CN1300959C - Narrow band thermal-optically tuned Fabry-Perot filter with flattop and steep belt edge response - Google Patents
Narrow band thermal-optically tuned Fabry-Perot filter with flattop and steep belt edge response Download PDFInfo
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- CN1300959C CN1300959C CNB2004100049531A CN200410004953A CN1300959C CN 1300959 C CN1300959 C CN 1300959C CN B2004100049531 A CNB2004100049531 A CN B2004100049531A CN 200410004953 A CN200410004953 A CN 200410004953A CN 1300959 C CN1300959 C CN 1300959C
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Abstract
The present invention relates to a narrow band thermal light tunable Fabry-Perot filter with flattop response, which comprises a substrate, a lower distributed Bragg reflector made on the upper side of the substrate, a Fabry-Perot cavity made on the upper side of the lower distributed Bragg reflector, a heater made on the upper side of the Fabry-Perot cavity, an upper distributed Bragg reflector made on the upper side of the heater, and a light-transmitting window formed on the middle of the heater.
Description
Technical field
The present invention relates to optical communication technique, relate to a kind of arrowband thermo-optical tunability Fabry-Bai Luo (Fabry-Perot) filter especially with flat-top and the response of precipitous band edge.
Background technology
In optical communication network, tunable optic filter is used for constituting various demodulation multiplexers, and multiplexing light is together made a distinction; This tunable filtering technology is applied to realizes tunable optical source and receiver important in the Dense Waveleng Division Multiplexing (DWDM) on laser and the detector; The Primary Component light top and bottom path device (OADM) of a new generation's all-optical network also can be made of this filter.This shows that tunable optic filter becomes indispensable important devices in all-optical network and the dwdm system.The application of filter in optical-fiber network comprise the difference of channel light detected, to filter except require the arrowband, tunable, wish that also it is flat-top response.Because channel light is a peaked wave, can drift about inevitably at the actual transmissions medium wavelength, because the Fabry-Perot filter is peak response, when channel light generation wave length shift, want very fast tuning and aim at channel light and be not easy to.If the Fabry-Perot filter has flat-top output response, then the problems referred to above can solve, because all be effective as long as the spike of channel light falls in the flat-top scope.Therefore, the Fabry-Perot filter with flat-top output response has improved rapidity and the accuracy that channel light is detected.
The name of submitting on May 15th, 2002 is called in " Narrow-band tunable filter withmulti-cavity structure of flat-top and steep-edge frequency response " european patent application CN1349318 number and has proposed a kind of narrow-band tunable filter with flat-top and the response of precipitous band edge, the input and output side of this filter is formed by two GRIN Lens, three parallel cavity configurations are between input and output side, two walls in chamber are suitable reflectance coatings, both sides are dielectric cavity in three parallel cavity configurations, the centre is an air chamber, and the spacing of air chamber is adjustable.The filter of this invention can overcome the shortcoming of the narrow inadequately and tuber function difference of bandwidth in the conventional filter.But, because this filter comprises two GRIN Lens and parallel multi-cavity structure as input and output side, and at least one of parallel multi-cavity is air chamber, so Filter Structures and Tuning mechanism relative complex, the miniaturization that can not satisfy the practicability system applies can compatible integrated demand.
The name of submitting to December 19 calendar year 2001 is called in " OPTICAL FILTER " european patent application CA2344003 number and has proposed a kind of optical filter with lens, wherein lens have two input ports and with two output ports of two input port optical communications, the end face optical coupled of part reflecting face and lens, another reflecting surface and part reflecting face standoff distance " d " are to form optical cavity between two reflectings surface.Transducer is used to change two distance ' ' d ' ' between the reflecting surface.Two input ports are placed on from the different radial distance of lens axis, make that the light beam that separates is by the light path with different optical path lengths between the reflecting surface when light beam separately enters two input ports.The filter of this invention provides the arrowband output response of flat-top basically.Obviously, this filter need have the special lenses of two input ports and output port, and requirement light beam separately enters two input ports from the lens axis different radial distances respectively, so this Filter Structures relative complex, the miniaturization that can not satisfy the practicability system applies can compatible integrated demand.In addition, two input ports are not easy especially from the control of the radial distance of lens axis and the distance of using transducer to change between the reflecting surface, thereby can only obtain the output response of flat-top basically.
