CN1078355C - 数字微镜装置的最佳电子操作方法 - Google Patents

数字微镜装置的最佳电子操作方法 Download PDF

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CN1078355C
CN1078355C CN95102761A CN95102761A CN1078355C CN 1078355 C CN1078355 C CN 1078355C CN 95102761 A CN95102761 A CN 95102761A CN 95102761 A CN95102761 A CN 95102761A CN 1078355 C CN1078355 C CN 1078355C
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CN1126843A (zh
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理查德·O·盖尔
兰德尔·S·劳森
哈兰·P·克利夫兰
亨利·朱克劳德·Ｅ·图
卡尔·W·戴维斯
斯科特·D·亨布赫
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
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    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/904—Micromirror

Abstract

一种减少应力、延长寿命、降低复位自发生率的控制数字微镜装置(40)的方法。为减少装置应力，镜面(50)封锁后减小其上偏压(142)；为防镜面状态过早改变，镜面驱动至所希位置后减小地址电极偏压(140)；为确保镜面返回中间位置，复位期间(152)镜面偏压(142)从地电位增至二地址电压之间近似的中间值；为降低铰链记忆效应，确保镜面(50)旋向恰当的地址电极，渐增镜面偏压(142)。

Description

数字微镜装置的最佳电子操作方法
本发明涉及数字微镜装置(DMD)领域，尤其涉及控制DMD的方法。
数字微镜装置见转让给德克萨斯仪器股份有限公司的、标题为“空间光调制器和方法(Spatial LightModulator and Method)”的美国专利5,061,049号。DMD含一很小的可偏转结构，具有代表性的乃为一悬吊在气隙之上的镜面。DMD的形式有好几种，每一种均根据支撑镜面的装置，包括悬臂梁、苜蓿叶(cloverleaf)和扭力梁在内而加以命名。扭力梁DMD的镜面由附装在镜面对角上的两个扭力铰链支撑着。镜面与位于镜面下的两个地址电极之间的电压差异使镜面围绕铰链轴发生偏转旋转，直至受到着陆电极的阻止。当镜面发生偏转时，投射到镜面表面上的光将受到偏转镜面的调制。
当要改变镜面位置时，向镜面施加一系列复位电压脉冲，使镜面摆脱着陆电极而释放出来。镜面的再次偏转取决于施加到地址电极和镜面之间的偏压。DMD镜面在偏转和复位时所产生的静电力使DMD的铰链和支撑结构产生应力，并可能导致支撑结构的倒塌以及铰链的过早损坏。因此需要一种既能释放被粘附的镜面又不使DMD铰链产生过应力或引起任何视觉缺点的复位方法。
