CN105649986A - Anti-impact structure used for multi-level vacuum pump and multi-stage vacuum pump comprising same - Google Patents
Anti-impact structure used for multi-level vacuum pump and multi-stage vacuum pump comprising same Download PDFInfo
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- CN105649986A CN105649986A CN201410629537.4A CN201410629537A CN105649986A CN 105649986 A CN105649986 A CN 105649986A CN 201410629537 A CN201410629537 A CN 201410629537A CN 105649986 A CN105649986 A CN 105649986A
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- vacuum pump
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Abstract
The invention relates to the technical field of vacuum pumps, in particular to an anti-impact structure used for a multi-level vacuum pump and the multi-level vacuum pump comprising the same. The anti-impact structure used for the multi-level vacuum pump comprises a vacuum pump cavity, a pressure control valve, an exhaust switch valve and an impact pipeline, wherein the vacuum pump cavity is provided with a cavity exhaust outlet, one end of the impact pipeline communicates with the cavity exhaust outlet, the other end of the impact pipeline communicates with an exhaust pipeline of the multi-level vacuum pump, and the impact pipeline is provided with the pressure control valve and/or the exhaust switch valve. A first-level vacuum pump cavity and a second-level vacuum pump cavity of the multi-level vacuum pump are both provided with the anti-impact structures. According to the anti-impact structure used for the multi-level vacuum pump and the multi-level vacuum pump comprising the same, compressed working media with allowable exhaust pressure are directly discharged to the exhaust outlets, and due to the fact that the compression processes are reduced, countercurrent flow caused by the cavity level pressure difference can be reduced, and the pumping speed at a low vacuum stage can be increased.
Description
Technical field
The present invention relates to vacuum pump technology field, specifically a kind of protecting against shock structure for multistage vacuum pump and the multistage vacuum pump with this structure.
Background technology
Can by pump chamber and rotor compression working medium when working medium drawn by vacuum pump, bigger compression ratio can be formed, the numerical value of compression ratio is often between 3��100, the compression ratio of general mechanical type vacuum pump is between 2��15, the method of the actual compression ratio measuring pump measures the pressure of pump inlet mouth and venting port, the inlet mouth pressure of such as lobe pump is 1Pa, and the back pressure that prime provides is 15Pa, and the compression ratio of this pump ascends the throne 15. When fixing compression ratio, multistage vacuum pump draws the working medium of 1 barometric point, the theoretical value of 15 barometric points can be formed in exhaust port pressure, according to experience, this pressure also can between 2��3 normal atmosphere, and multistage vacuum pump exhaust pressure is about 2 normal atmosphere, this pump has reached exhaust conditions at first step venting port after overdraft, because pipeline reason, continue the rank being passed to below, then compress.
The Calculation of Pumping of vacuum pump is S=Q/t, wherein S: vacuum pumping speed; Q: the gas volume of extraction; T: bleed the time.
The gas volume Q=Q that vacuum pump extracts at work1-Q2, wherein Q1: theoretical pumping speed; Q2: the amount of backflowing, and the amount of backflowing Q2Depend on Q2=�� P/L, wherein �� P: the pressure reduction of vacuum pump inlet mouth and venting port; L: the flow resistance of backflowing of vacuum pump, the flow resistance L that backflows of vacuum pump are definite values; Namely pumping speed can be caused decisive influence by the pressure reduction of vacuum pump inlet mouth and venting port.
In compression process as above, working medium pressure is higher, and the relative pressure reduction between each rank also can raise, and backflowing of cavity can increase; The pumping speed of pump at low-pressure stage can be affected.
Summary of the invention
For the problems referred to above, it is an object of the invention to provide a kind of protecting against shock structure for multistage vacuum pump and there is the multistage vacuum pump of this structure.
In order to realize above-mentioned purpose, the present invention by the following technical solutions:
A kind of protecting against shock structure for multistage vacuum pump, comprise vacuum pump cavity, pressure control valve, exhaust switchover valve door and impact pipeline, wherein vacuum pump cavity is provided with cavity venting port, one end of described impact pipeline is connected with described cavity venting port, the other end is connected with the pump exhaust line of multistage vacuum pump, and described impact pipeline is provided with pressure control valve and/or exhaust switchover valve door.
Cavity exhaust ports on described vacuum pump cavity is provided with the exhaust pressure sensor controlling valve for control pressure. Described cavity venting port is arranged at the bottom of vacuum pump cavity.
The one-level cavity of described multistage vacuum pump and secondary cavity are equipped with described protecting against shock structure. Described multistage vacuum pump is at least three grades of vacuum pumps.
Advantage and the useful effect of the present invention be: the working medium reaching exhaust pressure allowable through overdraft is directly discharged into exhaust ports by the present invention, owing to compression process reduces, the reflux owing to cavity rank pressure difference produces can be reduced, it is possible to improve the pumping speed in the rough vacuum stage.
