CN105676448A - Focusing micro-mirror and focusing device - Google Patents
Focusing micro-mirror and focusing device Download PDFInfo
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- CN105676448A CN105676448A CN201610230767.2A CN201610230767A CN105676448A CN 105676448 A CN105676448 A CN 105676448A CN 201610230767 A CN201610230767 A CN 201610230767A CN 105676448 A CN105676448 A CN 105676448A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
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- Mechanical Light Control Or Optical Switches (AREA)
Abstract
The invention relates to the technical field of optical elements, and specifically relates to a focusing micro-mirror and a focusing device. The focusing micro-mirror comprises a reflective body used for reflecting light, and the side surface, used for reflecting light, of the reflective body is a reflective surface. The focusing micro-mirror further comprises a conductive part I and a conductive part II which are isolated from each other. When same charges or opposite charges are supplied to the conductive part I and the conductive part II, a repulsion or attraction force is generated between the conductive part I and the conductive part II, the reflective surface is enabled to deform to connect the conductive part I and the conductive part II respectively with two electrodes of a power supply, and by adjusting the voltage of the power supply, the curvature of the reflective surface is adjusted, so that the focal length of the micro-mirror is adjusted. According to the invention, the structure is simple, the operation is convenient; in addition, at least two focusing micro-mirrors are spliced to form the focusing device, the reflective surfaces of all focusing micro-mirrors are combined to form a larger reflective surface, and a micro-mirror array adjustable in focal length can be formed.
Description
Technical field
The present invention relates to optical element technology field, it is specifically related to the micro-mirror of a kind of focusing and a kind of focusing device.
Background technology
For being undertaken splitting by light beam and the micro mirror array focused on respectively is one of the important research content in Information Optics field, show in optical communication, optical oomputing, light network, photoelectronic detecting array, imaging, light beam shaping and control, light display, the numerous areas such as sensing is widely used.
Traditional micro-mirror its focal length after processing and fabricating completes is fixing, and thus optical property and function are also just determined completely, can not regulate and control. Due to the needs of control, the micro-mirror of adjustable focus engenders in recent years, but the micro-mirror of current adjustable focus changes, by means such as power, heat, electricity, the adjustment that mirror shape realizes focusing, such as liquid-type adjustable focus microlens, complex structure and volume are big, thus, it is necessary to a kind of structure simply can regulate the device of micro-mirror focal length.
Summary of the invention
It is an object of the invention to: for the problem of current adjustable focus micro-mirror structure complexity, it is provided that a kind of structure is simply focused micro-mirror.
In order to realize above-mentioned purpose, the technical solution used in the present invention is:
The micro-mirror of a kind of focusing, comprises the refractive body for reflecting light, and for reflecting, the side of light is reflective surface to described refractive body; Also comprise the conductive component first and conductive component second that are spaced apart, in described conductive component first and described conductive component second when colluding property or the charges of different polarity, produce between conductive component first and conductive component second to repel each other or attracting power, make described reflective surface generation deformation.
In this scheme, support member supports refractive body, but refractive body is central unsettled, that is, the middle section of refractive body does not have supported member to support, conductive component first and conductive component second connect two electrodes of power supply respectively, make in conductive component first and conductive component second with the charges of different polarity, thus, can mutually attract between conductive component first and conductive component second, along with the increase of voltage of supply, amount of charge in conductive component first and conductive component second increases, conductive component first moves to conductive component second gradually, and conductive component first is fixedly installed on refractive body and refractive body by support member supports, the region that refractive body is fixedly installed conductive component first is moved to conductive component second gradually under the effect of conductive component first, and the part contacted with support component on refractive body can not move or the displacement amount of movement is less than the mobile amount of conductive component first, so, refractive body depression gradually, the plane of reflection of refractive body becomes a recessed curved surface, and the curvature of recessed curved surface is increasing, thus, the focal length achieving reflective surface changes, so, the adjustment of the reflective focal length of refractive body can be realized.
This scheme is compared with prior art, it does not have liquid-type becomes the enclosed space needed for burnt micro-mirror, and one-piece construction only has simple structure to form, and structure is simpler.
As preferably, described conductive component first, conductive component second and refractive body are positioned opposite, described conductive component first is arranged between described conductive component second and refractive body, described conductive component first is arranged on described refractive body, described conductive component second and conductive component first separate suitable distance, so, can mutually attract after the charges of different polarity in conductive component first and conductive component second band, it is arranged between conductive component second and refractive body due to conductive component first, and conductive component first is fixedly installed on refractive body, so, the part that refractive body and conductive component first are fixed can move to conductive component second under the drive of conductive component first, thus refractive body can cave in, curvature can change.
