CN1300952A - 反射镜和使用它的背投式显示器 - Google Patents

反射镜和使用它的背投式显示器 Download PDF

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CN1300952A
CN1300952A CN00130782A CN00130782A CN1300952A CN 1300952 A CN1300952 A CN 1300952A CN 00130782 A CN00130782 A CN 00130782A CN 00130782 A CN00130782 A CN 00130782A CN 1300952 A CN1300952 A CN 1300952A
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catoptron
glass substrate
projecting display
polished
screen
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秋元俊夫
西川宏
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Nippon Sheet Glass Co Ltd
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
    • G02B5/085—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal
    • G02B5/0858—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal the reflecting layers comprising a single metallic layer with one or more dielectric layers
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3615—Coatings of the type glass/metal/other inorganic layers, at least one layer being non-metallic
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3621—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a fluoride
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
    • C03C17/3663—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties specially adapted for use as mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0808—Mirrors having a single reflecting layer
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00—Projectors or projection-type viewers; Accessories therefor
    • G03B21/14—Details
    • G03B21/28—Reflectors in projection beam
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/31—Pre-treatment

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  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)
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  • Surface Treatment Of Glass (AREA)
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Abstract

提供了一种用于背投式显示器等的反射镜,包括:具有至少一个抛光表面的一个玻璃衬底,其被抛光以具有预定的表面起伏(在切断值为0.8mm—8mm的测量条件下等于或小于0.05μm);和通过按铝(Al)、氟化镁(MgF2)、二氧化钛(TiO2)的次序形成膜来形成在所述玻璃衬底的所述抛光表面上的一个反射膜。结果可以防止任何由于反射镜的不规则体导致的光强度的差异引起的图象中光和阴影的图案投射到屏幕上,由此提高图象质量。