本发明公开了一种空间光调制器(SLM)的偏压顺序，使(SLM)上的机械应力减小，还可减小与先前偏压顺序相关的镜面位置误差。所公开的本发明的一种实施例是通过降低镜面业已设定之后所施镜面偏压，来减小DMD铰链上应力的DMD镜面复位方法。另一种实施例借助于镜面偏转到所希位置后，减小确定镜面地址用的电压，来防止过早的镜面位置改变。为了确保复位期间镜面返回到中间的位置，本发明的另一实施例在复位期间将镜面偏压从地电位提高到介于两个地址电压之间的某一电压水平。为了减小铰链的记忆效应以及增加镜面沿正确方向偏转的几率，另一实施例则在使镜面倒向地址电极之前使镜面偏压逐渐增加。
图1是仅具有地址电极的DMD透视图。
图1b是图1所示DMD沿B-B线的截面图，显示镜面处于中间位置。
图1c是图1所示DMD沿B-B线的截面图，显示镜面处于偏转位置。
图2是图1所示DMD的示意图。
图3是将三种地址电压施加到图1所示DMD时，镜面位移随转矩的变化图。
图4是地址电极之外还具有着陆电极的DMD示意图。
图5是对图4所示DMD的两个地址施以等偏压时，镜面位移随转矩的变化关系图。
图6是对图4所示DMD的两个地址电极在单稳态地址电压下施以等偏压时，镜面位移随转矩的变化关系图。
图7是对图4所示DMD的两个地址电极在三稳态地址电压下施以等偏压时，镜面位移随转矩的变化关系图。
图8是对图4所示DMD的两个地址电极在第一双稳态地址电压下施以等偏压时，镜面位移随转矩的变化关系图。
图9是对图4所示DMD的两个地址电极在第二双稳态地址电压下施以等偏压时，镜面位移随转矩变化的关系图。
图10是各种地址电压下镜面的净势能图。
图11是现有技术中典型的DMD镜面偏压/复位波形。
图12是按照本发明第一种实施例，具有降低了镜面保持电压的典型DMD镜面偏压/复位波形。
图13是按照本发明第二种实施例，在镜面保持和复位期间具有减小了存储器偏压的典型DMD镜面偏压/复位和存储器偏压波形。
图14是按照本发明第三种实施例，在镜面复位期间具有偏移镜面偏压的典型DMD镜面偏压/复位和存储器偏压波形。
图15是按照本发明第四种实施例，显示每一时间间隔内镜面位置的典型DMD镜面偏压/复位和存储器偏压波形。
图16是产生DMD镜面偏压/复位电压波形的示意图。
正如转让给德克萨斯仪器股份公司的、标题为“空间光调制器和方法”的美国专利5,061,049号中所描述的那样，数字微镜装置(DMD)含有一悬吊于气隙之上的很小镜面。DMD的形式有好几种，包括悬臂梁、苜蓿叶和扭力梁在内。尽管所阐明的方法适用于DMD的其他形式，但为讨论方便，本发明将只涉及扭力梁DMD。图1a描述一简化了的扭力梁DMD元件20。每一扭力梁DMD元件20由一镜面26组成，它由两个附装在该镜面26对角上的扭力铰链22和24支撑着。DMD通常制作在带有绝缘层32的硅衬底34上，典型的绝缘层为衬底顶端的二氧化硅。两个地址电极28和30制作在绝缘层32上，在铰链轴的每一侧各有一个。绝缘层32上通常旋涂有平面化间隔层36，而在间隔层36上则淀积有铰链金属层38和镜面金属层39。在将镜面金属层39和铰链金属层38刻蚀成一定形状以后，就将间隔层36从镜面26和铰链22和24的下面除去。图1b是沿图1aB-B线的截面图。
元件20通过施加电压电位于镜面26或者地址电极28和30，或者更典型地施加电压电位于镜面和地址电极两者来加以操作。镜面和地址电极形成气隙电容的两个极板，施加电压于两极板上感生的正负电荷产生使镜面相对于地址电极发生偏转的静电力。图1c表示图1b所示DMD处于一偏转位置。使镜面偏转所需的电压取决于装置的结构以及这种结构所用的构筑材料。铰链的长度、宽度和厚度一类物理参数以及铰链材料控制着铰链的柔性(compliance)，后者决定使镜面偏转所需力的大小。