As preferably, also comprise for keeping the peripheral edge portion of described refractive body to fix, and make support component unsettled in the middle part of described refractive body, that is, support component is arranged on the edge of described refractive body side, so, under same magnetism effect, when support component is arranged on the edge of refractive body side, the recessed degree of refractive body is bigger, that is the curvature of reflective surface is less, and the scope of focus adjustment is bigger.
As preferably, described support component is electrical conductor, so, the conductive component first that electric current is passed on refractive body by support component, and do not need to arrange wire specially, it is possible to simplification device further.
As preferably, described support component is the supporting pile of vertical bar shaped, especially, it is cylindrical supporting pile, so, it is easy to manufacture, cheap for manufacturing cost.
As preferably, described support component comprises the supporting traverse of vertical bar shaped, the two ends of described supporting traverse are provided with one and aid the border areas, these two aid the border areas in one aid the border areas and extend to form the support portion of refractive body to refractive body, another is aided the border areas and deviates from the fixing portion that refractive body extends to form support component, so, compared with the supporting pile of vertical bar shaped, support component in this scheme has elasticity better, can obtain bigger focusing scope under same driving voltage.
As preferably, described conductive component first is fixedly installed on the central authorities of the side of described refractive body, is not arranged on the central authorities of refractive body side compared to conductive component first, and the degree that the refractive body of this scheme is recessed is bigger, that is the curvature of reflective surface is less, and the scope of focus adjustment is bigger.
As preferably, described refractive body and conductive component first are integral type structure, described conductive component first being coated with specular material and forms described reflective surface, so, structure is more simple, firmly stable.
As preferably, described conductive component first and/or described conductive component second are made up of conductor material and/or semiconductor material.
Disclosed herein as well is a kind of focusing device, comprise at least two micro-mirrors of above-mentioned focusing, the micro-mirror of described focusing adjacent layout successively, makes the reflective surface of the micro-mirror of all focusing be combined to form the bigger reflective surface of area, so, bigger reflective surface can be obtained, in addition, described focusing device can make light beam be focused to one one dimension or two dimension luminous point battle array, thus is separated by light beam and adjustable dot matrix focal position, especially, each micro-mirror of focusing is by independent Energy control.
In sum, owing to have employed technique scheme, the useful effect of the application is:
1, structure is simple: compared with prior art, it does not have liquid-type becomes the enclosed space needed for burnt micro-mirror, and one-piece construction only has simple structure to form, and structure is simpler;
2, scope of focusing is bigger: owing to the simple thus minute surface bore of structure is easy to reduce, and has bigger focusing scope according to the known device that bore is less under same distortion of focal length calculation formula;
3, regulating speed faster: the present invention adopts electrostatic means to drive, and the generation of electrostatic field and disappearance speed are very fast, the less lighter weight of present configuration simple minute surface bore in addition, has response speed faster. By comparison, adopting thermal expansion mode to change the process having energising, heating, expansion, heat radiation, contraction in the scheme implementation of curvature mirror, wherein especially radiation processes speed is relatively slow, and influenced by ambient temperature very big. In addition, the micro-mirror of focusing of the scheme such as LCD space light modulator is adopted thus to regulate speed slower due to the pole slow-response speed of liquid crystal molecule.
Accompanying drawing explanation
Fig. 1 is the structural representation of micro-mirror of focusing;
Fig. 2 is the component composition schematic diagram of Fig. 1;
Fig. 3 is the front pseudosection of Fig. 1;
Fig. 4 is another kind of view of Fig. 3;
Fig. 5 is another kind of view of Fig. 4;
Fig. 6 is another kind of view of Fig. 5;
Fig. 7 is another kind of view of Fig. 6;
Fig. 8 is the upward view of Fig. 1;
Fig. 9 is the upward view of another kind of structure of the micro-mirror of focusing being different from Fig. 1;
Figure 10 is the upward view of another kind of structure of the micro-mirror of focusing being different from Fig. 1;
Figure 11 is the upward view of another kind of structure of the micro-mirror of focusing being different from Fig. 1;
Figure 12 is the front view of another kind of structure of micro-mirror of focusing;
Figure 13 is the upward view of Figure 12;
Figure 14 is the structural representation of setting device;
Figure marks: 1-refractive body, 2-support component, 21-supporting traverse, 211 support portions, 212-fixes portion, 22-supporting pile, 3-conductive component first, 4-conductive component second.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in detail.
