CN1841863A - Laser oscillation device - Google Patents
Laser oscillation device Download PDFInfo
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- CN1841863A CN1841863A CN 200610071970 CN200610071970A CN1841863A CN 1841863 A CN1841863 A CN 1841863A CN 200610071970 CN200610071970 CN 200610071970 CN 200610071970 A CN200610071970 A CN 200610071970A CN 1841863 A CN1841863 A CN 1841863A
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Abstract
A laser oscillation device, comprising a laser crystal which is an optical crystal for oscillating an incident excitation light to a fundamental wave, a wavelength conversion crystal for second harmonic wave which is an optical crystal for converting the fundamental wave to a second harmonic wave, and a reflection film formed on an exit end surface of the laser crystal or on an incident end surface of the wavelength conversion crystal for second harmonic wave, wherein the reflection film reflects the second harmonic wave, and the second harmonic wave does not pass through the laser crystal.
Description
Technical field
The present invention relates to the laser oscillation apparatus of semiconductor laser as driving source.
Background technology
Shown in Figure 19 is a LD pumped solid-state laser device example, 1 oscillation wavelength as laser oscillation apparatus 1.
In Figure 19,2 is luminous component, and 3 is the photoresonance part.Above-mentioned luminous component 2 comprises LD photophore 4 and collector lens 5, above-mentioned photoresonance part 3 comprises: the 1st optical crystal (laser crystal 8), the 2nd optical crystal (nonlinear optical crystal (NLO) (2 subharmonic with Wavelength conversion crystal 9) that are formed with the 1st dielectric reflectance coating 7), be formed with the concave mirror 12 of the 2nd dielectric reflectance coating 11, make laser beam pumping (pumping) in above-mentioned photoresonance part 3, and laser beam is resonated, it is amplified back output.In addition, use Nd:YVO4 as above-mentioned laser crystal 8, use KTP (KTiOP4, titanium phosphate potassium) etc. are as above-mentioned 2 subharmonic Wavelength conversion crystal 9.
Above-mentioned laser oscillation apparatus 1 is for example to be used to penetrate that wavelength is the device of the laser beam of 809nm, and uses the above-mentioned LD photophore 4 as semiconductor laser.In addition, this LD photophore 4 has the function of the pump light generating means that produces exciting light.Above-mentioned laser oscillation apparatus 1 is not limited to semiconductor laser, as long as can produce laser beam, can adopt any light supply apparatus.
Above-mentioned laser crystal 8 is used for the amplification of light.Use the Nd:YVO4 of vibration spectral line in this laser crystal 8 as 1064nm.In addition, can also use the YAG (yttrium-aluminium-garnet) that is doped with the Nd3+ ion etc., YAG has vibration spectral lines such as 946nm, 1064nm, 1319nm.In addition, can also use the vibration spectral line is the Ti (Sapphire: sapphire) etc. of 700～900nm.
Above-mentioned LD photophore 4 one sides at above-mentioned laser crystal 8 are formed with above-mentioned the 1st dielectric reflectance coating 7.The 1st dielectric reflectance coating 7 is high transmission for the laser beam that above-mentioned LD photophore 4 is sent, and for the only high reflection of the oscillation wavelength of above-mentioned laser crystal 8, also be high reflection for 2 subharmonic (SECOND HARMONIC GENERATION:SHG) simultaneously.
Above-mentioned concave mirror 12 constitutes mutually opposed to each other with above-mentioned laser crystal 8, and laser crystal 8 sides of above-mentioned concave mirror 12 are processed to have the concave surface spherical mirror shape of suitable radius, and are formed with above-mentioned the 2nd dielectric reflectance coating 11.The 2nd dielectric reflectance coating 11 is high reflections for the oscillation wavelength of above-mentioned laser crystal 8, is high transmissions for 2 subharmonic.
As mentioned above, the 1st dielectric reflectance coating 7 of above-mentioned laser crystal 8 makes up with the 2nd dielectric reflectance coating 11 of above-mentioned concave mirror 12, make laser beam that above-mentioned LD photophore 4 sends through the pumping in above-mentioned optically focused crystal 8 of above-mentioned collector lens 5, then light between the 1st dielectric reflectance coating 7 of this laser crystal 8 and above-mentioned the 2nd dielectric reflectance coating 11 back and forth, and light is enclosed in therebetween for a long time, thereby can make photoresonance and amplification.
Above-mentioned 2 subharmonic have been inserted in the photoresonance part 3 that constitutes by the 2nd dielectric reflectance coating 11 of the 1st dielectric reflectance coating 7 of above-mentioned laser crystal 8 and above-mentioned concave mirror 12 with Wavelength conversion crystal 9.When to this 2 subharmonic during with the stronger coherent light of incident in Wavelength conversion crystal 9 such as laser beam, producing light frequency is 2 subharmonic of 2 frequencys multiplication.The generation of this 2 subharmonic is called as SECOND HARMONIC GENERATION.Therefore, above-mentioned laser oscillation apparatus 1 ejaculation wavelength is the laser beam (green laser light) of 532nm.