图2示出图1a中DMD元件的示意图。图3是施加电压Φa于图2中地址电极30上所产生转矩的近似值。图3中，τa表示由地址电极30和镜面26之间静电引力所产生的转矩，τt表示扭力铰链的恢复转矩，而α则表示镜面端点的归一化位移。此归一化位移由图2中镜面的端点位移Zt除以气隙Z得到。注意，对于0和1之间的α值，恢复转矩近似为线性，而引力则作为位移的函数而增加。如图3所示，一较小的地址电压Φa＝V1，将使处于中间，也即α＝0的镜面旋转至点P。P点处，扭力铰链的恢复转矩与地址电极的位移转矩相等而达到平衡。如果镜面在P和Q之间发生位移，则恢复转矩将使镜面返回到P点。如果镜面位移超过Q点，则引力转矩大于恢复转矩，镜面将发生旋转，直至α＝1，此时，镜面受阻于地址电极而停下。
对于Φa＝V2，点P和Q在曲线τa和τr的单个切点R处重合相交。点R(α＝αc)代表一准稳态：对于α小于αc的偏移，静转矩使α朝向αc恢复，而对于α大于αc的偏移，则静转矩导致镜面端点向着陆电极倒塌。因此V2为倒塌电压并记为Vc。对等于或大于倒塌电压的地址电压，如V3，不存在静转矩为零的点，且仅当镜面靠着地址电极30时才是稳定的。如施加地址电压于地址电极28以取代地址电极30，则镜面将以相反方向旋转。因此，对于低于Vc的地址电压，装置具有取决于地址电压的模拟偏转特性。对于高于Vc的电压，装置具有沿两个方向中任一方向全偏转的数字化特性，其偏转方向取决于地址电压偏置于哪一个地址电极上。因为其结果只有两个稳定状态，所以称此装置为双稳态。
当镜面触及地址电极时，镜面和地址电极之间的电压差异引起一大的电流尖峰。此电流尖峰会使镜面与地址电极焊接在一起，并可能熔化镜面铰链，损坏装置。为了避免电流尖峰，制作如图4所示的着陆电极46和48，以容许装置作无损双稳态运行。着陆电极维持在如镜面50的相同电位。
图5表示元件40产生的转矩，元件40具有着陆电极和接地的镜面，并对每一地址电极施以同一电压。图5中，地址电极42产生的转矩并不像图3那样增加到无限大。这是由于着陆电极46阻止镜面50的转动使之不能接近地址电极42的缘故。地址电极44产生的转矩对称于地址电极42产生的转矩。镜面50上来自地址电极42和44的静转矩用τa表示。图6至图9表示地址电压值增大时镜面50上的静转矩τa和恢复转矩τr。
图10表示不同偏压下镜面的净势能。在VB＝0的情况下，对于任一镜面位置，恢复转矩均大于地址转矩。这就导致零镜面偏转下一稳定的镜面位置。如果VB＝Vz，则存在三种稳定的镜面位置，α＝-1，0，+1。在偏压等于或大于V0时，装置仅在α±1处是稳定的。虽然在α＝0时镜面上不存在偏转力，但并不认为此不偏转的镜面是个稳定点，因为任何小的镜面偏转都将导致镜面的完全偏转。因此，对等于或大于V0的偏压，镜面将被驱动至两着陆电极之一，仅视偏压施加时的位移而定，即使并无差异的电压施加到地址电极上也如此。
因为使镜面偏转的静电力起因于镜面和地址电极之间相对的电位差，所以将地址电极接地和对镜面加偏压将与上述用同一电位对两个地址电极进行偏置以及将镜面接地具有相同的效果。同样，电压差异而非电压极性决定所产生的静电力。例如，镜面偏压-20伏与地址电极偏压+6伏将与镜面偏压+26伏和地址电极偏压0伏产生相同的静电力。本发明中，增加偏压系指增加地址电极和镜面之间的电压差。例如，如果地址电极具有电位+6.5伏，则当电压从-12伏变化到-20伏时，就使镜面偏压得以增大。
通过对或者镜面或者地址电极施加偏压而使镜面偏转的能力容许镜面由施加到地址电极上一低的电压信号而发生少量偏转，然后由施加到镜面上一较高的电压而将它驱动至着陆电极。通常施加0至+7伏的逻辑电平信号于地址电极上，而对镜面则施加0至-25伏的负电压。镜面一旦施以偏压并被驱动至着陆电极后，就可以去掉地址电压差异，或者在某些情况下颠反过来，均不会影响镜面的位置。这一现象称为镜面的机电封锁(electromechanical latching)。
