单和更加节省成本。在该条件下,大约6瓦的热流通过热电发生器器件。
转换模块能够包括或被连接到附加的功率电路来提供关于电能产生和/或存储的附加功能。例如,例如电容器或可再充电电池的存储器件可以连接到转换模块,以便当从转换模块(通过热源)可用的电能量下降到可以操作现场设备或其部分的最低限度时,可以维持功率电平。此外,任何已知的功率调节电路都能用于升高电压、去除功率信号上的噪声、隔离功率信号、平滑和/或整形功率信号。然而,本领域的技术人员将会认识到,可以根据需要,通过功率调节电路来实现任何希望的功能。
尽管已经参考优选实施例描述了本发明,本领域的技术人员将会意识到,在不脱离本发明的精神和范围的情况下,可以在形式和细节上进行改变。
Claims (22)
1.一种现场设备,包括:
无线通信模块,被配置成与另一个设备无线地通信过程相关信息;以及
与无线通信模块相连的能量转换模块,能量转换模块被配置成与热源相连,并将热势能转换为电,以便向所述现场设备内部的电路供电。
2.根据要求1所述的现场设备,其中,能量转换模块包括热电堆。
3.根据要求1所述的现场设备,其中,能量转换模块包括热电二极管。
4.根据要求1所述的现场设备,其中,能量转换模块包括半导体热电发生器。
5.根据要求1所述的现场设备,其中,能量转换模块紧邻现场设备放置。
6.根据要求1所述的现场设备,其中,能量转换模块远离现场设备放置。
7.根据要求1所述的现场设备,还包括:
连接到能量转换模块和无线通信模块的控制器;以及
连接到过程和控制器的换能器。
8.根据要求7所述的现场设备,其中,所述换能器是传感器。
9.根据要求8所述的现场设备,其中,所述传感器是温度传感器。
10.根据要求9所述的现场设备,其中,温度传感器产生电,并且是一种能量转换模块的组件。
11.根据要求9所述的现场设备,还包括:被配置成连接到过程流体的热电偶套管。
12.根据要求11所述的现场设备,还包括放置于热电偶套管内的热传导构件,所述热传导构件被配置成远离过程流体地传送热量。
13.根据要求12所述的现场设备,其中,能量转换模块包括与热传导构件相连的半导体热电发生器。
14.根据要求13所述的现场设备,其中,半导体热电发生器具有与过程流体热连接的热侧和与热传导构件热连接的冷侧。
15.根据要求14所述的现场设备,其中,热传导构件具有连接到热电发生器的第一端和连接到至少一个冷却片的第二端。
16.根据要求13所述的现场设备,其中,半导体热电发生器具有连接到热传导构件的第一端的热侧和连接到至少一个冷却片的冷侧,并且热传导构件的第二端热连接到过程流体。
17.根据要求1所述的现场设备,其中,由转换模块转换的电量用于提供与热源相关的温度指示。
18.根据要求1所述的现场设备,其中,热源是一种过程热源。
19.根据要求1所述的现场设备,还包括与转换模块相连的电能存储器件。
20.一种向无线现场设备供电的方法,所述方法包括:
将热电器件和热势能源热连接;以及
将热电器件和现场设备的无线通信模块电连接。
21.根据要求20所述的方法,其中,热连接热电器件包括通过热电器件来传递热。
22.一种现场设备,包括:
无线通信模块,被配置成与另一个设备无线地通信过程相关信息;以及
转换装置,用于将过程热源中的热势能转换为电,以便向现场设备供电。
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102088260A (zh) * | 2009-12-02 | 2011-06-08 | Abb技术股份公司 | 自主的温度发送器 |
CN102187515A (zh) * | 2008-10-13 | 2011-09-14 | 罗斯蒙德公司 | 具有结实天线和转动止动件的无线现场设备 |
CN105069981A (zh) * | 2015-07-15 | 2015-11-18 | 北京依米康科技发展有限公司 | 利用化合物溶于水吸热和/或放热的热电水灾报警装置 |
CN101821686B (zh) * | 2007-10-05 | 2017-02-08 | 罗斯蒙特公司 | 用于现场设备的rf适配器 |
Families Citing this family (339)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005086331A2 (en) | 2004-03-02 | 2005-09-15 | Rosemount, Inc. | Process device with improved power generation |
US8538560B2 (en) | 2004-04-29 | 2013-09-17 | Rosemount Inc. | Wireless power and communication unit for process field devices |
US8145180B2 (en) * | 2004-05-21 | 2012-03-27 | Rosemount Inc. | Power generation for process devices |
US20060176660A1 (en) * | 2005-02-07 | 2006-08-10 | Ahmad Amiri | Ultra mobile communicating computer |
US9184364B2 (en) | 2005-03-02 | 2015-11-10 | Rosemount Inc. | Pipeline thermoelectric generator assembly |
DE102005043771A1 (de) * | 2005-09-13 | 2007-03-15 | Endress + Hauser Flowtec Ag | Verfahren zur Energieversorgung eines Feldgerätes der Automatisierungstechnik |
DE102006014444A1 (de) * | 2006-03-29 | 2007-10-04 | Abb Patent Gmbh | Einrichtung zur Energieversorgung von Feldgeräten |
US7913566B2 (en) | 2006-05-23 | 2011-03-29 | Rosemount Inc. | Industrial process device utilizing magnetic induction |
CN101517765B (zh) * | 2006-09-28 | 2011-03-23 | 罗斯蒙德公司 | 工业热电发电组件及回收过程系统中的废弃热量的方法 |
US8188359B2 (en) * | 2006-09-28 | 2012-05-29 | Rosemount Inc. | Thermoelectric generator assembly for field process devices |
JP5031842B2 (ja) | 2006-09-28 | 2012-09-26 | ローズマウント インコーポレイテッド | 産業立地のためのアンテナ及びレードームを備えたワイヤレスフィールド装置 |
US8217782B2 (en) * | 2007-05-24 | 2012-07-10 | Rosemount Inc. | Industrial field device with reduced power consumption |
WO2009154748A2 (en) * | 2008-06-17 | 2009-12-23 | Rosemount Inc. | Rf adapter for field device with low voltage intrinsic safety clamping |
US8250924B2 (en) | 2008-04-22 | 2012-08-28 | Rosemount Inc. | Industrial process device utilizing piezoelectric transducer |
US8929948B2 (en) | 2008-06-17 | 2015-01-06 | Rosemount Inc. | Wireless communication adapter for field devices |
US8847571B2 (en) | 2008-06-17 | 2014-09-30 | Rosemount Inc. | RF adapter for field device with variable voltage drop |
US8694060B2 (en) | 2008-06-17 | 2014-04-08 | Rosemount Inc. | Form factor and electromagnetic interference protection for process device wireless adapters |
US7977924B2 (en) | 2008-11-03 | 2011-07-12 | Rosemount Inc. | Industrial process power scavenging device and method of deriving process device power from an industrial process |
US10378106B2 (en) | 2008-11-14 | 2019-08-13 | Asm Ip Holding B.V. | Method of forming insulation film by modified PEALD |
US8262287B2 (en) | 2008-12-08 | 2012-09-11 | Asm America, Inc. | Thermocouple |
US9394608B2 (en) | 2009-04-06 | 2016-07-19 | Asm America, Inc. | Semiconductor processing reactor and components thereof |
WO2010124665A1 (de) * | 2009-04-30 | 2010-11-04 | Siemens Aktiengesellschaft | Vorrichtung und temperaturmesseinheit zum berührungslosen messen und übermitteln von temperaturen von temperaturen aufnehmenden teilen und verwendung einer solchen vorrichtung |
US8382370B2 (en) | 2009-05-06 | 2013-02-26 | Asm America, Inc. | Thermocouple assembly with guarded thermocouple junction |
US9297705B2 (en) * | 2009-05-06 | 2016-03-29 | Asm America, Inc. | Smart temperature measuring device |
US20100318007A1 (en) * | 2009-06-10 | 2010-12-16 | O'brien Donald J | Electromechanical tactile stimulation devices and methods |
US8626087B2 (en) | 2009-06-16 | 2014-01-07 | Rosemount Inc. | Wire harness for field devices used in a hazardous locations |
US9674976B2 (en) | 2009-06-16 | 2017-06-06 | Rosemount Inc. | Wireless process communication adapter with improved encapsulation |
US8802201B2 (en) | 2009-08-14 | 2014-08-12 | Asm America, Inc. | Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species |
EP2567436B1 (en) | 2010-03-24 | 2022-04-20 | Pepperl+Fuchs SE | Power management circuit for a wireless communication device and process control system using same |
DE102010022025B4 (de) * | 2010-05-29 | 2021-03-04 | Abb Schweiz Ag | Stromversorgungseinrichtung für autonome Feldgeräte |
US8276458B2 (en) | 2010-07-12 | 2012-10-02 | Rosemount Inc. | Transmitter output with scalable rangeability |
US10761524B2 (en) | 2010-08-12 | 2020-09-01 | Rosemount Inc. | Wireless adapter with process diagnostics |
GB2483293A (en) * | 2010-09-03 | 2012-03-07 | Spirax Sarco Ltd | Steam flow meter with thermoelectric power source |
JP5640800B2 (ja) * | 2011-02-21 | 2014-12-17 | ソニー株式会社 | 無線電力供給装置及び無線電力供給方法 |
DE102011006638A1 (de) * | 2011-04-01 | 2012-10-04 | Robert Bosch Gmbh | Vorrichtung und Verfahren zum Melden eines Ereignisses und Überwachungssystem |
US9312155B2 (en) | 2011-06-06 | 2016-04-12 | Asm Japan K.K. | High-throughput semiconductor-processing apparatus equipped with multiple dual-chamber modules |
JP5881979B2 (ja) * | 2011-06-27 | 2016-03-09 | セイコーインスツル株式会社 | 端末装置、及び通信システム |
US10364496B2 (en) | 2011-06-27 | 2019-07-30 | Asm Ip Holding B.V. | Dual section module having shared and unshared mass flow controllers |
US20130005372A1 (en) * | 2011-06-29 | 2013-01-03 | Rosemount Inc. | Integral thermoelectric generator for wireless devices |
US10854498B2 (en) | 2011-07-15 | 2020-12-01 | Asm Ip Holding B.V. | Wafer-supporting device and method for producing same |
US20130023129A1 (en) | 2011-07-20 | 2013-01-24 | Asm America, Inc. | Pressure transmitter for a semiconductor processing environment |
TWI474161B (zh) * | 2011-10-17 | 2015-02-21 | Finetek Co Ltd | A process controller with a power regulation function |
US9310794B2 (en) | 2011-10-27 | 2016-04-12 | Rosemount Inc. | Power supply for industrial process field device |
US9017481B1 (en) | 2011-10-28 | 2015-04-28 | Asm America, Inc. | Process feed management for semiconductor substrate processing |
JP5980591B2 (ja) * | 2012-06-29 | 2016-08-31 | ナブテスコ株式会社 | 色センサーおよび機械装置遠隔監視システム |
CN202918218U (zh) | 2012-08-16 | 2013-05-01 | 中兴通讯股份有限公司 | 一种通信系统设备的节能环保装置 |
US9659799B2 (en) | 2012-08-28 | 2017-05-23 | Asm Ip Holding B.V. | Systems and methods for dynamic semiconductor process scheduling |
WO2014045235A1 (en) * | 2012-09-21 | 2014-03-27 | Koninklijke Philips N.V. | Handheld information processing device with remote control output mode |
US10714315B2 (en) | 2012-10-12 | 2020-07-14 | Asm Ip Holdings B.V. | Semiconductor reaction chamber showerhead |
US10910962B2 (en) | 2012-10-19 | 2021-02-02 | University Of Southern California | Pervasive power generation system |
US20160376700A1 (en) | 2013-02-01 | 2016-12-29 | Asm Ip Holding B.V. | System for treatment of deposition reactor |
US9484191B2 (en) | 2013-03-08 | 2016-11-01 | Asm Ip Holding B.V. | Pulsed remote plasma method and system |
US9589770B2 (en) | 2013-03-08 | 2017-03-07 | Asm Ip Holding B.V. | Method and systems for in-situ formation of intermediate reactive species |