In addition, the solid-state laser apparatus that produces 2 subharmonic has the spy to open disclosed device in the flat 5-145160 communique.
In above-mentioned laser oscillation apparatus 1 and the flat 5-145160 communique of Te Kai, above-mentioned laser crystal 8 (Nd:YVO4) is owing to being 1 character with wave plate (wave plate), produces phase difference when 2 subharmonic are inner by above-mentioned laser crystal 8 polarization characteristic is changed.Therefore, existing laser oscillation apparatus 1 penetrates the laser beam of elliptical polarization.
Some laser aid requires the laser beam of linear polarization, for example in Electronic Distance Meters, obtains distance according to reference light and catoptrical phase difference, when the laser beam itself that penetrates has phase difference, and the problem that existence can't correctly be found range.
Summary of the invention
The laser oscillation apparatus that the object of the present invention is to provide a kind of inner polarization characteristic not change.
In order to reach above-mentioned purpose, laser oscillation apparatus of the present invention comprises: be the laser crystal of first-harmonic as optical crystal and with the vibration of the exciting light of incident; Above-mentioned first-harmonic is transformed to 2 subharmonic Wavelength conversion crystals of 2 subharmonic; And the reflectance coating that on the ejaculation end face of above-mentioned laser crystal or the incident end face of above-mentioned 2 subharmonic with Wavelength conversion crystal, forms, this reflectance coating reflects above-mentioned 2 subharmonic, and this 2 subharmonic inside by above-mentioned laser crystal.In addition, laser oscillation apparatus of the present invention is kept the polarization of above-mentioned 2 subharmonic and is penetrated 2 subharmonic by the reflectance coating that above-mentioned 2 subharmonic of reflection are set on the ejaculation end face of above-mentioned laser crystal or the incident end face of above-mentioned 2 subharmonic with Wavelength conversion crystal.Laser oscillation apparatus of the present invention also is provided with 3 subharmonic Wavelength conversion crystals at above-mentioned 2 subharmonic on Wavelength conversion crystal, above-mentioned 2 subharmonic are transformed to 3 subharmonic by above-mentioned 3 subharmonic with Wavelength conversion crystal, and have formed the reflectance coating that reflects above-mentioned 3 subharmonic at above-mentioned 2 subharmonic on the ejaculation end face of Wavelength conversion crystal or the incident end face of above-mentioned 3 subharmonic with Wavelength conversion crystal.Laser oscillation apparatus of the present invention also is provided with the optics with optical effect between required crystal.Laser oscillation apparatus of the present invention also engages optical crystal and integrated.Laser oscillation apparatus of the present invention also utilizes bonding agent that adjacent above-mentioned optical crystal is joined together, the optical crystal that is positioned at emitting side is the optical crystal that incident light is transformed to high order harmonic component, is positioned on the incident end face of optical crystal of above-mentioned emitting side to have formed the reflectance coating that reflects above-mentioned high order harmonic component.In addition, laser oscillation apparatus of the present invention has also formed the reflectance coating that reflects above-mentioned high order harmonic component on the incident end face of the optical crystal that is positioned at above-mentioned emitting side, keeps the polarization of above-mentioned high order harmonic component and penetrates above-mentioned high order harmonic component.
According to the present invention, comprising: be the laser crystal of first-harmonic as optical crystal and with the vibration of the exciting light of incident; Above-mentioned first-harmonic is transformed to 2 subharmonic Wavelength conversion crystals of 2 subharmonic; And the reflectance coating that on the ejaculation end face of above-mentioned laser crystal or the incident end face of above-mentioned 2 subharmonic, forms with Wavelength conversion crystal, this reflectance coating reflects above-mentioned 2 subharmonic, this 2 subharmonic does not pass through the inside of above-mentioned laser crystal, therefore, can not change and in photoresonance part, be energized and the polarization state of the laser beam of conversion.
In addition, according to the present invention, also be provided with 3 subharmonic Wavelength conversion crystals on Wavelength conversion crystal at above-mentioned 2 subharmonic, above-mentioned 2 subharmonic are transformed to 3 subharmonic by above-mentioned 3 subharmonic with Wavelength conversion crystal, and formed the reflectance coating that reflects above-mentioned 3 subharmonic on the ejaculation end face of Wavelength conversion crystal or the incident end face of above-mentioned 3 subharmonic with Wavelength conversion crystal at above-mentioned 2 subharmonic, therefore, can obtain 3 subharmonic with simple structure, can not change the polarization state of emitted laser beam simultaneously.
In addition, according to the present invention, also utilize bonding agent that adjacent optical crystal is joined together, the optical crystal that is positioned at emitting side is the optical crystal that incident light is transformed to high order harmonic component, be positioned at be formed with on the incident end face of optical crystal of above-mentioned emitting side the above-mentioned high order harmonic component of reflection reflectance coating, therefore, because the high-octane high order harmonic component after the conversion does not see through the bonding agent part, so prevented the deterioration or the damage of bonding agent.
Description of drawings
Fig. 1 is a basic block diagram of the present invention.