图11概述按现有技术施加到扭力梁DMD上典型的镜面偏压和复位电压波形。图11中，将假定地址电压60和62为一存储器单元的差分输出，并将在0伏和+6伏的范围内变化。镜面偏压64在0伏和-20伏之间变化。尽管镜面偏压可降到低至-25伏，但大多数装置将在-5伏和-12伏之间的镜面偏压下操作。可以改变所选电压的极性和大小。如上所述，使镜面偏转所需的电压大小取决于DMD元件的物理特性。可以颠倒地址电压的极性，使镜面向相反方向偏转。也可以颠倒镜面偏压的极性。选择镜面偏压的大小以确保镜面总是驱向着陆电极。
在图11的时间间隔68期间，存储单元中保持逻辑“1”，导致+6伏电压施加于一个地址电极上。此+6伏偏压使镜朝向电极作少量旋转。于是在时间间隔70的起始阶段，对镜面施以-12伏偏置信号，导致镜面偏转至着陆电极，从而使时间间隔68和偏转极性遭到封锁。在对镜面进行偏置以后，可以将新数据写入到存储单元内，使地址信号的极性发生如图中时间间隔72内的变化。由于DMD的封锁效应(latch effects)，新数据不会影响镜面的双稳态位置。当镜面偏压去除时，镜面可向代表地址电极偏压的当前极性移动。
镜面端点通常粘附在着陆电极上，且将并不复位至等0。出现这种情况时，需一复位顺序，迫使镜面从着陆电极释放出来。复位顺序通常是一串复位脉冲。在图11时间间隔74内示出五(5)个复位脉冲。复位脉冲的目的在于积聚机械能于镜面，以便镜面从着陆电极跳开，从而使业已粘附在着陆电极上的镜面得以释放。复位脉冲增强镜面与两个地址电极之间的吸引力，并通常选择相等于镜面平板模式的谐振频率(plate mode resonant frequency)即大约5MHz，此镜面的响应时间快。由于铰链的谐振频率是个低得多的频率，故谐振并不损害铰链。
每一负电压复位脉冲均引起镜面本身向上凹弯。当断开每一脉冲时，镜面沿凹下位置发生振荡，给予端点一倾向于使它从着陆电极释放出来的反作用力。在镜面端点能够离开着陆电极之前施加以另一复位脉冲，镜面被再次吸向地址电极。每一个附加的脉冲都使振荡的幅度和端点的反作用力增加。在二至五个脉冲以后，镜面振荡达到极大，而进一步的复位脉冲不再有益。当脉冲串结束时，职聚在镜面内的机械能帮助铰链转矩，将镜面从着陆电极跳开。
复位脉冲串以后，对镜面不进行偏置，以容许它按照在时间间隔72开始时写入到存储单元内的数据发生旋转。当如在时间间隔78那样重新施加偏压时，镜面被驱动至着陆电极，而来自时间间隔76的镜面偏转极性将被封锁住。
连续施加偏压使装置结构遭受应力，从而导致铰链的永久弯曲，在最坏的情况下，造成铰链的损坏。本发明的一种实施例在镜面一旦已驱动至着陆电极，就减小镜面偏压。再回到图10，可以看出，一旦镜面已经完全偏转，一降低了的偏压例如V2将保持镜面靠在着陆电极上。
图12示出按本发明一种实施例的镜面偏压和复位波形。在时间间隔82期间，将数据写入到存储单元内，使镜面产生一小量偏转。在时间间隔84期间，施加一大于倒塌电压的镜面偏置信号，驱使镜面倒向着陆电极。在时间间隔84以后，镜面业已定下靠在着陆电极上，并可降低镜面的偏压。图12示出，在镜面保持时间间隔86期间，镜面偏压80减小到-5伏。这一-5伏镜面保持电压仅为典型的电压水平，也可以采用其他电压水平来取得相同的效果。使镜面保持在着陆电极上的电压范围决定于镜面元件的设计。一旦镜面已经驱动至着陆电极，就可以将新数据写入到存储单元内，而不会影响镜面位置。写入新数据以后，就可以如时间间隔88、90、92和94所示的那样，使镜面复位并驱动到由存储单元中新数据所确定的着陆电极上。