In order to make the object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated. It is to be understood that specific embodiment described herein is only in order to explain the present invention, it is not intended to limit the present invention.
Embodiment 1:
Such as Fig. 1～11, the micro-mirror of a kind of focusing, comprises the refractive body 1 for reflecting light, and for reflecting, the side of light is reflective surface 11 to refractive body 1; Also comprise the conductive component first 3 and conductive component second 4 that are spaced apart, in conductive component first 3 and conductive component second 4 when colluding property or the charges of different polarity, produce between conductive component first 3 and conductive component second 4 to repel each other or attracting power, make reflective surface 11 that deformation occur.
Conductive component first 3, conductive component second 4 and refractive body 1 are positioned opposite, conductive component first 3 is arranged between conductive component second 4 and refractive body 1, conductive component first 3 is fixedly installed on refractive body 1, conductive component second 4 and conductive component first 3 separate suitable distance, this suitable distance is when there is maximum permission deformation in refractive body 1, conductive component first 3 does not contact with conductive component second 4, so, can mutually attract after conductive component first 3 and conductive component second 4 bring the charges of different polarity, owing to conductive component first 3 is arranged between conductive component second 4 and refractive body 1, and conductive component first 3 is fixedly installed on refractive body 1, so, refractive body 1 can move to conductive component second 4 with the fixing part of conductive component first 3 under the drive of conductive component first 3, thus refractive body 1 can cave in, curvature can change.
Also comprise for keeping the peripheral edge portion of refractive body 1 to fix, and make support component 2 unsettled in the middle part of refractive body 1, that is, support component 2 is arranged on the edge of refractive body 1 side, so, under same magnetism effect, when support component 2 is arranged on the edge of refractive body 1 side, the recessed degree of refractive body 1 is bigger, and that is the curvature of reflective surface 11 is less, and the scope of focus adjustment is bigger.
Support component 2 is electrical conductor, so, and the conductive component first 3 that electric current is passed on refractive body 1 by support component 2, and do not need to arrange wire specially, it is possible to simplification device further.
Such as Figure 12 and 13, support component 2 is the supporting pile 22 of vertical bar shaped, especially, is cylindrical supporting pile, so, it is easy to manufacture, cheap for manufacturing cost.
Or, such as Fig. 1～12, support component 2 comprises the supporting traverse 21 of vertical bar shaped, the two ends of supporting traverse 21 are provided with one and aid the border areas, these two aid the border areas in one aid the border areas and extend to form the support portion 211 of refractive body 1 to refractive body 1, another is aided the border areas and deviates from the fixing portion 212 that refractive body 1 extends to form support component 2, so, compared with the supporting pile 22 of vertical bar shaped, the support component 2 in this scheme can obtain bigger focusing scope.
Conductive component first 3 is fixedly installed on the central authorities of the side of refractive body 1, the central authorities of refractive body 1 side it are not arranged on compared to conductive component first 3, the recessed degree of the refractive body 1 of this scheme is bigger, and that is the curvature of reflective surface 11 is less, and the scope of focus adjustment is bigger.
Refractive body 1 and conductive component first 3 are integral type structure, conductive component first 3 is coated with specular material and forms reflective surface 11, so, structure is simpler, firmly stable, specular material is the material manufacturing optical reflecting mirror, usually need to add the good material (such as chemical Ni-plating layer) of plating one layer of polishing performance on surface, then carry out optical precision processing.
Conductive component first 3 and/or conductive component second 4 are made up of conductor material and/or semiconductor material.
In an embodiment, conductive component first 3 and conductive component second 4 connect two electrodes of power supply respectively, make in conductive component first 3 and conductive component second 4 with the charges of different polarity, thus, can mutually attract between conductive component first 3 and conductive component second 4, along with the increase of voltage of supply, amount of charge in conductive component first 3 and conductive component second 4 increases, conductive component first 3 moves to conductive component second 4 gradually, and conductive component first 3 is fixedly installed on refractive body 1 and refractive body 1 is supported by support component 2, the region that refractive body 1 is fixedly installed conductive component first 3 is moved to conductive component second 4 gradually under the effect of conductive component first 3, and refractive body 1 can not move to the part contacted with support component 2 or the displacement amount of movement is less than the mobile amount of conductive component first 3, so, refractive body 1 depression gradually, the plane of reflection of refractive body 1 becomes a recessed curved surface, and the curvature of recessed curved surface is increasing, thus, the focal length achieving reflective surface changes, so, the adjustment of the reflective focal length of refractive body 1 can be realized.