USD702188S1 (en) | 2013-03-08 | 2014-04-08 | Asm Ip Holding B.V. | Thermocouple |
US9240412B2 (en) | 2013-09-27 | 2016-01-19 | Asm Ip Holding B.V. | Semiconductor structure and device and methods of forming same using selective epitaxial process |
JP5772912B2 (ja) * | 2013-09-30 | 2015-09-02 | 横河電機株式会社 | 無線機器 |
DE102013114195A1 (de) * | 2013-12-17 | 2015-06-18 | Endress + Hauser Flowtec Ag | Feldgerät der Prozessautomatisierung |
EP2887511A1 (en) * | 2013-12-20 | 2015-06-24 | ABB Technology AG | Sensor assembly for measuring at least a temperature on a moving part of an electric machine |
US10683571B2 (en) | 2014-02-25 | 2020-06-16 | Asm Ip Holding B.V. | Gas supply manifold and method of supplying gases to chamber using same |
CN103822667A (zh) * | 2014-03-04 | 2014-05-28 | 上海理工大学 | 基于蓝牙技术的温湿度采集系统 |
US10167557B2 (en) | 2014-03-18 | 2019-01-01 | Asm Ip Holding B.V. | Gas distribution system, reactor including the system, and methods of using the same |
US11015245B2 (en) | 2014-03-19 | 2021-05-25 | Asm Ip Holding B.V. | Gas-phase reactor and system having exhaust plenum and components thereof |
US9704373B2 (en) | 2014-05-29 | 2017-07-11 | Thomas & Betts International Llc | Smart lug system |
US10858737B2 (en) | 2014-07-28 | 2020-12-08 | Asm Ip Holding B.V. | Showerhead assembly and components thereof |
US9890456B2 (en) | 2014-08-21 | 2018-02-13 | Asm Ip Holding B.V. | Method and system for in situ formation of gas-phase compounds |
JP6398486B2 (ja) * | 2014-09-03 | 2018-10-03 | 株式会社デンソー | アクチュエータ装置 |
US9657845B2 (en) | 2014-10-07 | 2017-05-23 | Asm Ip Holding B.V. | Variable conductance gas distribution apparatus and method |
US10941490B2 (en) | 2014-10-07 | 2021-03-09 | Asm Ip Holding B.V. | Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same |
KR102263121B1 (ko) | 2014-12-22 | 2021-06-09 | 에이에스엠 아이피 홀딩 비.브이. | 반도체 소자 및 그 제조 방법 |
US9885610B2 (en) | 2014-12-22 | 2018-02-06 | Rosemount Inc. | Thermowell system with vibration detection |
US10529542B2 (en) | 2015-03-11 | 2020-01-07 | Asm Ip Holdings B.V. | Cross-flow reactor and method |
US10276355B2 (en) | 2015-03-12 | 2019-04-30 | Asm Ip Holding B.V. | Multi-zone reactor, system including the reactor, and method of using the same |
DE102015004578A1 (de) * | 2015-04-14 | 2016-10-20 | Dräger Safety AG & Co. KGaA | Verfahren zur Datenübertragung zwischen Messeinrichtungen und einer Datenverarbeitungseinrichtung in einem Messdatenerfassungssystem |
US10458018B2 (en) | 2015-06-26 | 2019-10-29 | Asm Ip Holding B.V. | Structures including metal carbide material, devices including the structures, and methods of forming same |
US9891111B2 (en) * | 2015-06-30 | 2018-02-13 | Rosemount Inc. | Thermowell with infrared sensor |
US10600673B2 (en) | 2015-07-07 | 2020-03-24 | Asm Ip Holding B.V. | Magnetic susceptor to baseplate seal |
US9960072B2 (en) | 2015-09-29 | 2018-05-01 | Asm Ip Holding B.V. | Variable adjustment for precise matching of multiple chamber cavity housings |
US10211308B2 (en) | 2015-10-21 | 2019-02-19 | Asm Ip Holding B.V. | NbMC layers |
US10322384B2 (en) | 2015-11-09 | 2019-06-18 | Asm Ip Holding B.V. | Counter flow mixer for process chamber |
US11139308B2 (en) | 2015-12-29 | 2021-10-05 | Asm Ip Holding B.V. | Atomic layer deposition of III-V compounds to form V-NAND devices |
US10529554B2 (en) | 2016-02-19 | 2020-01-07 | Asm Ip Holding B.V. | Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches |
US10468251B2 (en) | 2016-02-19 | 2019-11-05 | Asm Ip Holding B.V. | Method for forming spacers using silicon nitride film for spacer-defined multiple patterning |
US10501866B2 (en) | 2016-03-09 | 2019-12-10 | Asm Ip Holding B.V. | Gas distribution apparatus for improved film uniformity in an epitaxial system |
US10343920B2 (en) | 2016-03-18 | 2019-07-09 | Asm Ip Holding B.V. | Aligned carbon nanotubes |
US9892913B2 (en) | 2016-03-24 | 2018-02-13 | Asm Ip Holding B.V. | Radial and thickness control via biased multi-port injection settings |
US10190213B2 (en) | 2016-04-21 | 2019-01-29 | Asm Ip Holding B.V. | Deposition of metal borides |
US10865475B2 (en) | 2016-04-21 | 2020-12-15 | Asm Ip Holding B.V. | Deposition of metal borides and silicides |
US10367080B2 (en) | 2016-05-02 | 2019-07-30 | Asm Ip Holding B.V. | Method of forming a germanium oxynitride film |
US10032628B2 (en) | 2016-05-02 | 2018-07-24 | Asm Ip Holding B.V. | Source/drain performance through conformal solid state doping |
KR102592471B1 (ko) | 2016-05-17 | 2023-10-20 | 에이에스엠 아이피 홀딩 비.브이. | 금속 배선 형성 방법 및 이를 이용한 반도체 장치의 제조 방법 |
US11453943B2 (en) | 2016-05-25 | 2022-09-27 | Asm Ip Holding B.V. | Method for forming carbon-containing silicon/metal oxide or nitride film by ALD using silicon precursor and hydrocarbon precursor |
US10388509B2 (en) | 2016-06-28 | 2019-08-20 | Asm Ip Holding B.V. | Formation of epitaxial layers via dislocation filtering |
US9859151B1 (en) | 2016-07-08 | 2018-01-02 | Asm Ip Holding B.V. | Selective film deposition method to form air gaps |
US10612137B2 (en) | 2016-07-08 | 2020-04-07 | Asm Ip Holdings B.V. | Organic reactants for atomic layer deposition |
US10714385B2 (en) | 2016-07-19 | 2020-07-14 | Asm Ip Holding B.V. | Selective deposition of tungsten |
JP6448093B2 (ja) * | 2016-07-27 | 2019-01-09 | ナブテスコ株式会社 | センサー装置 |
KR102354490B1 (ko) | 2016-07-27 | 2022-01-21 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 |
US9887082B1 (en) | 2016-07-28 | 2018-02-06 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
KR102532607B1 (ko) | 2016-07-28 | 2023-05-15 | 에이에스엠 아이피 홀딩 비.브이. | 기판 가공 장치 및 그 동작 방법 |
US9812320B1 (en) | 2016-07-28 | 2017-11-07 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
US10395919B2 (en) | 2016-07-28 | 2019-08-27 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
KR102613349B1 (ko) | 2016-08-25 | 2023-12-14 | 에이에스엠 아이피 홀딩 비.브이. | 배기 장치 및 이를 이용한 기판 가공 장치와 박막 제조 방법 |
US10410943B2 (en) | 2016-10-13 | 2019-09-10 | Asm Ip Holding B.V. | Method for passivating a surface of a semiconductor and related systems |
US10643826B2 (en) | 2016-10-26 | 2020-05-05 | Asm Ip Holdings B.V. | Methods for thermally calibrating reaction chambers |
US11532757B2 (en) | 2016-10-27 | 2022-12-20 | Asm Ip Holding B.V. | Deposition of charge trapping layers |
US10643904B2 (en) | 2016-11-01 | 2020-05-05 | Asm Ip Holdings B.V. | Methods for forming a semiconductor device and related semiconductor device structures |
US10229833B2 (en) | 2016-11-01 | 2019-03-12 | Asm Ip Holding B.V. | Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
US10714350B2 (en) | 2016-11-01 | 2020-07-14 | ASM IP Holdings, B.V. | Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
US10435790B2 (en) | 2016-11-01 | 2019-10-08 | Asm Ip Holding B.V. | Method of subatmospheric plasma-enhanced ALD using capacitively coupled electrodes with narrow gap |
US10134757B2 (en) | 2016-11-07 | 2018-11-20 | Asm Ip Holding B.V. | Method of processing a substrate and a device manufactured by using the method |
KR102546317B1 (ko) | 2016-11-15 | 2023-06-21 | 에이에스엠 아이피 홀딩 비.브이. | 기체 공급 유닛 및 이를 포함하는 기판 처리 장치 |
US10340135B2 (en) | 2016-11-28 | 2019-07-02 | Asm Ip Holding B.V. | Method of topologically restricted plasma-enhanced cyclic deposition of silicon or metal nitride |
KR20180068582A (ko) | 2016-12-14 | 2018-06-22 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
US11447861B2 (en) | 2016-12-15 | 2022-09-20 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus and a method of forming a patterned structure |
US11581186B2 (en) | 2016-12-15 | 2023-02-14 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus |
KR20180070971A (ko) | 2016-12-19 | 2018-06-27 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
US10269558B2 (en) | 2016-12-22 | 2019-04-23 | Asm Ip Holding B.V. | Method of forming a structure on a substrate |
US10867788B2 (en) | 2016-12-28 | 2020-12-15 | Asm Ip Holding B.V. | Method of forming a structure on a substrate |
US10655221B2 (en) | 2017-02-09 | 2020-05-19 | Asm Ip Holding B.V. | Method for depositing oxide film by thermal ALD and PEALD |
US10468261B2 (en) | 2017-02-15 | 2019-11-05 | Asm Ip Holding B.V. | Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures |
US10529563B2 (en) | 2017-03-29 | 2020-01-07 | Asm Ip Holdings B.V. | Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures |
US10283353B2 (en) | 2017-03-29 | 2019-05-07 | Asm Ip Holding B.V. | Method of reforming insulating film deposited on substrate with recess pattern |
KR102457289B1 (ko) | 2017-04-25 | 2022-10-21 | 에이에스엠 아이피 홀딩 비.브이. | 박막 증착 방법 및 반도체 장치의 제조 방법 |