Fig. 2 is the structural representation of the present invention's the 1st execution mode.
Fig. 3 is the incorporate key diagram of the 1st execution mode.
Fig. 4 is the another kind of incorporate key diagram of the 1st execution mode.
Fig. 5 is the specification of the film that forms on optical crystal in the 1st execution mode.
Fig. 6 is the structural representation of the present invention's the 2nd execution mode.
Fig. 7 is the incorporate key diagram of the 2nd execution mode.
Fig. 8 is the specification of the film that forms on optical crystal in the 2nd execution mode.
Fig. 9 is the structural representation of the present invention's the 3rd execution mode.
Figure 10 is the structural representation of the present invention's the 4th execution mode.
Figure 11 is the incorporate key diagram of the 5th execution mode.
Figure 12 is the specification of the film that forms on optical crystal in the 5th execution mode.
Figure 13 is the incorporate key diagram of the 6th execution mode.
Figure 14 is the specification of the film that forms on optical crystal in the 6th execution mode.
Incorporate key diagram when Figure 15 is the film that has formed with the film equivalence of above-mentioned the 1st execution mode.
Incorporate key diagram when Figure 16 is the film that has formed with the film equivalence of above-mentioned the 2nd execution mode.
Incorporate key diagram when Figure 17 is the film that has formed with the film equivalence of above-mentioned the 5th execution mode.
Incorporate key diagram when Figure 18 is the film that has formed with the film equivalence of above-mentioned the 6th execution mode.
Figure 19 is the structural representation of existing laser oscillation apparatus.
Embodiment
Preferred implementation of the present invention is described with reference to the accompanying drawings.
At first summary of the present invention is described with reference to Fig. 1.In Fig. 1, with the part of equivalence shown in Figure 19 with identical symbolic representation.In addition, omitted luminous component 2 among Fig. 1.
Be formed with the 1st dielectric reflectance coating 14 on the plane of incidence of above-mentioned laser crystal 8, form the 3rd dielectric reflectance coating 15 on the outgoing plane of above-mentioned laser crystal 8, be formed with the 2nd dielectric reflectance coating 11 on the above-mentioned concave mirror 12.
Above-mentioned the 1st dielectric reflectance coating 14 is high transmission for exciting light 17 (from the laser beam (referring to Figure 19) of luminous component 2), and is high reflections for the oscillation wavelength (first-harmonic 18) of above-mentioned laser crystal 8.Above-mentioned the 3rd dielectric reflectance coating 15 is high transmissions for above-mentioned first-harmonic 18, and is high reflections to 2 subharmonic 19.Above-mentioned the 2nd dielectric reflectance coating 11 is high reflections for above-mentioned first-harmonic 18, and is high transmissions for above-mentioned 2 subharmonic 19.And as dielectric substance, employing use TiO2 (n=2.3～2.55) etc. are as the alternate multi-layered film as low-index material such as high-index material, use MgF2 (n=1.32～1.39).
Above-mentioned luminous component 2 penetrates the exciting light 17 of linear polarization, this exciting light 17 sees through above-mentioned the 1st dielectric reflectance coating 14 and incides above-mentioned laser crystal 8, thereby above-mentioned first-harmonic 18 vibrations, the pumping between above-mentioned the 1st dielectric reflectance coating 14 and above-mentioned the 2nd dielectric reflectance coating 11 of above-mentioned first-harmonic 18, and then this first-harmonic 18 incides above-mentioned 2 subharmonic with Wavelength conversion crystal 9, thereby produces above-mentioned 2 subharmonic 19.
This 2 subharmonic 19 sees through above-mentioned the 2nd dielectric reflectance coating 11 and penetrates, and in addition, 2 subharmonic 19 are reflected by above-mentioned the 3rd dielectric reflectance coating 15, and penetrate through above-mentioned the 2nd dielectric reflectance coating 11.Above-mentioned 2 subharmonic 19 by 15 reflections of above-mentioned the 3rd dielectric reflectance coating do not pass through above-mentioned laser crystal 8, therefore keep polarization state, and 2 subharmonic (laser beam) of linear polarization penetrate from above-mentioned optical resonance part 3.
The following describes as Fig. 2～the 1st execution mode of the present invention shown in Figure 5.
In the 1st execution mode, show the laser oscillation apparatus that penetrates 2 subharmonic, and laser crystal 8 and 2 subharmonic form as one with Wavelength conversion crystal 9.
Incorporate situation comprises following situation: undertaken integrated by the bonding agent 16 that for example has with the ultraviolet curable resin of the roughly the same value of refractive index (Nd:YVO4 (n=1.97), KTP (n=1.76)) of crystal as shown in Figure 3; And undertaken by optics contact as shown in Figure 4 integrated, and, respectively the end face of each above-mentioned laser crystal 8 and 2 subharmonic with the end face of Wavelength conversion crystal 9 on formation have the dielectric film of characteristic as shown in Figure 5.In addition, as shown in Figure 3, Figure 4, with above-mentioned laser crystal 8,2 subharmonic with the end face (left end face among the figure) of incident one side of Wavelength conversion crystal 9 as the A face, be the B face with emitting side end face (its right end face among the figure).