With reference to Fig. 1 and Fig. 3, being the state of the application when normal placement does not add electric drive, now the reflected light of incident parallel light after micromirror reflects is still parallel light. If adding generating positive and negative voltage respectively to conductive component first 3 and conductive component second 4, therebetween electrostatic attraction will be produced in conductive component first 3 and conductive component second 4, then conductive component first 3 can be moved downward by attraction, drive the support component 2 being fixedly connected with it to bend, change to state as shown in Figure 4. In this moving process, the reflective surface 11 of refractive body 1 is flat always, only just moves up and down and can not deform, and thus incident parallel light is still parallel light after reflection, the same with the situation in Fig. 3.
Along with applying voltage increases, it is more and more that what conductive component first 3 was downward moves amount.When voltage reaches after to a certain degree, the lower surface edge of conductive component first 3 by the upper surface with support component 2, as shown in Figure 5. Now owing to stopping by the upper surface of support component 2, the part that conductive component first 3 contacts with support component 2 cannot move downward further, and downward amount of exercise reaches maximum value. Now that the reflection of incident light is still identical with Fig. 3 with Fig. 4.
After increasing driving voltage further, the magnetism that conductive component first 3 is subject to conductive component second 4 will increase further. Owing to the edge section supported member 2 of conductive component first 3 supports and middle portion is unsettled, magnetism will cause that middle portion is out of shape downwards and edge section is constant, namely the upper surface of conductive component first 3 turns into recessed sphere, simultaneously, being the one layer of specular material being coated in conductive component first 3 upper surface due to refractive body 1, therefore, the reflective surface 11 of refractive body 1 also turns into recessed sphere, thus incident light can be realized reflect focalization, as shown in Figure 6. It it is the half of reflective surface 11 radius-of-curvature of refractive body 1 by the theoretical known focusing length of optical design and focal length.
If increasing driving voltage further, conductive component first 3 middle portion is out of shape downwards will be more, and the radius-of-curvature of the reflective surface 11 of refractive body 1 reduces further, as shown in Figure 7. Obviously now focal length also can reduce further, thus realizes the autonomous controllable adjustment to micro-mirror focal length.
After finishing using, remove the voltage being applied to above conductive component first 3 and conductive component second 4, then electrostatic attraction disappears, due to the elasticity of conductive component first 3 self, it will become flat again, and support component 2 also can become state as shown in Figure 1 again due to the elasticity of self, and whole structure will return to initial position, namely the state shown in Fig. 1 is returned to, such that it is able to realize Reusability.
The conductive component first 3 of the micro-mirror of adjustable focus that the application proposes can be Polygons or circle, that is the negative side of refractive body 1 can be Polygons or circle, shown in Fig. 1 is the three-dimensional structure of micro-mirror of tetragon conductive component first 3, reflective surface 11 is also tetragon, it is hexagon and micro-mirror structure upward view time circular that Figure 10 and Figure 11 then sets forth conductive component first 3, accordingly, the reflective surface 11 of Figure 10 and Figure 11 is also be hexagon and circle respectively.
Except conductive component first 3, conductive component second 4 can also be Polygons or the circle of any limit number, it is hexagon and situation time circular that Figure 10 and Figure 11 sets forth conductive component second 4. In addition, the shape of conductive component second 4 might not be answered with the shape of conductive component first 3, and namely Figure 11 is that for circle, conductive component second 4 is pentagonal situation to conductive component first 3.
The support component 2 of the micro-mirror of adjustable focus that the application proposes can be straight or curved, Figure 10 and Figure 11 sets forth situation when support component 2 is straight and curved. In addition, support component 2 straight or curved might not with whether conductive component first 3 be circular corresponding, namely Fig. 9 is conductive component first 3 is circular and situation when support component 2 is straight. With reason, support component 2 straight or curved also might not with whether conductive component second 4 be circular corresponding, namely Figure 11 is the situation of conductive component second 4 when support component 2 is curved for pentagon.
No matter support component 2 is straight or curved, and its quantity all can be three, four, five and even more, and namely Figure 10 is support component 2 is straight and has the situation of the six roots of sensation, and namely Fig. 1～8 and Figure 11 are the situations that support component 2 has four.In addition, the radical of support component 2 might not be corresponding with the limit quantity of conductive component first 3 or conductive component second 4, and namely Figure 11 is that support component 2 has four and conductive component second 4 is pentagonal situation.