At document Electronics Letters, Volume:26, Issue:14, Pages:1073-1074 has described a kind of have three speculums of flat-top and the response of precipitous band edge, full optical fiber Fabry-Perot filter in 1990.This device is an III type structure, has three speculums of symmetry, and wherein the length in two outer reflectors and two and half chambeies is identical.Intermediate mirrors has reflectivity R
0=99.0% ± 0.1%, each end mirror has reflectivity R
1≈ 89%, approaches critical relation: R
0c=4R
1/ (1+R
1)
2Two and half chambeies drive in the piezoelectricity mode by synchronous ramp voltage.Use for DWDM, this filter is better than two speculum Fabry-Perot filters, has flat-top and precipitous band edge more, allows channel density greater than 3 times increase.But this filter construction is complicated, requires to form respectively three speculums of symmetry, and wherein the reflectivity of two outer reflectors is identical and satisfy critical relation with the reflectivity of intermediate mirrors.In addition, the suppression ratio at place is bigger in the middle of the flat-top response of this filter, approximately is 20% of maximum transmission rate, therefore just realizes flat-top basically.And this device is difficult for other photonic devices integrated realizing various sophisticated functionss, thereby the miniaturization that can not satisfy the practicability system applies can compatible integrated demand.
Summary of the invention:
The objective of the invention is to, a kind of arrowband hot optic tunable Fabry-Perot filter with flat-top and the response of precipitous band edge is provided, its miniaturization that can satisfy the practicability system applies can compatible integrated demand.
A kind of arrowband hot optic tunable Fabry-Perot filter with flat-top response of the present invention is characterized in that, comprising:
One substrate;
Distributed bragg reflector mirror once, this time distributed bragg reflector mirror be produced on substrate above;
One Fabry-Perot chamber, this Fabry-Perot chamber be produced on down distributed bragg reflector mirror above, form with part by having first physical thickness part with second physical thickness, the line of demarcation of these two parts is on a diameter of logical light window, and the area that makes the incident light process shine two parts in Fabry-Perot chamber by window equates;
One heater, this heater be produced on the Fabry-Perot chamber above;
Distributed bragg reflector mirror on one, on this distributed bragg reflector mirror be produced on heater above; And
One logical light window, this logical light window is formed at the centre of heater.
Wherein said substrate is made by single crystal silicon material, and its refractive index for example is 3.5.
Wherein said down distributed bragg reflector mirror comprises: silicon dioxide layer, and at silicon layer that forms on the silicon dioxide layer and the silicon dioxide layer that on silicon layer, forms.
The optical thickness of wherein said silicon dioxide layer is 1/4th of a centre wavelength, and refractive index for example is 1.46.
The optical thickness of wherein said silicon layer is 1/4th of a centre wavelength, and refractive index for example is 3.5.
Wherein said Fabry-Perot chamber, it is fabricated from a silicon, and refractive index for example is 3.5.
Wherein said Fabry-Perot chamber is divided into the part with first physical thickness and has the part of second physical thickness.
Wherein said first thickness is 30～40 microns.
Wherein said second thickness is than little for example 6～12 nanometers of described first thickness.
The thickness difference of wherein said two parts is realized by lithographic method.
Wherein said heater forms after the Fabry-Perot chamber forms and is divided into two parts with different-thickness, and the logical light window of its encirclement is the diameter circle bigger than the diameter of optical fiber.
The line of demarcation of two parts in wherein said Fabry-Perot chamber makes incident light equate through the area that logical light window shines described two parts on a diameter of logical light window.
Wherein said heater has electrode and resistance 42 parts.
Wherein said electrode and active component are all made by for example alloy and metal.
The resistance of wherein said active component for example is 20～30 ohm.
The wherein said distributed bragg reflector mirror of going up is included in the silicon dioxide layer that forms after the heater formation, the silicon layer that forms then on silicon dioxide layer on the Fabry-Perot chamber.
The optical thickness of wherein said silicon dioxide layer is 1/4th of a centre wavelength, and refractive index for example is 1.46.
The optical thickness of wherein said silicon layer is 1/4th of a centre wavelength, and refractive index for example is 3.5.
Wherein the three dB bandwidth of the output of device response is 0.7 nanometer.
Wherein the output of device response is flat-top response, and the relative transmittance of crest is 0.63, and the relative transmittance of trough is 0.61, and waviness is 0.02.
Wherein the tuning range of device can reach 23 nanometers, and the response time can reach 300 microseconds.