In addition, in Fig. 2, the 17th, from the exciting light of above-mentioned luminous component 2 (referring to Figure 19) incident, for example wavelength is the light of 810nm; The 18th, incide above-mentioned laser crystal 8 and the first-harmonic that obtains by 8 vibrations of this laser crystal by above-mentioned exciting light 17, for example wavelength is the light of 1064nm; The 19th, above-mentioned first-harmonic 18 incides 2 subharmonic that above-mentioned 2 subharmonic vibrate and obtain with Wavelength conversion crystal 9, and for example wavelength is the light of 532nm.
On the A of above-mentioned laser crystal 8 face, begin to be formed for successively the AR film 21 (antireflection film) of above-mentioned exciting light 17 from incident one side, the HR film 22 (highly reflecting films) that is used for above-mentioned first-harmonic 18, on the B of above-mentioned laser crystal 8 face, begin to be formed for successively the AR film 23 of above-mentioned first-harmonic 18 from incident one side, with the HR film 24 that is high transmission for the height reflection to above-mentioned first-harmonic 18 to above-mentioned 2 subharmonic 19, at above-mentioned 2 subharmonic above-mentioned first-harmonic 18 of formation on the A face of Wavelength conversion crystal 9, and the AR film 25 of 2 subharmonic, 19 usefulness, begin successively be formed for the AR film 26 of above-mentioned 2 subharmonic 19 from incident one side at above-mentioned 2 subharmonic on the B face of Wavelength conversion crystal 9, with be the HR film 27 of high transmission for height reflection to above-mentioned 2 subharmonic 19 to above-mentioned first-harmonic 18.The reflectivity of the transmissivity of each AR film, HR film as shown in Figure 5.In addition, even omit the AR film 25 of 2 subharmonic, also be feasible in practical application with the A face of Wavelength conversion crystal 9.
In Fig. 2, when above-mentioned exciting light 17 incides above-mentioned laser crystal 8, produce above-mentioned first-harmonic 18 by above-mentioned laser crystal 8.Because 24 pairs of above-mentioned first-harmonics 18 of above-mentioned HR film are high transmissions, so above-mentioned first-harmonic 18 is exaggerated between the HR film 27 with the outgoing plane of Wavelength conversion crystal 9 at the HR of the plane of incidence of above-mentioned laser crystal 8 film 22 and above-mentioned 2 subharmonic.Above-mentioned first-harmonic 18 from above-mentioned 2 subharmonic with seeing through in the Wavelength conversion crystal 9, thereby above-mentioned 2 subharmonic 19 vibrate.Because 24 pairs of above-mentioned 2 subharmonic 19 of above-mentioned HR film are high reflections, so this 2 subharmonic 19 can not see through in above-mentioned laser crystal 8,2 subharmonic see through above-mentioned HR film 27 and penetrate.In addition, because above-mentioned 2 subharmonic 19 do not see through,, under the situation of above-mentioned exciting light 17, penetrate 2 subharmonic 19 of linear polarization in above-mentioned laser crystal 8 with linear polarization incident so polarization characteristic can not change.
The following describes as Fig. 6～the 2nd execution mode of the present invention shown in Figure 8.
In the 2nd execution mode, with bonding agent 16,28 that laser crystal 8,2 subharmonic are integrated with Wavelength conversion crystal 29 with Wavelength conversion crystal 9 and 3 subharmonic, and penetrate 3 subharmonic.
Above-mentioned laser crystal 8, above-mentioned 2 subharmonic with Wavelength conversion crystal 9 and above-mentioned 3 subharmonic with Wavelength conversion crystal 29, form respectively on the A, B face and have the film of characteristic as shown in Figure 8.
The light incident side end face (A face) of above-mentioned laser crystal 8 go up from incident one side begin to be formed for successively exciting light 17 AR film 31, be used for the HR film 32 of first-harmonic 18, go up from incident one side at the emitting side end face (B face) of above-mentioned laser crystal 8 and begin to be formed for successively the AR film 33 of above-mentioned first-harmonic 18 and above-mentioned 2 subharmonic 19 are the HR film 34 of high transmission for the height reflection to above-mentioned first-harmonic 18.On the A face of above-mentioned 2 subharmonic, be formed for the AR film 35 of above-mentioned first-harmonic 18 and 2 subharmonic 19 with Wavelength conversion crystal 9, be formed for the AR film 36 of above-mentioned first-harmonic 18 and above-mentioned 2 subharmonic 19 with the B face of Wavelength conversion crystal 9 at above-mentioned 2 subharmonic, begin successively be formed for the AR film 37 of above-mentioned first-harmonic 18 and 2 subharmonic 19 from incident one side at above-mentioned 3 subharmonic on the A face of Wavelength conversion crystal 29, with be the HR film 38 of high transmission for height reflection to above-mentioned first-harmonic 18 and 2 subharmonic 19 to 3 subharmonic 30, begin successively be formed for the AR film 39 of above-mentioned first-harmonic 18 and above-mentioned 2 subharmonic 19 from incident one side at above-mentioned 3 subharmonic on the B face of Wavelength conversion crystal 29, and be the HR film 40 of high transmission for the height reflection to above-mentioned 3 subharmonic 30 to above-mentioned first-harmonic 18 and 2 subharmonic 19.In addition, even omit A face, the AR film 35 of B face, the AR film 36 of 2 subharmonic, also be feasible in practical application with Wavelength conversion crystal 9.Have, above-mentioned HR film 38 also can be formed on the B face of above-mentioned 2 subharmonic with Wavelength conversion crystal 9 again.