Description

反射镜和使用它的背投式显示器
本发明涉及用于显示器的反射镜，通过所述显示器，待显示的图象被放大和在镜子上反射和由此投射到例如背投式电视的屏幕等的一屏幕上，且本发明涉及使用上述反射镜的背投式显示器。
通常，在背投式显示器的反射镜中通过蒸发方法或溅射方法形成有铝反射膜。并且通常使用浮法工艺制造的玻璃衬底。
然而，在用浮法工艺制造的这种玻璃衬底的表面上，产生与生产线中浮法工艺的传送方向平行的细小的不规则体，它们被称为微皱褶(在切断值为0.8mm-8mm的测量条件下，约为0.1μm-0.16μm)。由于玻璃衬底的生产工艺，这种不规则体不可避免地出现在玻璃衬底的表面上。
因此，在为背投式显示器使用通过在这种玻璃衬底的表面上形成反射膜所获得的反射镜的情况下，入射到反射镜100上的平行光被具有不规则体的反射表面101反射，偏离平行，如图4所示。结果，由于光强度的空间差别，在投射到屏幕102上的图象中产生了光与阴影的图案，因此成为使图象质量产生显著的劣化的原因。
因此本发明的目的是提供一种反射镜以及使用上述反射镜的背投式显示器，其中在投射到屏幕上的图象中不会出现任何由于光密度的空间差别而产生的光与阴影的图案，由此显著改善图象质量。
根据本发明的一个方面，提供了一种用于背投式显示器等中的反射镜，包括一个玻璃衬底，所述衬底的至少一个表面被抛光以具有预定的表面起伏，和形成在所述衬底的抛光表面上的反射膜。
根据本发明另一个方面，在上述反射镜中，所述玻璃衬底是通过浮法工艺制造的以具有在切断值为0.8mm-8mm的测量条件下约为0.1μm或更小的细小的不规则体。
根据本方面再一个方面，在上述反射镜中，预定的表面起伏在切断值为0.8mm-8mm的测量条件下约为0.05μm或更小。
根据本方面再一个方面，在上述反射镜中，按铝(Al)、氟化镁(MgF2)、二氧化钛(TiO2)的次序形成膜来获得反射膜。通过这种形成方法，可以使反射镜具有94％的反射率，而只由铝形成的反射镜的反射率较低，为88-90％。
根据本方面再一个方面，提供了一种背投式显示器，包括上述反射镜、一光学单元和一屏幕。
图1是根据本发明的反射镜的剖视图；
图2是根据本发明的背投式显示器的结构图；
图3是显示在抛光前和抛光后的玻璃衬底表面上的不规则体的测量结果的图；
图4是说明在玻璃衬底的表面上具有不规则体的情况下反射镜的反射表面上反射的光的散射和在屏幕上发生的光和阴影的图案的视图。
之后将参照附图详细说明根据本发明的实施例。
为了制造根据本发明的反射镜，通过浮法工艺制造的3mm厚的玻璃衬底被切成预定的尺寸，之后其端面被倒角。考虑到对后面的抛光工艺所要求的表面起伏，优选地是使玻璃衬底的表面上在切断值为0.8mm-8mm的测量条件下具有等于或小于0.1μm的细小的不规则体。
然后，在平面抛光装置中用氧化铈作为研磨剂材料，将玻璃衬底表面去除约3μm，降低了其上的细小的不规则体，由此使其表面起伏具有预定值。
优选地，预定的表面起伏在切断值为0.8mm-8mm的测量条件下等于或小于0.05μm，例如，使用东京Seimitsu有限公司制造的SURFCOM479A作为表面粗糙度测量装置，考虑到在反射镜用作背投式显示器的镜子的情况下所需的图象质量。
然而，如果预定的表面起伏在切断值为0.8mm-8mm的测量条件下等于或小于0.001μm，则进行抛光的时间要更长，制造这种反射镜的成本亦相应地增加。
然后将抛光的玻璃衬底浸入含有氢氧化钾的碱性清洗剂中，使用超声清洗机进行清洗。之后在玻璃衬底表面用纯水进行超声清洗，使表面清洁。然而，作为纯水清洗的方法，除了超声清洗之外，可以使用例如擦洗等的公知方法。
接下来，如图1所示，利用真空蒸发在清洗过的玻璃衬底的一个表面1a上按铝(Al)、氟化镁(MgF2)、二氧化钛(TiO2)的次序形成膜来获得反射膜2，由此获得反射镜3。铝(Al)膜、氟化镁(MgF2)膜、二氧化钛(TiO2)膜的厚度分别在50nm-300nm范围内。
下面将解释按上述构造的反射镜3的功能。入射到反射镜3上的平行光以等于入射角的反射角反射。
因此即使浮法工艺制造的玻璃衬底被用作反射镜3的玻璃衬底1，通过在玻璃衬底1的一个表面1a被抛光以后形成的反射膜2，反射膜2上反射的光不会进入不同的方向。
在根据本发明的背投式显示器中，安装了上述反射镜3。如图2所示，该背投式显示器包括反射镜3、一光学单元4、一屏幕5等等。在这种装置中，反射镜3和屏幕5之间的距离一般在20-70cm范围。
光学单元4包括高亮度放电灯，分别对应于R(红)、G(绿)、B(蓝)的三片液晶板，一彩色滤色片和大尺寸的投影透镜。此外，屏幕5包括菲涅耳透镜，一种经过非眩目处理的透镜，等等。
之后将解释按上述构造的本发明背投式显示器的功能。
在背投式显示器中，光学单元4的光(图象)在反射镜3上被反射，投射到屏幕5上，因此重现图象。
即使是其中使用了由浮法工艺形成的玻璃衬底1的反射镜3被安装作为背投式显示器的镜子，通过在玻璃衬底1的一个表面1a被抛光后形成反射膜2，可以在投射到屏幕5上的图象中防止出现由浮法工艺制造的玻璃衬底的表面1a上细小的不规则体导致的光密度的差异所产生的任何光和阴影图案。
图3表示在抛光前和抛光后的玻璃衬底表面上的不规则体的测量结果。A表示在抛光前沿与浮法工艺的传送方向垂直的轴所作的测量数据曲线。B表示在抛光前沿与浮法工艺的传送方向平行的轴所作的测量数据曲线。另一方面，C表示在抛光后沿与浮法工艺的传送方向垂直的轴所作的测量数据曲线。D表示在抛光后沿与浮法工艺的传送方向平行的轴所作的测量数据曲线。
如A和B所示，平行于浮法工艺传送方向的条形不规则体出现在玻璃衬底的表面上。进一步地，C和D表示这种不规则体可以通过抛光减少。
至于反射镜3，与图1所示的前表面涂覆的镜子一样，可以使用背面涂覆的镜子。而且，反射膜可以用其它材料形成，以达到足够的反射率利用由此反射的图象，反射膜不限于铝反射镜。此外，可以使用其它方法来代替蒸发或溅射方法作为形成反射膜的方法。
根据本发明的反射膜3可以用于其中一片液晶板被全息彩色滤色片(衍射光栅的膜)所使用的背投式显示器，以及其中需要分别对应于R(红)、G(绿)、B(蓝)的三片液晶板的背投式显示器。
如上面所详述的，根据本发明可以等于入射角的反射角反射入射到反射镜上的平行光，由此防止反射光进入其它方向。
此外根据本发明，在反射镜用作背投式显示器的镜子的情况下，足以获得所需的图象质量。
此外根据本发明，即使反射镜和屏幕之间的距离增大，在反射镜用作背投式显示器的镜子的情况下，足以获得所需的图象质量。
此外根据本发明，可以提高反射镜的反射率。
此外根据本发明，可以防止任何由于光强度的差异引起的图象中光和阴影的图案投射到屏幕上，由此提高图象质量。