Device of the present invention has the upper and lower speculum that is made of multilayer dielectric film and between the Fabry-Perot chamber between the speculum up and down.After the Fabry-Perot chamber forms on following speculum, the Fabry-Perot chamber is divided into two parts with different-thickness, makes that to shine the area of two parts in Fabry-Perot chamber from the incident light of the optical fiber logical light window by device substantially the same.Because two parts in Fabry-Perot chamber have different optical thicknesses, the light path difference of light beam process in two parts in Fabry-Perot chamber, the selected light wavelength difference of passing through, thus the light of two kinds of wavelength selected by and other wavelength components are intercepted.The thickness difference (Δ) of two parts of Fabry-Perot can be selected to be provided with, and makes device have the output response of flat-top.
As everyone knows, can press the wavelength selectivity of bandwidth to obtain in narrow Fabry-Perot chamber by the reflectivity that improves speculum, the physical thickness that also can increase the Fabry-Perot chamber is pressed narrow bandwidth.In device of the present invention, use the SOR patented technology that thin slice Si material at low temperature is bonded to down on the speculum, through attenuated polishing, obtain the thicker Fabry-Perot chamber of tens micron dimensions, thereby obtain very narrow bandwidth.
Device of the present invention has the heater of being made by metal or alloy, this heater is after the Fabry-Perot chamber forms on following speculum and is divided into two parts with different-thickness, on the Fabry-Perot chamber, form, after upper reflector forms, carved two electrodes subsequently.After adding electric current, heater provides heat that the Fabry-Perot chamber is heated, and thermo-optic effect causes that the cavity refractive index increases, thereby reaches tuning purpose.
Device of the present invention has the output response that two parts of different-thickness realize flat-top by the Fabry-Perot chamber is divided into.Can know that from formula hereinafter the quantity that wish to obtain the dielectric layer in the thickness difference Δ of these required two parts of good flat-top output response and the speculum up and down is relevant.The Fabry-Perot chamber that utilization of the present invention is thicker, thus only need up and down less dielectric layer in the speculum, obtain narrow bandwidth and precipitous band edge.The more important thing is,, realize easily so obtain the required thickness difference Δ of flat-top response, and have enough nargin, to machining accuracy and do not require harsh especially owing to up and down comprise less dielectric layer in the speculum.The scheme technology that the present invention proposes is simple, realizes easily, and the reliability height, functional, and device is easy and other active or passive photonic devices are integrated to realize various sophisticated functionss.
Description of drawings
For further specifying technology contents of the present invention, below in conjunction with embodiment and accompanying drawing the present invention is described in detail, wherein:
Fig. 1 is the vertical view of filter of the present invention;
Fig. 2 is the cutaway view of filter of the present invention;
Fig. 3 is the reflectivity wavelength response curve of the upper reflector of filter of the present invention;
Fig. 4 is the reflectivity wavelength response curve of the following speculum of filter of the present invention;
Fig. 5 is the simplification schematic diagram of filter of the present invention;
Fig. 6 is that explanation filter of the present invention is exported the relation curve of the relative transmittance at the trough place that responds to Fabry-Perot chamber thickness;
Fig. 7 is that explanation filter of the present invention is exported the relation curve of the relative transmittance at the crest place that responds to Fabry-Perot chamber thickness;
Fig. 8 is that the waviness of output response of filter of the present invention is to the relation curve of Fabry-Perot chamber thickness;
Fig. 9 is that the typical case of filter of the present invention exports response.
Embodiment
Below in conjunction with Fig. 1 and Fig. 2, the structure of the embodiment of filter of the present invention is described.