The example of the antireflection rate of each AR film, the reflectivity of HR film as shown in Figure 8.
In Fig. 6, when above-mentioned exciting light 17 incides above-mentioned laser crystal 8, above-mentioned first-harmonic 18 vibrations, this first-harmonic 18 is transformed to above-mentioned 2 subharmonic 19 by above-mentioned 2 subharmonic with Wavelength conversion crystal 9, and then this 2 subharmonic 19 is transformed to above-mentioned 3 subharmonic 30 by above-mentioned 3 subharmonic with Wavelength conversion crystal 29.This 3 subharmonic 30 is by above-mentioned HR film 38 reflections, and 3 subharmonic see through above-mentioned HR film 40 and penetrate.In the 2nd execution mode, because above-mentioned 2 subharmonic 19 do not see through in above-mentioned laser crystal 8, in addition, above-mentioned 3 subharmonic 30 do not see through from the inside of above-mentioned 2 subharmonic with Wavelength conversion crystal 9 and laser crystal 8, so polarization characteristic can not change, when above-mentioned exciting light 17 during with linear polarization incident, above-mentioned 3 subharmonic 30 penetrate with linear polarization.
In addition, though it is not shown, but in the 2nd execution mode, by 3 subharmonic are changed to 4 subharmonic Wavelength conversion crystals with Wavelength conversion crystal, thereby can produce 4 subharmonic oscillations, and by on the A of each optical crystal, B face, forming AR film, the HR film of regulation, thereby can obtain the ejaculation of 4 subharmonic laser beams.
Fig. 9 is the schematic diagram that penetrates the 3rd execution mode of 3 subharmonic.In the 3rd execution mode, between required optical crystal, be provided with the optics with optical effect, for example wave plate.
As wave plate, for example can be by polarizer 42 being placed 2 subharmonic with between Wavelength conversion crystal 9 and the 3 subharmonic usefulness Wavelength conversion crystal 29, thus can and be appointed as the P polarization or the S polarization penetrates laser beam with linear polarization.In addition, more preferably on the A of above-mentioned polarizer 42, B two sides, be formed for preventing the AR film used for the antireflection of first-harmonic 18,2 subharmonic 19.
Figure 10 is the schematic diagram of the 4th execution mode, illustrates and has inserted supersaturation absorbing material (for example Cr:YAG), is the situation of Qsw 43 as optics.
This Qsw 43 is arranged on laser crystal 8 and 2 subharmonic with between the Wavelength conversion crystal 9, above-mentioned laser crystal 8, Qsw 43,2 subharmonic with Wavelength conversion crystal 9,3 subharmonic with forming the AR film respectively on the A of Wavelength conversion crystal 29, the B two sides.In addition, even omit above-mentioned 3 subharmonic, also be feasible in practical application with the AR film of the A face of Wavelength conversion crystal 29, the AR film of B face.
Be more preferably at form on the A face of above-mentioned laser crystal 8 for exciting light 17 for high transmission to the HR film of first-harmonic 18 for high reflection, to above-mentioned 2 subharmonic 19 is the HR film of high reflection with forming first-harmonic 18 on the A face of Wavelength conversion crystal 9 for high transmission at above-mentioned 2 subharmonic, is the HR film of high reflection for high transmission to 3 subharmonic 30 with forming first-harmonic 18 and 2 subharmonic 19 on the A face of Wavelength conversion crystal 29 at above-mentioned 3 subharmonic, is the HR film of high transmission for the height reflection to above-mentioned 3 subharmonic 30 with forming first-harmonic 18 and 2 subharmonic 19 on the B face of Wavelength conversion crystal 2 at above-mentioned 3 subharmonic.
In above-mentioned the 4th execution mode, when above-mentioned exciting light 17 incides above-mentioned laser crystal 8, above-mentioned first-harmonic 18 vibrations in above-mentioned laser crystal 8, this first-harmonic 18 sees through above-mentioned Qsw 43 and temporarily puts aside at this Qsw 43, sends the first-harmonic 18 that first-harmonic 18 forms pulsed light then.
This pulsed light first-harmonic 18 is transformed to above-mentioned 2 subharmonic 19 by above-mentioned 2 subharmonic with Wavelength conversion crystal 9, this 2 subharmonic 19 is reflected with the HR film of the A face of Wavelength conversion crystal 9 and the 3 subharmonic HR film with the B face of Wavelength conversion crystal 29 by above-mentioned 2 subharmonic, then, this pulsed light first-harmonic is transformed to above-mentioned 3 subharmonic 30 by above-mentioned 3 subharmonic with Wavelength conversion crystal 29, this 3 subharmonic 30 is by the HR film reflection of 3 subharmonic with the A face of Wavelength conversion crystal 29, and pulse 3 subharmonic 30 penetrate from the B face of above-mentioned 3 subharmonic with Wavelength conversion crystal 29.