US10770286B2 (en) | 2017-05-08 | 2020-09-08 | Asm Ip Holdings B.V. | Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures |
US10892156B2 (en) | 2017-05-08 | 2021-01-12 | Asm Ip Holding B.V. | Methods for forming a silicon nitride film on a substrate and related semiconductor device structures |
US10446393B2 (en) | 2017-05-08 | 2019-10-15 | Asm Ip Holding B.V. | Methods for forming silicon-containing epitaxial layers and related semiconductor device structures |
DE102017207783B3 (de) | 2017-05-09 | 2018-06-07 | Vega Grieshaber Kg | Radarfüllstandmessgerät mit einem Phasenregelkreis |
US10504742B2 (en) | 2017-05-31 | 2019-12-10 | Asm Ip Holding B.V. | Method of atomic layer etching using hydrogen plasma |
US10886123B2 (en) | 2017-06-02 | 2021-01-05 | Asm Ip Holding B.V. | Methods for forming low temperature semiconductor layers and related semiconductor device structures |
US11306395B2 (en) | 2017-06-28 | 2022-04-19 | Asm Ip Holding B.V. | Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus |
US10685834B2 (en) | 2017-07-05 | 2020-06-16 | Asm Ip Holdings B.V. | Methods for forming a silicon germanium tin layer and related semiconductor device structures |
KR20190009245A (ko) | 2017-07-18 | 2019-01-28 | 에이에스엠 아이피 홀딩 비.브이. | 반도체 소자 구조물 형성 방법 및 관련된 반도체 소자 구조물 |
US11374112B2 (en) | 2017-07-19 | 2022-06-28 | Asm Ip Holding B.V. | Method for depositing a group IV semiconductor and related semiconductor device structures |
US11018002B2 (en) | 2017-07-19 | 2021-05-25 | Asm Ip Holding B.V. | Method for selectively depositing a Group IV semiconductor and related semiconductor device structures |
US10541333B2 (en) | 2017-07-19 | 2020-01-21 | Asm Ip Holding B.V. | Method for depositing a group IV semiconductor and related semiconductor device structures |
US10312055B2 (en) | 2017-07-26 | 2019-06-04 | Asm Ip Holding B.V. | Method of depositing film by PEALD using negative bias |
US10605530B2 (en) | 2017-07-26 | 2020-03-31 | Asm Ip Holding B.V. | Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnace |
US10590535B2 (en) | 2017-07-26 | 2020-03-17 | Asm Ip Holdings B.V. | Chemical treatment, deposition and/or infiltration apparatus and method for using the same |
US10770336B2 (en) | 2017-08-08 | 2020-09-08 | Asm Ip Holding B.V. | Substrate lift mechanism and reactor including same |
US10692741B2 (en) | 2017-08-08 | 2020-06-23 | Asm Ip Holdings B.V. | Radiation shield |
US11769682B2 (en) | 2017-08-09 | 2023-09-26 | Asm Ip Holding B.V. | Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
US10249524B2 (en) | 2017-08-09 | 2019-04-02 | Asm Ip Holding B.V. | Cassette holder assembly for a substrate cassette and holding member for use in such assembly |
US11139191B2 (en) | 2017-08-09 | 2021-10-05 | Asm Ip Holding B.V. | Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
USD900036S1 (en) | 2017-08-24 | 2020-10-27 | Asm Ip Holding B.V. | Heater electrical connector and adapter |
US11830730B2 (en) | 2017-08-29 | 2023-11-28 | Asm Ip Holding B.V. | Layer forming method and apparatus |
US11056344B2 (en) | 2017-08-30 | 2021-07-06 | Asm Ip Holding B.V. | Layer forming method |
KR102491945B1 (ko) | 2017-08-30 | 2023-01-26 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
US11295980B2 (en) | 2017-08-30 | 2022-04-05 | Asm Ip Holding B.V. | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures |
US10607895B2 (en) | 2017-09-18 | 2020-03-31 | Asm Ip Holdings B.V. | Method for forming a semiconductor device structure comprising a gate fill metal |
KR102630301B1 (ko) | 2017-09-21 | 2024-01-29 | 에이에스엠 아이피 홀딩 비.브이. | 침투성 재료의 순차 침투 합성 방법 처리 및 이를 이용하여 형성된 구조물 및 장치 |
US10844484B2 (en) | 2017-09-22 | 2020-11-24 | Asm Ip Holding B.V. | Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
US10658205B2 (en) | 2017-09-28 | 2020-05-19 | Asm Ip Holdings B.V. | Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber |
US10403504B2 (en) | 2017-10-05 | 2019-09-03 | Asm Ip Holding B.V. | Method for selectively depositing a metallic film on a substrate |
US10319588B2 (en) | 2017-10-10 | 2019-06-11 | Asm Ip Holding B.V. | Method for depositing a metal chalcogenide on a substrate by cyclical deposition |
US10923344B2 (en) | 2017-10-30 | 2021-02-16 | Asm Ip Holding B.V. | Methods for forming a semiconductor structure and related semiconductor structures |
US10910262B2 (en) | 2017-11-16 | 2021-02-02 | Asm Ip Holding B.V. | Method of selectively depositing a capping layer structure on a semiconductor device structure |
KR102443047B1 (ko) | 2017-11-16 | 2022-09-14 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 방법 및 그에 의해 제조된 장치 |
US11022879B2 (en) | 2017-11-24 | 2021-06-01 | Asm Ip Holding B.V. | Method of forming an enhanced unexposed photoresist layer |
US11639811B2 (en) | 2017-11-27 | 2023-05-02 | Asm Ip Holding B.V. | Apparatus including a clean mini environment |
JP7214724B2 (ja) | 2017-11-27 | 2023-01-30 | エーエスエム アイピー ホールディング ビー.ブイ. | バッチ炉で利用されるウェハカセットを収納するための収納装置 |
US10290508B1 (en) | 2017-12-05 | 2019-05-14 | Asm Ip Holding B.V. | Method for forming vertical spacers for spacer-defined patterning |
US10872771B2 (en) | 2018-01-16 | 2020-12-22 | Asm Ip Holding B. V. | Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures |
TW202325889A (zh) | 2018-01-19 | 2023-07-01 | 荷蘭商Asm 智慧財產控股公司 | 沈積方法 |
US11482412B2 (en) | 2018-01-19 | 2022-10-25 | Asm Ip Holding B.V. | Method for depositing a gap-fill layer by plasma-assisted deposition |
USD903477S1 (en) | 2018-01-24 | 2020-12-01 | Asm Ip Holdings B.V. | Metal clamp |
US11018047B2 (en) | 2018-01-25 | 2021-05-25 | Asm Ip Holding B.V. | Hybrid lift pin |
US10535516B2 (en) | 2018-02-01 | 2020-01-14 | Asm Ip Holdings B.V. | Method for depositing a semiconductor structure on a surface of a substrate and related semiconductor structures |
USD880437S1 (en) | 2018-02-01 | 2020-04-07 | Asm Ip Holding B.V. | Gas supply plate for semiconductor manufacturing apparatus |
US11081345B2 (en) | 2018-02-06 | 2021-08-03 | Asm Ip Holding B.V. | Method of post-deposition treatment for silicon oxide film |
US10896820B2 (en) | 2018-02-14 | 2021-01-19 | Asm Ip Holding B.V. | Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
CN111699278B (zh) | 2018-02-14 | 2023-05-16 | Asm Ip私人控股有限公司 | 通过循环沉积工艺在衬底上沉积含钌膜的方法 |
US10731249B2 (en) | 2018-02-15 | 2020-08-04 | Asm Ip Holding B.V. | Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus |
KR102636427B1 (ko) | 2018-02-20 | 2024-02-13 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 및 장치 |
US10658181B2 (en) | 2018-02-20 | 2020-05-19 | Asm Ip Holding B.V. | Method of spacer-defined direct patterning in semiconductor fabrication |
US10975470B2 (en) | 2018-02-23 | 2021-04-13 | Asm Ip Holding B.V. | Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment |
US11473195B2 (en) | 2018-03-01 | 2022-10-18 | Asm Ip Holding B.V. | Semiconductor processing apparatus and a method for processing a substrate |
US11629406B2 (en) | 2018-03-09 | 2023-04-18 | Asm Ip Holding B.V. | Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate |
US11114283B2 (en) | 2018-03-16 | 2021-09-07 | Asm Ip Holding B.V. | Reactor, system including the reactor, and methods of manufacturing and using same |
KR102646467B1 (ko) | 2018-03-27 | 2024-03-11 | 에이에스엠 아이피 홀딩 비.브이. | 기판 상에 전극을 형성하는 방법 및 전극을 포함하는 반도체 소자 구조 |
US11088002B2 (en) | 2018-03-29 | 2021-08-10 | Asm Ip Holding B.V. | Substrate rack and a substrate processing system and method |
US10510536B2 (en) | 2018-03-29 | 2019-12-17 | Asm Ip Holding B.V. | Method of depositing a co-doped polysilicon film on a surface of a substrate within a reaction chamber |
US11230766B2 (en) | 2018-03-29 | 2022-01-25 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
KR102501472B1 (ko) | 2018-03-30 | 2023-02-20 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 |
DE102018110165A1 (de) * | 2018-04-27 | 2019-10-31 | Gemü Gebr. Müller Apparatebau Gmbh & Co. Kommanditgesellschaft | Vorrichtung zur Anordnung an einer Komponente einer Industrieanlage |
TW202344708A (zh) | 2018-05-08 | 2023-11-16 | 荷蘭商Asm Ip私人控股有限公司 | 藉由循環沉積製程於基板上沉積氧化物膜之方法及相關裝置結構 |
TW202349473A (zh) | 2018-05-11 | 2023-12-16 | 荷蘭商Asm Ip私人控股有限公司 | 用於基板上形成摻雜金屬碳化物薄膜之方法及相關半導體元件結構 |
KR102596988B1 (ko) | 2018-05-28 | 2023-10-31 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 및 그에 의해 제조된 장치 |
US11718913B2 (en) | 2018-06-04 | 2023-08-08 | Asm Ip Holding B.V. | Gas distribution system and reactor system including same |