尽管减少镜面保持期间的镜面偏压将减小装置的机械应力，但这也将降低返回已封锁镜面至中间位置所需的能量阈值。由于地址电压是用作保持镜面向下运动的总电压差异的较大部分，所以在保持期间响应于正被定入到存储单元内的新数据，某些镜面从一个着陆电极翻向另一电极的趋势有所加重。
按照本发明的第二种实施例，除了镜面被驱动到新位置的时间间隔外，施加到地址电极上的电压可以降低。降低地址电压使地址电压对总电压差异的贡献减小，因而在镜面保持期间使镜面改变其状态的趋势得以减少。示于图13的波形是降低地址电压的一个例子，如该图所示，正当镜面驱动至着陆电极时，地址电压从6至7伏的典型高值减小到镜面正保持靠在着陆电极上时3至4伏的典型低值。降低地址电压的一个途径是改变使数据保持住的存储单元的偏置电压。1994年2月8日发布的标题为“空间光调制器用存储器电路(Memory Circuit for Spatial Light Modulator)”的美国专利5,285,407公开了一种容许本发明这一实施例得以实施的存储器电路。在美国专利5,285,407中，一复用器从两个或两个以上供存储单元进行偏置的电压中选出一个。按照本发明，只有当有必要使镜面偏转时，才会采用存储偏压复用器来选择较高的存储单元偏置电压。存储单元偏置电压的提高可以与镜面驱动偏置信号施加的同时，或更可取的是施加之前进行。尽管图13中示出，在减小镜面偏置信号之前，一直保持高的存储单元偏置电压，但当镜面一旦已被封锁便可以立即减少存储单元偏置电压。为了从降低了的地址电压获取最大益处，应当在新数据被写入到存储单元内之前减小存储单元偏置电压。
当对具有高柔性铰链的镜面用如下方式进行偏置，即地址电压是镜面从准中间位置转变到双稳态所需差异电压的显著部分时，会出现另一种误差。当镜面发生偏转并且间隔距离不大时，地址电压可以强到即使在没有偏压的情况下，也足以保持镜面在不受复位脉冲串影响的位置上。如出现这种情况，在相同极性的顺序偏转之间的时间间隔期内，镜面将不返回到中间位置，而由偏转过的镜面所反射的光量将略高于期望值。这导致脉宽调制灰色标度中出现微分非线性。
解决微分非线性问题的一个途径是减小复位和镜面驱动期间的地址电压。虽然这使非线性问题得以减少，但也减小地址的界限(ad-dress margin)而可能导致不正确的镜面定位。一个较好的解决方法是，在复位和镜面定下期间以地址电极两电压之间近似的中间值来偏置镜面。图14描绘出本发明第三种实施例的波形，说明在复位时间102期间以及随后的镜面定下时间104期间，镜面偏压提高至大约2伏。
图15示出镜面偏置/复位电压142和地址电极偏压140波形的一个例子，该例结合进至此讨论过的本发明所有三种实施例以及后文要讨论的第四种实施例。图15所示波形的下面是两行表示镜面在波形的每一时间间隔期间，相对于地址电极位置的简化图形。在时间间隔150内，由降低了的镜面保持电压将镜面保持靠在着陆电极上。在时间间隔152内，镜面正被复位，并最终自着陆电极跳开。在时间间隔154期间，镜面向中间态附近定下来。在时间间隔156期间，地址电压升高，使镜面同根据地址数据而发生偏转。镜面位置图上面一行144表示地址数据不变时的镜面位置。底下一行146表示地址数据发生变化而使镜面按顺时钟方向旋转。
在时间间隔158期间，镜面偏压逐渐增大而超过倒塌电压，引起镜面变为双稳态，并被驱动靠在着陆电极中的一个。尽管图15表示在时间间隔158期间，镜面偏压呈斜坡状，但应理解除斜坡外，还有其他形式可供选择。例如，可以用一串阶跃上升或指数式波形，或上述三种波形之组合来替代斜坡。