The following describes as Figure 11, the 5th execution mode of the present invention shown in Figure 12.
The 5th execution mode is the laser oscillation apparatus that penetrates 2 subharmonic, and its structure is identical with the laser oscillation apparatus of the 1st execution mode shown in Figure 2, and laser crystal 8 passes through bonding agent 16 with 2 subharmonic usefulness Wavelength conversion crystal 9 and integrated.
Secondly, form AR film 23, begin to form successively dielectric films such as AR film 25 and HR film 24 from incident one side on the A face of Wavelength conversion crystal 9 at above-mentioned 2 subharmonic at the B of above-mentioned laser crystal 8 face.In addition, even omit the AR film 23 of the B face of above-mentioned laser crystal 8, also be feasible in practical application.
The above-mentioned AR film 21 of the A face of above-mentioned laser crystal 8 is that above-mentioned exciting light 17 is the antireflection film of high transmission, and above-mentioned HR film 22 is the highly reflecting films that are used for above-mentioned first-harmonic 18; The above-mentioned AR film 23 of the B face of above-mentioned laser crystal 8 is that above-mentioned first-harmonic 18 is the antireflection film of high transmission.
Above-mentioned 2 subharmonic are high transmissions with 25 pairs of above-mentioned first-harmonics 18 of above-mentioned AR film of the A face of Wavelength conversion crystal 9; 24 pairs of above-mentioned first-harmonics 18 of above-mentioned HR film are high transmissions, and are high reflections to above-mentioned 2 subharmonic 19; 24 pairs of above-mentioned 2 subharmonic 19 that formed by first-harmonic 18 high order conversion of above-mentioned HR film are high reflections.
Have, above-mentioned 2 subharmonic are the antireflection films that are used for above-mentioned 2 subharmonic 19 with the above-mentioned AR film 26 of the B face of Wavelength conversion crystal 9 again, and 27 pairs of first-harmonics of above-mentioned HR film 18 are high reflection, and are high transmissions to above-mentioned 2 subharmonic 19.The example of the reflectivity of the transmissivity of each AR film, HR film as shown in figure 12.
In Figure 11, when above-mentioned exciting light 17 incided above-mentioned laser crystal 8, by above-mentioned laser crystal 8 above-mentioned first-harmonics 18 vibrations, this first-harmonic 18 reflected between above-mentioned HR film 22 and above-mentioned HR film 27 and amplifies.With seeing through in the Wavelength conversion crystal 9, in view of the above, above-mentioned 2 subharmonic 19 produce vibration to above-mentioned first-harmonic 18 from above-mentioned 2 subharmonic.This 2 subharmonic 19 is reflected by above-mentioned HR film 24, and sees through above-mentioned HR film 27 ejaculations (referring to Fig. 2).
Above-mentioned 2 subharmonic 19 do not see through in above-mentioned laser crystal 8, do not see through above-mentioned bonding agent 16 yet, and penetrate from above-mentioned HR film 27.Therefore, the polarization characteristic of above-mentioned 2 subharmonic 19 can not change, and under the situation of above-mentioned exciting light 17 with linear polarization incident, penetrates 2 subharmonic 19 of linear polarization.In addition, because high-octane 2 subharmonic 19 do not see through above-mentioned bonding agent 16, so can prevent the deterioration damage of this bonding agent 16.
The following describes as Figure 13, the 6th execution mode of the present invention shown in Figure 14.
The 6th execution mode shows the laser oscillation apparatus that penetrates 3 subharmonic, wherein laser crystal 8,2 subharmonic are bonded as one by bonding agent 16,28 with Wavelength conversion crystal 29 with Wavelength conversion crystal 9,3 subharmonic, and have the structure identical with Fig. 6, execution mode shown in Figure 72.In addition, bonding agent 16,28 used herein is also identical with the 2nd execution mode.
Formed dielectric film on the A that the following describes at above-mentioned laser crystal 8, above-mentioned 2 subharmonic usefulness Wavelength conversion crystal 9, above-mentioned 3 subharmonic usefulness Wavelength conversion crystal 29, the B face.The characteristic of formed dielectric film is shown in Figure 14 respectively.
Go up from incident one side at the end face (A face) of incident one side of above-mentioned laser crystal 8 and to begin to form successively to above-mentioned exciting light 17, go up the AR film 33 that formation is high transmission to above-mentioned first-harmonic 18 at the end face (B face) of ejaculation one side of above-mentioned laser crystal 8 for the AR film 31 of high transmission with to the HR film 32 of first-harmonic 18 for high reflection.