US11270899B2 (en) | 2018-06-04 | 2022-03-08 | Asm Ip Holding B.V. | Wafer handling chamber with moisture reduction |
US11286562B2 (en) | 2018-06-08 | 2022-03-29 | Asm Ip Holding B.V. | Gas-phase chemical reactor and method of using same |
US10797133B2 (en) | 2018-06-21 | 2020-10-06 | Asm Ip Holding B.V. | Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures |
KR102568797B1 (ko) | 2018-06-21 | 2023-08-21 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 시스템 |
CN112292478A (zh) | 2018-06-27 | 2021-01-29 | Asm Ip私人控股有限公司 | 用于形成含金属的材料的循环沉积方法及包含含金属的材料的膜和结构 |
KR20210027265A (ko) | 2018-06-27 | 2021-03-10 | 에이에스엠 아이피 홀딩 비.브이. | 금속 함유 재료를 형성하기 위한 주기적 증착 방법 및 금속 함유 재료를 포함하는 막 및 구조체 |
US10612136B2 (en) | 2018-06-29 | 2020-04-07 | ASM IP Holding, B.V. | Temperature-controlled flange and reactor system including same |
KR20200002519A (ko) | 2018-06-29 | 2020-01-08 | 에이에스엠 아이피 홀딩 비.브이. | 박막 증착 방법 및 반도체 장치의 제조 방법 |
US10755922B2 (en) | 2018-07-03 | 2020-08-25 | Asm Ip Holding B.V. | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
US10388513B1 (en) | 2018-07-03 | 2019-08-20 | Asm Ip Holding B.V. | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
US10767789B2 (en) | 2018-07-16 | 2020-09-08 | Asm Ip Holding B.V. | Diaphragm valves, valve components, and methods for forming valve components |
US10483099B1 (en) | 2018-07-26 | 2019-11-19 | Asm Ip Holding B.V. | Method for forming thermally stable organosilicon polymer film |
US11053591B2 (en) | 2018-08-06 | 2021-07-06 | Asm Ip Holding B.V. | Multi-port gas injection system and reactor system including same |
US10883175B2 (en) | 2018-08-09 | 2021-01-05 | Asm Ip Holding B.V. | Vertical furnace for processing substrates and a liner for use therein |
US10829852B2 (en) | 2018-08-16 | 2020-11-10 | Asm Ip Holding B.V. | Gas distribution device for a wafer processing apparatus |
US11430674B2 (en) | 2018-08-22 | 2022-08-30 | Asm Ip Holding B.V. | Sensor array, apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
KR20200030162A (ko) | 2018-09-11 | 2020-03-20 | 에이에스엠 아이피 홀딩 비.브이. | 박막 증착 방법 |
US11024523B2 (en) | 2018-09-11 | 2021-06-01 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
US11049751B2 (en) | 2018-09-14 | 2021-06-29 | Asm Ip Holding B.V. | Cassette supply system to store and handle cassettes and processing apparatus equipped therewith |
CN110970344A (zh) | 2018-10-01 | 2020-04-07 | Asm Ip控股有限公司 | 衬底保持设备、包含所述设备的系统及其使用方法 |
US11232963B2 (en) | 2018-10-03 | 2022-01-25 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
KR102592699B1 (ko) | 2018-10-08 | 2023-10-23 | 에이에스엠 아이피 홀딩 비.브이. | 기판 지지 유닛 및 이를 포함하는 박막 증착 장치와 기판 처리 장치 |
US10847365B2 (en) | 2018-10-11 | 2020-11-24 | Asm Ip Holding B.V. | Method of forming conformal silicon carbide film by cyclic CVD |
US10811256B2 (en) | 2018-10-16 | 2020-10-20 | Asm Ip Holding B.V. | Method for etching a carbon-containing feature |
KR102546322B1 (ko) | 2018-10-19 | 2023-06-21 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 및 기판 처리 방법 |
KR102605121B1 (ko) | 2018-10-19 | 2023-11-23 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 및 기판 처리 방법 |
USD948463S1 (en) | 2018-10-24 | 2022-04-12 | Asm Ip Holding B.V. | Susceptor for semiconductor substrate supporting apparatus |
US10381219B1 (en) | 2018-10-25 | 2019-08-13 | Asm Ip Holding B.V. | Methods for forming a silicon nitride film |
US11087997B2 (en) | 2018-10-31 | 2021-08-10 | Asm Ip Holding B.V. | Substrate processing apparatus for processing substrates |
KR20200051105A (ko) | 2018-11-02 | 2020-05-13 | 에이에스엠 아이피 홀딩 비.브이. | 기판 지지 유닛 및 이를 포함하는 기판 처리 장치 |
US11572620B2 (en) | 2018-11-06 | 2023-02-07 | Asm Ip Holding B.V. | Methods for selectively depositing an amorphous silicon film on a substrate |
US11031242B2 (en) | 2018-11-07 | 2021-06-08 | Asm Ip Holding B.V. | Methods for depositing a boron doped silicon germanium film |
US10818758B2 (en) | 2018-11-16 | 2020-10-27 | Asm Ip Holding B.V. | Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures |
US10847366B2 (en) | 2018-11-16 | 2020-11-24 | Asm Ip Holding B.V. | Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process |
US10559458B1 (en) | 2018-11-26 | 2020-02-11 | Asm Ip Holding B.V. | Method of forming oxynitride film |
US11217444B2 (en) | 2018-11-30 | 2022-01-04 | Asm Ip Holding B.V. | Method for forming an ultraviolet radiation responsive metal oxide-containing film |
KR102636428B1 (ko) | 2018-12-04 | 2024-02-13 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치를 세정하는 방법 |
US11158513B2 (en) | 2018-12-13 | 2021-10-26 | Asm Ip Holding B.V. | Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures |
TW202037745A (zh) | 2018-12-14 | 2020-10-16 | 荷蘭商Asm Ip私人控股有限公司 | 形成裝置結構之方法、其所形成之結構及施行其之系統 |
TWI819180B (zh) | 2019-01-17 | 2023-10-21 | 荷蘭商Asm 智慧財產控股公司 | 藉由循環沈積製程於基板上形成含過渡金屬膜之方法 |
KR20200091543A (ko) | 2019-01-22 | 2020-07-31 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
CN111524788B (zh) | 2019-02-01 | 2023-11-24 | Asm Ip私人控股有限公司 | 氧化硅的拓扑选择性膜形成的方法 |
KR102638425B1 (ko) | 2019-02-20 | 2024-02-21 | 에이에스엠 아이피 홀딩 비.브이. | 기판 표면 내에 형성된 오목부를 충진하기 위한 방법 및 장치 |
KR102626263B1 (ko) | 2019-02-20 | 2024-01-16 | 에이에스엠 아이피 홀딩 비.브이. | 처리 단계를 포함하는 주기적 증착 방법 및 이를 위한 장치 |
TW202104632A (zh) | 2019-02-20 | 2021-02-01 | 荷蘭商Asm Ip私人控股有限公司 | 用來填充形成於基材表面內之凹部的循環沉積方法及設備 |
US11482533B2 (en) | 2019-02-20 | 2022-10-25 | Asm Ip Holding B.V. | Apparatus and methods for plug fill deposition in 3-D NAND applications |
TW202100794A (zh) | 2019-02-22 | 2021-01-01 | 荷蘭商Asm Ip私人控股有限公司 | 基材處理設備及處理基材之方法 |
KR20200108242A (ko) | 2019-03-08 | 2020-09-17 | 에이에스엠 아이피 홀딩 비.브이. | 실리콘 질화물 층을 선택적으로 증착하는 방법, 및 선택적으로 증착된 실리콘 질화물 층을 포함하는 구조체 |
KR20200108243A (ko) | 2019-03-08 | 2020-09-17 | 에이에스엠 아이피 홀딩 비.브이. | SiOC 층을 포함한 구조체 및 이의 형성 방법 |
KR20200108248A (ko) | 2019-03-08 | 2020-09-17 | 에이에스엠 아이피 홀딩 비.브이. | SiOCN 층을 포함한 구조체 및 이의 형성 방법 |
JP2020167398A (ja) | 2019-03-28 | 2020-10-08 | エーエスエム・アイピー・ホールディング・ベー・フェー | ドアオープナーおよびドアオープナーが提供される基材処理装置 |
KR20200116855A (ko) | 2019-04-01 | 2020-10-13 | 에이에스엠 아이피 홀딩 비.브이. | 반도체 소자를 제조하는 방법 |
KR20200123380A (ko) | 2019-04-19 | 2020-10-29 | 에이에스엠 아이피 홀딩 비.브이. | 층 형성 방법 및 장치 |
KR20200125453A (ko) | 2019-04-24 | 2020-11-04 | 에이에스엠 아이피 홀딩 비.브이. | 기상 반응기 시스템 및 이를 사용하는 방법 |
KR20200130121A (ko) | 2019-05-07 | 2020-11-18 | 에이에스엠 아이피 홀딩 비.브이. | 딥 튜브가 있는 화학물질 공급원 용기 |
KR20200130118A (ko) | 2019-05-07 | 2020-11-18 | 에이에스엠 아이피 홀딩 비.브이. | 비정질 탄소 중합체 막을 개질하는 방법 |
KR20200130652A (ko) | 2019-05-10 | 2020-11-19 | 에이에스엠 아이피 홀딩 비.브이. | 표면 상에 재료를 증착하는 방법 및 본 방법에 따라 형성된 구조 |
JP2020188255A (ja) | 2019-05-16 | 2020-11-19 | エーエスエム アイピー ホールディング ビー.ブイ. | ウェハボートハンドリング装置、縦型バッチ炉および方法 |
USD975665S1 (en) | 2019-05-17 | 2023-01-17 | Asm Ip Holding B.V. | Susceptor shaft |
USD947913S1 (en) | 2019-05-17 | 2022-04-05 | Asm Ip Holding B.V. | Susceptor shaft |
USD935572S1 (en) | 2019-05-24 | 2021-11-09 | Asm Ip Holding B.V. | Gas channel plate |
USD922229S1 (en) | 2019-06-05 | 2021-06-15 | Asm Ip Holding B.V. | Device for controlling a temperature of a gas supply unit |
KR20200141002A (ko) | 2019-06-06 | 2020-12-17 | 에이에스엠 아이피 홀딩 비.브이. | 배기 가스 분석을 포함한 기상 반응기 시스템을 사용하는 방법 |
KR20200143254A (ko) | 2019-06-11 | 2020-12-23 | 에이에스엠 아이피 홀딩 비.브이. | 개질 가스를 사용하여 전자 구조를 형성하는 방법, 상기 방법을 수행하기 위한 시스템, 및 상기 방법을 사용하여 형성되는 구조 |
USD944946S1 (en) | 2019-06-14 | 2022-03-01 | Asm Ip Holding B.V. | Shower plate |
USD931978S1 (en) | 2019-06-27 | 2021-09-28 | Asm Ip Holding B.V. | Showerhead vacuum transport |
KR20210005515A (ko) | 2019-07-03 | 2021-01-14 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치용 온도 제어 조립체 및 이를 사용하는 방법 |
JP2021015791A (ja) | 2019-07-09 | 2021-02-12 | エーエスエム アイピー ホールディング ビー.ブイ. | 同軸導波管を用いたプラズマ装置、基板処理方法 |
CN112216646A (zh) | 2019-07-10 | 2021-01-12 | Asm Ip私人控股有限公司 | 基板支撑组件及包括其的基板处理装置 |
KR20210010307A (ko) | 2019-07-16 | 2021-01-27 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
KR20210010816A (ko) | 2019-07-17 | 2021-01-28 | 에이에스엠 아이피 홀딩 비.브이. | 라디칼 보조 점화 플라즈마 시스템 및 방법 |
KR20210010820A (ko) | 2019-07-17 | 2021-01-28 | 에이에스엠 아이피 홀딩 비.브이. | 실리콘 게르마늄 구조를 형성하는 방법 |
US11643724B2 (en) | 2019-07-18 | 2023-05-09 | Asm Ip Holding B.V. | Method of forming structures using a neutral beam |
CN112242296A (zh) | 2019-07-19 | 2021-01-19 | Asm Ip私人控股有限公司 | 形成拓扑受控的无定形碳聚合物膜的方法 |
TW202113936A (zh) | 2019-07-29 | 2021-04-01 | 荷蘭商Asm Ip私人控股有限公司 | 用於利用n型摻雜物及/或替代摻雜物選擇性沉積以達成高摻雜物併入之方法 |
CN112309899A (zh) | 2019-07-30 | 2021-02-02 | Asm Ip私人控股有限公司 | 基板处理设备 |
CN112309900A (zh) | 2019-07-30 | 2021-02-02 | Asm Ip私人控股有限公司 | 基板处理设备 |