Claims (5)

1、一种用于背投式显示器等装置上的反射镜，包括：
具有至少一个抛光表面的一个玻璃衬底，该表面被抛光以具有预定的表面起伏；和
形成在所述玻璃衬底的所述抛光表面上的一个反射膜。
2、根据权利要求1的反射镜，特征在于所述玻璃衬底是通过浮法工艺制造的，在切断值为0.8mm-8mm的测量条件下具有等于或小于0.1μm的细小的不规则体。
3、根据权利要求1或2的反射镜，特征在于预定的表面起伏在切断值为0.8mm-8mm的测量条件下等于或小于0.05μm。
4、根据权利要求1-3中任一权利要求的反射镜，特征在于所述反射膜通过按铝(Al)、氟化镁(MgF2)、二氧化钛(TiO2)的次序形成膜来获得。
5、一种背投式显示器，包括：
根据权利要求1-4中任一权利要求的一反射镜；
一光学单元；和
一屏幕。
CNB001307827A 1999-12-17 2000-12-16 反射镜和使用它的背投式显示器 Expired - Fee Related CN1150418C (zh)

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JP358282/1999 1999-12-17
JP35828299 1999-12-17
JP281788/2000 2000-09-18
JP2000281788A JP2001235798A (ja) 1999-12-17 2000-09-18 反射ミラー及びこれを用いた背面投写型ディスプレイ

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CN1328601C (zh) * 2004-05-12 2007-07-25 株式会社日立制作所 反射镜及使用该反射镜的背面投影型图像显示装置
CN100409039C (zh) * 2003-10-17 2008-08-06 三菱树脂株式会社 反射膜
CN101180574B (zh) * 2005-06-02 2010-05-19 中央硝子株式会社 前表面镜
CN102707478A (zh) * 2006-06-30 2012-10-03 日本板硝子株式会社 液晶板用玻璃基板和包括该玻璃基板的液晶板

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JP2004325694A (ja) 2003-04-24 2004-11-18 Hitachi Ltd 背面反射鏡およびそれを用いた背面投写型映像表示装置
CN100538512C (zh) * 2003-07-03 2009-09-09 木本股份有限公司 透过型屏幕
US7678459B2 (en) * 2004-09-21 2010-03-16 Guardian Industries Corp. First surface mirror with silicon-metal oxide nucleation layer
US7276289B2 (en) * 2004-09-21 2007-10-02 Guardian Industries Corp. First surface mirror with metal oxide nucleation layer
KR100664318B1 (ko) * 2005-01-07 2007-01-04 삼성전자주식회사 프로젝션 ｔｖ
WO2008149717A1 (ja) 2007-06-08 2008-12-11 Toyo Kohan Co., Ltd. 光反射板、その製造方法及び光反射装置
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US20010004283A1 (en) 2001-06-21
JP2001235798A (ja) 2001-08-31

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