A kind of arrowband hot optic tunable Fabry-Perot filter of the present invention with flat-top response, comprising:
One substrate 10, this substrate 10 are made by single crystal silicon material, and its refractive index for example is 3.5;
Once distributed bragg reflector mirror 20, this time distributed bragg reflector mirror 20 be produced on substrate 10 above; This time distributed bragg reflector mirror 20 comprises: silicon dioxide layer 21, at the silicon dioxide layer 23 of silicon layer 22 that forms on the silicon dioxide layer 21 and formation on silicon layer 22; The optical thickness of this silicon dioxide layer 21,23 is 1/4th of a centre wavelength, and refractive index for example is 1.46; The optical thickness of this silicon layer 22 is 1/4th of a centre wavelength, and refractive index for example is 3.5;
One Fabry-Perot chamber 30, this Fabry-Perot chamber 30 be produced on down distributed bragg reflector mirror 20 above; This Fabry-Perot chamber 30, it is fabricated from a silicon, and refractive index for example is 3.5; This Fabry-Perot chamber 30 is divided into the part 31 with first physical thickness and has the part 32 of second physical thickness; The part 31 of this first physical thickness is 30～40 microns; The part 32 of this second physical thickness is than little for example 6～12 nanometers of described first thickness; The portion of this first, second physical thickness 31,32 thickness difference in two sub-sections realizes by lithographic method;
One heater 40, this heater 40 be produced on Fabry-Perot chamber 30 above; This heater 40 forms after Fabry-Perot chamber 30 forms and is divided into two parts with different-thickness, and the logical light window 60 of its encirclement is the diameter circle bigger than the diameter of optical fiber; This heater 40 has electrode 41 and resistance 42 parts; This electrode 41 and resistance 42 parts are all made by for example alloy and metal; The resistance of this active component 42 for example is 20～30 ohm;
Distributed bragg reflector mirror 50 on one, on this distributed bragg reflector mirror 50 be produced on heater 40 above; Should go up distributed bragg reflector mirror 50 be included in heater 40 form after at the silicon dioxide layer 51 that forms on the Fabry-Perot chamber 30, the silicon layer 52 that on silicon dioxide layer 51, forms then; The optical thickness of this silicon dioxide layer 51 is 1/4th of a centre wavelength, and refractive index for example is 1.46; The optical thickness of this silicon layer 52 is 1/4th of a centre wavelength, and refractive index for example is 3.5; And
One logical light window 60, this logical light window 60 is formed at the centre of heater 40.
The portion of this first, second physical thickness in wherein said Fabry-Perot chamber 30 31,32 line of demarcation in two sub-sections makes incident light equate through the area that logical light window 60 shines described two parts on a diameter of logical light window 60.
The three dB bandwidth that this output with arrowband hot optic tunable Fabry-Perot filter of flat-top response responds is 0.7 nanometer.
This output response with arrowband hot optic tunable Fabry-Perot filter of flat-top response is flat-top response, and the relative transmittance of crest is 0.63, and the relative transmittance of trough is 0.61, and waviness is 0.02.
This tuning range with arrowband hot optic tunable Fabry-Perot filter of flat-top response can reach 23 nanometers, and the response time can reach 300 microseconds.
Fig. 3 is the reflectivity wavelength response curve of device upper reflector of the present invention.The transfer matrix method of layered medium is well known in the art.Though the reflectivity of the upper reflector that is made of multilayer dielectric film that utilizes that computer program realizes that transfer matrix method finds to use in the present invention is relevant with wavelength, changes slow in very wide wave-length coverage.Filter of the present invention has near the output response of centre wavelength (1300 nanometer) very narrow (less than 1 nanometer), and the reflectivity of upper reflector is almost not too big change in so narrow bandwidth range.Provide the reflectivity of upper reflector in 1100nm arrives the 1600nm wave-length coverage of device of the present invention as Fig. 3, can see that the variation of reflectivity is very little near 1300.Therefore, the reflectivity of upper reflector can be regarded constant as basically, is expressed as R hereinafter
1, it is approximately 0.8195.
Fig. 4 is the reflectivity wavelength response curve of speculum under the device of the present invention.Similarly, the transfer matrix method that utilizes computer program to realize finds that near the change of the reflectivity arrowband output response that will realize of speculum down of the present invention is very little.Provide the reflectivity of following speculum in 1100nm arrives the 1600nm wave-length coverage of device of the present invention as Fig. 4.Therefore, the reflectivity of following speculum can be regarded constant as basically, is expressed as R hereinafter
2, it is approximately 0.8859.