Begin successively form AR film 35, HR film 34 from incident one side at above-mentioned 2 subharmonic on the A face of Wavelength conversion crystal 9,35 pairs of above-mentioned first-harmonics 18 of above-mentioned AR film are high transmissions, and 34 pairs of above-mentioned first-harmonics 18 of above-mentioned HR film are high transmissions and are high reflections to 2 subharmonic 19.Is the AR film 36 of high transmission at above-mentioned 2 subharmonic with forming above-mentioned first-harmonic 18 and AR film 25 and 2 subharmonic 19 on the B face of Wavelength conversion crystal 9.
Begin successively form AR film 37, HR film 38 from incident one side at above-mentioned 3 subharmonic on the A face of Wavelength conversion crystal 29,37 pairs of above-mentioned first-harmonics 18 of above-mentioned AR film and above-mentioned 2 subharmonic 19 are high transmissions, and 38 pairs of above-mentioned first-harmonics 18 of above-mentioned HR film and above-mentioned 2 subharmonic 19 are high transmissions and are high reflections to 3 subharmonic 30.Begin successively form AR film 39, HR film 40 from incident one side at above-mentioned 3 subharmonic on the B face of Wavelength conversion crystal 29,39 pairs of above-mentioned first-harmonics 18 of above-mentioned AR film and above-mentioned 2 subharmonic 19 are high transmissions, 40 pairs of above-mentioned first-harmonics 18 of above-mentioned HR film and above-mentioned 2 subharmonic 19 be high reflection and are high transmissions to 3 subharmonic 30.
With reference to Fig. 6 its effect is described.When above-mentioned exciting light 17 incides above-mentioned laser crystal 8, above-mentioned first-harmonic 18 vibrations, this first-harmonic 18 is transformed to above-mentioned 2 subharmonic 19 by above-mentioned 2 subharmonic with Wavelength conversion crystal 9.This 2 subharmonic 19 is reflected between above-mentioned HR film 34 and above-mentioned HR film 40, and is transformed to above-mentioned 3 subharmonic 30 with Wavelength conversion crystal 29 through above-mentioned 3 subharmonic.This 3 subharmonic 30 is reflected by above-mentioned HR film 38, and sees through above-mentioned HR film 40 ejaculations.
In the 6th execution mode, above-mentioned HR film 34 reflections are carried out resulting 2 subharmonic 19 of high order conversion to the first-harmonic 18 of incident, 38 reflections of above-mentioned HR film are carried out resulting 3 subharmonic 30 after the high order conversion to 2 subharmonic 19 of institute's incident, and inner and above-mentioned bonding agent 16 does not see through above-mentioned 2 subharmonic 19 from above-mentioned laser crystal 8.
Above-mentioned 3 subharmonic 30 not from above-mentioned 2 subharmonic with seeing through the inside of the inside of Wavelength conversion crystal 9, above-mentioned laser crystal 8 and the above-mentioned bonding agent 28, therefore its polarization state can not change, under the situation of above-mentioned exciting light 17 with linear polarization incident, above-mentioned 3 subharmonic 30 penetrate with linear polarization.In addition, owing to the laser beam that incident wave is carried out high-octane high order harmonic component conversion gained does not see through above-mentioned bonding agent 16,28, so, also can prevent the deterioration damage of this bonding agent 16,28 even under the situation of height output laser.
In addition, the 1st execution mode～the 6th execution mode schematically show laser crystal 8,2 subharmonic with Wavelength conversion crystal 9,3 subharmonic with the A face of Wavelength conversion crystal 29, B face on formed film be the different separately film of function, but in fact when forming film, be film to be formed multilayer form the film with desired properties, film is considered to 1 film usually.
That is, form film with Wavelength conversion crystal 9, above-mentioned 3 subharmonic respectively on the A face of Wavelength conversion crystal 29, B face with predetermined function at laser crystal 8, above-mentioned 2 subharmonic.
For example, if corresponding to the 1st execution mode (referring to Fig. 3), then as shown in Figure 5, formed the dielectric film 45 of function at the A of laser crystal 8 face, formed the dielectric film 46 of function at the B of above-mentioned laser crystal 8 face with above-mentioned AR film 23 and above-mentioned HR film 24 with above-mentioned AR film 21 and above-mentioned HR film 22.On the A face of above-mentioned 2 subharmonic, formed AR film 25, on the B face of above-mentioned 2 subharmonic, formed the dielectric film 47 of function with above-mentioned AR film 26 and above-mentioned HR film 27 with Wavelength conversion crystal 9 with Wavelength conversion crystal 9.In addition, the specification of film is identical with specification shown in Figure 5.
If corresponding to the 2nd execution mode (referring to Fig. 7), then as shown in figure 16, formed the dielectric film 48 of function at the A of above-mentioned laser crystal 8 face, on the B of above-mentioned laser crystal 8 face, formed the dielectric film 49 of function with above-mentioned AR film 33 and above-mentioned HR film 34 with AR film 31 and HR film 32; Formed AR film 35 at above-mentioned 2 subharmonic with the A face of Wavelength conversion crystal 9, formed AR film 36 with the B face of Wavelength conversion crystal 9 at above-mentioned 2 subharmonic.