Embodiment 2:
Such as Figure 12～13, the micro-mirror of a kind of focusing, comprise the refractive body 1 of circular plate type, cylindrical supporting pile 22, cylindrical conductive component first 3 and cylindrical conductive component second 4, four supporting piles 22 fixedly support refractive body 1, the upper surface of refractive body 1 is reflective surface 11, and the lower surface central authorities of refractive body 1 are fixedly installed a conductive component first 3, in the underface of conductive component first 3, being fixedly installed a conductive component second 4, conductive component first 3 and conductive component second are spaced a distance. The present embodiment is another kind of distortion of embodiment 1, the difference main with embodiment 1 is that refractive body is no longer coat, but the refractive body of a monoblock, conductive component first is the central authorities being fixedly installed on refractive body lower surface, in addition, other feature mutation in embodiment 1 all can be applicable to embodiment 2.
Embodiment 3:
As shown in figure 14, a kind of focusing device, comprise at least two micro-mirrors of above-mentioned focusing, the micro-mirror of described focusing adjacent layout successively, the reflective surface of the micro-mirror of all focusing is made to be combined to form bigger reflective surface, so, bigger reflective surface can be obtained, adjustable focus micro mirror array can be realized, in addition, described focusing device can make light beam be focused to one one dimension or two dimension luminous point battle array, thus light beam is separated and adjustable dot matrix focal position, same mode just can realize array that is thousands of and even up to a million the micro-mirror compositions of adjustable focus, especially, each micro-mirror of focusing is by independent Energy control.
All any amendment, equivalent replacement and improvement etc. done within the spirit and principles in the present invention, all should be included within protection scope of the present invention.
Claims (10)
1. the micro-mirror of focusing, it is characterised in that, comprise the refractive body for reflecting light, for reflecting, the side of light is reflective surface to described refractive body; Also comprise the conductive component first and conductive component second that are spaced apart, in described conductive component first and described conductive component second when colluding property or the charges of different polarity, produce between conductive component first and conductive component second to repel each other or attracting power, make described reflective surface generation deformation.
2. the micro-mirror of focusing according to claim 1, it is characterized in that, described conductive component first, conductive component second and refractive body are positioned opposite, described conductive component first is arranged between described conductive component second and refractive body, described conductive component first is arranged on described refractive body, and described conductive component second and conductive component first separate suitable distance.
3. the micro-mirror of focusing according to claim 2, it is characterised in that, also comprise for keeping the peripheral edge portion of described refractive body to fix, and make support component unsettled in the middle part of described refractive body.
4. the micro-mirror of focusing according to claim 3, it is characterised in that, described support component is electrical conductor.
5. the micro-mirror of focusing according to claim 3 or 4, it is characterised in that, described support component is the supporting pile of vertical bar shaped.
6. the micro-mirror of focusing according to claim 3 or 4, it is characterized in that, described support component comprises the supporting traverse of vertical bar shaped, the two ends of described supporting traverse are provided with one and aid the border areas, these two aid the border areas in one aid the border areas and extend to form the support portion of refractive body to refractive body, another is aided the border areas and deviates from the fixing portion that refractive body extends to form support component.
7. the micro-mirror of focusing according to claim 1～6 any one, it is characterised in that, described conductive component first is fixedly installed on the central authorities of the side of described refractive body.
8. the micro-mirror of focusing according to claim 1～7 any one, it is characterised in that, described refractive body and conductive component first are integral type structure, described conductive component first is coated with specular material and forms described reflective surface.
9. the micro-mirror of focusing according to claim 1～8 any one, it is characterised in that, described conductive component first and/or described conductive component second are made up of conductor material and/or semiconductor material.
10. a focusing device, it is characterised in that, comprise the micro-mirror of described focusing described at least two claim 1～9 any one, the micro-mirror of described focusing adjacent layout successively, make the reflective surface of the micro-mirror of all focusing be combined to form the bigger reflective surface of area.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610230767.2A CN105676448B (en) | 2016-04-14 | 2016-04-14 | A kind of focusing micro mirror and a kind of focus control |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610230767.2A CN105676448B (en) | 2016-04-14 | 2016-04-14 | A kind of focusing micro mirror and a kind of focus control |
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| CN105676448B CN105676448B (en) | 2018-12-11 |
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| CN112327474A (en) * | 2020-11-11 | 2021-02-05 | 中国科学院上海技术物理研究所 | Micro-mirror structure and forming method, micro-mirror array and detector |
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| Publication number | Publication date |
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| CN105676448B (en) | 2018-12-11 |
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