回忆一下根据图9，在某一足够的镜面偏压下，镜面会倒向取决于镜面位置的某一地址电极，而与地址电极偏压无关。对镜面偏置，采用除单一阶跃变化以外的其它波形，容许镜面在其偏压超过倒塌电压之前，朝向所要求的地址电极旋转，并强迫靠在最近的电极上。在理想情况下，在时间间隔154和156期间，镜面将早已朝向所要求的地址电极旋转。然而，如果镜面已经朝向某一电极而不是朝向另一电极旋转，则铰链可能产生滞后或记忆作用，并且即使在没有任何偏置信号下，镜面也将具有朝向某一电极的永久性偏移。当铰链记忆出现时，时间间隔154和156期间产生的小静电力可能不会足以使镜面旋转超过中间位置。如果镜面偏压在镜面旋转超过中间位置之前阶跃式上升超过镜面的倒塌电压，则镜面会朝向错误电极倒塌，而出现的显示将是不正确的。
逐渐增加镜面偏压将确保在倒塌之前，镜面朝向正确的地址电极旋转。在时间间隔160期间，也即在时间间隔162内正欲降低到减小了的镜面保持电压之前将镜面偏压保持在倒塌电压之上。
图16示出镜面偏压电路的一种可能的实施例，这一电路提供按照本发明所需的镜面驱动电压、保持电压和复位电压。图16中的镜面偏压电路有四个逻辑电平输入端170、172、174、176和一个输出端178。可以有五个独立的电压信号提供给这一镜面偏压电路，即通常为-8伏至-12伏之间的镜面驱动电压180，供镜面从中间位置驱动到着陆电极用；通常为-3伏至-4伏之间的镜面保持电压182，供保持镜面靠在着陆电极上用；通常为5伏的V∞184；通常为+6.5伏的存储器地址电压186；以及通常为-25伏的复位电压188。
当输入170为低电平时，晶体管190将驱动输出178连同镜面驱动电压180。选择电阻192和电容194的RC时间常数以及电路中的所有其他RC时间常数，使之长于通常为5MHz控制信号170、172、174和176的转换速度。这是为了防止任一场效应晶体管(FET)的自发地通或断。所有的FET仅当输入端170、172、174和176出现相应的低或高电平脉冲时才通和断。
当输入端172为高电平时，晶体管196驱动输出178连同镜面保持电压182。当输入端174为高电平时，晶体管对198和199驱动输出178至存储器地址电压的二分之一。采用的晶体管198和199以降低晶体管开关的有效“导通”电阻。存储器地址电压由通常具有相同阻值的电阻200和202加以分压。当输入端176为逻辑低电平时，晶体管204导通，将复位电压驱动到输出端。电阻206防止输出电压不用时输出178之漂移。
这样，尽管至此对导致降低机械应力并提高镜面定时精度的数字微镜装置复位方法用特定的实施例作了描述，这并不意味着把这样一些特定的资料看作为除后文权利要求书所述内容外对本发明范围的限制。另外，在结合某些特定实施例对本发明作了描述以后，由此要理解的是目前对本领域熟练的技术人员可以提出进一步的改进，本发明力图将所有这样一些改进均包括在所附的权利要求范围以内。

Claims (19)

1.一种使数字微镜装置复位的方法，其特征在于，它包含：
对数字微镜装置元件的一对地址电极施加偏压，其中，第一地址电压施加到第一地址电极上，第二地址电压施加到第二地址电极上，将所述第一和第二地址电压施加到所述第一和第二地址电极上是由所要求的可偏转结构的位置决定的；
用镜面偏压对所述可偏转结构进行偏置，其中，所述镜面偏压低于所述第一地址电压，但高于所述第二地址电压。
2.如权利要求1所述的方法，其特征在于，所述镜面偏压近似为所述第一地址电压和所述第二地址电压之间的中间值。