US11587815B2 (en) | 2019-07-31 | 2023-02-21 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
US11587814B2 (en) | 2019-07-31 | 2023-02-21 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
US11227782B2 (en) | 2019-07-31 | 2022-01-18 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
KR20210018759A (ko) | 2019-08-05 | 2021-02-18 | 에이에스엠 아이피 홀딩 비.브이. | 화학물질 공급원 용기를 위한 액체 레벨 센서 |
USD965044S1 (en) | 2019-08-19 | 2022-09-27 | Asm Ip Holding B.V. | Susceptor shaft |
USD965524S1 (en) | 2019-08-19 | 2022-10-04 | Asm Ip Holding B.V. | Susceptor support |
JP2021031769A (ja) | 2019-08-21 | 2021-03-01 | エーエスエム アイピー ホールディング ビー.ブイ. | 成膜原料混合ガス生成装置及び成膜装置 |
USD940837S1 (en) | 2019-08-22 | 2022-01-11 | Asm Ip Holding B.V. | Electrode |
KR20210024423A (ko) | 2019-08-22 | 2021-03-05 | 에이에스엠 아이피 홀딩 비.브이. | 홀을 구비한 구조체를 형성하기 위한 방법 |
USD930782S1 (en) | 2019-08-22 | 2021-09-14 | Asm Ip Holding B.V. | Gas distributor |
USD979506S1 (en) | 2019-08-22 | 2023-02-28 | Asm Ip Holding B.V. | Insulator |
USD949319S1 (en) | 2019-08-22 | 2022-04-19 | Asm Ip Holding B.V. | Exhaust duct |
KR20210024420A (ko) | 2019-08-23 | 2021-03-05 | 에이에스엠 아이피 홀딩 비.브이. | 비스(디에틸아미노)실란을 사용하여 peald에 의해 개선된 품질을 갖는 실리콘 산화물 막을 증착하기 위한 방법 |
US11286558B2 (en) | 2019-08-23 | 2022-03-29 | Asm Ip Holding B.V. | Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film |
KR20210029090A (ko) | 2019-09-04 | 2021-03-15 | 에이에스엠 아이피 홀딩 비.브이. | 희생 캡핑 층을 이용한 선택적 증착 방법 |
KR20210029663A (ko) | 2019-09-05 | 2021-03-16 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
US11562901B2 (en) | 2019-09-25 | 2023-01-24 | Asm Ip Holding B.V. | Substrate processing method |
CN112593212B (zh) | 2019-10-02 | 2023-12-22 | Asm Ip私人控股有限公司 | 通过循环等离子体增强沉积工艺形成拓扑选择性氧化硅膜的方法 |
TW202129060A (zh) | 2019-10-08 | 2021-08-01 | 荷蘭商Asm Ip控股公司 | 基板處理裝置、及基板處理方法 |
TW202115273A (zh) | 2019-10-10 | 2021-04-16 | 荷蘭商Asm Ip私人控股有限公司 | 形成光阻底層之方法及包括光阻底層之結構 |
KR20210045930A (ko) | 2019-10-16 | 2021-04-27 | 에이에스엠 아이피 홀딩 비.브이. | 실리콘 산화물의 토폴로지-선택적 막의 형성 방법 |
US11637014B2 (en) | 2019-10-17 | 2023-04-25 | Asm Ip Holding B.V. | Methods for selective deposition of doped semiconductor material |
KR20210047808A (ko) | 2019-10-21 | 2021-04-30 | 에이에스엠 아이피 홀딩 비.브이. | 막을 선택적으로 에칭하기 위한 장치 및 방법 |
US11646205B2 (en) | 2019-10-29 | 2023-05-09 | Asm Ip Holding B.V. | Methods of selectively forming n-type doped material on a surface, systems for selectively forming n-type doped material, and structures formed using same |
KR20210054983A (ko) | 2019-11-05 | 2021-05-14 | 에이에스엠 아이피 홀딩 비.브이. | 도핑된 반도체 층을 갖는 구조체 및 이를 형성하기 위한 방법 및 시스템 |
US11501968B2 (en) | 2019-11-15 | 2022-11-15 | Asm Ip Holding B.V. | Method for providing a semiconductor device with silicon filled gaps |
KR20210062561A (ko) | 2019-11-20 | 2021-05-31 | 에이에스엠 아이피 홀딩 비.브이. | 기판의 표면 상에 탄소 함유 물질을 증착하는 방법, 상기 방법을 사용하여 형성된 구조물, 및 상기 구조물을 형성하기 위한 시스템 |
US11450529B2 (en) | 2019-11-26 | 2022-09-20 | Asm Ip Holding B.V. | Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface |
CN112951697A (zh) | 2019-11-26 | 2021-06-11 | Asm Ip私人控股有限公司 | 基板处理设备 |
CN112885693A (zh) | 2019-11-29 | 2021-06-01 | Asm Ip私人控股有限公司 | 基板处理设备 |
CN112885692A (zh) | 2019-11-29 | 2021-06-01 | Asm Ip私人控股有限公司 | 基板处理设备 |
JP2021090042A (ja) | 2019-12-02 | 2021-06-10 | エーエスエム アイピー ホールディング ビー.ブイ. | 基板処理装置、基板処理方法 |
KR20210070898A (ko) | 2019-12-04 | 2021-06-15 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
CN112992667A (zh) | 2019-12-17 | 2021-06-18 | Asm Ip私人控股有限公司 | 形成氮化钒层的方法和包括氮化钒层的结构 |
US11527403B2 (en) | 2019-12-19 | 2022-12-13 | Asm Ip Holding B.V. | Methods for filling a gap feature on a substrate surface and related semiconductor structures |
KR20210095050A (ko) | 2020-01-20 | 2021-07-30 | 에이에스엠 아이피 홀딩 비.브이. | 박막 형성 방법 및 박막 표면 개질 방법 |
TW202130846A (zh) | 2020-02-03 | 2021-08-16 | 荷蘭商Asm Ip私人控股有限公司 | 形成包括釩或銦層的結構之方法 |
KR20210100010A (ko) | 2020-02-04 | 2021-08-13 | 에이에스엠 아이피 홀딩 비.브이. | 대형 물품의 투과율 측정을 위한 방법 및 장치 |
US11776846B2 (en) | 2020-02-07 | 2023-10-03 | Asm Ip Holding B.V. | Methods for depositing gap filling fluids and related systems and devices |
TW202146715A (zh) | 2020-02-17 | 2021-12-16 | 荷蘭商Asm Ip私人控股有限公司 | 用於生長磷摻雜矽層之方法及其系統 |
KR20210116240A (ko) | 2020-03-11 | 2021-09-27 | 에이에스엠 아이피 홀딩 비.브이. | 조절성 접합부를 갖는 기판 핸들링 장치 |
KR20210116249A (ko) | 2020-03-11 | 2021-09-27 | 에이에스엠 아이피 홀딩 비.브이. | 록아웃 태그아웃 어셈블리 및 시스템 그리고 이의 사용 방법 |
CN113394086A (zh) | 2020-03-12 | 2021-09-14 | Asm Ip私人控股有限公司 | 用于制造具有目标拓扑轮廓的层结构的方法 |
KR20210124042A (ko) | 2020-04-02 | 2021-10-14 | 에이에스엠 아이피 홀딩 비.브이. | 박막 형성 방법 |
TW202146689A (zh) | 2020-04-03 | 2021-12-16 | 荷蘭商Asm Ip控股公司 | 阻障層形成方法及半導體裝置的製造方法 |
TW202145344A (zh) | 2020-04-08 | 2021-12-01 | 荷蘭商Asm Ip私人控股有限公司 | 用於選擇性蝕刻氧化矽膜之設備及方法 |
US11821078B2 (en) | 2020-04-15 | 2023-11-21 | Asm Ip Holding B.V. | Method for forming precoat film and method for forming silicon-containing film |
KR20210132576A (ko) | 2020-04-24 | 2021-11-04 | 에이에스엠 아이피 홀딩 비.브이. | 바나듐 나이트라이드 함유 층을 형성하는 방법 및 이를 포함하는 구조 |
KR20210132600A (ko) | 2020-04-24 | 2021-11-04 | 에이에스엠 아이피 홀딩 비.브이. | 바나듐, 질소 및 추가 원소를 포함한 층을 증착하기 위한 방법 및 시스템 |
TW202146831A (zh) | 2020-04-24 | 2021-12-16 | 荷蘭商Asm Ip私人控股有限公司 | 垂直批式熔爐總成、及用於冷卻垂直批式熔爐之方法 |
KR20210134226A (ko) | 2020-04-29 | 2021-11-09 | 에이에스엠 아이피 홀딩 비.브이. | 고체 소스 전구체 용기 |
KR20210134869A (ko) | 2020-05-01 | 2021-11-11 | 에이에스엠 아이피 홀딩 비.브이. | Foup 핸들러를 이용한 foup의 빠른 교환 |
KR20210141379A (ko) | 2020-05-13 | 2021-11-23 | 에이에스엠 아이피 홀딩 비.브이. | 반응기 시스템용 레이저 정렬 고정구 |
KR20210143653A (ko) | 2020-05-19 | 2021-11-29 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
KR20210145078A (ko) | 2020-05-21 | 2021-12-01 | 에이에스엠 아이피 홀딩 비.브이. | 다수의 탄소 층을 포함한 구조체 및 이를 형성하고 사용하는 방법 |
TW202201602A (zh) | 2020-05-29 | 2022-01-01 | 荷蘭商Asm Ip私人控股有限公司 | 基板處理方法 |
TW202218133A (zh) | 2020-06-24 | 2022-05-01 | 荷蘭商Asm Ip私人控股有限公司 | 形成含矽層之方法 |
TW202217953A (zh) | 2020-06-30 | 2022-05-01 | 荷蘭商Asm Ip私人控股有限公司 | 基板處理方法 |
KR20220010438A (ko) | 2020-07-17 | 2022-01-25 | 에이에스엠 아이피 홀딩 비.브이. | 포토리소그래피에 사용하기 위한 구조체 및 방법 |
TW202204662A (zh) | 2020-07-20 | 2022-02-01 | 荷蘭商Asm Ip私人控股有限公司 | 用於沉積鉬層之方法及系統 |
US11725280B2 (en) | 2020-08-26 | 2023-08-15 | Asm Ip Holding B.V. | Method for forming metal silicon oxide and metal silicon oxynitride layers |
USD990534S1 (en) | 2020-09-11 | 2023-06-27 | Asm Ip Holding B.V. | Weighted lift pin |
USD1012873S1 (en) | 2020-09-24 | 2024-01-30 | Asm Ip Holding B.V. | Electrode for semiconductor processing apparatus |
TW202229613A (zh) | 2020-10-14 | 2022-08-01 | 荷蘭商Asm Ip私人控股有限公司 | 於階梯式結構上沉積材料的方法 |
TW202217037A (zh) | 2020-10-22 | 2022-05-01 | 荷蘭商Asm Ip私人控股有限公司 | 沉積釩金屬的方法、結構、裝置及沉積總成 |
TW202223136A (zh) | 2020-10-28 | 2022-06-16 | 荷蘭商Asm Ip私人控股有限公司 | 用於在基板上形成層之方法、及半導體處理系統 |
TW202235675A (zh) | 2020-11-30 | 2022-09-16 | 荷蘭商Asm Ip私人控股有限公司 | 注入器、及基板處理設備 |
US11946137B2 (en) | 2020-12-16 | 2024-04-02 | Asm Ip Holding B.V. | Runout and wobble measurement fixtures |
TW202231903A (zh) | 2020-12-22 | 2022-08-16 | 荷蘭商Asm Ip私人控股有限公司 | 過渡金屬沉積方法、過渡金屬層、用於沉積過渡金屬於基板上的沉積總成 |
USD980813S1 (en) | 2021-05-11 | 2023-03-14 | Asm Ip Holding B.V. | Gas flow control plate for substrate processing apparatus |
USD1023959S1 (en) | 2021-05-11 | 2024-04-23 | Asm Ip Holding B.V. | Electrode for substrate processing apparatus |
USD980814S1 (en) | 2021-05-11 | 2023-03-14 | Asm Ip Holding B.V. | Gas distributor for substrate processing apparatus |
USD981973S1 (en) | 2021-05-11 | 2023-03-28 | Asm Ip Holding B.V. | Reactor wall for substrate processing apparatus |
USD990441S1 (en) | 2021-09-07 | 2023-06-27 | Asm Ip Holding B.V. | Gas flow control plate |
Family Cites Families (202)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2883489A (en) * | 1954-12-06 | 1959-04-21 | Daystrom Inc | Encased electrical instrument |
US3232712A (en) * | 1962-08-16 | 1966-02-01 | Continental Lab Inc | Gas detector and analyzer |
GB1027719A (zh) * | 1963-12-02 | |||
US3568762A (en) * | 1967-05-23 | 1971-03-09 | Rca Corp | Heat pipe |
US3612851A (en) | 1970-04-17 | 1971-10-12 | Lewis Eng Co | Rotatably adjustable indicator instrument |
US3881962A (en) * | 1971-07-29 | 1975-05-06 | Gen Atomic Co | Thermoelectric generator including catalytic burner and cylindrical jacket containing heat exchange fluid |
GB1397435A (en) * | 1972-08-25 | 1975-06-11 | Hull F R | Regenerative vapour power plant |
US3931532A (en) * | 1974-03-19 | 1976-01-06 | The United States Of America As Represented By The United States National Aeronautics And Space Administration | Thermoelectric power system |
GB1525709A (en) | 1975-04-10 | 1978-09-20 | Chloride Silent Power Ltd | Thermo-electric generators |