Fig. 5 is the simplification schematic diagram of device of the present invention.Because the reflectivity of upper and lower speculum can be regarded as constant near the output response of arrowband, so the structure of device of the present invention shown in Fig. 2 can be represented so that calculate and analyze with the simplification schematic diagram shown in Fig. 5.Wherein the refractive index in Fabry-Perot chamber is n, and thickness is h, and the reflectivity of upper reflector is R
1, the reflectivity of following speculum is R
2If ignore absorption loss, utilize multiple-beam interference method well-known in the art to calculate:
I
(t)/I
(i)＝(1-R
1)(1-R
2)/1+R
1R
2-2R
1 1/2R
2 1/2cosδ) (1)
I wherein
(t)Be transmitted intensity, I
(i)Be incident intensity, I
(t)/ I
(i)The expression relative transmittance.Phase factor δ satisfies:
δ＝4πnhcosθ/λ (2)
Wherein θ is an incidence angle, and λ is a wavelength, and n is the refractive index in chamber.When incidence angle was 0 °, phase factor was:
δ＝4πnh/λ (3)
By (1) formula as can be known, when the resonance in Fabry-Perot chamber occurs in phase factor and equals the integral multiple of 2 π, just:
δ＝2mπ (4)
By (3) and (4) formula as can be known, resonant wavelength λ
mFor:
λ
m＝2nh/m (5)
The Fabry-Perot chamber of device is made of two parts with different-thickness, and the thickness of supposing one of them part is h
1, then resonant wavelength is λ
M1=2nh
1/ m; The thickness of another part is h
2, then resonant wavelength is λ
M2=2nh
2/ m.The wavelength table of supposing the intersection point correspondence of the outputs response that produced by these two parts is shown λ
Dip, obviously the output that is produced by two parts responds at λ
DipThe relative transmittance at place is equal, promptly
cosδ
1＝cosδ
2 (6)
δ wherein
1=4 π nh
1/ λ
Dip, δ
2=4 π nh
2/ λ
DipAccording to (4) and (6) formula as can be known:
δ
1+δ
2＝4mπ (7)
4πnh
1/λ
dip+4πnh
2/λ
dip＝4mπ
λ
dip＝n(h
1+h
2)/m (8)
h
2＝h
1-Δ (9)
We only consider centre wavelength (λ
0=near 1300nm) output responds, so m satisfies:
m＝Round(2nh
1/λ
0) (10)
Wherein Round represents the round function.According to (1), (3), (8), (9) and (10) formula as can be known, the first of Fabry-Perot is at λ
DipThe relative transmittance that the place produces is:
In like manner, the second portion in Fabry-Perot chamber is at λ
DipThe relative transmittance that the place produces is:
So Fabry-Perot chamber λ
DipThe relative transmittance that the place produces is:
F
dip＝(F
1+F
2)/2 (13)
Fig. 6 has provided with computer program and has realized (11), (12) and (13) and the λ of acquisition
DipThe relative transmittance at place is to Fabry-Perot chamber thickness h
1Relation curve, R wherein
1=0.8195, R
2=0.8859, n=3.5, Δ=7nm, λ
0=1300nm, h
1Be 30 μ m～40 μ m.The trough of output response is approximately 0.61 as can see from Figure 6, to thickness h
1Variation insensitive.
The peak value that device is always exported response appears near the peak value of the output response that each part in Fabry-Perot chamber produces, and therefore total output response has two peaks.Work as h
1When bigger, can be approximated to be:
λ
peak1＝[2nh
1/m+n(h
1+h
2)/m]/2 (14)
According to (1), (3), (9), (10) and (14) formula as can be known, for λ
Peak1Have:
F
peak1＝(F
1’+F
2’)/2 (17)
Fig. 7 has provided with computer program and has realized (15), (16) and (17) and the λ of acquisition
Peak1The relative transmittance at place is to Fabry-Perot chamber thickness h
1Relation curve, R wherein
1=0.8195, R
2=0.8859, n=3.5, Δ=7nm, λ
0=1300nm, h
1Be 30 μ m～40 μ m.The crest of output response is approximately 0.626 as can see from Figure 7, to thickness h
1Variation insensitive.Use the same method and to obtain λ
Peak2The relative transmittance at place is to Fabry-Perot chamber thickness h
1Curve, find and λ
Peak1The situation at place is almost completely identical.
The waviness that Fig. 8 has provided device of the present invention output response is that difference between crest relative transmittance and the trough relative transmittance is to Fabry-Perot chamber thickness h
1Relation curve.The waviness of output response is approximately 0.017 as can see from Figure 8, to h
1Change insensitive.Therefore, can optionally design the one-tenth-value thickness 1/10 h of Fabry-Perot
1, and can not have influence on the performance of flat-top output response, thereby can realize the performance of arrowband and precipitous band edge and good flat-top response simultaneously.