Figure of description
Fig. 1 is the structural representation of protecting against shock structure in the present invention;
Fig. 2 is the structural representation of the multistage vacuum pump in the present invention with protecting against shock structure.
Wherein: 1 is vacuum pump cavity, 2 is exhaust pressure sensor, and 3 is pressure controlled valve, and 4 is exhaust switchover valve, 5 for impacting pipeline, and 10 is one-level cavity, and 11 is secondary cavity, and 12 is Pyatyi cavity, 13 is one-level protecting against shock exhaust structure, and 14 is two grades of protecting against shock exhaust structures, and 15 is pump exhaust line.
Embodiment
Below in conjunction with accompanying drawing, the invention will be further described.
As shown in Figure 1, the protecting against shock structure that the present invention is used for multistage vacuum pump comprises vacuum pump cavity 1, pressure control valve 3, exhaust switchover valve door 4 and impacts pipeline 5, wherein vacuum pump cavity 1 is provided with cavity venting port, one end of described impact pipeline 5 is connected with described cavity venting port, the other end is connected with the exhaust line of multistage vacuum pump, and described impact pipeline 5 is provided with pressure control valve 3 and/or exhaust switchover valve door 4. Cavity exhaust ports on described vacuum pump cavity 1 is provided with the exhaust pressure sensor 2 controlling valve 3 for control pressure, and described cavity venting port is arranged at the bottom of vacuum pump cavity 1.
As shown in Figure 2, a kind of multistage vacuum pump with protecting against shock structure, the one-level cavity 10 of described multistage vacuum pump and secondary cavity 11 are equipped with described protecting against shock structure. Described multistage vacuum pump is at least three grades of vacuum pumps, and the present embodiment adopts Pyatyi vacuum pump.
Described multistage vacuum pump can complete when the process gas that extraction pressure is higher, when reaching the exhaust pressure of one-level or two grades, the process gas that this rank vacuum pump outlet pressure control valve 3 controls, the process discharged to exhaust line via impact pipeline 5.
Embodiment one
A kind of protecting against shock structure for multistage vacuum pump comprises vacuum pump cavity 1, pressure control valve 3, exhaust switchover valve door 4 and impacts pipeline 5, wherein the bottom of vacuum pump cavity 1 is provided with cavity venting port, one end of described impact pipeline 5 is connected with described cavity venting port, the other end is connected with the exhaust line of multistage vacuum pump, and described impact pipeline 5 is provided with pressure control valve 3 and exhaust switchover valve door 4. Described cavity exhaust ports is provided with the exhaust pressure sensor 2 controlling valve 3 for control pressure.Described protecting against shock structure can complete this grade of vacuum pump when the process gas that extraction pressure is higher, and when reaching the exhaust pressure of this rank vacuum pump setting, to the process that exhaust line is exhausted.
Embodiment two
A kind of protecting against shock structure for multistage vacuum pump comprises vacuum pump cavity 1, pressure control valve 3 and impacts pipeline 5, wherein the bottom of vacuum pump cavity 1 is provided with cavity venting port, one end of described impact pipeline 5 is connected with described cavity venting port, the other end is connected with the exhaust line of multistage vacuum pump, described impact pipeline 5 is provided with pressure control valve 3, and described cavity exhaust ports is provided with the exhaust pressure sensor 2 controlling valve 3 for control pressure. Described protecting against shock structure can complete this grade of vacuum pump when the process gas that extraction pressure is higher, and when reaching the exhaust pressure of this rank vacuum pump setting, to the process that exhaust line is exhausted.
Embodiment three
A kind of protecting against shock structure for multistage vacuum pump comprises vacuum pump cavity 1, exhaust switchover valve door 4 and impacts pipeline 5, wherein the bottom of vacuum pump cavity 1 is provided with cavity venting port, one end of described impact pipeline 5 is connected with described cavity venting port, the other end is connected with the exhaust line of multistage vacuum pump, and described impact pipeline 5 is provided with exhaust switchover valve door 4. Described protecting against shock structure can complete this grade of vacuum pump when the process gas that extraction pressure is higher, and when reaching the exhaust pressure of this rank vacuum pump setting, to the process that exhaust line is exhausted.
Described protecting against shock structure can be implemented in the impact protection of multistage vacuum pump for pump under atmosphere pressure state of load chamber, frequent operation such as unloading chamber etc. In reality technique, when extracting air, under the effect of exhaust switchover valve door 4 and pressure control valve 3, process gas is directly discharged into pump exhaust inlet or other pump chamber of later stages via exhaust line, and then is discharged to air outlet. Therefore, the process gas that one-level cavity compresses directly has been discharged into venting port by the present invention, reduce by two, three, four, Pyatyi cavity carries out vacuumizing the load produced, in addition owing to compression process reduces, the reflux owing to cavity rank pressure difference produces can be reduced, it is possible to improve the pumping speed in the rough vacuum stage.