Formed the dielectric film 50 of function at above-mentioned 3 subharmonic with the A face of Wavelength conversion crystal 29, formed the dielectric film 51 of function at above-mentioned 3 subharmonic with the B face of Wavelength conversion crystal 29 with above-mentioned AR film 39 and above-mentioned HR film 40 with above-mentioned AR film 37 and above-mentioned HR film 38.In addition, the specification of above-mentioned dielectric film 48, above-mentioned dielectric film 49, above-mentioned dielectric film 50, above-mentioned dielectric film 51 is identical with specification shown in Figure 8.
If corresponding to the 5th execution mode (referring to Figure 11), then as shown in figure 17, formed the dielectric film 45 of function respectively with above-mentioned AR film 21 and HR film 22 at the A of above-mentioned laser crystal 8 face, formed AR film 23 at the B of above-mentioned laser crystal 8 face, formed the dielectric film 53 of function at above-mentioned 2 subharmonic with the A face of Wavelength conversion crystal 9, formed the dielectric film 47 of function at above-mentioned 2 subharmonic with the B face of Wavelength conversion crystal 9 with AR film 26 and HR film 27 with AR film 25 and HR film 24.The specification of above-mentioned dielectric film 45, above-mentioned dielectric film 53 and above-mentioned dielectric film 47 is identical with specification shown in Figure 12.
If corresponding to the 6th execution mode (referring to Figure 13), then as shown in figure 18, formed the dielectric film 48 of function with AR film 31 and HR film 32 at the A of above-mentioned laser crystal 8 face, formed AR film 33 at the B of above-mentioned laser crystal 8 face.Formed the dielectric film 54 of function at above-mentioned 2 subharmonic with the A face of Wavelength conversion crystal 9, formed AR film 36 with the B face of Wavelength conversion crystal 9 at above-mentioned 2 subharmonic with AR film 35 and HR film 34.Formed the dielectric film 50 of function at above-mentioned 3 subharmonic with the A face of Wavelength conversion crystal 29, formed the dielectric film 51 of function at above-mentioned 3 subharmonic with the B face of Wavelength conversion crystal 29 with AR film 39 and HR film 40 with AR film 37 and HR film 38.
The specification of the film that forms on the A face of Wavelength conversion crystal 29, B face with Wavelength conversion crystal 9, above-mentioned 3 subharmonic at above-mentioned laser crystal 8, above-mentioned 2 subharmonic is identical with specification shown in Figure 14 respectively.
Claims (7)
1. laser oscillation apparatus wherein, comprising: be the laser crystal of first-harmonic as optical crystal and with the exciting light vibration of incident; Described first-harmonic is transformed to 2 subharmonic Wavelength conversion crystals of 2 subharmonic; And the reflectance coating that on the ejaculation end face of described laser crystal or the incident end face of described 2 subharmonic with Wavelength conversion crystal, forms, this reflectance coating reflects described 2 subharmonic, and this 2 subharmonic does not pass through from the inside of described laser crystal.
2. claims 1 described laser oscillation apparatus, wherein, the ejaculation end face of described laser crystal or described 2 subharmonic are provided with the reflectance coating of described 2 subharmonic of reflection with the incident end face of Wavelength conversion crystal, thereby keep the polarization of described 2 subharmonic and penetrate 2 subharmonic.
3. claims 1 described laser oscillation apparatus, wherein, be provided with 3 subharmonic Wavelength conversion crystals at described 2 subharmonic on Wavelength conversion crystal, with Wavelength conversion crystal described 2 subharmonic are transformed to 3 subharmonic by described 3 subharmonic, and at ejaculation end face or the described 3 subharmonic reflectance coating that the incident end face of Wavelength conversion crystal on form reflection described 3 subharmonic of described 2 subharmonic with Wavelength conversion crystal.
4. claims 1 or 3 described laser oscillation apparatus wherein, are provided with the optics with optical effect between required crystal.
5. claims 1 or 3 described laser oscillation apparatus wherein, engage optical crystal and form as one.
6. claims 5 described laser oscillation apparatus, wherein, utilize bonding agent that adjacent described optical crystal is joined together, the optical crystal that is positioned at emitting side is the optical crystal that incident light is transformed to high order harmonic component, is positioned on the incident end face of optical crystal of described emitting side to generate the reflectance coating that the described high order harmonic component of reflection is arranged.
7. claims 6 described laser oscillation apparatus wherein, have generated the reflectance coating that reflects described high order harmonic component on the incident end face of the optical crystal that is positioned at described emitting side, keep the polarization of described high order harmonic component and penetrate high order harmonic component.
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| CN102474065A (en) * | 2010-04-23 | 2012-05-23 | 松下电器产业株式会社 | Wavelength conversion laser light source and image display device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102474065A (en) * | 2010-04-23 | 2012-05-23 | 松下电器产业株式会社 | Wavelength conversion laser light source and image display device |
| CN102474065B (en) * | 2010-04-23 | 2014-04-23 | 松下电器产业株式会社 | Wavelength conversion laser light source and image display device |
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