US4125122A (en) | 1975-08-11 | 1978-11-14 | Stachurski John Z O | Direct energy conversion device |
US4026348A (en) * | 1975-10-06 | 1977-05-31 | Bell Telephone Laboratories, Incorporated | Heat pipe switch |
GR67600B (zh) * | 1979-06-29 | 1981-08-31 | Payot Jocelyne | |
US4370890A (en) * | 1980-10-06 | 1983-02-01 | Rosemount Inc. | Capacitive pressure transducer with isolated sensing diaphragm |
US4485670A (en) | 1981-02-13 | 1984-12-04 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Heat pipe cooled probe |
US4383801A (en) * | 1981-03-02 | 1983-05-17 | Pryor Dale H | Wind turbine with adjustable air foils |
US4389895A (en) * | 1981-07-27 | 1983-06-28 | Rosemount Inc. | Capacitance pressure sensor |
US4475047A (en) | 1982-04-29 | 1984-10-02 | At&T Bell Laboratories | Uninterruptible power supplies |
SE445389B (sv) * | 1982-06-28 | 1986-06-16 | Geotronics Ab | Forfarande och anordning for att erhalla metdata fran en kemisk process |
US4476853A (en) | 1982-09-28 | 1984-10-16 | Arbogast Clayton C | Solar energy recovery system |
GB2145876A (en) | 1983-08-24 | 1985-04-03 | Shlomo Beitner | DC power generation for telemetry and like equipment from geothermal energy |
DE3340834A1 (de) | 1983-11-11 | 1985-05-23 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Schaltungsanordnung zur konstanthaltung der temperaturabhaengigen empfindlichkeit eines differenzdruckmessgeraetes |
US4639542A (en) * | 1984-06-11 | 1987-01-27 | Ga Technologies Inc. | Modular thermoelectric conversion system |
GB8426964D0 (en) | 1984-10-25 | 1984-11-28 | Sieger Ltd | Adjusting circuit parameter |
US4651019A (en) * | 1984-11-16 | 1987-03-17 | Pennsylvania Power & Light Company | Dual fueled thermoelectric generator |
DE3503347A1 (de) * | 1985-02-01 | 1986-08-14 | Dr.Ing.H.C. F. Porsche Ag, 7000 Stuttgart | Vorrichtung zur drahtlosen messsignaluebertragung |
US4860232A (en) | 1987-04-22 | 1989-08-22 | Massachusetts Institute Of Technology | Digital technique for precise measurement of variable capacitance |
CH672368A5 (en) * | 1987-08-20 | 1989-11-15 | Rudolf Staempfli | Solar thermal power plant with expansive heat engine - utilises pressure increase of working fluid in thermal storage heater transmitting energy between two closed circuits |
US4878012A (en) | 1988-06-10 | 1989-10-31 | Rosemount Inc. | Charge balanced feedback transmitter |
US4977480A (en) | 1988-09-14 | 1990-12-11 | Fuji Koki Mfg. Co., Ltd. | Variable-capacitance type sensor and variable-capacitance type sensor system using the same |
DE3907209C1 (zh) | 1989-01-18 | 1990-03-01 | Danfoss A/S, Nordborg, Dk | |
US4982412A (en) * | 1989-03-13 | 1991-01-01 | Moore Push-Pin Company | Apparatus and method for counting a plurality of similar articles |
JPH0769750B2 (ja) * | 1989-09-08 | 1995-07-31 | 三菱電機株式会社 | 太陽電池電源系 |
SU1746056A1 (ru) | 1990-02-21 | 1992-07-07 | Рижский технический университет | Ветроэнергетическа установка |
USD331370S (en) | 1990-11-15 | 1992-12-01 | Titan Industries, Inc. | Programmable additive controller |
JP2753389B2 (ja) * | 1990-11-28 | 1998-05-20 | 株式会社日立製作所 | フィールドバス・システム |
US5094109A (en) * | 1990-12-06 | 1992-03-10 | Rosemount Inc. | Pressure transmitter with stress isolation depression |
RU1813916C (ru) | 1990-12-10 | 1993-05-07 | Ч.-КАБудревич | Ветродвигатель |
DE4124662A1 (de) | 1991-07-25 | 1993-01-28 | Fibronix Sensoren Gmbh | Relativdrucksensor |
US5329818A (en) | 1992-05-28 | 1994-07-19 | Rosemount Inc. | Correction of a pressure indication in a pressure transducer due to variations of an environmental condition |
USD345107S (en) * | 1992-06-01 | 1994-03-15 | Titan Industries, Inc. | Programmable additive controller |
US5313831A (en) * | 1992-07-31 | 1994-05-24 | Paul Beckman | Radial junction thermal flowmeter |
JPH08557B2 (ja) * | 1992-10-30 | 1996-01-10 | 川崎重工業株式会社 | 深海用耐圧殻入り熱機関発電システムの非常用排熱装置 |
US5506757A (en) * | 1993-06-14 | 1996-04-09 | Macsema, Inc. | Compact electronic data module with nonvolatile memory |
US5412535A (en) * | 1993-08-24 | 1995-05-02 | Convex Computer Corporation | Apparatus and method for cooling electronic devices |
DE69423105T2 (de) * | 1993-09-07 | 2000-11-09 | Rosemount Inc | Messumformer für mehrere variablen |
US5606513A (en) * | 1993-09-20 | 1997-02-25 | Rosemount Inc. | Transmitter having input for receiving a process variable from a remote sensor |
JP3111816B2 (ja) | 1993-10-08 | 2000-11-27 | 株式会社日立製作所 | プロセス状態検出装置 |
US5642301A (en) * | 1994-01-25 | 1997-06-24 | Rosemount Inc. | Transmitter with improved compensation |
US5531936A (en) * | 1994-08-31 | 1996-07-02 | Board Of Trustees Operating Michigan State University | Alkali metal quaternary chalcogenides and process for the preparation thereof |
GB2293446A (en) | 1994-09-17 | 1996-03-27 | Liang Chung Lee | Cooling assembly |
DE69529180T2 (de) | 1994-10-24 | 2003-09-25 | Fisher Rosemount Systems Inc | Feldgeräte zur Verwendung in einem verteilten Steuerungssystem |
US5793963A (en) | 1994-10-24 | 1998-08-11 | Fisher Rosemount Systems, Inc. | Apparatus for providing non-redundant secondary access to field devices in a distributed control system |
US5656782A (en) | 1994-12-06 | 1997-08-12 | The Foxboro Company | Pressure sealed housing apparatus and methods |
US5637802A (en) * | 1995-02-28 | 1997-06-10 | Rosemount Inc. | Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates |
US5644185A (en) | 1995-06-19 | 1997-07-01 | Miller; Joel V. | Multi stage thermoelectric power generation using an ammonia absorption refrigeration cycle and thermoelectric elements at numerous locations in the cycle |
US5705978A (en) * | 1995-09-29 | 1998-01-06 | Rosemount Inc. | Process control transmitter |
JPH09130289A (ja) | 1995-10-31 | 1997-05-16 | Mitsubishi Electric Corp | アナログ携帯通信機 |
DE19608310C1 (de) | 1996-02-22 | 1997-07-17 | Hartmann & Braun Ag | Differenzdruckmeßumformereinheit mit einem Überlastschutzsystem |
US5665899A (en) | 1996-02-23 | 1997-09-09 | Rosemount Inc. | Pressure sensor diagnostics in a process transmitter |
US6907383B2 (en) * | 1996-03-28 | 2005-06-14 | Rosemount Inc. | Flow diagnostic system |
US7949495B2 (en) * | 1996-03-28 | 2011-05-24 | Rosemount, Inc. | Process variable transmitter with diagnostics |
FR2747238B1 (fr) | 1996-04-04 | 1998-07-10 | France Etat | Generateur thermoelectrique |
US5811201A (en) | 1996-08-16 | 1998-09-22 | Southern California Edison Company | Power generation system utilizing turbine and fuel cell |
ES2127122B1 (es) * | 1996-09-02 | 1999-12-16 | Blaquez Navarro Vicente | Sistema mejorado electronico autonomo de monitorizacion para purgadores, valvulas e instalaciones en tiempo real. |
US5803604A (en) * | 1996-09-30 | 1998-09-08 | Exergen Corporation | Thermocouple transmitter |
US5954526A (en) | 1996-10-04 | 1999-09-21 | Rosemount Inc. | Process control transmitter with electrical feedthrough assembly |
US5851083A (en) | 1996-10-04 | 1998-12-22 | Rosemount Inc. | Microwave level gauge having an adapter with a thermal barrier |
FR2758009B1 (fr) | 1996-12-26 | 1999-03-19 | France Etat | Generateur thermoelectrique sous-marin a modules thermoelectriques disposes en manchons |
AU726789B2 (en) * | 1997-02-12 | 2000-11-23 | Siemens Aktiengesellschaft | Arrangement and method for generating coded high-frequency signals |
JP3633180B2 (ja) * | 1997-02-14 | 2005-03-30 | 株式会社日立製作所 | 遠隔監視システム |
US6458319B1 (en) | 1997-03-18 | 2002-10-01 | California Institute Of Technology | High performance P-type thermoelectric materials and methods of preparation |
US6013204A (en) * | 1997-03-28 | 2000-01-11 | Board Of Trustees Operating Michigan State University | Alkali metal chalcogenides of bismuth alone or with antimony |
US7068991B2 (en) * | 1997-05-09 | 2006-06-27 | Parise Ronald J | Remote power recharge for electronic equipment |
US6792259B1 (en) * | 1997-05-09 | 2004-09-14 | Ronald J. Parise | Remote power communication system and method thereof |
US5872494A (en) * | 1997-06-27 | 1999-02-16 | Rosemount Inc. | Level gage waveguide process seal having wavelength-based dimensions |
RU2131934C1 (ru) * | 1997-09-01 | 1999-06-20 | Санков Олег Николаевич | Нагревательная установка для обработки материалов |
US6282247B1 (en) * | 1997-09-12 | 2001-08-28 | Ericsson Inc. | Method and apparatus for digital compensation of radio distortion over a wide range of temperatures |
US6437692B1 (en) | 1998-06-22 | 2002-08-20 | Statsignal Systems, Inc. | System and method for monitoring and controlling remote devices |