3.如权利要求1所述的方法，其特征在于，它还包含以下步骤，即改变所述镜面偏压，从而增大所述可偏转结构的偏转。
4.如权利要求3所述的方法，其特征在于，所述增大的镜面偏压使所述可偏转结构对向一着陆电极偏转。
5.如权利要求4所述的方法，其特征在于，它还包含以下步骤，即减小所述镜面偏压。
6.如权利要求1所述的方法，其特征在于，增大所述第一地址电压，从而增大所述可偏转结构的偏转。
7.一种操作数字微镜装置的方法，其特征在于，它包含：对数字微镜装置元件的一对地址电极施加偏压，其中，第一地址电压施加到第一地址电极上，第二地址电压施加到第二地址电极上；
用镜面偏压对可偏转结构进行偏置；
增大施加到所述第一地址电极上的偏压，从而增大所述可偏转结构的偏转。
8.如权利要求7所述的方法，其特征在于，所述镜面偏压小于所述第一地址电压，但大于所述第二地址电压。
9.如权利要求7所述的方法，其特征在于，所述镜面偏压近似为第一地址电压和第二地址电压之间的中间值。
10.如权利要求7所述的方法，其特征在于，它还包含以下步骤，即改变所述镜面偏压，从而增大所述可偏转结构的偏转。
11.如权利要求10所述的方法，其特征在于，所述改变的镜面偏压使所述可偏转结构对向着陆电极偏转。
12.如权利要求11所述的方法，其特征在于，它还包含以下步骤，即减小所述镜面偏压。
13.如权利要求12所述的方法，其特征在于，在所述偏压减小以后，所述可偏转结构保持与所述着陆电极相接触。
14.一种使数字微镜装置复位的方法，其特征在于，它包含：
对数字微镜装置元件的一对电极施加偏压，其中，第一地址电压施加到第一地址电极上，第二地址电压施加到第二地址电极上，将所述第一和第二地址电压施加到所述第一和第二地址电极上是由所要求的可偏转结构的位置决定的；
用镜面偏压对所述可偏转结构进行偏置；
逐渐改变所述镜面偏压，从而增大所述可偏转结构的偏转。
15.如权利要求14所述的方法，其特征在于，所述改变电压的步骤包含对所述可偏转结构进行斜坡偏置。
16.如权利要求14所述的方法，其特征在于，所述改变电压的步骤包含至少以两个分立的阶跃来改变施加到所述可偏转结构上的偏压。
17.一种对数字微镜装置施加偏压的方法，其特征在于，它包含：
将镜面偏压施加到可偏转结构，其中，所述镜面偏压大于使所述可偏转结构偏转至极限位置所需电压的最小值；
在所述可偏转结构被驱动到所述极限位置以后，减小所述镜面偏压。
18.如权利要求17所述的方法，其特征在于，所述镜面偏压是一个负电压。
19.如权利要求17所述的方法，其特征在于，所述镜面偏压是一个正电压。
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CN1126843A (zh) 1996-07-17
EP0671644A1 (en) 1995-09-13
US5444566A (en) 1995-08-22
JPH07294832A (ja) 1995-11-10
KR100368366B1 (ko) 2003-03-28
JP3921247B2 (ja) 2007-05-30
CA2143079C (en) 2005-08-23
KR950033555A (ko) 1995-12-26
TW266349B (zh) 1995-12-21
DE69521350D1 (de) 2001-07-26
DE69521350T2 (de) 2002-05-02
CA2143079A1 (en) 1995-09-08

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