The typical case that Fig. 9 has provided the device of the present invention that uses transfer matrix method well-known in the art and obtain exports response.Δ=7nm wherein, λ
0=1300nm, h
1Be 30 μ m.The three dB bandwidth of device output response is approximately 0.7nm as seen from Figure 9, the 10dB bandwidth is approximately 1.6nm, the waviness of flat-top response is approximately 0.02, and the nuance of the value 0.017 that this value and Fig. 8 provide is to cause owing to use approximate expression (14) in Fig. 8 calculates.
So far, understand the structure and the principle of device of the present invention in detail.Compare with existing filter, the Fabry-Perot chamber of filter of the present invention has two parts of different-thickness, the light path difference of light beam process in two parts in Fabry-Perot chamber, the light of two kinds of wavelength selected by and other wavelength components are intercepted, thereby make the output response have flat characteristic.The flat-top response performance of device of the present invention depends on the thickness difference of two parts in chamber, and it doesn't matter with Fabry-Perot chamber thickness, and the physical thickness that therefore can increase the Fabry-Perot chamber reduces bandwidth and obtains precipitous band edge.Device of the present invention also has heater, thereby has arrowband, flat-top response and tunable superperformance simultaneously, thereby is more suitable for detecting in the difference to channel light in optical-fiber network.The scheme technology that the present invention proposes is simple, realizes easily, and the reliability height, superior performance, device is integrated realizing various sophisticated functionss with other active or passive photonic devices easily, thus the miniaturization that can satisfy the practicability system applies can the integrated demand of compatibility.
Claims (21)
1. the arrowband hot optic tunable Fabry-Perot filter with flat-top response is characterized in that, comprising:
One substrate;
Distributed bragg reflector mirror once, this time distributed bragg reflector mirror be produced on substrate above;
One Fabry-Perot chamber, this Fabry-Perot chamber be produced on down distributed bragg reflector mirror above, form with part by having first physical thickness part with second physical thickness, the line of demarcation of these two parts is on a diameter of logical light window, and the area that makes the incident light process shine two parts in Fabry-Perot chamber by window equates;
One heater, this heater be produced on the Fabry-Perot chamber above;
Distributed bragg reflector mirror on one, on this distributed bragg reflector mirror be produced on heater above; And
One logical light window, this logical light window is formed at the centre of heater.
2. the arrowband hot optic tunable Fabry-Perot filter with flat-top response according to claim 1 is characterized in that wherein said substrate is made by single crystal silicon material, and its refractive index for example is 3.5.
3. the arrowband hot optic tunable Fabry-Perot filter with flat-top response according to claim 1, it is characterized in that, wherein said down distributed bragg reflector mirror comprises: silicon dioxide layer, and at silicon layer that forms on the silicon dioxide layer and the silicon dioxide layer that on silicon layer, forms.
4. the arrowband hot optic tunable Fabry-Perot filter with flat-top response according to claim 3 is characterized in that the optical thickness of wherein said silicon dioxide layer is 1/4th of a centre wavelength, and refractive index for example is 1.46.
5. the arrowband hot optic tunable Fabry-Perot filter with flat-top response according to claim 3 is characterized in that the optical thickness of wherein said silicon layer is 1/4th of a centre wavelength, and refractive index for example is 3.5.
6. the arrowband hot optic tunable Fabry-Perot filter with flat-top response according to claim 1 is characterized in that, wherein said Fabry-Perot chamber, and it is fabricated from a silicon, and refractive index for example is 3.5.
7. the arrowband hot optic tunable Fabry-Perot filter with flat-top response according to claim 1 is characterized in that, wherein said Fabry-Perot chamber is divided into the part with first physical thickness and has the part of second physical thickness.
8. the arrowband hot optic tunable Fabry-Perot filter with flat-top response according to claim 7 is characterized in that wherein said first thickness is 30～40 microns.
9. the arrowband hot optic tunable Fabry-Perot filter with flat-top response according to claim 7 is characterized in that wherein said second thickness is than little for example 6～12 nanometers of described first thickness.
10. the arrowband hot optic tunable Fabry-Perot filter with flat-top response according to claim 7 is characterized in that the thickness difference of wherein said two parts is realized by lithographic method.
11. the arrowband hot optic tunable Fabry-Perot filter with flat-top response according to claim 1, it is characterized in that, wherein said heater forms after the Fabry-Perot chamber forms and is divided into two parts with different-thickness, and the logical light window of its encirclement is the diameter circle bigger than the diameter of optical fiber.