US6891838B1 (en) * | 1998-06-22 | 2005-05-10 | Statsignal Ipc, Llc | System and method for monitoring and controlling residential devices |
CN1184461C (zh) * | 1998-06-26 | 2005-01-12 | 德士古发展公司 | 用于气化工艺中的热电偶 |
US6360277B1 (en) * | 1998-07-22 | 2002-03-19 | Crydom Corporation | Addressable intelligent relay |
US6480699B1 (en) * | 1998-08-28 | 2002-11-12 | Woodtoga Holdings Company | Stand-alone device for transmitting a wireless signal containing data from a memory or a sensor |
US6405139B1 (en) * | 1998-09-15 | 2002-06-11 | Bently Nevada Corporation | System for monitoring plant assets including machinery |
US6312617B1 (en) | 1998-10-13 | 2001-11-06 | Board Of Trustees Operating Michigan State University | Conductive isostructural compounds |
US7640007B2 (en) | 1999-02-12 | 2009-12-29 | Fisher-Rosemount Systems, Inc. | Wireless handheld communicator in a process control environment |
US6127739A (en) | 1999-03-22 | 2000-10-03 | Appa; Kari | Jet assisted counter rotating wind turbine |
US6783167B2 (en) * | 1999-03-24 | 2004-08-31 | Donnelly Corporation | Safety system for a closed compartment of a vehicle |
FI111760B (fi) * | 1999-04-16 | 2003-09-15 | Metso Automation Oy | Kenttälaitteen langaton ohjaus teollisuusprosessissa |
JP2000321361A (ja) | 1999-05-07 | 2000-11-24 | Kubota Corp | 通信装置 |
US6295875B1 (en) | 1999-05-14 | 2001-10-02 | Rosemount Inc. | Process pressure measurement devices with improved error compensation |
US6508131B2 (en) * | 1999-05-14 | 2003-01-21 | Rosemount Inc. | Process sensor module having a single ungrounded input/output conductor |
US7064671B2 (en) | 2000-06-23 | 2006-06-20 | Fisher Controls International Llc | Low power regulator system and method |
US6255010B1 (en) | 1999-07-19 | 2001-07-03 | Siemens Westinghouse Power Corporation | Single module pressurized fuel cell turbine generator system |
US6385972B1 (en) * | 1999-08-30 | 2002-05-14 | Oscar Lee Fellows | Thermoacoustic resonator |
US6667594B2 (en) | 1999-11-23 | 2003-12-23 | Honeywell International Inc. | Determination of maximum travel of linear actuator |
RU2168062C1 (ru) | 1999-12-07 | 2001-05-27 | Открытое акционерное общество "Всероссийский научно-исследовательский институт гидротехники им. Б.Е. Веденеева" | Ветрогенератор |
US6934862B2 (en) | 2000-01-07 | 2005-08-23 | Robertshaw Controls Company | Appliance retrofit monitoring device with a memory storing an electronic signature |
JP2001222787A (ja) | 2000-02-07 | 2001-08-17 | Mitsui Eng & Shipbuild Co Ltd | 回転ドラム用計測システム |
DE10014272B4 (de) * | 2000-03-22 | 2008-06-05 | Endress + Hauser Gmbh + Co. Kg | Feldgerät, sowie Verfahren zum Umprogrammieren eines Feldgerätes |
US6744814B1 (en) * | 2000-03-31 | 2004-06-01 | Agere Systems Inc. | Method and apparatus for reduced state sequence estimation with tap-selectable decision-feedback |
AT410041B (de) | 2000-04-17 | 2003-01-27 | Voest Alpine Ind Anlagen | Verfahren und einrichtung zur aufnahme von messdaten in einem hüttenwerk |
US6441747B1 (en) | 2000-04-18 | 2002-08-27 | Motorola, Inc. | Wireless system protocol for telemetry monitoring |
US6574515B1 (en) * | 2000-05-12 | 2003-06-03 | Rosemount Inc. | Two-wire field-mounted process device |
US6326764B1 (en) | 2000-06-05 | 2001-12-04 | Clement Virtudes | Portable solar-powered CD player and electrical generator |
FI114507B (fi) * | 2000-07-07 | 2004-10-29 | Metso Automation Oy | Laitediagnostiikkajärjestelmä |
JP3553001B2 (ja) | 2000-08-04 | 2004-08-11 | 高圧ガス保安協会 | ガス監視システム |
EP1202145B1 (en) | 2000-10-27 | 2005-02-09 | Invensys Systems, Inc. | Field device with a transmitter and/ or receiver for wireless data communication |
ATE298962T1 (de) | 2001-01-12 | 2005-07-15 | Vector Informatik Gmbh | Verfahren und vorrichtung zur relevanzprüfung eines kennzeichners |
US6686831B2 (en) | 2001-01-23 | 2004-02-03 | Invensys Systems, Inc. | Variable power control for process control instruments |
US6728603B2 (en) | 2001-02-08 | 2004-04-27 | Electronic Data Systems Corporation | System and method for managing wireless vehicular communications |
US6625990B2 (en) | 2001-02-09 | 2003-09-30 | Bsst Llc | Thermoelectric power generation systems |
JP3394996B2 (ja) | 2001-03-09 | 2003-04-07 | 独立行政法人産業技術総合研究所 | 最大電力動作点追尾方法及びその装置 |
DE20107112U1 (de) * | 2001-04-25 | 2001-07-05 | Abb Patent Gmbh | Einrichtung zur Energieversorgung von Feldgeräten |
DE10125058B4 (de) * | 2001-05-22 | 2014-02-27 | Enocean Gmbh | Thermisch speisbarer Sender und Sensorsystem |
JP2002369554A (ja) | 2001-06-06 | 2002-12-20 | Nec Tokin Corp | 標示装置 |
DE10128447A1 (de) | 2001-06-12 | 2003-01-02 | Abb Patent Gmbh | Elektropneumatischer Stellantrieb |
US6564859B2 (en) * | 2001-06-27 | 2003-05-20 | Intel Corporation | Efficient heat pumping from mobile platforms using on platform assembled heat pipe |
US20030012563A1 (en) * | 2001-07-10 | 2003-01-16 | Darrell Neugebauer | Space heater with remote control |
JP2003051894A (ja) | 2001-08-08 | 2003-02-21 | Mitsubishi Electric Corp | プラントの作業管理システム |
US6781249B2 (en) * | 2001-08-29 | 2004-08-24 | Hewlett-Packard Development Company, L.P. | Retrofittable power supply |
EP1293853A1 (de) | 2001-09-12 | 2003-03-19 | ENDRESS + HAUSER WETZER GmbH + Co. KG | Funkmodul für Feldgerät |
US20030134161A1 (en) | 2001-09-20 | 2003-07-17 | Gore Makarand P. | Protective container with preventative agent therein |
US6995685B2 (en) * | 2001-09-25 | 2006-02-07 | Landis+Gyr, Inc. | Utility meter power arrangements and methods |
JP4114334B2 (ja) | 2001-10-09 | 2008-07-09 | 株式会社ジェイテクト | 転がり軸受 |
JP3815603B2 (ja) | 2001-10-29 | 2006-08-30 | 横河電機株式会社 | 通信システム |
EP1440302A2 (en) * | 2001-11-01 | 2004-07-28 | The Johns Hopkins University | Techniques for monitoring health of vessels containing fluids |
JP2003149058A (ja) * | 2001-11-14 | 2003-05-21 | Toshiba Corp | 温度センサ及びプラント温度計測装置 |
JP2003168182A (ja) | 2001-12-04 | 2003-06-13 | Nsk Ltd | ワイヤレスセンサ |
DE60237401D1 (de) * | 2001-12-21 | 2010-09-30 | Bae Systems Plc | Sensorsystem |
US7002800B2 (en) * | 2002-01-25 | 2006-02-21 | Lockheed Martin Corporation | Integrated power and cooling architecture |
AU2003230599A1 (en) | 2002-03-06 | 2003-09-22 | Automatika, Inc | Conduit network system |
US7035773B2 (en) | 2002-03-06 | 2006-04-25 | Fisher-Rosemount Systems, Inc. | Appendable system and devices for data acquisition, analysis and control |
US6839546B2 (en) * | 2002-04-22 | 2005-01-04 | Rosemount Inc. | Process transmitter with wireless communication link |
AU2003225271A1 (en) | 2002-04-30 | 2003-11-17 | Chevron U.S.A. Inc. | Temporary wireless sensor network system |
US20040203984A1 (en) * | 2002-06-11 | 2004-10-14 | Tai-Her Yang | Wireless information device with its transmission power lever adjustable |
JP2004021877A (ja) | 2002-06-20 | 2004-01-22 | Yokogawa Electric Corp | フィールド機器 |
US6843110B2 (en) * | 2002-06-25 | 2005-01-18 | Fluid Components International Llc | Method and apparatus for validating the accuracy of a flowmeter |
CA2491018C (en) | 2002-06-28 | 2013-06-18 | Advanced Bionics Corporation | Microstimulator having self-contained power source and bi-directional telemetry system |
WO2004006301A2 (en) | 2002-07-05 | 2004-01-15 | Golden Solar Energy, Inc. | Apparatus, system, and method of diagnosing individual photovoltaic cells |
EP1547126A2 (en) * | 2002-08-05 | 2005-06-29 | The Research Foundation Of State University Of New York | System and method for manufacturing embedded conformal electronics |
US6838859B2 (en) * | 2002-08-13 | 2005-01-04 | Reza H. Shah | Device for increasing power of extremely low DC voltage |
US7063537B2 (en) * | 2002-08-15 | 2006-06-20 | Smar Research Corporation | Rotatable assemblies and methods of securing such assemblies |
AU2002357654A1 (en) * | 2002-09-13 | 2004-04-30 | Proton Energy Systems, Inc. | Method and system for balanced control of backup power |
US6910332B2 (en) * | 2002-10-15 | 2005-06-28 | Oscar Lee Fellows | Thermoacoustic engine-generator |
US7440735B2 (en) | 2002-10-23 | 2008-10-21 | Rosemount Inc. | Virtual wireless transmitter |
US20040081872A1 (en) * | 2002-10-28 | 2004-04-29 | Herman Gregory S. | Fuel cell stack with heat exchanger |
US6926440B2 (en) * | 2002-11-01 | 2005-08-09 | The Boeing Company | Infrared temperature sensors for solar panel |
CN1251953C (zh) | 2002-11-12 | 2006-04-19 | 三菱电机株式会社 | 电梯用绳索及电梯装置 |
JP2004208476A (ja) | 2002-12-26 | 2004-07-22 | Toyota Motor Corp | 排熱発電装置 |