Claims (5)
1. the protecting against shock structure for multistage vacuum pump, it is characterized in that: comprise vacuum pump cavity (1), pressure control valve (3), exhaust switchover valve door (4) and impact pipeline (5), wherein vacuum pump cavity (1) is provided with cavity venting port, one end of described impact pipeline (5) is connected with described cavity venting port, the other end is connected with the pump exhaust line of multistage vacuum pump, and described impact pipeline (5) is provided with pressure control valve (3) and/or exhaust switchover valve door (4).
2. by the protecting against shock structure for multistage vacuum pump according to claim 1, it is characterised in that: the cavity exhaust ports on described vacuum pump cavity (1) is provided with the exhaust pressure sensor (2) controlling valve (3) for control pressure.
3. by the protecting against shock structure for multistage vacuum pump according to claim 1, it is characterised in that: described cavity venting port is arranged at the bottom of vacuum pump cavity (1).
4. one kind has the multistage vacuum pump of the described protecting against shock structure of the arbitrary item of claim 1-3, it is characterised in that: the one-level cavity (10) of described multistage vacuum pump and secondary cavity (11) are equipped with described protecting against shock structure.
5. by multistage vacuum pump according to claim 4, it is characterised in that: described multistage vacuum pump is at least three grades of vacuum pumps.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410629537.4A CN105649986B (en) | 2014-11-10 | 2014-11-10 | Impact-proof structure for multistage vacuum pump and the multistage vacuum pump with the structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410629537.4A CN105649986B (en) | 2014-11-10 | 2014-11-10 | Impact-proof structure for multistage vacuum pump and the multistage vacuum pump with the structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105649986A true CN105649986A (en) | 2016-06-08 |
| CN105649986B CN105649986B (en) | 2018-07-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410629537.4A Active CN105649986B (en) | 2014-11-10 | 2014-11-10 | Impact-proof structure for multistage vacuum pump and the multistage vacuum pump with the structure |
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Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4655688A (en) * | 1984-05-30 | 1987-04-07 | Itt Industries, Inc. | Control for liquid ring vacuum pumps |
| DE3639512A1 (en) * | 1986-11-20 | 1988-06-01 | Alcatel Hochvakuumtechnik Gmbh | Vacuum pump system with a Roots pump |
| JPS63208691A (en) * | 1987-02-26 | 1988-08-30 | Hitachi Ltd | Operation of inverter-driven oil-free screw vacuum pump |
| CN2268790Y (en) * | 1996-06-21 | 1997-11-26 | 荣道发 | Mechanical vacuum pump with two stage oil seals |
| JP2003139054A (en) * | 2001-10-31 | 2003-05-14 | Ulvac Japan Ltd | Evacuation device |
| TW200637973A (en) * | 2005-03-17 | 2006-11-01 | Boc Group Plc | Vacuum pumping arrangement |
| CN201306283Y (en) * | 2008-10-30 | 2009-09-09 | 山东华腾环保科技有限公司 | Cam-pump vacuum machine set |
| CN101725502A (en) * | 2009-12-11 | 2010-06-09 | 北京航空航天大学 | Vacuum pumping system design for vacuum container |
| CN102713287A (en) * | 2009-12-28 | 2012-10-03 | 株式会社爱发科 | Vacuum exhaust device and vacuum exhaust method, and substrate treatment device |
-
2014
- 2014-11-10 CN CN201410629537.4A patent/CN105649986B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4655688A (en) * | 1984-05-30 | 1987-04-07 | Itt Industries, Inc. | Control for liquid ring vacuum pumps |
| DE3639512A1 (en) * | 1986-11-20 | 1988-06-01 | Alcatel Hochvakuumtechnik Gmbh | Vacuum pump system with a Roots pump |
| JPS63208691A (en) * | 1987-02-26 | 1988-08-30 | Hitachi Ltd | Operation of inverter-driven oil-free screw vacuum pump |
| CN2268790Y (en) * | 1996-06-21 | 1997-11-26 | 荣道发 | Mechanical vacuum pump with two stage oil seals |
| JP2003139054A (en) * | 2001-10-31 | 2003-05-14 | Ulvac Japan Ltd | Evacuation device |
| TW200637973A (en) * | 2005-03-17 | 2006-11-01 | Boc Group Plc | Vacuum pumping arrangement |
| CN201306283Y (en) * | 2008-10-30 | 2009-09-09 | 山东华腾环保科技有限公司 | Cam-pump vacuum machine set |
| CN101725502A (en) * | 2009-12-11 | 2010-06-09 | 北京航空航天大学 | Vacuum pumping system design for vacuum container |
| CN102713287A (en) * | 2009-12-28 | 2012-10-03 | 株式会社爱发科 | Vacuum exhaust device and vacuum exhaust method, and substrate treatment device |
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| Publication number | Publication date |
|---|---|
| CN105649986B (en) | 2018-07-20 |
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