12. according to claim 7 and 11 described arrowband hot optic tunable Fabry-Perot filters with flat-top response, it is characterized in that, the line of demarcation of two parts in wherein said Fabry-Perot chamber makes incident light equate through the area that logical light window shines described two parts on a diameter of logical light window.
13. the arrowband hot optic tunable Fabry-Perot filter with flat-top response according to claim 1 is characterized in that wherein said heater has electrode and resistance 42 parts.
14. the arrowband hot optic tunable Fabry-Perot filter with flat-top response according to claim 13 is characterized in that wherein said electrode and active component are all made by for example alloy and metal.
15. the arrowband hot optic tunable Fabry-Perot filter with flat-top response according to claim 14 is characterized in that the resistance of wherein said active component for example is 20～30 ohm.
16. the arrowband hot optic tunable Fabry-Perot filter with flat-top response according to claim 1, it is characterized in that the wherein said distributed bragg reflector mirror of going up is included in the silicon dioxide layer that forms after the heater formation, the silicon layer that forms then on the Fabry-Perot chamber on silicon dioxide layer.
17. the arrowband hot optic tunable Fabry-Perot filter with flat-top response according to claim 16 is characterized in that the optical thickness of wherein said silicon dioxide layer is 1/4th of a centre wavelength, refractive index for example is 1.46.
18. the arrowband hot optic tunable Fabry-Perot filter with flat-top response according to claim 16 is characterized in that the optical thickness of wherein said silicon layer is 1/4th of a centre wavelength, refractive index for example is 3.5.
19., it is characterized in that wherein the three dB bandwidth of the output of device response is 0.7 nanometer according to the described arrowband hot optic tunable Fabry-Perot filter of claim 1～18 with flat-top response.
20. according to the described arrowband hot optic tunable Fabry-Perot filter of claim 1～18 with flat-top response, it is characterized in that wherein the output of device response is flat-top response, the relative transmittance of crest is 0.63, the relative transmittance of trough is 0.61, and waviness is 0.02.
21. according to the described arrowband hot optic tunable Fabry-Perot filter with flat-top response of claim 1～18, it is characterized in that wherein the tuning range of device can reach 23 nanometers, the response time can reach 300 microseconds.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100049531A CN1300959C (en) | 2004-02-13 | 2004-02-13 | Narrow band thermal-optically tuned Fabry-Perot filter with flattop and steep belt edge response |
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|---|---|---|---|
| CNB2004100049531A CN1300959C (en) | 2004-02-13 | 2004-02-13 | Narrow band thermal-optically tuned Fabry-Perot filter with flattop and steep belt edge response |
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| CN1300959C true CN1300959C (en) | 2007-02-14 |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100397123C (en) * | 2005-12-07 | 2008-06-25 | 中国科学院半导体研究所 | Narrow-band heat-light adjustable Farbry-Boro filter with flat-top responding |
| CN100435018C (en) * | 2006-04-03 | 2008-11-19 | 中国科学院半导体研究所 | Structure of long wave long micro mechanical adjustable filter and producing method |
| CN104917048A (en) * | 2015-07-06 | 2015-09-16 | 大连藏龙光电子科技有限公司 | Small packaged long-distance transmission DFB laser |
| CN109269644B (en) * | 2018-11-02 | 2020-10-02 | 天津津航技术物理研究所 | Wide tuning range spectral imaging sensor |
| CN109798979B (en) * | 2019-03-12 | 2021-02-12 | 天津津航技术物理研究所 | Design method of semiconductor process compatible high-spectrum imaging chip with wide spectrum range |
| CN111880257B (en) * | 2020-09-28 | 2021-05-07 | 深圳市海谱纳米光学科技有限公司 | Adjustable optical filter device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5345328A (en) * | 1992-08-12 | 1994-09-06 | Sandia Corporation | Tandem resonator reflectance modulator |
| US20020080493A1 (en) * | 2000-12-21 | 2002-06-27 | Rung-Ywan Tsai | Polarization-independent ultra-narrow band pass filters |
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2004
- 2004-02-13 CN CNB2004100049531A patent/CN1300959C/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5345328A (en) * | 1992-08-12 | 1994-09-06 | Sandia Corporation | Tandem resonator reflectance modulator |
| US20020080493A1 (en) * | 2000-12-21 | 2002-06-27 | Rung-Ywan Tsai | Polarization-independent ultra-narrow band pass filters |
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| Publication number | Publication date |
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| CN1655482A (en) | 2005-08-17 |
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