US20040159235A1 (en) * | 2003-02-19 | 2004-08-19 | Marganski Paul J. | Low pressure drop canister for fixed bed scrubber applications and method of using same |
AU2003212340A1 (en) * | 2003-03-12 | 2004-09-30 | Abb Research Ltd. | Arrangement and method for continuously supplying electric power to a field device in a technical system |
US6904476B2 (en) | 2003-04-04 | 2005-06-07 | Rosemount Inc. | Transmitter with dual protocol interface |
US7326851B2 (en) | 2003-04-11 | 2008-02-05 | Basf Aktiengesellschaft | Pb-Ge-Te-compounds for thermoelectric generators or Peltier arrangements |
US6891477B2 (en) * | 2003-04-23 | 2005-05-10 | Baker Hughes Incorporated | Apparatus and methods for remote monitoring of flow conduits |
US20040214543A1 (en) * | 2003-04-28 | 2004-10-28 | Yasuo Osone | Variable capacitor system, microswitch and transmitter-receiver |
JP2004350479A (ja) | 2003-05-26 | 2004-12-09 | Hitachi Powdered Metals Co Ltd | 熱電変換発電ユニットおよびこの熱電変換発電ユニットを備えるトンネル型炉 |
US7272454B2 (en) | 2003-06-05 | 2007-09-18 | Fisher-Rosemount Systems, Inc. | Multiple-input/multiple-output control blocks with non-linear predictive capabilities |
US7436797B2 (en) | 2003-06-18 | 2008-10-14 | Fisher-Rosemount Systems, Inc. | Wireless architecture and support for process control systems |
US7460865B2 (en) | 2003-06-18 | 2008-12-02 | Fisher-Rosemount Systems, Inc. | Self-configuring communication networks for use with process control systems |
US7275213B2 (en) * | 2003-08-11 | 2007-09-25 | Ricoh Company, Ltd. | Configuring a graphical user interface on a multifunction peripheral |
US20050046595A1 (en) * | 2003-08-26 | 2005-03-03 | Mr.John Blyth | Solar powered sign annunciator |
US8481843B2 (en) * | 2003-09-12 | 2013-07-09 | Board Of Trustees Operating Michigan State University | Silver-containing p-type semiconductor |
US7627441B2 (en) * | 2003-09-30 | 2009-12-01 | Rosemount Inc. | Process device with vibration based diagnostics |
US6932561B2 (en) * | 2003-10-01 | 2005-08-23 | Wafermasters, Inc. | Power generation system |
US7508671B2 (en) * | 2003-10-10 | 2009-03-24 | Intel Corporation | Computer system having controlled cooling |
US20050082949A1 (en) * | 2003-10-21 | 2005-04-21 | Michio Tsujiura | Piezoelectric generator |
US7655331B2 (en) * | 2003-12-01 | 2010-02-02 | Societe Bic | Fuel cell supply including information storage device and control system |
US8455751B2 (en) * | 2003-12-02 | 2013-06-04 | Battelle Memorial Institute | Thermoelectric devices and applications for the same |
US20050139250A1 (en) * | 2003-12-02 | 2005-06-30 | Battelle Memorial Institute | Thermoelectric devices and applications for the same |
US7330695B2 (en) * | 2003-12-12 | 2008-02-12 | Rosemount, Inc. | Bus powered wireless transmitter |
US7234084B2 (en) | 2004-02-18 | 2007-06-19 | Emerson Process Management | System and method for associating a DLPDU received by an interface chip with a data measurement made by an external circuit |
US6984899B1 (en) * | 2004-03-01 | 2006-01-10 | The United States Of America As Represented By The Secretary Of The Navy | Wind dam electric generator and method |
WO2005086331A2 (en) | 2004-03-02 | 2005-09-15 | Rosemount, Inc. | Process device with improved power generation |
US20050201349A1 (en) | 2004-03-15 | 2005-09-15 | Honeywell International Inc. | Redundant wireless node network with coordinated receiver diversity |
US7515977B2 (en) | 2004-03-30 | 2009-04-07 | Fisher-Rosemount Systems, Inc. | Integrated configuration system for use in a process plant |
US6971274B2 (en) * | 2004-04-02 | 2005-12-06 | Sierra Instruments, Inc. | Immersible thermal mass flow meter |
US8538560B2 (en) | 2004-04-29 | 2013-09-17 | Rosemount Inc. | Wireless power and communication unit for process field devices |
US7620409B2 (en) | 2004-06-17 | 2009-11-17 | Honeywell International Inc. | Wireless communication system with channel hopping and redundant connectivity |
US7262693B2 (en) | 2004-06-28 | 2007-08-28 | Rosemount Inc. | Process field device with radio frequency communication |
US8929228B2 (en) * | 2004-07-01 | 2015-01-06 | Honeywell International Inc. | Latency controlled redundant routing |
US20060063522A1 (en) * | 2004-09-21 | 2006-03-23 | Mcfarland Norman R | Self-powering automated building control components |
KR20060027578A (ko) * | 2004-09-23 | 2006-03-28 | 삼성에스디아이 주식회사 | 이차 전지 모듈 온도 제어 시스템 |
US20060077917A1 (en) * | 2004-10-07 | 2006-04-13 | Honeywell International Inc. | Architecture and method for enabling use of wireless devices in industrial control |
JP4792851B2 (ja) * | 2004-11-01 | 2011-10-12 | 横河電機株式会社 | フィールド機器 |
CA2588909A1 (en) * | 2004-11-24 | 2006-06-22 | Abbott Laboratories | Chromanylurea compounds that inhibit vanilloid receptor subtype 1 (vr1) receptor and uses thereof |
US7680460B2 (en) | 2005-01-03 | 2010-03-16 | Rosemount Inc. | Wireless process field device diagnostics |
US7173343B2 (en) * | 2005-01-28 | 2007-02-06 | Moshe Kugel | EMI energy harvester |
US9184364B2 (en) * | 2005-03-02 | 2015-11-10 | Rosemount Inc. | Pipeline thermoelectric generator assembly |
US20060227729A1 (en) | 2005-04-12 | 2006-10-12 | Honeywell International Inc. | Wireless communication system with collision avoidance protocol |
US7649138B2 (en) | 2005-05-25 | 2010-01-19 | Hi-Z Technology, Inc. | Thermoelectric device with surface conforming heat conductor |
US7742394B2 (en) | 2005-06-03 | 2010-06-22 | Honeywell International Inc. | Redundantly connected wireless sensor networking methods |
US7848223B2 (en) | 2005-06-03 | 2010-12-07 | Honeywell International Inc. | Redundantly connected wireless sensor networking methods |
KR100635405B1 (ko) * | 2005-06-10 | 2006-10-19 | 한국과학기술연구원 | 마이크로 발전기 |
US8463319B2 (en) | 2005-06-17 | 2013-06-11 | Honeywell International Inc. | Wireless application installation, configuration and management tool |
WO2007002847A2 (en) * | 2005-06-28 | 2007-01-04 | Community Power Corporation | Method and apparatus for a self-cleaning filter |
US7271679B2 (en) | 2005-06-30 | 2007-09-18 | Intermec Ip Corp. | Apparatus and method to facilitate wireless communications of automatic data collection devices in potentially hazardous environments |
US7801094B2 (en) * | 2005-08-08 | 2010-09-21 | Honeywell International Inc. | Integrated infrastructure supporting multiple wireless devices |
US20070030816A1 (en) * | 2005-08-08 | 2007-02-08 | Honeywell International Inc. | Data compression and abnormal situation detection in a wireless sensor network |
US7848827B2 (en) | 2006-03-31 | 2010-12-07 | Honeywell International Inc. | Apparatus, system, and method for wireless diagnostics |
US8204078B2 (en) | 2006-03-31 | 2012-06-19 | Honeywell International Inc. | Apparatus, system, and method for integration of wireless devices with a distributed control system |
KR100744902B1 (ko) * | 2006-05-24 | 2007-08-01 | 삼성전기주식회사 | 휴대 무선 조작기 |
US7644633B2 (en) * | 2006-12-18 | 2010-01-12 | Rosemount Inc. | Vortex flowmeter with temperature compensation |
-
2005
- 2005-03-02 WO PCT/US2005/006596 patent/WO2005086331A2/en active Application Filing
- 2005-03-02 JP JP2007501903A patent/JP5058785B2/ja not_active Expired - Fee Related
- 2005-03-02 DE DE602005018749T patent/DE602005018749D1/de active Active
- 2005-03-02 CA CA2552615A patent/CA2552615C/en active Active
- 2005-03-02 EP EP05724190A patent/EP1721067B1/en active Active
- 2005-03-02 CN CN200580006438XA patent/CN1954138B/zh active Active
- 2005-03-02 RU RU2006134646/06A patent/RU2347921C2/ru not_active IP Right Cessation
- 2005-03-02 US US11/070,860 patent/US7957708B2/en active Active
Cited By (4)
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CN101821686B (zh) * | 2007-10-05 | 2017-02-08 | 罗斯蒙特公司 | 用于现场设备的rf适配器 |
CN102187515A (zh) * | 2008-10-13 | 2011-09-14 | 罗斯蒙德公司 | 具有结实天线和转动止动件的无线现场设备 |
CN102088260A (zh) * | 2009-12-02 | 2011-06-08 | Abb技术股份公司 | 自主的温度发送器 |
CN105069981A (zh) * | 2015-07-15 | 2015-11-18 | 北京依米康科技发展有限公司 | 利用化合物溶于水吸热和/或放热的热电水灾报警装置 |
Also Published As
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CN1954138B (zh) | 2011-02-16 |
RU2006134646A (ru) | 2008-04-10 |
WO2005086331A3 (en) | 2006-09-21 |
EP1721067A2 (en) | 2006-11-15 |
WO2005086331A2 (en) | 2005-09-15 |
RU2347921C2 (ru) | 2009-02-27 |
US20050208908A1 (en) | 2005-09-22 |
CA2552615A1 (en) | 2005-09-15 |
DE602005018749D1 (zh) | 2010-02-25 |
US7957708B2 (en) | 2011-06-07 |
JP5058785B2 (ja) | 2012-10-24 |
CA2552615C (en) | 2014-08-26 |
JP2007526740A (ja) | 2007-09-13 |
EP1721067B1 (en) | 2010-01-06 |
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